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Research Project: EMMA: ElectroMechanical Microcomponents for precision Applications
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2006

Fernández, L.J. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2006) Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications. Journal of micromechanics and microengineering, 16. pp. 862-868. ISSN 0960-1317 *** ISI Impact 1,768 ***
Fernández, L.J. and Wiegerink, R.J. and Flokstra, Jaap and Sesé, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) A capacitive rf power sensor based on mems technology. Journal of micromechanics and microengineering, 16. S1099-S1107. ISSN 0960-1317 *** ISI Impact 1,768 ***

2005

Fernández, L.J. (2005) A capacitive rf power sensor based on mems technology. PhD thesis, University of Twente. ISBN 90-365-2294-3
Fernández, L.J. and Arz, U. and Schubert, D. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, Jaap (2005) A cmos compatible process for improved rf performance on highly doped substrates. In: Proceedings. 9th IEEE Workshop on Signal Propagation on Interconnects, 2005., 10-13 May 2005, Garmisch Partenkirchen. pp. 167-170. IEEE Computer Society. ISBN 0-7803-9054-7
Fernández, L.J. and Berenschot, J.W. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2005) Fabrication of thick silicon nitride blocks for integration of rf devices. Electronics letters, 41 (3). pp. 1-2. ISSN 0013-5194 *** ISI Impact 0,854 ***
Fernández, L.J. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2005) Radio frequency power sensor based on mems technology with ultra low loss. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005., 30-01 / 03-02-2005, Miami. pp. 191-194. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5

2003

Fernández, L.J. and Visser, E. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jan and Jansen, H.V. and Elwenspoek, M.C. (2003) Radio frequency power sensor based on MEMS technology. In: Sensors, 2003. Proceedings of IEEE, 22-24 Oct., Toronto, Canada. pp. 549-552. IEEE Computer Society. ISBN 0-7803-8133-5