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2002
Moktadir, Z. and Bruijn, M.P. and Wiegerink, R.J. and Elwenspoek, M.C. and Ridder, M.L. and Mels, W.A.
(2002)
Limitations of Heat Conductivity in Cryogenic Sensors Due to Surface Roughness.
In: Proceedings of IEEE Sensors, 12 - 14 June 2002, Orlando, Florida.
pp. 1024-1027.
IEEE Computer Society.
ISBN 0-7803-7454-1
1995
Jansen, H.V. and de Boer, M.J. and Burger, J.F. and Legtenberg, R. and Elwenspoek, M.C.
(1995)
Black silicon method II: the effect of mask material and loading on the reactive ion etching of deep silicon trenches.
Microelectronic engineering, 27 (1-4).
pp. 475-480.
ISSN 0167-9317
*** ISI Impact 1,569 ***
Jansen, H.V. and de Boer, M.J. and Otter, B. and Elwenspoek, M.C.
(1995)
The black silicon method IV: the fabrication of three-dimensional structures in silicon with high aspect ratios for scanning probe microscopy and other applications.
In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands.
pp. 88-93.
IEEE Computer Society.
ISBN 0-7803-2503-6
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