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2017

Alveringh, D. and Sanders, R.G.P. and Wiegerink, R.J. and Lötters, J.C. (2017) Phase relation recovery for scanning laser Doppler vibrometry. Measurement science and technology, 28 (2). 025208. ISSN 0957-0233 *** ISI Impact 1,492 ***
Monge, R. and Groenesteijn, J. and Alveringh, D. and Wiegerink, R.J. and Lötters, J.C. and Fernandez, L.J. (2017) SU-8 micro Coriolis mass flow sensor. Sensors and actuators. B: Chemical, 241. pp. 744-749. ISSN 0925-4005 *** ISI Impact 4,758 ***

2016

Alveringh, D. and Groenesteijn, J. and Wiegerink, R.J. and Lötters, J.C. (2016) Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning. Microelectronic engineering, 159. pp. 1-5. ISSN 0167-9317 *** ISI Impact 1,277 ***
Alveringh, D. and Sanders, R.G.P. and Wiegerink, R.J. and Lötters, J.C. (2016) Vortex generation and sensing in microfabricated surface channels. In: 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, 24-28 Jan 2016, Shanghai, China. pp. 812-815. IEEE. ISBN 978-1-5090-1973-1
Brookhuis, R.A. and Sanders, R.G.P. and Sikkens, B.N.A. and Wiegerink, R.J. (2016) Three-axis force-torque sensor with fully differential capacitive readout. In: 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, 24-28 Jan 2016, Shanghai, China. pp. 885-888. IEEE. ISBN 978-1-5090-1973-1
Groenesteijn, J. (2016) Microfluidic platform for Coriolis-based sensor and actuator systems. PhD thesis, University of Twente. ISBN 978-90-365-4011-7
Groenesteijn, J. and Alveringh, D. and Groen, M.S. and Wiegerink, R.J. and Lötters, J.C. (2016) Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve. In: 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, 24-28 Jan 2016, Shanghai, China. pp. 788-791. IEEE Robotics and Automation Society. ISBN 978-1-5090-1972-4
Groenesteijn, J. and Sanders, R.G.P. and Wiegerink, R.J. and Lötters, J.C. (2016) Towards nanogram per second Coriolis mass flow sensing. In: 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, 24-28 Jan 2016, Shanghai, China. pp. 193-196. IEEE Robotics and Automation Society. ISBN 978-1-5090-1972-4
Lötters, J.C. and Groen, M.S. and Wiegerink, R.J. and Brouwer, D.M. and Brookhuis, R.A. and Meutstege, E. (2016) Fluid flow device, comprising a valve unit, as well as method of manufacturing the same. Patent WO2016182437 (Application).
Le The, H. and Berenschot, J.W. and Tiggelaar, R.M. and Tas, N.R. and van den Berg, A. and Eijkel, J.C.T. (2016) Large-area fabrication of sub-30 NM periodic nanostructures. In: 20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, MicroTAS 2016, 9-13 Oct 2016, Dublin, Ireland. pp. 1124-1125. International Conference on Miniaturized Systems for Chemistry and LifeSciences (MicroTAS). The Chemical and Biological Microsystems Society. ISSN 1556-5904 ISBN 978-0-9798064-9-0
Nazeer, H. and Nguyen, Minh Duc and Rijnders, A.J.H.M. and Abelmann, L. and Sardan Sukas, O. (2016) Residual stress and Young's modulus of pulsed laser deposited PZT thin films: Effect of thin film composition and crystal direction of Si cantilevers. Microelectronic Engineering, 161. pp. 56-62. ISSN 0167-9317 *** ISI Impact 1,277 ***
Pjetri, O. (2016) Two-dimensional acoustic particle velocity sensors based on a crossing wires topology. PhD thesis, Univ. of Twente. ISBN 978-90-365-4217-3
Pjetri, O. and Wiegerink, R.J. and Krijnen, G.J.M. (2016) A 2D particle velocity sensor with minimal flow disturbance. IEEE sensors journal, 16 (24). pp. 8706-8714. ISSN 1530-437X *** ISI Impact 1,889 ***
Pjetri, O. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2016) A 2D acoustic particle velocity sensor with perfectly orthogonal sensitivity directions. Sensors and actuators. A: Physical, 246. pp. 28-34. ISSN 0924-4247 *** ISI Impact 2,201 ***
de Rutte, J.M. and Janssen, K.G.H. and Tas, N.R. and Eijkel, J.C.T. and Pennathur, S. (2016) Channel deformation in electrokinetic micro/nanofluidic systems. In: 20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, MicroTAS 2016, 9-13 Oct 2016, Dublin, Ireland. pp. 764-765. International conference on Miniaturized Systems for Chemistry and LifeSciences (MicroTAS). the Chemical and Biological Microsystems Society. ISSN 1556-5904 ISBN 978-0-9798064-9-0
Svetovoy, V.B. and Postnikov, A. and Uvarov, I. and Sanders, R.G.P. and Krijnen, G.J.M. (2016) Overcoming the fundamental limit: combustion of a hydrogen-oxygen mixture in micro- and nano-bubbles. Energies, 9 (2). pp. 1-17. ISSN 1996-1073 *** ISI Impact 2,077 ***
Svetovoy, V.B. and Uvarov, I.V. and Postnikov, A.V. and Sanders, R.G.P. and Krijnen, G.J.M. (2016) Electrochemical actuator with a short response time: A new actuation regime. Sensors and actuators. A: Physical, 243. ISSN 0924-4247 *** ISI Impact 2,201 ***
Woldering, L.A. and Been, A.J. and Alink, L. and Abelmann, L. (2016) Using magnetic levitation for 2D and 3D self-assembly of cubic silicon macroparticles. Physica status solidi RRL, 10 (2). pp. 176-184. ISSN 1862-6300 *** ISI Impact 1,648 ***

2015

Alveringh, D. and Groenesteijn, J. and Ma, Kechun and Wiegerink, R.J. and Lötters, J.C. (2015) A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning. In: 41st International Conference on Micro- and Nano-Engineering, MNE 2015, 21-24 Sep 2015, The Hague, The Netherlands. MNE 2015. ISBN not assigned
Alveringh, D. and Groenesteijn, J. and Wiegerink, R.J. and Lötters, J.C. (2015) Inline pressure sensing mechanisms enabling scalable range and sensitivity. In: 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015, 21-25 Jun 2015, Anchorage, USA. pp. 1187-1190. The Printing House, Inc.. ISBN 978-1-4799-8955-3
van den Beld, W.T.E. and Cadena, N.L. and Bomer, J.G. and de Weerd, E.L. and Abelmann, L. and van den Berg, A. and Eijkel, J.C.T. (2015) Bidirectional microfluidic pumping using an array of magnetic Janus microspheres rotating around magnetic disks. Lab on a chip, 15. pp. 2872-2878. ISSN 1473-0197 *** ISI Impact 5,586 ***
Brookhuis, R.A. and Lammerink, T.S.J. and Wiegerink, R.J. (2015) Differential capacitive sensing circuit for a multi-electrode capacitive force sensor. Sensors and actuators. A: Physical, 234. pp. 168-179. ISSN 0924-4247 *** ISI Impact 2,201 ***
Brookhuis, R.A. and Sanders, R.G.P. and Ma, Kechun and Lammerink, T.S.J. and de Boer, M.J. and Krijnen, G.J.M. and Wiegerink, R.J. (2015) Miniature large range multi-axis force-torque sensor for biomechanical applications. Journal of micromechanics and microengineering, 25 (2). 025012. ISSN 0960-1317 *** ISI Impact 1,768 ***
Dagamseh, A.M.K. and Hmeidi, S. and Krijnen, G.J.M. (2015) Spatio-temporal flow pattern observations using bio-inspired hair flow sensors. In: 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015, 27-30 April 2015, Montpellier, France. pp. 250-253. IEEE Robotics and Automation Society. ISBN 978-1-4799-8627-9
Droogendijk, H. and de Boer, M.J. and Sanders, R.G.P. and Krijnen, G.J.M. (2015) Stochastic resonance in a voltage-controlled micromechanical slider. Journal of microelectromechanical systems, 24 (3). pp. 651-660. ISSN 1057-7157 *** ISI Impact 1,939 ***
Droogendijk, H. and de Boer, M.J. and Sanders, R.G.P. and Krijnen, G.J.M. (2015) Advantages of electrostatic spring hardening in biomimetic hair flow sensors. Journal of microelectromechanical systems, 24 (5). pp. 1415-1425. ISSN 1057-7157 *** ISI Impact 1,939 ***
Droogendijk, H. and de Boer, M.J. and Sanders, R.G.P. and Krijnen, G.J.M. (2015) Bio-inspired hair-based inertial sensors. In: Biomimetic Technologies: Principles and Applications. Woodhead Publishing Series in Electronic and Optical Materials. Elsevier, Amsterdam, pp. 93-119. ISBN 978-008100260-5
Droogendijk, H. and Casas, J. and Steinmann, T. and Krijnen, G.J.M. (2015) Performance assessment of bio-inspired systems: flow sensing MEMS hairs. Bioinspiration & Biomimetics, 10. 016001. ISSN 1748-3182 *** ISI Impact 2,891 ***
Geerlings, Joël and Sarajlic, E. and Berenschot, J.W. and Sanders, R.G.P. and Siekman, M.H. and Abelmann, L. and Tas, N.R. (2015) Electric field controlled nanoscale contactless deposition using a nanofluidic scanning probe. Applied physics letters, 107 (12). 123109. ISSN 0003-6951 *** ISI Impact 3,142 ***
Groen, M.S. (2015) Microvalves for precise dosing: proportional flow control on a chip. PhD thesis, Univ. of Twente. ISBN 978-90-365-3961-6
Groen, M.S. and Brouwer, D.M. and Lötters, J.C. and Wiegerink, R.J. (2015) Miniature proportional control valve with top-mounted piezo bimorph actuator with millisecond response time. Journal of micromechanics and microengineering, 25. 105008. ISSN 0960-1317 *** ISI Impact 1,768 ***
Groen, M.S. and Groenesteijn, J. and Meutstege, E. and Brookhuis, R.A. and Brouwer, D.M. and Lötters, J.C. and Wiegerink, R.J. (2015) Proportional control valves integrated in silicon nitride surface channel technology. Journal of microelectromechanical systems, 24 (6). pp. 1759-1767. ISSN 1057-7157 *** ISI Impact 1,939 ***
Groenesteijn, J. and Steenwelle, R.J.A. and Lötters, J.C. and Wiegerink, R.J. (2015) In-line picogram-resolution microchannel resonator for protein adsorption measurements operating at atmospheric pressure. In: 41st International Conference on Micro- and Nano-Engineering, MNE 2015, 21-24 Sep 2015, The Hague, The Netherlands. 1. Twente University. ISBN not assigned
Hu, Chun and Zheng, Dezhi and Fan, Sangchun and Wiegerink, R.J. and Guo, Zhanshe (2015) Theoretical and experimental research on the in-plane comb-shaped capacitor for MEMS coriolis mass flow sensor. Microsystem technologies, 21. pp. 1-9. ISSN 0946-7076 *** ISI Impact 0,974 ***
Krijnen, B. and Brouwer, D.M. and Abelmann, L. and Herder, J.L (2015) Vacuum behavior and control of a MEMS stage with integrated thermal displacement sensor. Sensors and actuators. A: Physical, 234. pp. 321-330. ISSN 0924-4247 *** ISI Impact 2,201 ***
Krijnen, B. and Swinkels, K.R. and Brouwer, D.M. and Abelmann, L. and Herder, J.L. (2015) A large-stroke 3DOF stage with integrated feedback in MEMS. Journal of microelectromechanical systems, 24 (6). pp. 1720-1729. ISSN 1057-7157 *** ISI Impact 1,939 ***
Lammerink, T.S.J. and Groenesteijn, J. and Lötters, J.C. and Wiegerink, R.J. (2015) Readout circuit for capacitance ratio measurement. In: 41st International Conference on Micro- and Nano-Engineering, MNE 2015, 21-24 Sep 2015, The Hague, The Netherlands. 1. Twente University. ISBN not assigned
Lötters, J.C. (2015) Flow measurement system and method for determining at least one property of a medium. Patent US2016334349 (Application).
