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2003
Ekkels, P. and Tjerkstra, R.W. and Krijnen, G.J.M. and Berenschot, J.W. and Brugger, J. and Elwenspoek, M.C.
(2003)
Fabrication of functional structures on thin silicon nitride membranes.
Microelectronic engineering, 67-68.
pp. 422-429.
ISSN 0167-9317
*** ISI Impact 1,569 ***
Tjerkstra, R.W. and Ekkels, P. and Krijnen, G.J.M. and Egger, S. and Berenschot, J.W. and Ma, K. and Brugger, J.
(2003)
Fabrication of an active nanostencil with integrated microshutters.
In: TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003, 8-12 June, Boston, USA.
pp. 1651-1654.
IEEE Computer Society.
ISBN 0-7803-7731-1
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