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Research Project: New micromachining methods for the fabrication of passsive components for miniaturized chemical analysis systems
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2000

de Boer, M.J. and Tjerkstra, R.W. and Berenschot, J.W. and Jansen, H.V. and Burger, G.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. and van den Berg, A. (2000) Micromachining of buried micro channels in silicon. Journal of microelectromechanical systems, 9 (1). pp. 94-103. ISSN 1057-7157 *** ISI Impact 1,939 ***
Driesen, C.H. and Kuerten, J.G.M. (2000) An accurate boundary-element method for Stokes flow in partially covered cavities. Computational mechanics, 25 (5). pp. 501-513. ISSN 0178-7675 *** ISI Impact 2,639 ***
Tjerkstra, R.W. and Gardeniers, J.G.E. and Kelly, J.J. and van den Berg, A. (2000) Multi-walled microchannels: free-standing porous silicon membranes for use in $\mu$TAS. Journal of microelectromechanical systems, 9 (4). pp. 495-501. ISSN 1057-7157 *** ISI Impact 1,939 ***

1999

Tjerkstra, R.W. (1999) Isotropic etching of silicon in fluoride containing solutions as a tool for micromachining. PhD thesis, University of Twente. ISBN 90-36513286

1997

Gilding, B.H. and Li, S. (1997) The parameter dependence of the coefficient in a model for constant-pressure steam injection in soil. Mathematical models and methods in applied sciences, 7 (5). pp. 593-612. ISSN 0218-2025 *** ISI Impact 3,084 ***
Tjerkstra, R.W. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and van den Berg, A. and Elwenspoek, M.C. (1997) Etching technology for chromatography microchannels. Electrochimica acta, 42 (20-22). pp. 3399-3406. ISSN 0013-4686 *** ISI Impact 4,803 ***
Tjerkstra, R.W. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and van den Berg, A. and Elwenspoek, M.C. (1997) Etching technology for microchannels. In: Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS, 26-30 Jan 1997, Nagoya, Japan. pp. 147-152. IEEE Computer Society. ISBN 0-7803-3744-1