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Research Project: CLEMPS: Closed-Loop Embedded MEMS-gebaseerde Precisie actuator
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2012

Been, A.J. and Vermeer, R. and Woldering, L.A. and Abelmann, L. (2012) Effects on imaging by tilting electrostatic actuators in electron microscopy. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 Sep 2012, Ilmenau, Germany. B14. Ilmenau University of Technology. ISBN 978-3-938843-71-0

2011

Abelmann, L. (2011) The 21st MicroMechanics Europe Workshop (MME 2010). Journal of micromechanics and microengineering, 21 (7). pp. 070201-070202. ISSN 0960-1317 *** ISI Impact 1,768 ***
Chapuis, Y.-A. and Jalabert, L. and Sarajlic, E. and Vermeer, R. and Collard, D. and Fujita, H. (2011) Polymer membrane-based thermo-pneumatic actuation for distributed air-jet planar micromanipulator. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico. pp. 141-144. IEEE Micro Electro Mechanical Systems. ISBN 978-1-4244-9633-4
Krijnen, B. and Hogervorst, R. and van Dijk, J.W. and Engelen, J.B.C. and Woldering, L.A. and Brouwer, D.M. and Abelmann, L. and Soemers, H.M.J.R. (2011) A Thermal displacement sensor in MEMS [Towards accurate small-scale manipulation]. Mikroniek, 51 (4). pp. 5-11. ISSN 0026-3699
Krijnen, B. and Hogervorst, R.P. and van Dijk, J.W. and Engelen, J.B.C. and Woldering, L.A. and Brouwer, D.M. and Abelmann, L. and Soemers, H.M.J.R. (2011) A single-mask thermal displacement sensor in MEMS. Journal of micromechanics and microengineering, 21 (7). pp. 074007-074019. ISSN 0960-1317 *** ISI Impact 1,768 ***
Vermeer, R. and Woldering, L.A. and Abelmann, L. (2011) Effect of electric fields generated by microactuators on the imaging in electron microscopy. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 222-225. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9

2010

Brouwer, D.M. and Otten, A. and Engelen, J.B.C. and Krijnen, B. and Soemers, H.M.J.R. (2010) Long-range elastic guidance mechanisms for electrostatic comb-drive actuators. In: Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology, 31 May - 4 Jun 2010, Delft, The Netherlands. pp. 47-50. Delft University . ISBN 978-0-9553082-8-4
Hogervorst, R.P. and Krijnen, B. and Brouwer, D.M. and Engelen, J.B.C. and Staufer, U. (2010) A single-mask thermal displacement sensor in MEMS. In: Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology, 31 May - June 4 2010, Delft, The Netherlands. pp. 462-465. Delft University. ISBN 978-0-9553082-8-4
Krijnen, B. and Hogervorst, R.P. and Engelen, J.B.C. and van Dijk, J.W. and Brouwer, D.M. and Abelmann, L. (2010) Single-mask thermal displacement sensor in MEMS. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 52-55. University of Twente - TST. ISBN 978-90-81673716