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Research Project: DEEMO: Dry etching electro-plating and moulding
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1994

Elders, J. and Jansen, H.V. and Elwenspoek, M.C. (1994) Materials analysis of fluorocarbon films for MEMS applications. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 170-175. IEEE Computer Society. ISBN 0-7803-1833-1

1993

Elders, J. and Tilmans, H.A.C. and Bouwstra, S. and Elwenspoek, M.C. (1993) Mechanical parameter extraction using resonant structures. In: Proceedings of the 1993 Spring Meeting of the Materials Research Society, 12-16 April 1993, San Francisco, CA, USA. pp. 171-176. Materials Research Society. ISSN 0272-9172