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Research Project: Metal-semiconductor Junctions
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2012

Kovalgin, A.Y. and Tiggelman, N. and Wolters, R.A.M. (2012) An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance. IEEE transactions on electron devices, 59 (2). pp. 426-432. ISSN 0018-9383 *** ISI Impact 2,207 ***

2010

Tiggelman, N. and Kovalgin, A.Y. and Brennan, R. and Wolters, R.A.M. (2010) Low specific contact resistance of NiSi and PtSi to Si: impact of interface. Electrochemical and solid-state letters, 13 (12). H450-H453. ISSN 1099-0062

2009

Stavitski, N. (2009) Silicide-to-silicon specific contact resistance characterization. PhD thesis, University of Twente. ISBN 978-90-365-2939-6
Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) Cross-Bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization. IEEE Transactions on Semiconductor Manufacturing, 22 (1). pp. 146-152. ISSN 0894-6507 *** ISI Impact 1,045 ***
in 't Zandt, M.A.A. and Jedema, M.J. and Gravesteijn, D.J. and Attenborough, K. and Wolters, R.A.M. (2009) Doped SbTe phase change material in memory cells. (Invited) In: Proceedings of the International Materials Research Congress (IMRC 2009), 16-21 Aug 2009, Cancun, Mexico. Materials Research Society. ISBN not assigned

2008

Stavitski, N. and van Dal, M.J.H. and Lauwers, A. and Vrancken, C. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) Systematic TLM Measurements of NiSi and PtSi Specific Contact Resistance to n- and p-Type Si in a Broad Doping Range. IEEE electron device letters, 29 (4). pp. 378-381. ISSN 0741-3106 *** ISI Impact 2,528 ***
Stavitski, N. and van Dal, M.J.H. and Lauwers, A. and Vrancken, C. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific Contact Resistance Extraction. IEEE transactions on electron devices, 55 (5). pp. 1170-1176. ISSN 0018-9383 *** ISI Impact 2,207 ***
Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) A study of cross-bridge kelvin resistor structures for reliable measurement of low contact resistances. In: Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures, 24-28 Mar 2008, Edinburgh, Schotland. pp. 199-204. IEEE Computer Society. ISBN 978-1-4244-1801-5

2007

Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Boksteen, B.K. and Kovalgin, A.Y. and Wolters, R.A.M. (2007) Cross-bidge Kelvin resistor (CBKR) structures for measurement of low contact resistances. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 551-554. Technology Foundation STW. ISBN 978-90-73461-49-9

2006

Stavitski, N. and van Dal, M.J.H. and Klootwijk, J.H. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2006) Cross-Bridge Kelvin Resistor (CBKR) structures for silicide-semiconductor junctions characterization. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 436-438. Technology Foundation STW. ISBN 978-90-73461-44-4
Stavitski, N. and van Dal, M.J.H. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2006) Specific Contact Resistance Measurements of Metal Semiconductor-Junctions. In: Proceedings of the IEEE International Conference on Microelectronic Test Structures (ICMTS), 6-9 Mar 2006, Austin, TX, USA. pp. 13-17. IEEE. ISBN 1-4244-0167-4

2005

Stavitski, N. and van Dal, M.J.H. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2005) Specific contact resistance measurements of metal-semiconductor junctions. In: Proceedings of the 8th annual workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE) 2005, 17-18 Nov 2005, Veldhoven, The Netherlands. pp. 52-55. Technology Foundation STW. ISBN 90-73461-50-2