EEMCS EPrints Service
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Number of items: 1. 2003
Isai, I.G.
(2003)
ECR plasma deposited SiO2 and Si3N4 layers: a room temperature technology
PhD thesis, University of Twente.
ISBN 90-365-1934-9
This list was generated on Thu May 24 09:10:09 CEST 2012. |
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