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Research Project: Hot Silicon: Super low power hot-surface silicon chemical sensors and actuators
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2012

Groenland, A.W. and Vereshchagina, E. and Kovalgin, A.Y. and Wolters, R.A.M. and Gardeniers, J.G.E. and Schmitz, J. (2012) Micro- and nano-link ultra-low power heaters for sensors. In: European Solid-State Device Research Conference, ESSDERC 2012, 17-21 Sept 2012, Bordeaux, France. pp. 169-172. IEEE Solid-State Circuits Society. ISSN 1930-8876 ISBN 978-1-4673-1706-1
Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2012) Four point probe structures with buried and surface electrodes for the electrical characterization of ultrathin conducting films. IEEE transactions on semiconductor manufacturing, 25 (2). pp. 178-184. ISSN 0894-6507 *** ISI Impact 1,045 ***

2011

Groenland, A.W. (2011) Nanolink-based thermal devices: integration of ALD TiN thin films. PhD thesis, University of Twente. ISBN 978-90-365-3213-6
Groenland, A.W. and Kovalgin, A.Y. and Schmitz, J. (2011) Nano-Link Based Ultra Low Power Micro Electronic Hotplates for Sensors and Actuators. ECS Transactions, 35 (30). pp. 25-34. ISSN 1938-5862
Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2011) A Difference in Using Atomic Layer Deposition or Physical Vapour Deposition TiN as Electrode Material in Metal-Insulator-Metal and Metal-Insulator-Silicon Capacitors. Journal of nanoscience and nanotechnology, 11 (9). pp. 8368-8373. ISSN 1533-4880 *** ISI Impact 1,338 ***
Vereshchagina, E. and Wolters, R.A.M. and Gardeniers, J.G.E. (2011) Measurement of reaction heats using a polysilicon-based microcalorimetric sensor. Sensors and actuators A (Physical), 169 (2). pp. 308-316. ISSN 0924-4247 *** ISI Impact 2,201 ***
Vereshchagina, E. and Wolters, R.A.M. and Gardeniers, J.G.E. (2011) The development of titanium silicide–boron-doped polysilicon resistive temperature sensors. Journal of micromechanics and microengineering, 21 (10). 105022. ISSN 0960-1317 *** ISI Impact 1,768 ***

2010

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2010) On the leakage problem of MIM capacitors due to improper etching of titanium nitride. In: Proceedings of STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands. pp. 89-92. Technology Foundation STW. ISBN 978-90-73461-67-3

2009

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films. In: Proceedings of the 2009 IEEE International Conference on Microelectronic Test Structures, 30 Mar - 2 Apr 2009, Oxnard, CA, USA. pp. 191-195. IEEE Computer Society. ISBN 978-1-4244-4259-1
Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Contact chain measurements for ultrathin conducting films. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 150-152. Technology Foundation STW. ISBN 978-90-73461-62-8
Tiggelaar, R.M. and Groenland, A.W. and Sanders, R.G.P. and Gardeniers, J.G.E. (2009) Electrical properties of low pressure chemical vapor deposited silicon nitride thin films for temperatures up to 650 °C. Journal of applied physics, 105 (3). 033714. ISSN 0021-8979 *** ISI Impact 2,101 ***

2008

Agiral, A. and Groenland, A.W. and Kumar Chinthaginjala, J. and Seshan, K. and Lefferts, L. and Gardeniers, J.G.E. (2008) On-chip microplasma reactors using carbon nanofibres and tungsten oxide nanowires as electrodes. Journal of physics D: applied physics, 41 (19). 194009. ISSN 0022-3727 *** ISI Impact 2,772 ***
Brunets, I. and Groenland, A.W. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. (2008) A study of thermal oxidation and plasma-enhanced oxidation/reduction of ALD TiN layers. In: Proceedings of the 18th International Conference on Atomical Layer Deposition ALD 2008, 29 Jun - 2 Jul 2008, Bruges, Belgium. P-54. TUe Eindhoven. ISBN not assigned
Groenland, A.W. and Brunets, I. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Schmitz, J. (2008) Thermal and plasma-enhanced oxidation of ALD TiN. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 468-471. Technology Foundation STW. ISBN 978-90-73461-56-7

2007

Groenland, A.W. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2007) Simulation of a Nanolink Hot-Plate Device. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 581-583. Technology Foundation STW. ISBN 978-90-73461-49-9