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Research Project: Micro-mechanical Thin Film Devices
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2003

Rusu, C.R. and Jansen, H.V. and Gunn, R. and Witvrouw, A. (2003) Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process. In: Symposium on design, test, integration and packaging of MEMS 2003, 5-7 May 2003, Mandelieu-La Napoule, France. pp. 245-250. IEEE Computer Society. ISBN 0-7803-7066-X

2001

Rusu, C.R. and Oever, R.V. and de Boer, M.J. and Jansen, H.V. and Berenschot, J.W. and Bennink, M.L. and Kanger, J.S. and de Grooth, B.G. and Elwenspoek, M.C. and Greve, J. and Brugger, J. and van den Berg, A. (2001) Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers. Journal of microelectromechanical systems, 10 (2). pp. 238-246. ISSN 1057-7157 *** ISI Impact 1,939 ***

1998

Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Elwenspoek, M.C. (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part II: Fabrication and performance. Journal of microelectromechanical systems, 7 (1). pp. 87-93. ISSN 1057-7157 *** ISI Impact 1,939 ***
Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Elwenspoek, M.C. (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part I: Design and modeling. Journal of microelectromechanical systems, 7 (1). pp. 79-86. ISSN 1057-7157 *** ISI Impact 1,939 ***

1997

Gui, C. and Jansen, H.V. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multilayer substrates. In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), 16-19 June 1997, Chicago, IL, USA. pp. 633-636. IEEE Computer Society. ISBN 0-7803-3829-4
Jansen, H.V. and de Boer, M.J. and Wiegerink, R.J. and Tas, N.R. and Smulders, E.J.T. and Neagu, C.R. and Elwenspoek, M.C. (1997) RIE lag in high aspect ratio trench etching of silicon. Microelectronic engineering, 35 (1-4). pp. 45-50. ISSN 0167-9317 *** ISI Impact 1,277 ***
Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1997) A fabrication process for electrostatic microactuators with integrated gear linkages. Journal of microelectromechanical systems, 6 (3). pp. 234-241. ISSN 1057-7157 *** ISI Impact 1,939 ***
Legtenberg, R. and Gilbert, J. and Senturia, S.D. and Elwenspoek, M.C. (1997) Electrostatic curved electrode actuators. Journal of microelectromechanical systems, 6 (3). pp. 257-265. ISSN 1057-7157 *** ISI Impact 1,939 ***

1996

Berenschot, J.W. and Jansen, H.V. and Burger, G.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1996) Thermally assisted ion beam etching of polytetrafluoroethylene a new technique for high aspect ratio etching of MEMS. In: Proceedings of the 1996 9th Annual International Workshop on Micro Electro Mechanical Systems, 11-15 Feb 1996, San Diego, CA, USA. pp. 277-284. IEEE Computer Society. ISBN 0-7803-2985-6
Jansen, H.V. and de Boer, M.J. and Elwenspoek, M.C. (1996) The black silicon method VI: high aspect ratio trench etching for MEMS applications. In: Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems 1996, MEMS '96, 11-15 Feb 1996, San Diego, CA, USA. pp. 250-257. IEEE Computer Society. ISBN 0-7803-2985-6
Jansen, H.V. and Gardeniers, J.G.E. and de Boer, M.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) A survey on the reactive ion etching of silicon in microtechnology. Journal of micromechanics and microengineering, 6 (1). pp. 14-28. ISSN 0960-1317 *** ISI Impact 1,768 ***
Legtenberg, R. (1996) Electrostatic actuators fabricated by surface micromachining techniques. PhD thesis, University of Twente. ISBN 90-3650796-0
Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Electrostatic microactuators with integrated gear linkages for mechanical power transmission. In: Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS '96, 11-15 Feb 1996, San Diego, CA, USA. pp. 204-209. IEEE Computer Society. ISBN 0-7803-2985-6
Legtenberg, R. and Groeneveld, A.W. and Elwenspoek, M.C. (1996) Comb-drive actuators for large displacements. Journal of micromechanics and microengineering, 6 (3). pp. 320-329. ISSN 0960-1317 *** ISI Impact 1,768 ***

1995

de Boer, M.J. and Jansen, H.V. and Elwenspoek, M.C. (1995) The black silicon method V: a study of the fabricating of movable structures for micro electromechanical systems. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 565-568. IEEE Computer Society. ISBN 91-630-3473-5
Elders, J. and Jansen, H.V. and Elwenspoek, M.C. and Ehrfeld, W. (1995) DEEMO: a new technology for the fabrication of microstructures. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 238-243. IEEE Computer Society. ISBN 0-7803-2503-6
Elwenspoek, M.C. and Weustink, M. and Legtenberg, R. (1995) Static and dynamic properties of active joints. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX. Part 2 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 412-415. IEEE Computer Society. ISBN 91-630-3473-5
Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elwenspoek, M.C. (1995) The black silicon method: A universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. Journal of micromechanics and microengineering, 5 (2). pp. 115-120. ISSN 0960-1317 *** ISI Impact 1,768 ***
Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (1995) An electrostatic lower stator axial gap wobble motor: design and fabrication. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX. Part 2 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 404-407. IEEE Computer Society. ISBN 91-630-3473-5
Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Electrostatic curved electrode actuators. In: : Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 37-42. IEEE Computer Society. ISBN 0-7803-2503-6
Legtenberg, R. and Jansen, H.V. and de Boer, M.J. and Elwenspoek, M.C. (1995) Anisotropic reactive ion etching of silicon using SF6/O2/CHF3 gas mixtures Journal of the Electrochemical Society, 142 (6). pp. 2020-2028. ISSN 0013-4651 *** ISI Impact 3,014 ***

1994

Jansen, H.V. and Gardeniers, J.G.E. and Elders, J. and Tilmans, H.A.C. and Elwenspoek, M.C. (1994) Applications of fluorocarbon polymers in micromechanics and micromachining. Sensors and actuators A: Physical, 41 (1-3). pp. 136-140. ISSN 0924-4247 *** ISI Impact 2,201 ***

1991

Legtenberg, R. and Bouwstra, S. and Elwenspoek, M.C. (1991) Low-temperature glass bonding for sensor application using boron oxide thin films. Journal of micromechanics and microengineering, 1 (3). pp. 157-160. ISSN 0960-1317 *** ISI Impact 1,768 ***
Legtenberg, R. and Bouwstra, S. and Fluitman, J.H.J. (1991) Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer. Sensors and actuators A: Physical, 27 (1-3). pp. 723-727. ISSN 0924-4247 *** ISI Impact 2,201 ***