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EEMCS EPrints Service


Supervisor: Wolters, R.A.M.
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Number of items: 7.

2013

Van Hao, B. (2013) Atomic layer deposition of TiN films : growth and electrical behavior down to sub-nanometer scale. PhD thesis, University of Twente. ISBN 978-9-03653-484-0
Kaleli, B. (2013) Characterization of strained silicon FinFETs and the integration of a piezoelectric layer. PhD thesis, University of Twente. ISBN 978-90-365-0471-3

2011

Groenland, A.W. (2011) Nanolink-based thermal devices: integration of ALD TiN thin films. PhD thesis, University of Twente. ISBN 978-90-365-3213-6
Roy, D. (2011) Characterization of electrical contacts for phase change memory cells. PhD thesis, University of Twente. ISBN 978-90-77172-77-3

2009

Stavitski, N. (2009) Silicide-to-silicon specific contact resistance characterization. PhD thesis, University of Twente. ISBN 978-90-365-2939-6

2004

Bystrova, S. (2004) Diffusion barriers for Cu metallisation in Si integrated circuits : deposition and related thin film properties. PhD thesis, University of Twente. ISBN 90-365-2114-9

This list was generated on Mon May 22 08:01:07 CEST 2017.