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Research Project: POLY-GAN: Towards Polycrystalline Gan/aigan Devices In Silicon Technology
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2016

Banerjee, S. and Aarnink, A.A.I. and Kip, M.A.G. and Gravesteijn, D.J. and Schmitz, J. and Kovalgin, A.Y. (2016) Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia. In: Proceedings 16th International Conference on Atomic Layer Deposition, ALD 2016, 24-27 July 2016, Dublin, Ireland. Happening Conferences & Events. ISBN not assigned

2015

Banerjee, S. and Aarnink, A.A.I. and van de Kruijs, R. and Kovalgin, A.Y. and Schmitz, J. (2015) PEALD AlN: Controlling growth and film crystallinity. Physica status solidi C, 12 (7). pp. 1036-1042. ISSN 1610-1634