Lötters, J.C. and Groenesteijn, J. and Lammerink, T.S.J. and Wiegerink, R.J. and van der Wouden, E.J. and Sparreboom, W. (2015) Method and system for determining the fractions of a streaming gaseous medium. Patent WO2016056902 (Application).
Lötters, J.C. and Groenesteijn, J. and Sparreboom, W. and van der Wouden, E.J. and Lammerink, T.S.J. and Wiegerink, R.J. (2015) Fully integrated microfluidic measurement system for real-time determination of gas and liquid mixtures composition. In: Proceedings of the18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, 21-25 Jun 2015, Anchorage, AK, USA. pp. 1798-1801. IEEE Robotics and Automation Society. ISBN 978-1-4799-8954-6
Legrain, A.B.H. and Berenschot, J.W. and Tas, N.R. and Abelmann, L. (2015) Elasto-capillary folding using stop-programmable hinges fabricated by 3D micro-nachining. PLOS one, 10 (5). e0125891. ISSN 1932-6203 *** ISI Impact 3,057 ***
Legrain, A.B.H. and Berenschot, J.W. and Tas, N.R. and Abelmann, L. (2015) Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges. Microelectronic engineering, 140. pp. 60-66. ISSN 0167-9317 *** ISI Impact 1,277 ***
Nazeer, H. and Bhaskaran, H. and Woldering, L.A. and Abelmann, L. (2015) Young's modulus and residual stress of GeSbTe phase-change thin films. Thin solid films, 592 (Part A). pp. 69-75. ISSN 0040-6090 *** ISI Impact 1,761 ***
Park, J.K. and Campos, C.D.M. and Neuzil, P. and Abelmann, L. and Guijt, R.M. and Manz, A. (2015) Direct coupling of a free-flow isotachophoresis (FFITP) device with electrospray ionization mass spectrometry (ESI-MS). Lab on a chip, 15. pp. 3495-3502. ISSN 1473-0197 *** ISI Impact 5,586 ***
Pjetri, O. and Wiegerink, R.J. and Krijnen, G.J.M. (2015) A 2D particle velocity sensor with minimal flow-disturbance. In: Proceedings IEEE Sensors 2015, 01-04 Nov 2015, Busan, Korea. pp. 1307-1310. IEEE. ISBN 978-1-4799-8203-5
Pondman, K.M. and Bunt, N.D and Maijenburg, A.W. and van Wezel, R.J.A. and Kishore, U and Abelmann, L. and ten Elshof, J.E. and ten Haken, B. (2015) Magnetic drug delivery with FePd nanowires. Journal of magnetism and magnetic materials, 380. pp. 299-306. ISSN 0304-8853 *** ISI Impact 2,357 ***
Shemelya, C. and Banuelos-Chacon, L. and Melendez, A. and Kief, C. and Espalin, D. and Wicker, R. and Krijnen, G.J.M. and MacDonald, E. (2015) Multi-functional 3D printed and embedded sensors for satellite qualification structures. In: Proceedings IEEE Sensors 2015, 01-04 Nov 2015, Busan, Korea. pp. 1422-1425. IEEE. ISBN 978-1-4799-8203-5
van Tiem, J. and Groenesteijn, J. and Sanders, R.G.P. and Krijnen, G.J.M. (2015) 3D printed bio-inspired angular acceleration sensor. In: Proceedings IEEE Sensors 2015, 01-04 Nov 2015, Busan, Korea. pp. 1430-1433. IEEE. ISBN 978-1-4799-8203-5
Verhaar, J. and Sanders, R.G.P. and Krijnen, G.J.M. (2015) 3D printed features in the 100 μm range for application in sensing. In: Proceedings IEEE Sensors 2015, 01-04 Nov 2015, Busan, Korea. pp. 478-481. IEEE. ISBN 978-1-4799-8203-5
Westerik, P. and Berenschot, J.W. and Krijnen, G.J.M. (2015) Development of a biomimetic eardrum for acoustic sensing. In: Proceedings IEEE Sensors 2015, 01-04 Nov 2015, Busan, Korea. pp. 743-746. IEEE. ISBN 978-1-4799-8203-5
Wolters, R.A.M. and Vereshchagina, E. and Tiggelaar, R.M. and Sanders, R.G.P. and Gardeniers, J.G.E. (2015) Low power micro-calorimetric sensors for analysis of gaseous samples. Sensors and actuators. B: Chemical, 206. pp. 772-787. ISSN 0925-4005 *** ISI Impact 4,758 ***
van der Wouden, E.J. and Groenesteijn, J. and Wiegerink, R.J. and Lötters, J.C. (2015) Multi parameter flow meter for on-line measurement of gas mixture composition. Micromachines, 6 (4). pp. 452-461. ISSN 2072-666X *** ISI Impact 1,295 ***

2014

Abelmann, L. (2014) A bit more across the border. Twente University Press, Enschede.
Abelmann, L. and de Vries, Jeroen and Bolhuis, T. and Kikuchi, N. (2014) Energy barriers in nanometer sized magnetic islands prepared from alloyed and multilayered Co/Pt films. In: IEEE International Magnetics Conference, INTERMAG 2014, 4-8 May 2014, Dresden. pp. 1013-1014. IEEE Magnetics Society. ISBN not assigned
Alink, L. and Siekman, M.H. and Groenland, J.P.J. and Abelmann, L. (2014) Remarkable difference in reversal mechanism between identically patterned thin film Co/Pt elements of 70 nm diameter in an array. In: IEEE International Magnetics Conference, INTERMAG 2014, 4-8 May 2014, Dresden, Germany. pp. 1059-1060. IEEE Magnetics Society. ISBN not assigned
Alveringh, D. and Brookhuis, R.A. and Wiegerink, R.J. and Krijnen, G.J.M. (2014) A Large Range Multi-Axis Capacitive Force/Torque Sensor Realized in a Single SOI Wafer. In: 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26-30 Jan 2014, San Francisco, USA. pp. 680-683. The Printing House, Inc.. ISBN 978-1-4799-3509-3
Alveringh, D. and Wiegerink, R.J. and Lötters, J.C. (2014) Towards system-level modeling and characterization of components for intravenous therapy. In: Proceedings of the 2nd International Conference on MicroFluidic Handling Systems, MFHS 2014, 8-10 Oct 2014, Freiburg im Breisgau, Germany. pp. 106-109. Albert-Ludwigs-Universität Freiburg. ISBN not assigned
Brookhuis, R.A. (2014) Miniature force-torque sensors for biomechanical applications. PhD thesis, University of Twente. ISBN 978-90-365-3742-1
Brookhuis, R.A. and Droogendijk, H. and de Boer, M.J. and Sanders, R.G.P. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2014) Six-axis force-torque sensor with a large range for biomechanical applications. Journal of micromechanics and microengineering, 24 (3). pp. 1-10. ISSN 0960-1317 *** ISI Impact 1,768 ***
Burouni, N. (2014) 3D Nanofabrication of fluidic components by corner lithography. PhD thesis, University of Twente. ISBN 978-90-365-3722-3
Dagamseh, A.M.K. (2014) Estimation of squeeze film damping in artificial hair-sensor towards the detection-limit of crickets' hairs. Microsystem technologies, 20 (4-5). pp. 963-970. ISSN 0946-7076 *** ISI Impact 0,974 ***
Das, S. and Chanda, S. and Eijkel, J.C.T. and Tas, N.R. and Chakraborty, S. and Mitra, S.K. (2014) Filling of charged cylindrical capillaries. Physical review E: Statistical, nonlinear, and soft matter physics, 90 (4). 043011. ISSN 1539-3755
Dijkstra, M.A. and Lammerink, T.S.J. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2014) Thermal flow-sensor drift reduction by thermopile voltage cancellation via power feedback control. IEEE Journal of Microelectromechanical Systems, 23 (4). pp. 908-917. ISSN 1057-7157 *** ISI Impact 1,939 ***
Dijkstra, M.A. and Lammerink, T.S.J. and Pjetri, O. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2014) Thermal-wave balancing flow sensor with low-drift power feedback. Journal of micromechanics and microengineering, 24 (5). 055016. ISSN 0960-1317 *** ISI Impact 1,768 ***
Dijkstra, M.A. and Ma, Kechun and de Boer, M.J. and Groenesteijn, J. and Lötters, J.C. and Wiegerink, R.J. (2014) Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation. In: MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26-30 Jan 2014, San Francisco, CA, USA. pp. 999-1002. IEEE. ISBN 978-1-4799-3508-6
Droogendijk, H. (2014) Bio-inspired MEMS flow and inertial sensors. PhD thesis, University of Twente. ISBN 978-90-365-3598-4
Droogendijk, H. (2014) A bio-inspired hair- based acceleration sensor. Vonk : semi-wetenschappelijk maandblad van de ETSV Scintilla, 32 (4). pp. 22-25. ISSN 0925-5427
Droogendijk, H. and de Boer, M.J. and Sanders, R.G.P. and Krijnen, G.J.M. (2014) A biomimetic accelerometer inspired by the cricket's clavate hair. Journal of the Royal Society interface, 2014 (11). 20140438. ISSN 1742-5689 *** ISI Impact 3,818 ***
Droogendijk, H. and Brookhuis, R.A. and de Boer, M.J. and Sanders, R.G.P. and Krijnen, G.J.M. (2014) Towards a biomimetic gyroscope inspired by the fly's haltere using microelectromechanical systems technology. Journal of the Royal Society interface, 11 (99). 20140573. ISSN 1742-5689 *** ISI Impact 3,818 ***
Droogendijk, H. and Dagamseh, A.M.K. and Sanders, R.G.P. and Yntema, D.R. and Krijnen, G.J.M. (2014) Characterization of bio-inspired hair flow sensors for oscillatory airflows: techniques to measure the response for both flow and pressure. Measurement science and technology, 25. 095005. ISSN 0957-0233 *** ISI Impact 1,492 ***
Gauer, M. and Telitschkin, D. and Gotzig, U. and Batonneau, Y. and Johansson, H. and Ivanov, M. and Palmer, P. and Wiegerink, R.J. (2014) First results of PRECISE—Development of a MEMS-based monopropellant micro chemical propulsion system. Acta Astronautica, 93. pp. 77-83. ISSN 0094-5765 *** ISI Impact 1,095 ***
Geerlings, Joël and Sarajlic, E. and Berenschot, J.W. and Sanders, R.G.P. and Abelmann, L. and Tas, N.R. (2014) Electrospray deposition from AFM probes with nanoscale apertures. In: 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26-30 Jan 2014 , San Francisco, CA, USA. pp. 100-103. IEEE. ISBN 978-1-4799-3508-6
Geerlings, Joël and Sarajlic, E. and Berenschot, J.W. and Siekman, M.H. and Jansen, H.V. and Abelmann, L. and Tas, N.R. (2014) Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds. Journal of micromechanics and microengineering, 24 (10). 105013. ISSN 0960-1317 *** ISI Impact 1,768 ***
Groen, M.S. and Brouwer, D.M. and Brookhuis, R.A. and Wiegerink, R.J. (2014) Fluid flow regulator device, comprising a valve member and a valve seat defining a fluid flow surface area, as well as method of using the same. Patent WO2014NL50736 (Application).
