Nederlands
Contact
Sitemap
Search
OrganisationEEMCS EPrints Service
 |
|
|
||||||||||||||
|
|
|
|
|
||||||||||||
|
|
|
||||||||||||||
|
|
|
|
|
||||||||||||
|
|
2008
Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C.
(2008)
3D-Nanomachining using corner lithography.
In: 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, 6-9 Jan 2008, Sanya, China.
pp. 729-732.
IEEE Computer Society.
ISBN 978-1-4244-1907-4
|
|
|
||||||||||||
|
|
|
||||||||||||||
|
|
|
|
|
||||||||||||
|
|
|
||||||||||||||