EEMCS EPrints Service
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2008
Fazal, I. and Elwenspoek, M.C.
(2008)
Piezoelectric microvalve for precise control of gas flow at high pressure.
In: 2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007, 4-7 Sept 2007, Las Vegas, NV, United States.
pp. 841-844.
American Society of Mechanical Engineers.
ISBN 0791848027
Fazal, I. and Elwenspoek, M.C.
(2008)
Fusion-bonded fluidic interconnects.
Journal of micromechanics and microengineering, 18 (5).
055011.
ISSN 0960-1317
*** ISI Impact 2,276 ***
2007
Fazal, I.
(2007)
Development of a gas microvalve based on fine and micromachining.
PhD thesis, University of Twente.
ISBN 978-90-365-2571-8
Fazal, I. and Elwenspoek, M.C.
(2007)
Design and analysis of a high pressure piezoelectric actuated microvalve.
Journal of micromechanics and microengineering, 17 (11).
pp. 2366-2379.
ISSN 0960-1317
*** ISI Impact 2,276 ***
Fazal, I. and Elwenspoek, M.C.
(2007)
Design challenges for stepper motor actuated microvalve based on fine and micro-machining.
In: 18th Workshop on MicroMechanics Europe MME 2007, 16-18 September 2007, Guimaraes, Portugal.
pp. 219-222.
University of Minho.
ISBN 978-972-98603-3-1
2006
Fazal, I. and Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C.
(2006)
Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machining.
Journal of micromechanics and microengineering, 16.
pp. 1207-1214.
ISSN 0960-1317
*** ISI Impact 2,276 ***
Fazal, I. and Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C.
(2006)
Stepper Motor Actuated Microvalve.
Journal of Physics: Conference Series, 34.
pp. 1032-1037.
ISSN 1742-6588
Vargas, L.D. and Jansen, H.V. and Elwenspoek, M.C.
(2006)
Seedless electroplating on patterned silicon.
Journal of micromechanics and microengineering, 16.
pp. 1-6.
ISSN 0960-1317
*** ISI Impact 2,276 ***
2005
Fazal, I. and Berenschot, J.W. and de Boer, J.H. and Jansen, H.V. and Elwenspoek, M.C.
(2005)
Bond strength tests between silicon wafers and duran tubes (fusion bonded fluidic interconnects).
In: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., 5-9 June 2005, Seoul.
pp. 936-939.
Solid-State Sensors, Actuators and Microsystems 1.
IEEE Computer Society.
ISBN 0-7803-8994-8
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