Groen, M.S. and Wu, K. and Brookhuis, R.A. and van Houwelingen, M.J. and Brouwer, D.M. and Lötters, J.C. and Wiegerink, R.J. (2014) A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring. Journal of micromechanics and microengineering, 24 (12). 125020. ISSN 0960-1317 *** ISI Impact 1,768 ***
Groenesteijn, J. and Dijkstra, M.A. and Lammerink, T.S.J. and Lötters, J.C. and Wiegerink, R.J. (2014) A compact micro Coriolis mass flow sensor with flow bypass for a monopropellant micro propulsion system. In: Proceedings of the Second International Conference on MicroFluidic Handling Systems, MFHS 2014, 8-10 Oct 2014, Freiburg im Breisgau, Germany. pp. 21-24. Albert-Ludwigs-Universität Freiburg. ISBN not assigned
Groenesteijn, J. and Droogendijk, H. and de Boer, M.J. and Sanders, R.G.P. and Wiegerink, R.J. and Krijnen, G.J.M. (2014) An angular acceleration sensor inspired by the vestibular system with a fully circular fluid-channel and thermal read-out. In: Technical Digest of the 27th IEEE International Conference on Micro Electro Mechanical Systems, 26-30 Jan 2014, San Francisco, USA. pp. 696-699. The Printing House, Inc.. ISBN 978-1-4799-3508-6
Groenesteijn, J. and Droogendijk, H. and Wiegerink, R.J. and Lammerink, T.S.J. and Lötters, J.C. and Sanders, R.G.P. and Krijnen, G.J.M. (2014) Parametric amplification in a micro Coriolis mass flow sensor. Journal of applied physics, 115 (19). 194503. ISSN 0021-8979 *** ISI Impact 2,101 ***
Groenesteijn, J. and van de Ridder, L. and Lötters, J.C. and Wiegerink, R.J. (2014) Modelling of a micro Coriolis mass flow sensor for sensitivity improvement. In: Proceedings of the Thirteenth IEEE Sensors Conference, IEEE Sensors 2014, 3-5 Nov 2014, Valencia, Spain. pp. 954-957. IEEE Service Center. ISBN 978-1-4799-0162-3
Hageman, T.A.G. and Pichel, M.P. and Altmeyer, M.O. and Manz, A. and Abelmann, L. (2014) An integrated magnet array for trapping and manipulation of magnetotactic bacteria in microfluidics. In: Proceedings of the 25th workshop on Micromechanics and Microsystems Europe 2014, 31 Aug - 3 Sept 2014, Istanbul, Turkey. MME. ISBN not assigned
Hatakeyama, K. and Sarajlic, E. and Siekman, M.H. and Jalabert, L. and Fujita, H. and Tas, N.R. and Abelmann, L. (2014) Wafer-scale fabrication of scanning thermal probes with integrated metal nanowire resistive elements for sensing and heating. In: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), 26-30 Jan 2014, San Francisco, CA, USA. pp. 1111-1114. The Printing House, Inc.. ISBN 978-1-4799-3508-6
Hatakeyama, K. and Vermeer, R. and Siekman, M.H. and Sarajlic, E. and Tas, N.R. and Abelmann, L. (2014) Batch fabricated scanning Hall probes for quantitative imaging of magnetic stray fields. In: IEEE International Magnetics Conference, INTERMAG 2014, 04-08 May 2014, Dresden, Germany. pp. 1741-1742. IEEE Magnetics Society. ISBN not assigned
Katerberg, M.R. and Ratering, G.H.J.M. and Platenkamp, T.H. and Geest, J.W. van de and Klein Hesselink, S. and Lötters, J.C. (2014) Low flow Coriolis flow controller with piezo operated control valve. In: Proceedings of the Second International Conference on Microfluidic Handling Systems, 8-10 Oct 2014, Freiburg, Germany. pp. 169-172. University of Freiburg. ISBN not assigned
Khalil, I.S.M. and Abelmann, L. and Misra, S. (2014) Magnetic-based motion control of paramagnetic microparticles with disturbance compensation. IEEE transactions on magnetics, 50 (10). 2323940. ISSN 0018-9464 *** ISI Impact 1,277 ***
Khalil, I.S.M. and Dijkslag, H.C. and Abelmann, L. and Misra, S. (2014) MagnetoSperm: A microrobot that navigates using weak magnetic fields. Applied physics letters, 22 (2). 223701. ISSN 0003-6951 *** ISI Impact 3,142 ***
Krijnen, G.J.M. and Droogendijk, H. and Dagamseh, A.M.K. and Jaganatharaja, R.K. and Casas, J. (2014) Crickets as bio-inspiration for MEMS-based flow-sensing. In: Flow Sensing in Air and Water; Behavioral, Neural and Engineering Principles of Operation. Springer Verlag, London, pp. 459-488. ISBN 978-3-642-41446-6
Krijnen, G.J.M. and Droogendijk, H. and Steinmann, T. and Dagamseh, A.M.K. and Jaganatharaja, R.K. and Casas, J. (2014) Hair-based flow-sensing inspired by the cricket cercal system. In: Handbook of Biomimetics and Bioinspiration: Electromechanical Systems. World Scientific Series in Nanoscience and Nanotechnology 2. World Scientific, Singapore, pp. 861-887. ISBN 978-981-4354-92-9
Lötters, J.C. and van der Wouden, E.J. and Groenesteijn, J. and Sparreboom, W. and Lammerink, T.S.J. and Wiegerink, R.J. (2014) Integrated multi-parameter flow measurement system. In: 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26-30 Jan 2014, San Francisco, CA, USA. pp. 975-978. IEEE Robotics and Automation Society. ISBN 978-1-4799-3509-3
Lötters, J.C. and van der Wouden, E.J. and Groenesteijn, J. and Sparreboom, W. and Lammerink, T.S.J. and Wiegerink, R.J. (2014) Real-time composition determination of gas mixtures. (Invited) In: Proceedings of IEEE Sensors 2014, 02-05 Nov 2014, Valencia, Spain. pp. 1640-1643. IEEE Instrumentation & Measurement Society. ISBN 978-1-4799-0162-3
Legrain, A.B.H. (2014) Elastocapillary self-folding of micro-machined structures. PhD thesis, University of Twente. ISBN 978-90-365-3759-9
Legrain, A.B.H. and Janson, T.G. and Berenschot, J.W. and Abelmann, L. and Tas, N.R. (2014) Controllable elastocapillary folding of three-dimensional micro-objects by through-wafer filling. Journal of applied physics, 115. 214905. ISSN 0021-8979 *** ISI Impact 2,101 ***
Letters, J.C. and Snijders, G.J. and Volker, A.W.F. (2014) Ultrasonic flow meter. Patent US2017038234 (Application).
Lucas, P. and Petter, H.T. and Sparreboom, W. and Lötters, J.C. (2014) Primary standard for nano flow rates. In: Proceedings of the Second International Conference on Microfluidic Handling Systems, 8-10 Oct 2014, Freiburg, Germany. pp. 17-20. University of Freiburg. ISBN not assigned
Nazeer, H. and Nguyen, Minh Duc and Rijnders, A.J.H.M. and Abelmann, L. and Elwenspoek, M.C. (2014) Compositional dependence of the Young's modulus and piezoelectric coefficient of (110)-oriented pulsed laser deposited PZT thin films. Journal of microelectromechanical systems, 24 (1). pp. 166-173. ISSN 1057-7157 *** ISI Impact 1,939 ***
Platenkamp, T.H. and Sparreboom, W. and Ratering, G.H.J.M. and Katerberg, M.R. and Lötters, J.C. (2014) Low flow liquid calibration setup. In: Proceedings of the Second International Conference on Microfluidic Handling Systems, 8-10 Oct 2014, Freiburg, Germany. pp. 165-168. University of Freiburg. ISBN not assigned
Sparreboom, W. and van der Wouden, E.J. and Lammerink, T.S.J. and Lötters, J.C. (2014) Truly calorimetric flow sensor chip based on surface channel technology. In: Proceedings of the Second International Conference on MicroFluidic Handling Systems, MFHS 2014, 8-10 Oct 2014, Freiburg, Germany. pp. 53-56. University of Freiburg. ISBN not assigned
Svetovoy, V.B. and Sanders, R.G.P. and Ma, Kechun and Elwenspoek, M.C. (2014) New type of microengine using internal combustion of hydrogen and oxygen. Scientific reports, Vol 4 (4296). 4296. ISSN 2045-2322 *** ISI Impact 5,228 ***
Vermeer, R. and Berenschot, J.W. and Sarajlic, E. and Tas, N.R. and Jansen, H.V. (2014) Fabrication of novel AFM probe with high-aspect-ratio ultra-sharp three-face silicon nitride tips. In: Proceedings of the 14th IEEE International Conference on Nanotechnology, 18-21 Aug 2014, Toronto, Canada. pp. 229-233. IEEE . ISBN 978-1-4799-4082-0
Woldering, L.A. and Mosk, A.P. and Vos, W.L. (2014) Design of a three-dimensional photonic band gap cavity in a diamondlike inverse woodpile photonic crystal. Physical review B: Condensed matter and materials physics, 90 (11). 115140. ISSN 1098-0121
van der Wouden, E.J. and Lötters, J.C. (2014) Real-time composition determination of gas mixtures. In: Proceedings of the Second International Conference on Microfluidic Handling Systems, 8-10 Oct 2014, Freiburg, Germany. pp. 37-40. University of Freiburg. ISBN not assigned
Yagubizade, H. and Darvishi, M. and Elwenspoek, M.C. and Tas, N.R. (2014) A UHF 4th-order band-pass filter based on contour-mode PZT-on-silicon resonators. In: The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014), 26-30 Jan 2014, San Francisco. pp. 1237-1240. IEEE. ISBN 978-1-4799-3509-3

2013

Alveringh, D. (2013) A large range multi-axis capacitive force/torque sensor realized in a single SOI wafer. Master's thesis, University of Twente.
Berenschot, J.W. and Jansen, H.V. and Tas, N.R. (2013) Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon. Journal of micromechanics and microengineering, 23 (5). 10. ISSN 0960-1317 *** ISI Impact 1,768 ***
Brookhuis, R.A. and Lammerink, T.S.J. and Wiegerink, R.J. (2013) Six-axis force-torque sensor. Patent US201314371632 (Application).
