EEMCS EPrints Service
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2009
Jansen, H.V. and de Boer, M.J. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C.
(2009)
Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment.
Journal of micromechanics and microengineering, 19 (3).
033001.
ISSN 0960-1317
*** ISI Impact 2,276 ***
Unnikrishnan, S.
(2009)
Micromachined Dense Palladium Electrodes for Thin-film Solid Acid Fuel Cells.
PhD thesis, University of Twente.
ISBN 978-90-365-2949-5
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C.
(2009)
MEMS within a Swagelok®: a new platform for microfluidic devices.
Lab on a chip, 9 (13).
pp. 1966-1969.
ISSN 1473-0197
*** ISI Impact 6,260 ***
Unnikrishnan, S. and Jansen, H.V. and Falke, F.H. and Tas, N.R. and van Wolferen, H.A.G.M. and de Boer, M.J. and Sanders, R.G.P. and Elwenspoek, M.C.
(2009)
Transition flow through an ultra-thin nanosieve.
Nanotechnology, 20 (30).
pp. 1-6.
ISSN 0957-4484
*** ISI Impact 3,644 ***
2008
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C.
(2008)
Wafer scale nano-membrane supported on a silicon microsieve using thin-film transfer technology.
Journal of micromechanics and microengineering, 18 (6).
064005.
ISSN 0960-1317
*** ISI Impact 2,276 ***
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Fazal, I. and Louwerse, M.C. and Mogulkoc, B. and Sanders, R.G.P. and de Boer, M.J. and Elwenspoek, M.C.
(2008)
A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent EP20080007746 (Application).
2007
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C.
(2007)
Wafer scale nano-membranes supported on a silicon microsieve.
In: Micromechanics Europe 2007, 16-18 September 2007, Portugal.
pp. 127-130.
University of Minho.
ISBN 978-972-98603-3-1
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