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Research Project: Micro mechanical sensors using encapsulated built-in resonant strain gauges

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1994

Tilmans, H.A.C. and Legtenberg, R. and Schurer, H. and IJntema, D.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) (Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators. IEEE transactions on ultrasonics, ferroelectrics and frequency control, 41 (1). pp. 4-6. ISSN 0885-3010 *** ISI Impact 1,460 ***

1993

Tilmans, H.A.C. and Elwenspoek, M.C. (1993) Quasi-monolithic planar load cells using built-in resonant strain gauges. Journal of micromechanics and microengineering, 3 (4). pp. 193-197. ISSN 0960-1317 *** ISI Impact 2,276 ***

1992

Tilmans, H.A.C. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Micro resonant force gauges. Sensors and actuators A: Physical, 30 (1-2). pp. 35-53. ISSN 0924-4247 *** ISI Impact 1,933 ***

1991

Tilmans, H.A.C. and Bouwstra, S. and IJntema, D.J. and Elwenspoek, M.C. and Klein, C.F. (1991) A differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247 *** ISI Impact 1,933 ***

1990

Tilmans, H.A.C. and Bouwstra, S. and Fluitman, J.H.J. and Spence, S.L. (1990) Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges. Sensors and actuators A: Physical, 25 (1-3). pp. 79-86. ISSN 0924-4247 *** ISI Impact 1,933 ***