EEMCS EPrints Service
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1994
Prak, A. and Fluitman, J.H.J.
(1994)
Applications of a model for silicon resonant sensors.
Sensors and actuators A: Physical, 41 (1-3 pt 3).
pp. 251-255.
ISSN 0924-4247
*** ISI Impact 1,933 ***
1992
Prak, A. and Elwenspoek, M.C. and Fluitman, J.H.J.
(1992)
Selective mode excitation and detection of micromachined resonators.
Journal of microelectromechanical systems, 1 (4).
pp. 179-186.
ISSN 1057-7157
*** ISI Impact 2,157 ***
Prak, A. and Elwenspoek, M.C. and Fluitman, J.H.J.
(1992)
Selective mode excitation and detection of micromachined resonators.
In: Proceedings of the IEEE Micro Electro Mechanical Systems Workshop, 4-7 Feb 1992, Travemuende, Germany.
pp. 220-225.
IEEE Computer Society.
ISBN 0-7803-0497-7
1991
Prak, A. and Blom, F.R. and Elwenspoek, M.C. and Lammerink, T.S.J.
(1991)
Q-factor and frequency shift of resonating silicon diaphragms in air.
Sensors and actuators A: Physical, 27 (1-3).
pp. 691-698.
ISSN 0924-4247
*** ISI Impact 1,933 ***
1990
Blom, F.R. and Yntema, D.J. and van de Pol, F.C.M. and Elwenspoek, M.C. and Fluitman, J.H.J. and Popma, T.J.A.
(1990)
Thin-film ZnO as micromechanical actuator at low frequencies.
Sensors and actuators A: Physical, 21 (1-3).
pp. 226-228.
ISSN 0924-4247
*** ISI Impact 1,933 ***
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