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OrganisationEEMCS EPrints Service
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2011
Burouni, N. and Berenschot, J.W. and Elwenspoek, M.C. and Tas, N.R.
(2011)
Dimensional Control in Corner Lithography for Wafer-Scale Fabrication of Nano-Apertures.
In: 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, 20-23 Feb 2011, Kaohsiung, Taiwan.
pp. 940-943.
IEEE-NEMS 2011.
ISBN 978-1-61284-775-7
Sarajlic, E. and Siekman, M.H. and Fujita, H. and Abelmann, L. and Tas, N.R.
(2011)
A novel electrostatically actuated AFM probe for vibro-flexural mode operation.
In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 Jan 2011, Cancun, Mexico.
pp. 537-540.
IEEE.
ISBN 978-1-4244-9633-4
2010
Sarajlic, E. and Geerlings, Joël and Berenschot, J.W. and Siekman, M.H. and Tas, N.R. and Abelmann, L.
(2010)
Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip.
In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands.
pp. 24-27.
University of Twente - TST.
ISBN 978-90-81673716
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