EEMCS

Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators. Sensors and actuators A: Physical, 130-131. pp. 340-345. ISSN 0924-4247 *** ISI Impact 1,933 ***

Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Surface micromachined fabrication of piezoelectric ain unimorph suspension devices for rf resonator applications. In: Proceedings of the 13th International Conferences on Solid-State Sensors, Actuators and Microsystems 2005, 5-9 June 2005, Seoul. pp. 1362-1365. IEEE Computer Society. ISBN 0-7803-8994-8

Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators. In: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS (DTIP), 1-3 June 2005, Montreux, Switzerland. DTIP of MEMS & MOEMS. ISBN 2-84813-057-1

Saravanan, S. and Keim, E.G. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Growth and surface characterization of piezoelectric AlN thin films on silicon (100) and (110) substrates. In: Microscopy of Semiconducting Materials. Springer Proceedings in Physics 107. Springer, pp. 75-78. ISSN 0930-8989 ISBN 978-3-540-31914-6