EEMCS EPrints Service
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1992
van Mullem, C.J. and Tilmans, H.A.C. and Mouthaan, A.J. and Fluitman, J.H.J.
(1992)
Electrical cross-talk in two-port resonators - the resonant silicon beam force sensor.
Sensors and actuators A: Physical, 31 (1-3 pt 3).
pp. 168-173.
ISSN 0924-4247
*** ISI Impact 1,933 ***
1991
van Mullem, C.J. and Blom, F.R. and Fluitman, J.H.J. and Elwenspoek, M.C.
(1991)
Piezoelectrically driven silicon beam force sensor.
Sensors and actuators A: Physical, 26 (1-3).
pp. 379-383.
ISSN 0924-4247
*** ISI Impact 1,933 ***
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