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Research Project: Particles: Impact Determination of Particles in IC Production
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2010

Knotter, D.M. and Wali, F. (2010) Particles in Semiconductor Processing. In: Developments in Surface Contamination and Cleaning - Methods for Removal of Particle Contaminants. Elsevier, Amsterdam, pp. 81-120. ISBN 978-1-4377-7830-4

2009

Klee, M. and van Esch, H. and Keur, W. and Kumar, B. and van Leuken-Peters, L. and Liu, Jin and Mauczock, R. and Neumann, K. and Reimann, K. and Renders, C. and Roest, A.L. and Tiggelman, M.P.J. and de Wild, M. and Wunnicke, O. and Zhao, Jing (2009) Ferroelectric Thin-Film Capacitors and Piezoelectric Switches for Mobile Communication Applications. IEEE transactions on ultrasonics, ferroelectrics and frequency control, 56 (8). pp. 1505-1512. ISSN 0885-3010 *** ISI Impact 2,287 ***
Rink, I. and Wali, F. and Knotter, D.M. (2009) Impact of metal-ion contaminated silica particles on gate oxide integrity. Solid State Phenomena, 145-146. pp. 131-134. ISSN 1012-0394
Wali, F. and Knotter, D.M. and Bearda, T. and Mertens, P.W. (2009) Local distribution of particles deposited on patterned surfaces. Solid State Phenomena, 145-146. pp. 65-68. ISSN 1012-0394
Wali, F. and Knotter, D.M. and Mud, A. and Kuper, F.G. (2009) Impact of particles in ultra pure water on random yield loss in IC production. Microelectronic engineering, 86 (2). pp. 140-144. ISSN 0167-9317 *** ISI Impact 1,277 ***

2008

Kuper, F.G. (2008) Automotive IC reliability: Elements of the battle towards zero defects. Microelectronics reliability, 48 (8-9). pp. 1459-1463. ISSN 0026-2714 *** ISI Impact 1,202 ***
Wali, F. and Knotter, D.M. and Kuper, F.G. (2008) Liquid-borne nano particles impact on the random yield during critical processes in IC’s production. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 513-515. Technology Foundation STW. ISBN 978-90-73461-56-7
Wali, F. and Knotter, D.M. and Kuper, F.G. (2008) Impact of nano particles on semiconductor manufacturing. In: Proceedings of 12th IEEE International Multitopic Conference (INMIC) 2008, 23-24 Dec 2008, Karachi. pp. 97-99. IEEE. ISBN 978-1-4244-2823-6

2007

Wali, F. and Knotter, D.M. and Wortelboer, R. and Mud, A. (2007) Statistical relation between particle contaminations in ultra pure water and defects generated by process tools. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 555-557. Technology Foundation STW. ISBN 978-90-73461-49-9

2006

Wali, F. and Martin Knotter, D. and Kelly, J.J. and Kuper, F.G. (2006) Deposition and detection of particles during integrated circuit manufacturing. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 483-487. Technology Foundation STW. ISBN 90-73461-44-8