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Research Project: Micro Coriolis flow Enabling
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2011

Wiegerink, R.J. and Lammerink, T.S.J. and Haneveld, J. and Hageman, T.A.G. and Lötters, J.C. (2011) Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 Jan 2011, Cancun, Mexico. pp. 1135-1138. IEEE . ISBN 978-1-4244-9633-4

2010

Haneveld, J. and Lammerink, T.S.J. and de Boer, M.J. and Sanders, R.G.P. and Mehendale, A. and Lötters, J.C. and Dijkstra, M.A. and Wiegerink, R.J. (2010) Modeling, design, fabrication and characterization of a micro Coriolis mass flow sensor. Journal of micromechanics and microengineering, 20 (6). 125001. ISSN 0960-1317 *** ISI Impact 1,768 ***

2009

Flokstra, Jaap and Cuperus, R. and Wiegerink, R.J. and Essen, M.C. (2009) A MEMS-based gravity gradiometer for future planetary missions. Cryogenics, 49 (11). pp. 665-668. ISSN 0011-2275 *** ISI Impact 1,026 ***
Haneveld, J. and Lammerink, T.S.J. and de Boer, M.J. and Wiegerink, R.J. (2009) Micro coriolis mass flow sensor with integrated capacitive readout. In: IEEE 22nd International Conference on MEMS, 25-29 January 2009, Sorrento, Italy. pp. 463-466. Institute of Electrical and Electronics Engineering, Inc.. ISSN 1084-6999 ISBN 978-1-4244-2977-6
Wiegerink, R.J. and Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. (2009) Thermal and Coriolis type micro flow sensors based on surface channel technology. Procedia Chemistry, 1 (1). pp. 1455-1458. ISSN 1876-6196

2008

Haneveld, J. and Lammerink, T.S.J. and Dijkstra, M.A. and Droogendijk, H. and de Boer, M.J. and Wiegerink, R.J. (2008) Highly sensitive micro coriolis mass flow sensor. In: MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems, 13-17 Jan 2008, Tucson, AZ, United States. pp. 920-923. IEEE Computer Society. ISBN 978-1-4244-1793-3

2006

Haneveld, J. and Berenschot, J.W. and Maury, P.A. and Jansen, H.V. (2006) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. Journal of micromechanics and microengineering, 16. S24-S28. ISSN 0960-1317 *** ISI Impact 1,768 ***
Haneveld, J. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2006) Fabrication and capillary filling of sub-10nm nanochannels. In: Proceedings of the NanoNed / MicroNed Symposium II Eindhoven 2006, 16-17 Nov, Eindhoven. 192. Technische Universiteit Eindhoven. ISBN not assigned
Haneveld, J. and Lammerink, T.S.J. and Dijkstra, M.A. and Wiegerink, R.J. (2006) Micro coriolis flow sensor. In: Proceedings of the NanoNed / MicroNed Symposium II, 16-17 Nov 2006, Eindhoven. 174. University of Eindhoven. ISBN not assigned

2002

Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2002) Wet anisotropic etching for fluidic 1D nanochannels. In: Micromechanics Europe Workshop, MME 2002, 6-8 Oct 2002, Sinaia, Romania. pp. 47-50. MicroMechanics Europe.