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Research Project: Microactuator systems for nanoposition control
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2006

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2006) A micromachined capacitive incremental position sensor: part 2. experimental assessment. Journal of micromechanics and microengineering, 16 (6). S125-S134. ISSN 0960-1317 *** ISI Impact 1,768 ***
Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2006) A micromachined capacitive incremental position sensor: part 1. Analysis and simulations. Journal of micromechanics and microengineering, 16. S116-S124. ISSN 0960-1317 *** ISI Impact 1,768 ***

2004

Kuijpers, A.A. (2004) Micromachined capacitive long-range displacement sensor for nanopositioning of microatuator systems. PhD thesis, University of Twente. ISBN 90-365-2119-X
Kuijpers, A.A. and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2004) Capacitive long-range position sensor for microactuators. In: Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS), 25-29 January, Maastricht. pp. 544-547. Micro Electro Mechanical Systems. IEEE Computer Society. ISBN 0-7803-8265-x

2003

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2003) 2d-finite-element simulations for long-range capacitive position sensor. Journal of micromechanics and microengineering, 13 (4). S183-S189. ISSN 0960-1317 *** ISI Impact 1,768 ***