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OrganisationEEMCS EPrints Service
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1994
Elders, J. and Jansen, H.V. and Elwenspoek, M.C.
(1994)
Materials analysis of fluorocarbon films for MEMS applications.
In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn.
pp. 170-175.
IEEE Computer Society.
ISBN 0-7803-1833-1
1993
Elders, J. and Tilmans, H.A.C. and Bouwstra, S. and Elwenspoek, M.C.
(1993)
Mechanical parameter extraction using resonant structures.
In: Proceedings of the 1993 Spring Meeting of the Materials Research Society, 12-16 April 1993, San Francisco, CA, USA.
pp. 171-176.
Materials Research Society.
ISSN 0272-9172
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