EEMCS EPrints Service
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2006
Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C.
(2006)
A micromachined capacitive incremental position sensor: part 2. experimental assessment.
Journal of micromechanics and microengineering, 16 (6).
S125-S134.
ISSN 0960-1317
*** ISI Impact 2,276 ***
Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C.
(2006)
A micromachined capacitive incremental position sensor: part 1. Analysis and simulations.
Journal of micromechanics and microengineering, 16.
S116-S124.
ISSN 0960-1317
*** ISI Impact 2,276 ***
2004
Kuijpers, A.A.
(2004)
Micromachined capacitive long-range displacement sensor for nanopositioning of microatuator systems.
PhD thesis, University of Twente.
ISBN 90-365-2119-X
Kuijpers, A.A. and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C.
(2004)
Capacitive long-range position sensor for microactuators.
In: Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS), 25-29 January, Maastricht.
pp. 544-547.
Micro Electro Mechanical Systems.
IEEE Computer Society.
ISBN 0-7803-8265-x
2003
Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C.
(2003)
2d-finite-element simulations for long-range capacitive position sensor.
Journal of micromechanics and microengineering, 13 (4).
S183-S189.
ISSN 0960-1317
*** ISI Impact 2,276 ***
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