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Research Project: ASSET: Application of Smart Structures in Engineering and Technology
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2002

Krijnen, G.J.M. and Kuijpers, A.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2002) Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation. In: Proceedings of SPIE - The International Society for Optical Engineering, 21 - 23 May 2002, Presquile de Giens, France. pp. 201-206. The International Society for Optical Engineering. ISSN 0277-786X ISBN 0-8194-4529-0