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Research Project: FIRAT: revolutie in de AFM
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2008

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2008) 3D-Nanomachining using corner lithography. In: 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, 6-9 Jan 2008, Sanya, China. pp. 729-732. IEEE Computer Society. ISBN 978-1-4244-1907-4