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Research Project: NanoImpuls Sidewall Patterning and Technology
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2006

Brouwer, D.M. and de Jong, B.R. and de Boer, M.J. and Soemers, H.M.J.R. (2006) Rotational precision mems-based clamping mechanism for stable fixation of elastic mechanisms. In: Proceedings of the Annual Meeting of the American Society of Precision Engineering (ASPE), October 15-20, 2006, Monterey CA, USA. pp. 275-278. MEMS, LIGA & Nanotechnology. American Society for Precision Engineering. ISSN not assigned