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1999
Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. and van den Berg, A.
(1999)
Micromachined pressure/flow-sensor.
Sensors and actuators A: Physical, 77 (3).
pp. 167-177.
ISSN 0924-4247
*** ISI Impact 1,802 ***
1997
Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and van den Berg, A. and Elwenspoek, M.C.
(1997)
Designing, realization and characterization of a novel capacitive pressure/flow sensor.
In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), 16-19 June 1997, Chicago, IL, USA.
pp. 151-154.
IEEE Computer Society.
ISBN 0-7803-3829-4
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