Brookhuis, R.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Ma, Kechun and Krijnen, G.J.M. (2013) Large range multi-axis fingertip force sensor. In: 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 16-20 June 2013, Barcelona, Spain. pp. 2737-2740. IEEE Electron Devices Society. ISBN 978-1-4673-5981-8
Brookhuis, R.A. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2013) Three-axial force sensor with capacitive read-out using a differential relaxation oscillator. In: IEEE Sensors 2013, 3-6 Nov 2013, Baltimore, USA. pp. 1-4. IEEE. ISSN 1930-0395 ISBN 978-1-4673-4642-9
Burouni, N. and Berenschot, J.W. and Elwenspoek, M.C. and Sarajlic, E. and Leussink, P.J. and Jansen, H.V. and Tas, N.R. (2013) Wafer-scale fabrication of nanoapertures using corner lithography. Nanotechnology, 24 (28). 10. ISSN 0957-4484 *** ISI Impact 3,573 ***
Dagamseh, A.M.K. and Bruinink, C.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Droogendijk, H. and Krijnen, G.J.M. (2013) Interfacing of differential-capacitive biomimetic hair flow-sensors for optimal sensitivity. Journal of micromechanics and microengineering, 23 (3). 035010. ISSN 0960-1317 *** ISI Impact 1,768 ***
Dagamseh, A.M.K. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2013) Imaging dipole flow sources using an artificial lateral-line system made of biomimetic hair flow sensors. Journal of the Royal Society interface, 10 (83). 20130162. ISSN 1742-5662
Droogendijk, H. and de Boer, M.J. and Brookhuis, R.A. and Sanders, R.G.P. and Krijnen, G.J.M. (2013) Stochastic resonance in a voltage-controlled MEMS-slider: increasing the signal-to-noise ratio with noise. In: 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 16-20 Jun 2013, Barcelona, Spain. pp. 1707-1710. IEEE Electron Devices Society. ISBN 978-1-4673-5983-2
Droogendijk, H. and de Boer, M.J. and Sanders, R.G.P. and Krijnen, G.J.M. (2013) Design, fabrication and characterisation of a biomimetic accelerometer inspired by the cricket's clavate hair. In: IEEE Sensors 2013, 3-6 Nov 2013, Baltimore, MD, United States. pp. 167-170. IEEE Instrumentation & Measurement Society. ISSN 1930-0395
Droogendijk, H. and Brookhuis, R.A. and de Boer, M.J. and Sanders, R.G.P. and Krijnen, G.J.M. (2013) Design and fabrication of a biomimetic gyroscope inspired by the fly’s haltere. In: Sense of Contact 15, 10 Apr 2013, Soesterberg, The Netherlands. Technology Foundation STW. ISBN not assigned
Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Krijnen, G.J.M. (2013) Tunable sensor response by voltage-control in biomimetic hair flow sensors. Micromachines, 4 (1). pp. 116-127. ISSN 2072-666X *** ISI Impact 1,295 ***
Droogendijk, H. and Sanders, R.G.P. and Krijnen, G.J.M. (2013) Uncovering signals from measurement noise by electro mechanical amplitude modulation. New journal of physics, 15. 053029. ISSN 1367-2630 *** ISI Impact 3,570 ***
Engelen, J.B.C. and Khatib, M.G. and Abelmann, L. and Elwenspoek, M.C. (2013) Nanopositioner actuator energy cost and performance. Sensors and actuators. A: Physical, 199. pp. 353-365. ISSN 0924-4247 *** ISI Impact 2,201 ***
Groen, M.S. and Brookhuis, R.A. and van Houwelingen, M.J. and Brouwer, D.M. and Lötters, J.C. and Wiegerink, R.J. (2013) A micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring. In: Proceedings of MicroTAS 2013, 27-31 Oct 2013, Freiburg, Germany. 1469. The Printing House, Inc.. ISBN 978-0-9798064-6-9
Groenesteijn, J. and Droogendijk, H. and Wiegerink, R.J. and Lammerink, T.S.J. and Lötters, J.C. and Sanders, R.G.P. and Krijnen, G.J.M. (2013) Parametric amplification in a micro Coriolis mass flow sensor: reduction of power dissipation without loss of sensitivity. In: Proceedings of IEEE Sensors 2013, 4-6 Nov 2013, Baltimore, USA. pp. 1626-1629. IEEE Circuits & Systems Society. ISBN 978-1-4673-4642-9
Groenesteijn, J. and Zhang, H. and Tiggelaar, R.M. and Lammerink, T.S.J. and Lötters, J.C. and Gardeniers, J.G.E. and Wiegerink, R.J. (2013) Direct differential micro Coriolis mass flow sensor to detect the efficiency of a preconcentrator system. In: Proceedings of MicroTAS 2013, 27-31 Oct 2013, Freiburg, Germany. T.042c. Printing House Inc.. ISBN 978-0-9798064-6-9
Khalil, I.S.M. and Magdanz, V. and Sanchez, S. and Schmidt, O.G. and Abelmann, L. and Misra, S. (2013) Magnetic control of potential microrobotic drug delivery systems: nanoparticles, magnetotactic bacteria and self-propelled microjets. In: 35th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC 2013), 3-7 July 2013, Osaka, Japan. pp. 5299-5302. IEEE RAS. ISBN 978-1-4577-0216-7
Khalil, I.S.M. and Pichel, M.P. and Abelmann, L. and Misra, S. (2013) Closed-loop control of magnetotactic bacteria. The International Journal of Robotics Research, 32 (6). pp. 637-649. ISSN 0920-4741 *** ISI Impact 2,437 ***
Khalil, I.S.M. and Pichel, M.P. and Reefman, B.A. and Sardan Sukas, O. and Abelmann, L. and Misra, S. (2013) Control of magnetotactic bacterium in a micro-fabricated maze. In: 2013 IEEE International Conference on Robotics and Automation (ICRA), 06-10 May 2013, Karlsruhe, Germany. pp. 5488-5493. 2013 IEEE International Conference on Robotics and Automation. IEEE RAS. ISBN 978-1-4673-5642-8
Khalil, I.S.M. and Pichel, M.P. and Zondervan, L. and Abelmann, L. and Misra, S. (2013) Characterization and control of biological microrobots. In: Experimental Robotics. Springer Tracts in Advanced Robotics 88. Springer Verlag, Bern, Switzerland, pp. 617-631. ISBN 978-3-319-00065-7
Kokorian, J and Engelen, J.B.C. and de Vries, Jeroen and Nazeer, H. and Woldering, L.A. and Abelmann, L. (2013) Ultra-flat bismuth films for diamagnetic levitation by template-stripping. Thin solid films, 550. pp. 298-304. ISSN 0040-6090 *** ISI Impact 1,761 ***
Krijnen, G.J.M. and Dagamseh, A.M.K. (2013) Biomimetic flow sensors for environmental awareness. (Invited) In: International Congress on Acoustics, ICA 2013, 2-7 June 2013, Montreal, Canada. 2aEA2. Proceedings of Meetings on Acoustics 19. Acoustical Society of America. ISSN 1939-800X
Krijnen, G.J.M. and Droogendijk, H. and Dagamseh, A.M.K. and Jaganatharaja, R.K. and Casas, J. (2013) Imitating the cricket cercal system: The beauty of the beast with a twist of the engineer. Advances in Science and Technology, 84. pp. 19-28. ISSN 1662-0356
Lötters, J.C. and Groenesteijn, J. and Dijkstra, M.A. and Droogendijk, H. and Lammerink, T.S.J. and Wiegerink, R.J. (2013) Micro Coriolis mass flow censor with extended range for a monopropellant micro propulsion system. In: Proceedings of Sensor 2013, 14-16 May 2013, Nürnberg, Germany. pp. 508-512. Proceedings AMA conferences 2013. AMA Services GmbH. ISBN 978-3-9813484-3-9
Lötters, J.C. and Lammerink, T.S.J. and Pap, M.G. and Sanders, R.G.P. and de Boer, M.J. and Mouris, A.J. and Wiegerink, R.J. (2013) Integrated micro Wobbe index meter towards on-chip energy content measurement. In: Technical Digest of the 26th IEEE International Conference on Micro Electro Mechanical Systems, 20-24 Jan 2013, Taipei, Taiwan. pp. 965-968. IEEE Robotics and Automation Society. ISBN 978-1-4673-5655-8
Legrain, A.B.H. and Janson, T.G. and Berenschot, J.W. and Krijnen, G.J.M. and Abelmann, L. and Tas, N.R. (2013) Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling. In: 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, 0710 April 2013, Suzhou, China. pp. 538-541. IEEE. ISBN 978-146736352-5
Pjetri, O. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2013) A crossed-wire 2-dimensional acoustic particle velocity sensor. In: IEEE Sensors 2013, 3-6 Nov 2013, Baltimore, USA. pp. 1-4. IEEE Computer Society. ISSN 1930-0395 ISBN 978-1-4673-4642-9
Pjetri, O. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2013) A novel two dimensional particle velocity sensor. In: International Congress on Acoustics, 02-07 jun 2013, Montreal, Canada. pp. 1-6. Acoustical Society of America. ISSN 1939-800X
Porter, B.F. and Abelmann, L. and Bhaskaran, H. (2013) Design parameters for voltage-controllable directed assembly of single nanoparticles. Nanotechnology, 24. 405304. ISSN 0957-4484 *** ISI Impact 3,573 ***
Schön, P.M. and Geerlings, Joël and Tas, N.R. and Sarajlic, E. (2013) AFM cantilever with in situ renewable mercury microelectrode. Analytical chemistry, 85 (19). pp. 8937-8942. ISSN 0003-2700 *** ISI Impact 5,886 ***
Sparreboom, W. and van de Geest, J. and Katerberg, M. and Postma, F. and Haneveld, J. and Groenesteijn, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Lötters, J.C. (2013) Compact mass flow meter based on a micro coriolis flow sensor. Micromachines, 4 (1). pp. 22-33. ISSN 2072-666X *** ISI Impact 1,295 ***
Svetovoy, V.B. and Sanders, R.G.P. and Elwenspoek, M.C. (2013) Transient nanobubbles in short-time electrolysis. Journal of physics. Condensed matter, 25 (18). 184002. ISSN 0953-8984 *** ISI Impact 2,209 ***
Syed Nawazuddin, M.B. (2013) Micromachined parallel plate structures for Casimir force measurement and optical modulation. PhD thesis, Univ. of Twente. ISBN 978-90-365-3568-7
Syed Nawazuddin, M.B. and de Boer, M.J. and Berenschot, J.W. and Ma, Kechun and Elwenspoek, M.C. and Wiegerink, R.J. (2013) Design, fabrication and characterization of a suspended plate mechano-optical modulator. In: 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 20-24 Jan 2013, Taipeh, Taiwan. pp. 560-563. IEEE. ISBN 978-1-4673-5655-8
Tijs, E.H.G. (2013) Study and development of an in situ acoustic absorption measurement method. PhD thesis, University of Twente. ISBN 978-90-365-3521-2
Vermeer, R. and Sarajlic, E. and Siekman, M.H. and Kawakatsu, H. and Fujita, H. and Tas, N.R. and Jansen, H.V. (2013) Electrostatically actuated double cantileverl AFM probe for high speed imaging. In: 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII, 16-20 June 2013, Barcelona, Spain. pp. 912-915. IEEE. ISBN 978-1-4673-5983-2
de Vries, Jeroen (2013) Energy barriers in patterned media. PhD thesis, Univ. of Twente. ISBN 978-90-365-0640-3
de Vries, Jeroen and Bolhuis, T. and Abelmann, L. (2013) Energy barrier versus switching field for patterned Co80Pt20 alloy and Co/Pt multilayer films Journal of applied physics, 17 (17B910). pp. 1-3. ISSN 0021-8979 *** ISI Impact 2,101 ***
Yagubizade, H. (2013) PZT-on-silicon RF-MEMS Lamb wave resonators and filters. PhD thesis, Univ. of Twente. ISBN 978-90-365-3594-6
Yagubizade, H. and Darvishi, M. and Chen, Yung-Yu and Nguyen, Minh Duc and Dekkers, J.M. and Wiegerink, R.J. and Elwenspoek, M.C. and Tas, N.R. (2013) Pulsed-laser deposited Pb(Zr0.52,Ti0.48)O3-on-silicon resonators with high-stopband rejection using feed-through cancellation Applied physics letters, 102 (6). 063509. ISSN 0003-6951 *** ISI Impact 3,142 ***
Yagubizade, H. and Darvishi, M. and Elwenspoek, M.C. and Tas, N.R. (2013) A 4th-order band-pass filter using differential readout of two in-phase actuated contour-mode resonators. Applied physics letters, 103 (17). 173517. ISSN 0003-6951 *** ISI Impact 3,142 ***

2012

Abdulla, S.M.C. and Kauppinen, L.J. and Krijnen, G.J.M. and de Ridder, R.M. (2012) Mechano-optical wavelength tuning in a photonic crystal microcavity with sub-1 V drive voltage. Optics letters, 37 (11). pp. 2010-2012. ISSN 0146-9592 *** ISI Impact 3,040 ***
