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Research Project: Quasi monolithic load cell using resonant strain gauges
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2001

Tong, Hien Duy and Zwijze, A.F. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) Platinum patterning by a modified lift-off technique and its application in a silicon load cell. Sensors and materials, 13 (4). pp. 235-246. ISSN 0914-4935 *** ISI Impact 0,489 ***

2000

Wiegerink, R.J. and Zwijze, A.F. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2000) Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. Sensors and Actuators A: Physical, 80 (2). pp. 189-196. ISSN 0924-4247 *** ISI Impact 2,201 ***
Zwijze, A.F. (2000) Micro-machined high capacity silicon load cells. PhD thesis, University of Twente. ISBN 90-3651-507-6
Zwijze, A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Berenschot, J.W. and de Boer, M.J. and Elwenspoek, M.C. (2000) High force 10 kN piezoresistive silicon force sensor with output independent of force distribution. In: Proceedings of SPIE - The International Society for Optical Engineering, 18-19 Sep 2000, Santa Clara, CA, USA. pp. 47-58. Society of Photo-Optical Instrumentation Engineers. ISSN 0277-786X
Zwijze, A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2000) Low-cost piezoresistive silicon load cell independent of force distribution. Journal of micromechanics and microengineering, 10 (2). pp. 200-203. ISSN 0960-1317 *** ISI Impact 1,768 ***

1999

Wiegerink, R.J. and Zwijze, A.F. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (1999) Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. In: Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 17-21 Jan 1999, Orlando, FL, USA. pp. 558-563. IEEE Computer Society. ISBN 0-7803-5194-0
Zwijze, A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (1999) Low creep and hysteresis load cell based on a force-to-fluid pressure transformation. Sensors and actuators A: Physical, 78 (2-3). pp. 74-80. ISSN 0924-4247 *** ISI Impact 2,201 ***

1998

Wensink, H. and de Boer, M.J. and Wiegerink, R.J. and Zwijze, A.F. and Elwenspoek, M.C. (1998) First micromachined silicon load cell for loads up to 1000 kg. In: Proceedings of the 1998 Conference on Micromachined Devices and Components IV, 21-22 Sept 1998, Santa Clara, CA, USA. pp. 424-430. SPIE. ISSN 0277-786X

1996

Gardeniers, J.G.E. and Tilmans, H.A.C. and Visser, C.C.G. (1996) LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design. Journal of vacuum science and technology A: vacuum, surfaces, and films, 14 (5). pp. 2879-2892. ISSN 0734-2101 *** ISI Impact 1,724 ***