EEMCS

Home > Publications
Home University of Twente
Education
Research
Prospective Students
Jobs
Publications
Intranet (internal)
 
 Nederlands
 Contact
 Search
 Organisation

EEMCS EPrints Service


Research Project: Micromachined silicon smart sensors
Home Policy Brochure Browse Search User Area Contact Help

1992

van Mullem, C.J. and Tilmans, H.A.C. and Mouthaan, A.J. and Fluitman, J.H.J. (1992) Electrical cross-talk in two-port resonators - the resonant silicon beam force sensor. Sensors and actuators A: Physical, 31 (1-3 pt 3). pp. 168-173. ISSN 0924-4247 *** ISI Impact 1,84 ***

1991

van Mullem, C.J. and Blom, F.R. and Fluitman, J.H.J. and Elwenspoek, M.C. (1991) Piezoelectrically driven silicon beam force sensor. Sensors and actuators A: Physical, 26 (1-3). pp. 379-383. ISSN 0924-4247 *** ISI Impact 1,84 ***