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Research Project: Fundamentals and simulation of wet-chemical etching techniques for the fabrication of 3-dimensional structures in silicon
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2001

van Veenendaal, E. (2001) From an atomistic to a continuum description of crystal growth. PhD thesis, Kat. Universiteit Nijmegen. ISBN 90-373-0560-1

1997

Kasparian, J. and Elwenspoek, M.C. and Allongue, P. (1997) Digital computation and in situ STM approach of silicon anisotropic etching. Surface science, 388 (1-3). pp. 50-62. ISSN 0039-6028 *** ISI Impact 1,931 ***

1996

Elwenspoek, M.C. (1996) The form of etch rate minima in wet chemical anisotropic etching of silicon. Journal of micromechanics and microengineering, 6 (4). pp. 405-409. ISSN 0960-1317 *** ISI Impact 1,768 ***

1995

Elwenspoek, M.C. (1995) Physical chemistry of wet chemical anisotropic etching of silicon. In: Proceedings of the ASME Dynamic Systems and Control Division. ASME, New York, NY, USA, pp. 901-907. ISBN 0791817466

1994

Elwenspoek, M.C. and Lindberg, U. and Kok, H. and Smith, L. (1994) Wet chemical etching mechanism of silicon. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 223-228. IEEE Computer Society. ISBN 0-7803-1833-1