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Research Project: Integration of edge lithography

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2010

Zhao, Yiping (2010) High-Resolution Stamp Fabrication by Edge Lithography. PhD thesis, University of Twente. ISBN 978-90-365-3036-1

2009

Duan, Xuexin and Zhao, Yiping and Perl, A. and Berenschot, J.W. and Reinhoudt, D.N. and Huskens, J. (2009) High-Resolution Contact Printing with Chemically Patterned Flat Stamps Fabricated by Nanoimprint Lithography. Advanced materials, 21 (27). pp. 2798-2802. ISSN 0935-9648 *** ISI Impact 10,857 ***

Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Sub-10 nm silicon ridge nanofabrication by advanced edge lithography for NIL applications. Microelectronic engineering, 86 (4-6). pp. 832-835. ISSN 0167-9317 *** ISI Impact 1,569 ***

Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Multi-silicon ridge nanofabrication by repeated edge lithography. Nanotechnology, 20 (315305). pp. 1-7. ISSN 0957-4484 *** ISI Impact 3,644 ***

2008

Zhao, Yiping and Berenschot, J.W. and de Boer, M.J. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Fabrication of a silicon oxide stamp by edge lithography reinforced with silicon nitride for nanoimprint lithography. Journal of micromechanics and microengineering, 18 (18). 064013. ISSN 0960-1317 *** ISI Impact 2,276 ***

Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Monolithics silicon nano-ridge fabrication by edge lithography and wet anisotropic etching of silicon. In: 34th International Conference on Micro & Nano Enginering, 15-18 Sept 2008, Greece. 221. Ergo publications. ISBN not assigned