EEMCS

Home > Publications
Home University of Twente
Education
Research
Prospective Students
Jobs
Publications
Intranet (internal)
 
 Nederlands
 Contact
 Search
 Organisation

EEMCS EPrints Service


Research Project: Nano Conductivity: conductivity control in metallic nanolayer
Home Policy Brochure Browse Search User Area Contact Help

2014

Kovalgin, A.Y. and Van Hao, B. and Schmitz, J. and Wolters, R.A.M. (2014) Growth and properties of subnanometer thin titanium nitride films. (Invited) In: Website of the Nano & Giga 2014, 10-14 March 2014, Arizona. 1. Nano and Giga Challenges in Electronics, Photonics and Renewable Energy. ISBN not assigned
Van Hao, B. and Wiggers, F.B. and Aarnink, A.A.I. and Nguyen, Minh Duc and de Jong, M.P. and Kovalgin, A.Y. and Gupta, A. (2014) Growth characteristics, optical properties, and crystallinity of thermal and plasma-enhanced ALD AlN films. In: Proceeding of the 14th International Conference on Atomic Layer Deposition, 15-18 June 2014, Kyoto, Japan. pp. 113-113. ALD 2014. ISBN not assigned

2013

Kovalgin, A.Y. and Aarnink, A.A.I. (2013) Semiconductor processing apparatus with compact free radical source. Patent US201313918094 (Application).
Van Hao, B. (2013) Atomic layer deposition of TiN films : growth and electrical behavior down to sub-nanometer scale. PhD thesis, University of Twente. ISBN 978-9-03653-484-0
Van Hao, B. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. (2013) Hot-Wire generated atomic hydrogen and its impact on thermal ALD in TiCl4/NH3 System ECS Journal of Solid State Science and Technology, 2 (4). pp. 149-155. ISSN 2162-8769
Van Hao, B. and Kovalgin, A.Y. and Schmitz, J. and Wolters, R.A.M. (2013) Conduction and electric field effect in ultra-thin TiN films. Applied physics letters, 103 (5). 051904. ISSN 0003-6951 *** ISI Impact 3,79 ***
Van Hao, B. and Kovalgin, A.Y. and Wolters, R.A.M. (2013) On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films. In: SURFINT-SREN III, 14-19 May 2012, Florence, Italy. pp. 45-49. Applied Surface Science 269. Elsevier. ISSN 0169-4332

2012

Van Hao, B. and Kovalgin, A.Y. and Wolters, R.A.M. (2012) Growth of sub-nanometer thin continuous TiN films by atomic layer deposition. ECS Journal of Solid State Science and Technology, 1 (6). pp. 285-290. ISSN 2162-8769
Van Hao, B. and Wolters, R.A.M. and Kovalgin, A.Y. (2012) TiN films by Atomic Layer Deposition: Growth and electrical characterization down to sub-nm thickness. (Invited) In: Proceedings of the International Conference on Anvanced Materials and Nanotechnology (ICAMN 2012), 13-14 Dec 2012, Hanoi, Vietnam. pp. 7-12. Hanoi University of Science and Technology. ISBN 978-604-911-247-8

2011

Van Hao, B. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. (2011) Ultra-Thin Atomic Layer Deposited TiN Films: Non-Linear I–V Behaviour and the Importance of Surface Passivation. Journal of nanoscience and nanotechnology, 11 (9). pp. 8120-8125. ISSN 1533-4880 *** ISI Impact 1,15 ***
Van Hao, B. and Groenland, A.W. and Aarnink, A.A.I. and Wolters, R.A.M. and Schmitz, J. and Kovalgin, A.Y. (2011) Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry. Journal of the Electrochemical Society, 158 (3). pp. 214-220. ISSN 0013-4651 *** ISI Impact 2,59 ***

2009

Aarnink, A.A.I. and Van Bui, B. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) In-situ monitoring of growth and oxidation of ALD TiN layers followed by reduction in atomic hydrogen. In: Proceedings of the 9th International conference on Atomic Layer Deposition, 19-22 Jul 2009, Monterey, CA, USA. America Vaccum Society, Omnipress. ISBN not assigned
Van Hao, B. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Schmitz, J. (2009) Thermal atomic layer deposition and oxidation of TiN monitored by in-situ spectroscopic ellipsometry. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 59-62. Technology Foundation STW. ISBN 978-90-73461-62-8