Nederlands
Contact
Sitemap
Search
OrganisationEEMCS EPrints Service
 |
|
|
||||||||||||||
|
|
|
|
|
||||||||||||
|
|
|
||||||||||||||
|
|
|
|
|
||||||||||||
|
|
2011
Van Hao, B. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M.
(2011)
Ultra-Thin Atomic Layer Deposited TiN Films: Non-Linear I–V Behaviour and the Importance of Surface Passivation.
Journal of nanoscience and nanotechnology, 11 (9).
pp. 8120-8125.
ISSN 1533-4880
*** ISI Impact 1,351 ***
Van Hao, B. and Groenland, A.W. and Aarnink, A.A.I. and Wolters, R.A.M. and Schmitz, J. and Kovalgin, A.Y.
(2011)
Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry.
Journal of the Electrochemical Society, 158 (3).
pp. 214-220.
ISSN 0013-4651
*** ISI Impact 2,420 ***
2009
Aarnink, A.A.I. and Van Bui, B. and Kovalgin, A.Y. and Wolters, R.A.M.
(2009)
In-situ monitoring of growth and oxidation of ALD TiN layers followed by reduction in atomic hydrogen.
In: Proceedings of the 9th International conference on Atomic Layer Deposition, 19-22 Jul 2009, Monterey, CA, USA.
America Vaccum Society, Omnipress.
ISBN not assigned
Van Hao, B. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Schmitz, J.
(2009)
Thermal atomic layer deposition and oxidation of TiN monitored by in-situ spectroscopic ellipsometry.
In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands.
pp. 59-62.
Technology Foundation STW.
ISBN 978-90-73461-62-8
|
|
|
||||||||||||
|
|
|
||||||||||||||
|
|
|
|
|
||||||||||||
|
|
|
||||||||||||||