Abdulla, S.M.C. and Yagubizade, H. and Krijnen, G.J.M. (2012) Analysis of resonance frequency and pull-in voltages of curled micro-bimorph cantilevers. Journal of micromechanics and microengineering, 22 (3). 035014. ISSN 0960-1317 *** ISI Impact 1,768 ***
Alink, L. and Groenland, J.P.J. and Abelmann, L. (2012) Determination of bit patterned media noise based on island perimeter fluctuations. In: Digests of the IEEE International Magnetics Conference, INTERMAG 2012, 7-11 May 2012, Vancouver. HT_01. IEEE Magnetics Society. ISBN not assigned
Alink, L. and Groenland, J.P.J. and de Vries, Jeroen and Abelmann, L. (2012) Determination of bit patterned media noise based on island perimeter fluctuations. IEEE transactions on magnetics, 48 (11). pp. 4574-4577. ISSN 0018-9464 ISBN not assigned *** ISI Impact 1,277 ***
Been, A.J. and Vermeer, R. and Woldering, L.A. and Abelmann, L. (2012) Effects on imaging by tilting electrostatic actuators in electron microscopy. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 Sep 2012, Ilmenau, Germany. B14. Ilmenau University of Technology. ISBN 978-3-938843-71-0
van den Beld, W.T.E. and de Weerd, E.L. and Abelmann, L. and Bomer, J.G. and van den Berg, A. and Eijkel, J.C.T. (2012) Microfluidic pump based on arrays of rotating magnetic microspheres. In: The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Oct 28 - Nov 1, 2012, Okinawa, Japan. pp. 1453-1455. microTAS. Chemical and Biological Microsytems Society. ISSN 1556-5904
Berenschot, J.W. and Burouni, N. and Schurink, B. and van Honschoten, J.W. and Sanders, R.G.P. and Truckenmüller, R.K. and Jansen, H.V. and Elwenspoek, M.C. and van Apeldoorn, A.A. and Tas, N.R. (2012) 3D Nanofabrication of Fluidic Components by Corner Lithography. Small, 8 (24). pp. 3823-3831. ISSN 1613-6810 *** ISI Impact 8,315 ***
Bernhardi, E.H. and Khan, M.R.H. and Roeloffzen, C.G.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2012) Photonic generation of stable microwave signals from a dual-wavelength Al2O3:Yb3+ distributed-feedback waveguide laser Optics letters, 37 (2). pp. 181-183. ISSN 0146-9592 *** ISI Impact 3,040 ***
Bernhardi, E.H. and Khan, M.R.H. and Roeloffzen, C.G.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2012) Optical generation of microwave signals with a dual-phase-shifted Al2O3:Yb3+ distributed-feedback laser In: Conference on Lasers and Electro-Optics, 6-11 May 2012, San José, California, USA. Paper JW2A.36. Optical Society of America. ISBN 978-1-55752-943-5
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2012) Stable microwave generation in a dual-phase-shifted Al2O3:Yb3+ distributed-feedback waveguide laser In: Advanced Solid-State Photonics - Semiconductor and Waveguide Lasers, 29 Jan - 03 Feb 2012, San Diego, California, USA. AM5A.6. Optical Society of America. ISBN 978-1-55752-933-6
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2012) Waveguide Bragg gratings for the realization of high-quality monolithic cavities. (Invited) In: Conference on Bragg Gratings, Photosensitivity and Poling in Glass Waveguides (BGPP 2012), 17-21 Jun 2012, Colorado Springs, CO, USA. BM3D.1. Optical Society of America. ISBN not assigned
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. and Khan, M.R.H. and Roeloffzen, C.G.H. (2012) Dual-wavelength Al2O3:Yb3+ distributed feedback waveguide laser for microwave signal generation In: 16th European Conference on Integrated Optics, ECIO 2012, 18-20 Apr 2012, Sitges/Barcelona, Spain. Paper 69. Insitut de Ciències Fotòniques. ISBN not assigned
Broer, W. and Palasantzas, G. and Knoester, J. and Svetovoy, V.B. (2012) Roughness correction to the Casimir force at short separations: Contact distance and extreme value statistics. Physical review B Condensed matter and materials physics, 85 (15). 155410. ISSN 1098-0121
Brookhuis, R.A. and Lammerink, T.S.J. and Wiegerink, R.J. and de Boer, M.J. and Elwenspoek, M.C. (2012) 3D force sensor for biomechanical applications. Sensors and actuators A (Physical), 182 (182). pp. 28-33. ISSN 0924-4247 *** ISI Impact 2,201 ***
Brookhuis, R.A. and Wiegerink, R.J. and Lammerink, T.S.J. and de Boer, M.J. (2012) Scalable six-axis force-torque sensor with a large range for biomechanical applications. In: Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on, 29 Jan - 2 Feb 2012, Paris, France. pp. 595-598. IEEE Computer Society. ISSN 1084-6999 ISBN 978-1-4673-0324-8
Burouni, N. and Berenschot, J.W. and Elwenspoek, M.C. and Tas, N.R. (2012) 3D Nanofabrication of components by repeated corner lithography: Self Aligned sub-50nm apertures. In: Proceedings of the 12th IEEE International Conference on Nanotechnology (IEEE- NANO), 20-23 August 2012, Birmingham, United Kingdom. IEEE. ISSN 1944-9399 ISBN 978-1-4673-2198-3
Burouni, N. and Sarajlic, E. and Siekman, M.H. and Abelmann, L. and Tas, N.R. (2012) Pyramidal nanowire tip for atomic force microscopy and thermal imaging. In: Proceedings of the 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, 5-8 March 2012, Kyoto, Japan. pp. 86-89. IEEE. ISBN 978-1-4673-1122-9
Casas, J. and Liu, Chang and Krijnen, G.J.M. (2012) Biomimetic Flow Sensors. In: Encyclopedia of Nanotechnology. Springer Verlag, Netherlands, pp. 264-276. ISBN 978-90-481-9750-7
Dagamseh, A.M.K. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2012) Towards a high-resolution flow camera using artificial hair sensor arrays for flow pattern observations. Bioinspiration & Biomimetics, 7 (4). 046009. ISSN 1748-3182 ISBN 978-90-365-3308-9 *** ISI Impact 2,891 ***
van Dalfsen, K. and van Wolferen, H.A.G.M. and Dijkstra, M. and Aravazhi, S. and Bernhardi, E.H. and García Blanco, S.M. and Pollnau, M. (2012) Towards integrated channel waveguide lasers in monoclinic double tungstates. In: Europhoton Conference, 26-31 Aug 2012, Stockholm, Sweden. Paper ThP.30. Europhysics Conference Abstract Volume 36 E. European Physical Society. ISBN 2-914771-78-9
David, C. and Claudel, P. and Lötters, J.C. (2012) Water flow calibration facility in France (1 ml/h to 10 000 ml/h). In: Proceedings of the 1st International Conference on Microfluidic Handling Systems, 10-12 Oct 2012, Enschede, The Netherlands. pp. 68-71. University of Twente. ISBN not assigned
Dekkers, M. and Boschker, H. and van Zalk, M. and Nazeer, H. and Houwman, E. and Rijnders, A.J.H.M. (2012) The significance of the piezoelectric coefficient d31,eff determined from cantilever structures Journal of micromechanics and microengineering, 23 (2). 025008. ISSN 0960-1317 *** ISI Impact 1,768 ***
Delalande, M.Y. and de Vries, Jeroen and Abelmann, L. and Lodder, J.C. (2012) Measurement of the nucleation and domain depinning field in a single Co/Pt multilayer dot by anomalous Hall effect. Journal of magnetism and magnetic materials, 324 (7). pp. 1277-1280. ISSN 0304-8853 *** ISI Impact 2,357 ***
Dijkstra, M.A. and Berenschot, J.W. and de Boer, M.J. and van der Linden, H.J. and Hankemeier, T. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. and Tas, N.R. (2012) Nano-slit electrospray emitters fabricated by a micro- to nanofluidic via technology. Microfluidics and nanofluidics, 13 (1). pp. 29-35. ISSN 1613-4982 *** ISI Impact 2,537 ***
Droogendijk, H. and Brookhuis, R.A. and de Boer, M.J. and Sanders, R.G.P. and Krijnen, G.J.M. (2012) Design and fabrication of a biomimetic gyroscope inspired by the fly's haltere. In: IEEE Sensors 2012, 28-31 Oct 2012, Taipei, Taiwan. pp. 1400-1403. IEEE. ISSN 1930-0395 ISBN 978-1-4577-1767-3
Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Dagamseh, A.M.K. and Wiegerink, R.J. and Krijnen, G.J.M. (2012) Improving the performance of biomimetic hair-flow sensors by electrostatic spring softening. Journal of micromechanics and microengineering, 22 (6). 065026. ISSN 0960-1317 *** ISI Impact 1,768 ***
Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Krijnen, G.J.M. (2012) Application of electro mechanical stiffness modulation in biomimetic hair flow sensors. In: 25th IEEE International Conference on Micro Electro Mechanical Systems, 29 Jan - 2 Feb 2012, Paris, France. pp. 531-534. IEEE Instrumentation & Measurement Society. ISSN 1084-6999 ISBN 978-1-4673-0324-8
Droogendijk, H. and Groenesteijn, J. and Haneveld, J. and Sanders, R.G.P. and Wiegerink, R.J. and Lammerink, T.S.J. and Lötters, J.C. and Krijnen, G.J.M. (2012) Parametric excitation of a micro Coriolis mass flow sensor. Applied physics letters, 101 (22). 223511. ISSN 0003-6951 *** ISI Impact 3,142 ***
Droogendijk, H. and Krijnen, G.J.M. (2012) Tunable sensor response by voltage-control in biomimetic hair flow sensors. In: 1st International Conference on Microfluidic Handling Systems, 10-12 Oct 2012, Enschede, The Netherlands. pp. 26-29. Twente University Press. ISBN not assigned
Droogendijk, H. and Krijnen, G.J.M. (2012) Tunable sensor response by voltage-control in biomimetic hair flow sensors. In: ICT.OPEN 2012, 22-23 Oct 2012, Rotterdam, The Netherlands. Netherlands Organisation for Scientific Research (NWO). ISBN 978-90-73461-80-2
Engelen, J.B.C. and de Boer, H.L. and Beekman, J.G. and Fortgens, L.C. and de Graaf, D.B. and Vocke, S. and Abelmann, L. (2012) The Micronium-A Musical MEMS instrument. Journal of Microelectromechanical Systems, 21 (2). pp. 262-269. ISSN 1057-7157 *** ISI Impact 1,939 ***
Geerlings, Joël and Sarajlic, E. and Berenschot, J.W. and Abelmann, L. and Tas, N.R. (2012) Electrospray deposition from fountain pen AFM probes. In: Proceedings of the 23rd Micromechanics and Microsystems Europe Workshop (MME 2012), 9-12 Sept 2012, Ilmenau, Germany. C19. Ilmenau University of Technology. ISBN 978-3-938843-71-0
Groen, M.S. and Brouwer, D.M. and Lötters, J.C. and Wiegerink, R.J. (2012) Towards a microvalve for proportional control of mass flow. In: 1st International Conference on Microfluidic Handling Systems, MFHS 2012, 10-12 Oct 2012, Enschede, The Netherlands. pp. 148-151. University of Twente. ISBN not assigned
Groen, M.S. and Brouwer, D.M. and Wiegerink, R.J. and Lötters, J.C. (2012) Design considerations for a micromachined proportional control valve. Micromachines, 3 (2). pp. 396-412. ISSN 2072-666X *** ISI Impact 1,295 ***
Groenesteijn, J. and de Boer, M.J. and Lammerink, T.S.J. and Lötters, J.C. and Wiegerink, R.J. (2012) Integrated wafer-through fluidic connection for surface channel technology. In: Proceedings of the 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 Sep 2012, Ilmenau, Germany. A03#. Verlag ISLE, Betriebsstätte des ISLE e.V.. ISBN 978-3-938843-71-0
Groenesteijn, J. and de Boer, M.J. and Lammerink, T.S.J. and Lötters, J.C. and Wiegerink, R.J. (2012) Wafer-through access trenches for surface channel technology. In: 1st International Conference on Microfluidic Handling Systems, 10-12 Oct 2012, Enschede, The Netherlands. University of Twente. ISBN not assigned
Groenesteijn, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Haneveld, J. and Lötters, J.C. (2012) Optimization of a micro Coriolis mass flow sensor using Lorentz force actuation. Sensors and actuators A (Physical), 186. pp. 48-53. ISSN 0924-4247 *** ISI Impact 2,201 ***
