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Research Project: Plasma-free Radical-enhanced Ald
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2016

Kovalgin, A.Y. (2016) High-quality tungsten films by hotwire-assisted CVD/ALD at low temperature. (Invited) In: Abstracts Hot Wire CVD 9, 6-9 Sep 2016, Philadelphia, PA, USA. pp. 16-16. HWCVD9. ISBN not assigned
Yang, Mengdi and Aarnink, A.A.I. and Kovalgin, A.Y. and Gravesteijn, D.J. and Wolters, R.A.M. and Schmitz, J. (2016) Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor. Journal of vacuum science and technology A: vacuum, surfaces, and films, 34 (1). 01A129:1-01A129:10. ISSN 0734-2101 *** ISI Impact 1,724 ***

2015

Yang, Mengdi and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Schmitz, J. (2015) Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes. Physica status solidi A, 212 (7). pp. 1607-1614. ISSN 1862-6300 *** ISI Impact 1,648 ***