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Research Project: Chemical mechanical polishing for integrated circuits and sensor actuator technologies

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1999

Gui, C. and Elwenspoek, M.C. and Tas, N.R. and Gardeniers, J.G.E. (1999) The effect of surface roughness on direct wafer bonding. Journal of applied physics, 85 (10). pp. 7448-7454. ISSN 0021-8979 *** ISI Impact 2,064 ***

Gui, C. and Elwenspoek, M.C. and Tas, N.R. and Gardeniers, J.G.E. (1999) The Surface adhesion parameter: A measure for wafer bondability. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 17-21 Jan 1999, Orlando, FL, USA. pp. 290-295. IEEE Computer Society. ISBN 0-7803-5194-0

Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Fabrication of nanomechanical optical devices with aligned wafer bonding. Microsystem technologies, 5 (3). pp. 138-143. ISSN 0946-7076 *** ISI Impact 1,069 ***

1998

Gui, C. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (1998) Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures. Sensors and actuators A: Physical, 70 (1-2). pp. 61-66. ISSN 0924-4247 *** ISI Impact 1,933 ***

Gui, C. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Lambeck, P.V. (1998) Present and future role of chemical mechanical polishing in wafer bonding. Journal of the Electrochemical Society, 145 (6). pp. 2198-2204. ISSN 0013-4651 *** ISI Impact 2,420 ***

Gui, C. and Legtenberg, R. and Tilmans, H.A.C. and Fluitman, J.H.J. and Elwenspoek, M.C. (1998) Nonlinearity and hysteresis of resonant strain gauges. Journal of microelectromechanical systems, 7 (1). pp. 122-127. ISSN 1057-7157 *** ISI Impact 2,157 ***

Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Nanomechanical optical devices fabricated with aligned wafer bonding. In: The Eleventh Annual International Workshop on Micro Electro Mechanical Systems, MEMS 98 Proceedings, 25-29 Jan 1998, Heidelberg. pp. 482-487. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-4412-X

Veldhuis, G.J. and Gui, C. and Nauta, T. and Koster, T.M. and Berenschot, J.W. and Lambeck, P.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Mechano-optical waveguide on-off intensity modulator. Optics Letters, 23 (19). pp. 1532-1534. ISSN 0146-9592 *** ISI Impact 3,316 ***

1997

Gui, C. and Albers, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Lambeck, P.V. (1997) Fusion bonding of rough surfaces with polishing technique for silicon micromachining. Microsystem technologies, 3 (3). pp. 122-128. ISSN 0946-7076 *** ISI Impact 1,069 ***

1995

Gui, C. and Legtenberg, R. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure. Journal of micromechanics and microengineering, 5 (2). pp. 183-185. ISSN 0960-1317 *** ISI Impact 2,276 ***

Gui, C. and Legtenberg, R. and Tilmans, H.A.C. and Fluitman, J.H.J. and Elwenspoek, M.C. (1995) Nonlinearity and hysteresis of resonant strain gauges. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 157-162. IEEE Computer Society. ISBN 0-7803-2503-6