Hatakeyama, K. and Sarajlic, E. and Siekman, M.H. and Huijink, R. and Abelmann, L. (2012) Full silicon-nitride probes with corner lithography wireframes for scanning Hall probe microscopy. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 Sep 2012, Ilmenau, Germany. A13. Ilmenau University of Technology. ISBN 978-3-938843-71-0
Hoang, Thi Hanh (2012) Machining technologies for silicon-based nanochannels and some properties of aqueous solutions confined in these channels. PhD thesis, University of Twente. ISBN 978-90-365-3298-3
Hoang, Thi Hanh and Tong, Hien Duy and Segers-Nolten, I.M. and Tas, N.R. and Subramaniam, V. and Elwenspoek, M.C. (2012) Wafer-scale thin encapsulated two-dimensional nanochannels and its application toward visualization of single molecules. Journal of colloid and interface science, 367 (1). pp. 455-459. ISSN 0021-9797 *** ISI Impact 3,782 ***
Janssen, K.G.H. and Li, Jiajie and Hoang, Thi Hanh and Vulto, P. and van den Berg, R.J.B.H.N. and Overkleeft, H.S. and Eijkel, J.C.T. and Tas, N.R. and van der Linden, H.J. and Hankemeier, T. (2012) Limits of miniaturization: assessing ITP performance in sub-micron and nanochannels. Lab on a chip, 12 (16). pp. 2888-2893. ISSN 1473-0197 *** ISI Impact 5,586 ***
Khalil, I.S.M. and Abelmann, L. and Misra, S. (2012) Control System Design for Wireless Electromagnetic-Based Micromanipulation System. In: 31st Benelux meeting on Systems and Control, 29-29 May 2012, Heijen, The Netherlands. pp. 39-39. The 31st Benelux meeting on Systems and cotntrol. DISC. ISBN 978-94-6173-317-7
Khalil, I.S.M. and Keuning, J.D. and Abelmann, L. and Misra, S. (2012) Wireless magnetic-based control of paramagnetic microparticles. In: Proceedings of The Fourth IEEE RAS/EMBS International Conference on Biomedical Robotics and Biomechatronics, 24-27 June 2012, Rome, Italy . pp. 460-466. Proceedings of the IEEE RAS & EMBS International Conference on Biomedical Robotics and Biomechatronics (BioRob). IEEE Robotics and Automation Society. ISSN 2155-1774 ISBN 978-1-4577-1198-5
Khalil, I.S.M. and Metz, R.M.P. and Abelmann, L. and Misra, S. (2012) Interaction Force Estimation During Manipulation of Microparticles. In: Proceedings of the IEEE/RSJ International Conference on Intelligent Robots and Systems, 7-10 Oct 2012, Vilamoura, Algarve, Portugal. pp. 950-956. IEEE Xplore. IEEE Robotics and Automation Society. ISSN 2153-0858 ISBN 978-1-4673-1737-5
Koelmans, W.W. and Peters, T. and Berenschot, J.W. and de Boer, M.J. and Siekman, M.H. and Abelmann, L. (2012) Cantilever arrays with self-aligned nanotips of uniform height. Nanotechnology, 23 (13). pp. 135301-135309. ISSN 0957-4484 *** ISI Impact 3,573 ***
Kozhummal, R. and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Zacharias, M. and Elwenspoek, M.C. (2012) Fabrication of micron-sized tetrahedra by Si〈1 1 1〉 micromachining and retraction edge lithography. Journal of micromechanics and microengineering, 22 (8). 085032. ISSN 0960-1317 *** ISI Impact 1,768 ***
Kozhummal, R. and Yang, Yang and Güder, F. and Hartel, A. and Lu, Xiaoli and Kücükbayrak, U.M. and Mateo-Alonso, A. and Elwenspoek, M.C. and Zacharias, M. (2012) Homoepitaxial Branching: an unusual polymorph of Zinc Oxide Derived from seeded solution growth. ACS Nano, 6 (8). pp. 7133-7141. ISSN 1936-0851 *** ISI Impact 13,334 ***
Lötters, J.C. and Lammerink, T.S.J. and Groenesteijn, J. and Haneveld, J. and Wiegerink, R.J. (2012) Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades. Micromachines, 3 (1). pp. 194-203. ISSN 2072-666X *** ISI Impact 1,295 ***
Lötters, J.C. and Lammerink, T.S.J. and Haneveld, J. and Hageman, T.A.G. and Wiegerink, R.J. (2012) Fully integrated micro coriolis mass flow sensor operating at atmospheric pressure. Technisches Messen, 79 (1). pp. 4-9. ISSN 0171-8096 *** ISI Impact 0,179 ***
Lötters, J.C. and Lammerink, T.S.J. and Wiegerink, R.J. and Mouris, A.J. and Pap, M.G. and de Boer, M.J. and Sanders, R.G.P. (2012) Device and method for determining the combustion value of a fuel. Patent WO2013NL50956 (Application).
Nazeer, H. (2012) Thin films on cantilevers. PhD thesis, University of Twente. ISBN 978-90-365-3345-4
Pham, V.S. and Dijkstra, M. and Hollink, A.J.F. and de Ridder, R.M. and Krijnen, G.J.M. and Lambeck, P.V. and Pollnau, M. and Hoekstra, H.J.W.M. (2012) Grated waveguide optical cavity for sensing. In: 16th European Conference on Integrated Optics, ECIO 2012, 18-20 Apr 2012, Sitges/Barcelona, Spain. Paper 114. Insitut de Ciències Fotòniques. ISBN not assigned
Pjetri, O. and Wiegerink, R.J. and Jansen, H.V. and Krijnen, G.J.M. (2012) Improved dicing method for the microflown particle velocity sensor. In: 23rd Micromechanics And Microsystems Europe Workshop, 2012, 9-12 Sep 2012, Ilmenau, Germany. Ilmenau University of Technology. ISBN 978-3-938843-71-0
Sardan Sukas, O. and Yagubizade, H. and Berenschot, J.W. and de Boer, M.J. and Nguyen, Minh Duc and Abelmann, L. (2012) Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O3 thin film membranes In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 Sep 2012, Ilmenau, Germany. C9. Ilmenau University of Technology. ISBN 978-3-938843-71-0
Sebastian, A. and Shamsudhin, N. and Rothuizen, H. and Drechsler, U. and Koelmans, W.W. and Bhaskaran, H. and Quenzer, H.J. and Wagner, B. and Despont, M. (2012) Micro-cantilevers with AIN actuators and PtSi tips for multi-frequency atomic force microscopy. Review of scientific instruments, 83 (9). 096107. ISSN 0034-6748 *** ISI Impact 1,336 ***
Shao, Xiaoying and Alink, L. and Groenland, J.P.J. and Abelmann, L. and Slump, C.H. (2012) A novel decoding scheme for product codes in bit patterned media. In: Digests of the IEEE International Magnetics Conference, 7-11 May, 2012, Vancouver, Canada. HT_15. IEEE Magnetics Society. ISBN not assigned
Sparreboom, W. and Katerberg, M.R. and Lammerink, T.S.J. and Postma, F.M. and Haneveld, J. and Groenesteijn, J. and Wiegerink, R.J. and Lötters, J.C. (2012) Compact mass flow meter based on a micro Coriolis flow sensor. In: Proceedings of the 1st International Conference on Microfluidic Handling Systems, 10-12 Oct 2012, Enschede, Netherlands. pp. 30-33. University of Twente. ISBN not assigned
Svetovoy, V.B. and Sanders, R.G.P. and Lammerink, T.S.J. and Elwenspoek, M.C. (2012) Combustion of hydrogen-oxygen mixture in nanobubbles. In: Nonequilibrium processes in plasma, combustion, and atmosphere. Torus Press, Moscow, pp. 201-208. ISBN 978-5-94588-121-1
Svetovoy, V.B. and van Zwol, P. J. and Chevrier, J. (2012) Plasmon enhanced near-field radiative heat transfer for graphene covered dielectrics. Physical review B Condensed matter and materials physics, 85 (15). 155418. ISSN 1098-0121
Syed Nawazuddin, M.B. and Lammerink, T.S.J. and Berenschot, J.W. and de Boer, M.J. and Ma, Kechun and Elwenspoek, M.C. and Wiegerink, R.J. (2012) Towards a Casimir force measurement between micromachined parallel plate structures. Challenges, 3 (2). pp. 261-277. ISSN 2078-1547
Torrichelli, G. and van Zwol, P. J. and Shpak, O. and Palasantzas, G. and Svetovoy, V.B. and Binns, C. and Kooi, B. J. and Jost, P. and Wittig, M. (2012) Casimir Force Contrast Between Amorphous and Crystalline Phases of AIST. Advanced functional materials, 22 (17). pp. 3729-3736. ISSN 1616-301X *** ISI Impact 11,382 ***
Veltink, P.H. and Kortier, H.G. and Schepers, H.M. and Sluiter, V.IJ. and Brookhuis, R.A. and Lammerink, T.S.J. and Wiegerink, R.J. (2012) PowerGlove, Concepts and current results. In: Proceedings of XII International Symposium on 3D Analysis of Human Movement, DAHM 2012, 18-20 July 2012, Bologna, Italy. pp. 42-45. Universita di Bologna. ISBN not assigned
de Vries, Jeroen and Abelmann, L. and Manz, A and Elwenspoek, M.C. (2012) Tungsten-siliconnitride medium for Mega- to Gigayear data storage. In: Proceedings of the 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 Sep 2012, Ilmenau, Germany. Ilmenau University of Technology. ISBN 978-3-938843-71-0
de Vries, Jeroen and Abelmann, L. and Manz, Andreas and Elwenspoek, M.C. (2012) Human Document Project. In: Jaarboek E.T.S.V. Scintilla, Memories 2010-2011. E.T.S.V. Scintilla, Enschede, Netherlands, pp. 64-66. ISBN not assigned
de Vries, Jeroen and Bolhuis, T. and van Wolferen, H.A.G.M. and Siekman, M.H. and Abelmann, L. (2012) Thermally induced switching field distribution of sub-micron CoPt alloy and Co/Pt multilayer islands. In: Digests of the IEEE International Magnetics Conference, INTERMAG 2012, 7-11 May 2012, Vancouver, Canada. IEEE Magnetics Society. ISBN not assigned
Wiegerink, R.J. and Lammerink, T.S.J. and Groenesteijn, J. and Dijkstra, M.A. and Lötters, J.C. (2012) Micro Coriolis mass flow sensor for chemical micropropulsion systems. In: 1st International Conference on Microfluidic Handling Systems, MFHS 2012, 10-12 Oct 2012, Enschede, The Netherlands. pp. 107-110. Universiteit Twente. ISBN not assigned
Wiegerink, R.J. and Lammerink, T.S.J. and Groenesteijn, J. and Dijkstra, P.J. and Lötters, J.C. (2012) Micro Coriolis mass flow sensor for chemical micropropulsion systems. In: 8th ESA Round Table on Micro and Nano Technologies for Space Applications, 15-18 Oct 2012, Noordwijk, The Netherlands. ESCIES. ISBN not assigned
Wiegerink, R.J. and Lötters, J.C. and Lammerink, T.S.J. and Pap, M.G. and Mouris, A.J. (2012) The application of micro- and nanofluidics in Wobbe index meters. In: Proceedings of the 1st International Conference on Microfluidic Handling Systems, 10-12 October 2012, Enschede, The Netherlands. pp. 166-167. University of Twente. ISBN not assigned
Yagubizade, H. and Younis, M.I. (2012) The Effect of Squeeze-Film Damping on the Shock Response of Clamped-Clamped Microbeams. Journal of Dynamic Systems, Measurement and Control, 134 (1). 011017. ISSN 0022-0434 *** ISI Impact 0,975 ***
Yamahata, C. and Stranczl, M. and Sarajlic, E. and Krijnen, G.J.M. and Gijs, M.A.M. (2012) Temporally aliased video microscopy: an undersampling method for in-plane modal analysis of microelectromechanical systems. Journal of microelectromechanical systems, 21 (4). pp. 934-944. ISSN 1057-7157 *** ISI Impact 1,939 ***

2011

Abdulla, S.M.C. (2011) Integration of Micro-cantilevers with Photonic Structures for Mechano-optical Wavelength Selective Devices. PhD thesis, University of Twente. ISBN 978-90-365-3176-4
Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and Berenschot, J.W. and de Boer, M.J. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Mechano-optical switching in a mems integrated photonic crystal slab waveguide. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January, 2011, Cancun, Mexico. pp. 9-12. IEEE Micro Electro Mechanical Systems. ISBN 978-1-4244-9633-4
Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and Jansen, H.V. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever. Optics express, 19 (17). pp. 15864-15878. ISSN 1094-4087 *** ISI Impact 3,148 ***
Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter. Journal of micromechanics and microengineering, 21 (7). 0740041. ISSN 0960-1317 *** ISI Impact 1,768 ***
Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning. Journal of micromechanics and microengineering, 21 (12). 125010. ISSN 0960-1317 *** ISI Impact 1,768 ***
Abdulla, S.M.C. and Kauppinen, L.J. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Integrated self-aligned tips for dispersion tuning in a photonic crystal micro-cavity. In: 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11, 5-9 June 2011, Beijing. China. pp. 2534-2537. IEEE Photonics Society. ISBN 978-1-4577-0156-6
Abelmann, L. (2011) The 21st MicroMechanics Europe Workshop (MME 2010). Journal of micromechanics and microengineering, 21 (7). pp. 070201-070202. ISSN 0960-1317 *** ISI Impact 1,768 ***
Alink, L. and Marsman, G.H. and Woldering, L.A. and Abelmann, L. (2011) Simulating three dimensional self-assembly of shape modified particles using magnetic dipolar forces. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 Jun 2011, Tonsberg, Norway. pp. 254-257. Department of micro and nano systems technology, Vestfold University College . ISBN 978-82-7860-224-9
Bernhardi, E.H. and Lu, Qi and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) Monolithic Distributed Bragg Reflector Cavities in Al2O3 with Quality Factors Exceeding 106 Photonics and Nanostructures, 9 (3). pp. 225-234. ISSN 1569-4410 *** ISI Impact 1,505 ***
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) Highly efficient, low-threshold monolithic distributed-Bragg-reflector channel waveguide laser in Al2O3:Yb3+ Optics letters, 36 (5). pp. 603-605. ISSN 0146-9592 *** ISI Impact 3,040 ***
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) High-Q monolithic distributed Bragg reflector cavities in Al2O3 channel waveguides In: Conference on Lasers and Electro-Optics, CLEO, 1-6 May 2011, Baltimore, Maryland, USA. CME4. Optical Society of America. ISBN 978-1-55752-910-7
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) Distributed Bragg reflector high-Q cavities and lasers in Al2O3 on silicon In: Conference on Lasers and Electro-Optics, CLEO/Europe, 22-26 May 2011, Munich, Germany. Paper CE5.2. Optical Society of America. ISBN 978-1-4577-0532-8
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) Distributed feedback channel waveguide lasers in erbium- and ytterbium-doped Al2O3:Er3+ on silicon In: Conference on Lasers and Electro-Optics, CLEO Europe, 22-26 May 2011, Munich, Germany. Paper CJ10.4. Optical Society of America. ISBN 978-1-4577-0532-8
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) Monolithic distributed Bragg reflector cavities in Al2O3 with quality factors exceeding one million In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia. Paper 4240-CT-6. Conference Handbook. Australian Optical Society. ISBN 978-0-9775657-7-1
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) Ultra-narrow-linewidth distributed feedback lasers in Al2O3:Er3+ and Al2O3:Yb3+ In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia. Paper 5420. Conference Handbook. Australian Optical Society. ISBN 978-0-9775657-7-1
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) Efficient and ultra-narrow-linewidth integrated waveguide lasers in Al2O3:Yb and Al2O3:Er (Invited) In: International Laser Physics Workshop, LPHYS 2011, 11-15 July 2011, Sarajevo, Bosnia and Herzegovina. Paper 4.5.3. L'Phys'11 Program. General Physics Institute, Moscow. ISBN not assigned
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) High-Q distributed-Bragg-grating laser cavities. In: 16th International Conference on Luminescence & Optical Sperctroscopy of Condensed Matter, 26 Jun - 01 Jul 2011, Ann Arbor, MI. Paper MI2-p.12. Conference Program. University of Michigan. ISBN not assigned
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) High-Quality Monolithic Distributed Bragg Reflector Cavities and Lasers in Alumina Channel Waveguides. In: Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter, 1-2 December 2011, Ghent, Belgium. pp. 41-44. Proceedings of the 2011 Anual Symposium of the IEEE Photonics Benelux Chapter. Department of Information Technology, Ghent University. ISBN 978-90-76546-00-1
Broer, W. and Palasantzas, G. and Knoester, J. and Svetovoy, V.B. (2011) Roughness correction to the Casimir force beyond perturbation theory. A Letters Journal Exploring the Frontiers of Physics, 95 (3). pp. 1-6. ISSN 0295-5075 *** ISI Impact 1,963 ***
Brookhuis, R.A. and Lammerink, T.S.J. and Wiegerink, R.J. and de Boer, M.J. and Elwenspoek, M.C. (2011) Force sensor for measuring power transfer between the human body and the environment. In: 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011), 5-9 June 2011, Beijing, China. pp. 2042-2045. IEEE. ISBN 978-1-4577-0157-3
Burouni, N. and Berenschot, J.W. and Elwenspoek, M.C. and Tas, N.R. (2011) Dimensional Control in Corner Lithography for Wafer-Scale Fabrication of Nano-Apertures. In: 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, 20-23 Feb 2011, Kaohsiung, Taiwan. pp. 940-943. IEEE-NEMS 2011. ISBN 978-1-61284-775-7
Chapuis, Y.-A. and Jalabert, L. and Sarajlic, E. and Vermeer, R. and Collard, D. and Fujita, H. (2011) Polymer membrane-based thermo-pneumatic actuation for distributed air-jet planar micromanipulator. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico. pp. 141-144. IEEE Micro Electro Mechanical Systems. ISBN 978-1-4244-9633-4
Dagamseh, A.M.K. (2011) Bio-inspired Hair Flow Sensor Arrays: From Nature to MEMS. PhD thesis, University of Twente. ISBN 978-90-365-3308-9
Dagamseh, A.M.K. and Krijnen, G.J.M. (2011) Arrays of biomimetic hair flow-sensor dedicated for measuring flow patterns. In: International Congress on Flow Sensing in Air and Water, 17-20 July 2011, Bonn, Germany. University of Bonn. ISBN not assigned
Dagamseh, A.M.K. and Lammerink, T.S.J. and Sanders, R.G.P. and Wiegerink, R.J. and Krijnen, G.J.M. (2011) Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition. In: 24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011), 23-27 January 2011, Cancun, Mexico. pp. 648-651. IEEE. ISBN 978-1-4244-9633-4
Dagamseh, A.M.K. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2011) Advancements in Biomimetic Hair Flow-Sensor Arrays. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tønsberg, Norway. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9
Dagamseh, A.M.K. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2011) Artificial lateral-line system for imaging dipole sources using Beamforming techniques. In: 25th Eurosensors conference (Eurosensors 2011), 4-7 Sep. 2011, Athens, Greece. Elsevier. ISSN 1877-7058
Droogendijk, H. and de Boer, M.J. and Krijnen, G.J.M. (2011) Stochastic Resonance in an Electrostatically Controlled MEMS-slider. In: Sense of Contact 13, 7 Apr 2011, Zeist, The Netherlands. Technology Foundation STW. ISBN not assigned
Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Krijnen, G.J.M. (2011) Non-degenerate parametric amplification and filtering in biomimetic hair flow sensors. In: 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11, 5-9 Jun 2011, Beijing, China. pp. 2038-2041. IEEE Circuits & Systems Society. ISBN 978-1-4577-0157-3
Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Krijnen, G.J.M. (2011) Non-resonant parametric amplification in biomimetic hair flow sensors: Selective gain and tunable filtering. Applied Physics Letters, 99 (21). 213503. ISSN 0003-6951 *** ISI Impact 3,142 ***
Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Siebelder, O.G. and Krijnen, G.J.M. (2011) Lowering the sensory threshold and enhancing the responsivity of biomimetic hair flow sensors by electrostatic spring softening. In: IEEE Sensors 2011, 28-31 Oct 2011, Limerick, Ireland. pp. 829-832. IEEE. ISSN 1930-0395 ISBN 978-1-4244-9290-9
Droogendijk, H. and Dagamseh, A.M.K. and Yntema, D.R. and Sanders, R.G.P. and Krijnen, G.J.M. (2011) On the use of various oscillatory air flow fields for characterization of biomimetic hair flow sensors. In: Flow Sensing in Air and Water, 17-20 Jul 2011, Bonn, Germany. pp. 62-62. University of Bonn. ISBN not assigned
Droogendijk, H. and Dagamseh, A.M.K. and Yntema, D.R. and Sanders, R.G.P. and Krijnen, G.J.M. (2011) On the Use of Various Oscillatory Air Flow Fields for Characterization of Biomimetic Hair Flow Sensors. In: ICT.OPEN 2011, 14-15 Nov 2011, Veldhoven, The Netherlands. Netherlands Organisation for Scientfic Research (NWO). ISBN 978-90-73461-99-4
Elwenspoek, M.C. (2011) Long-time data storage: relevant time scales. Challenges, 2 (1). pp. 19-36. ISSN 2078-1547
Elwenspoek, M.C. (2011) Counterfactual thinking in physics. In: Counterfactual Thinking - Counterfactual Writing. Linguae & Litterae 12. De Gruyter, Berlin, Germany, pp. 62-80. ISBN 978-3-11-026866-9
Engelen, J.B.C. (2011) Optimization of Comb-Drive Actuators [Nanopositioners for probe-based data storage and musical MEMS]. PhD thesis, University of Twente. ISBN 978-90-365-3120-7
Gemelli, M. and Abelmann, L. and Engelen, J.B.C. and Khatib, M.G. and Koelmans, W.W. and Zaboronski, O. (2011) Probe Storage. In: Memory mass storage. Springer Verlag, Berlin Heidelberg, pp. 99-167. ISBN 978-3-642-14751-7
Groenesteijn, J. and Lammerink, T.S.J. and Lötters, J.C. and Haneveld, J. and Wiegerink, R.J. (2011) Miniaturization of a micro coriolis mass flow sensor with lorentz actuation. In: Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011, 19-22 Jun 2011, Toensberg, Noorwegen. pp. 1-4. Micromechanics and Micro systems Europe . ISBN 978-82-7860-224-9
Groenesteijn, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Haneveld, J. and Lötters, J.C. (2011) Optimization of a micro Coriolis mass flow sensor. In: Proceedings Eurosensors XXV, 4-7 sep 2011, Athens, Greece. pp. 783-786. Procedia Engineering 25. Elsevier. ISSN 1877-7058
Groenesteijn, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Haneveld, J. and Lötters, J.C. (2011) Optimization of the Lorentz Force Actuation for a micro Coriolis mass flow sensor. In: Netherlands MicroNano Conference 2011, 15-16 Nov 2011, Ede, The Netherlands. pp. 1-1. MicroNano Conference. ISBN not assigned
Hoang, Thi Hanh and Segers-Nolten , I.M. and Tas, N.R. and van Honschoten, J.W. and Subramaniam, V. and Elwenspoek, M.C. (2011) Analysis of single quantum-dot mobility inside 1D nanochannel devices. Nanotechnology, 22 (27). 275201. ISSN 0957-4484 *** ISI Impact 3,573 ***
van Honschoten, J.W. and Jong, H.W. and Koelmans, W.W. and Parnell, T.P. and Zaboronski, O. (2011) Information storage and retrieval for probe storage using optical diffraction patterns. Journal of applied physics, 110 (104309). pp. 1-14. ISSN 0021-8979 *** ISI Impact 2,101 ***
van Honschoten, J.W. and Legrain, A.B.H. and Berenschot, J.W. and Abelmann, L. and Tas, N.R. (2011) Micro-assembly of three dimensional tetrahedra by capillary forces. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 Jan 2011, Cancun, Mexico. pp. 288-291. IEEE Robotics and Automation Society. ISBN 978-1-4244-9633-4
Iannuzzi, D. and Deladi, S. and Elwenspoek, M.C. (2011) Optical device comprising a cantilever and method of fabrication and use thereof. Patent US7916306 (Assigned).
Izadi, N. (2011) Bio-inspired MEMS Aquatic Flow Sensor Arrays. PhD thesis, University of Twente. ISBN 978-90-365-3140-5
Izadi, N. and Krijnen, G.J.M. (2011) Design and fabrication process for artificial lateral line sensors. In: Frontiers in Sensing : From Biology to Engineering. Springer Verlag, Wien, pp. 405-421. ISBN 978-3-211-99748-2
Jaganatharaja, R.K. and Droogendijk, H. and Vats, S. and Hagedoorn, B. and Bruinink, C.M. and Krijnen, G.J.M. (2011) Unraveling the viscosity-mediated coupling effect in biomimetic hair sensor arrays. In: 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), 23-27 Jan 2011, Cancun, Mexico. pp. 652-655. IEEE. ISBN 978-1-4244-9633-4
Kauppinen, L.J. and Abdulla, S.M.C. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and Krijnen, G.J.M. and Pollnau, M. and de Ridder, R.M. (2011) Micromechanically tuned ring resonator in silicon on insulator. Optics letters, 36 (7). pp. 1047-1049. ISSN 0146-9592 *** ISI Impact 3,040 ***
Kauppinen, L.J. and Abdulla, S.M.C. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and Krijnen, G.J.M. and Pollnau, M. and de Ridder, R.M. (2011) Micromechanically tuned ring resonator in silicon on insulator. (Invited) In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia. Paper 4240-IT. Conference Handbook. Australian Optical Society. ISBN 978-0-9775657-7-1
Kauppinen, L.J. and Abdulla, S.M.C. and Krijnen, G.J.M. and Pollnau, M. and de Ridder, R.M. (2011) Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever. In: Conference on Lasers and Electro-Optics, CLEO/Europe, 22-26 May 2011, Munich, Germany. Paper CE5.1. Online Conference Digest. Optical Society of America. ISBN 978-1-4577-0532-8
Keuning, J.D. and de Vries, Jeroen and Abelmann, L. and Misra, S. (2011) Image-based magnetic control of paramagnetic microparticles in water. In: IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS), 25-30 September 2011, San Francisco, USA. pp. 421-426. IEEE Robotics and Automation Society. ISSN 2153-0858
Khatib, M.G. (2011) Performance Evaluation of Three Architectural Variants for Multi-sled MEMS Storage. In: IEEE 19th International Symposium on Modeling, Analysis & Simulation of Computer and Telecommunication Systems (MASCOTS), 25-27 July 2011, Singapore. pp. 217-226. IEEE Computer Society. ISBN 978-1-4577-0468-0
Khatib, M.G. and Abelmann, L. (2011) Buffering Implications for the Design Space of Streaming MEMS Storage. In: Proceedings of Design, Automation & Test in Europe (DATE'11), 14-18 Mar 2011, Grenoble. pp. 253-256. ACM. ISBN 978-3-9810801-7-9
Koelmans, W.W. (2011) Parallel Probe Readout. PhD thesis, University of Twente. ISBN 978-90-365-3192-4
Koelmans, W.W. and Sebastian, A. and Abelmann, L. and Despont, M. and Pozidis, H. (2011) Force modulation for enhanced nanoscale electrical sensing. Nanotechnology, 22 (25). pp. 1-9. ISSN 0957-4484 *** ISI Impact 3,573 ***
Kottumakulal Jaganatharaja, R. (2011) Cricket Inspired Flow-Sensor Arrays. PhD thesis, University of Twente. ISBN 978-90-365-3215-0
Krijnen, B. and Hogervorst, R. and van Dijk, J.W. and Engelen, J.B.C. and Woldering, L.A. and Brouwer, D.M. and Abelmann, L. and Soemers, H.M.J.R. (2011) A Thermal displacement sensor in MEMS [Towards accurate small-scale manipulation]. Mikroniek, 51 (4). pp. 5-11. ISSN 0026-3699
Krijnen, B. and Hogervorst, R.P. and van Dijk, J.W. and Engelen, J.B.C. and Woldering, L.A. and Brouwer, D.M. and Abelmann, L. and Soemers, H.M.J.R. (2011) A single-mask thermal displacement sensor in MEMS. Journal of micromechanics and microengineering, 21 (7). pp. 074007-074019. ISSN 0960-1317 *** ISI Impact 1,768 ***
Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. and Wiegerink, R.J. (2011) Flowmeter. Patent US7895905 (Assigned).
Lammerink, T.S.J. and Lötters, J.C. and Wiegerink, R.J. and Groenesteijn, J. and Haneveld, J. (2011) Single chip flow sensing system with a dynamic flow range of more than 4 decades. In: Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 June, 2011, Beijing, China. pp. 890-893. IEEE . ISBN 978-1-4577-0157-3
Lötters, J.C. and Lammerink, T.S.J. and Groenesteijn, J. and Haneveld, J. and Wiegerink, R.J. (2011) Integrated thermal and micro Coriolis flow sensing system with a dynamic flow range of more than 4 decades. In: Netherlands MicroNano Conference 2011, 15-16 Nov 2011, Ede, The Netherlands. pp. 1-1. MicroNano Conference. ISBN not assigned
Legrain, A.B.H. and Berenschot, J.W. and Sanders, R.G.P. and Ma, Kechun and Tas, N.R. and Abelmann, L. (2011) Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 250-253. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9
Nazeer, H. and Nguyen, Minh Duc and Rijnders, A.J.H.M. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2011) Pulsed laser deposited Pb(Zr,Ti)O3 thin films with excellent piezoelectric and mechanical properties In: Proceedings of the the 20th IEEE International Symposium on Applications of Ferroelectrics, International Symposium on Piezoresponse Force Microscopy & Nanoscale Phenomena in Polar Materials , 24-27 Jul 2011, Vancouver, Canada. Organisation Committee ISAF-PFM 2011. ISBN not assigned
Nazeer, H. and Nguyen, Minh Duc and Woldering, L.A. and Abelmann, L. and Rijnders, A.J.H.M. and Elwenspoek, M.C. (2011) Determination of the Young's modulus of pulsed laser deposited epitaxial PZT thin films. Journal of micromechanics and microengineering, 21 (7). pp. 074008-074014. ISSN 0960-1317 *** ISI Impact 1,768 ***
Nazeer, H. and Nguyen, Minh Duc and Woldering, L.A. and Rijnders, A.J.H.M. and Elwenspoek, M.C. and Abelmann, L. (2011) Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O3 thin films In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 238-241. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9
Nazeer, H. and Woldering, L.A. and Abelmann, L. and Nguyen, Minh Duc and Rijnders, A.J.H.M. and Elwenspoek, M.C. (2011) Influence of silicon orientation and cantilever undercut on the determination of the Young’s modulus of thin films. Microelectronic engineering, 88 (8). pp. 2345-2348. ISSN 0167-9317 *** ISI Impact 1,277 ***
Nguyen, Minh Duc and Dekkers, M. and van Zalk, M. and Broekmaat, J. and Janssens, A. and Nazeer, H. and Blank, D.H.A. and Rijnders, D. (2011) Large-area pulsed laser deposition and assembly processes for pierzoelectric MEMS devices based on all-oxide LaNiO3/Pb(Zr,Ti)O3/LaNiO3 thin films In: Proceedings of the International Conference on Materials for Advanced Tehcnologies, ICMAT 2011, 26 Jun - 1 Jul 2011, Suntec, Singapore. Organisation Committee of the ICMAT 2011. ISBN not assigned
Pham, V.S. and Dijkstra, M. and Hollink, A.J.F. and de Ridder, R.M. and van Wolferen, H.A.G.M. and Krijnen, G.J.M. and Pollnau, M. and Hoekstra, H.J.W.M. (2011) Grated waveguide cavity for label-free protein and mechano-optical gas sensing. In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia. Paper 2250-CT-7. Conference Handbook. Australian Optical Society. ISBN 978-0-9775657-7-1
Pham, V.S. and Dijkstra, M. and van Wolferen, H.A.G.M. and Pollnau, M. and Krijnen, G.J.M. and Hoekstra, H.J.W.M. (2011) A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide In: Conference on Lasers and Electro-Optics, CLEO, 1-6 May 2011, Baltimore, Maryland, USA. CThQ4. Optical Society of America. ISBN 978-1-55752-910-7
Pham, V.S. and Dijkstra, M. and van Wolferen, H.A.G.M. and Pollnau, M. and Krijnen, G.J.M. and Hoekstra, H.J.W.M. (2011) Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide. Optics letters, 36 (15). pp. 3003-3005. ISSN 0146-9592 *** ISI Impact 3,040 ***
Pham, V.S. and Dijkstra, M. and van Wolferen, H.A.G.M. and Pollnau, M. and Krijnen, G.J.M. and Hoekstra, H.J.W.M. (2011) A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide In: Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter, 1-2 December 2011, Ghent, Belgium. pp. 61-64. Department of Information Technology, Ghent University. ISBN 978-90-76546-00-1
Pham, V.S. and Kauppinen, L.J. and Dijkstra, M. and van Wolferen, H.A.G.M. and de Ridder, R.M. and Hoekstra, H.J.W.M. (2011) Read-Out of Cantilever Bending With a Grated Waveguide Optical Cavity. IEEE photonics technology letters, 23 (4). pp. 215-217. ISSN 1041-1135 *** ISI Impact 1,945 ***
Pjetri, O. and Koelmans, W.W. and Abelmann, L. and Siekman, M.H. and Elwenspoek, M.C. (2011) Using diffraction to detect deflection of the cantilevers in an array. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 278-281. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9
Rottenberg, X. and Jansen, H.V. and Tilmans, H.A.C. and De Raedt, W. (2011) Switchable capacitor. Patent EP1398811 (Assigned).
Sarajlic, E. and Siekman, M.H. and Fujita, H. and Abelmann, L. and Tas, N.R. (2011) A novel electrostatically actuated AFM probe for vibro-flexural mode operation. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 Jan 2011, Cancun, Mexico. pp. 537-540. IEEE. ISBN 978-1-4244-9633-4
Sardan Sukas, O. and Berenschot, J.W. and de Boer, M.J. and Nguyen, Minh Duc and van Zalk, M. and Abelmann, L. (2011) Towards in-situ tem analysis of PLD Pb(Zr,Ti)O3 thin film membranes In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 287-290. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9
Sengo, G. and van Wolferen, H.A.G.M. and Driessen, A. (2011) Optimized Deep UV Curing Process for Metal-Free Dry-Etching of Critical Integrated Optical Devices. Journal of the Electrochemical Society, 158 (10). H1084-H1089. ISSN 0013-4651 *** ISI Impact 3,014 ***
Shao, Xiaoying and Alink, L. and Groenland, J.P.J. and Abelmann, L. and Slump, C.H. (2011) A Simple Two-Dimensional Coding Scheme for Bit Patterned Media. IEEE transactions on magnetics, 47 (10). pp. 2559-2562. ISSN 0018-9464 *** ISI Impact 1,277 ***
Shao, Xiaoying and Alink, L. and Groenland, J.P.J. and Abelmann, L. and Slump, C.H. (2011) A Simple Two-Dimensional Coding Scheme for Bit Patterned Media. In: Digests of the IEEE International Magnetics Conference, 25-29 April 2011, Taipei, Taiwan. IEEE Magnetics Society. ISBN not assigned
Stranczl, M. and Sarajlic, E. and Krijnen, G.J.M. and Fujita, H. and Gijs, M.A.M. and Yamahata, C. (2011) Modal analysis and modeling of a frictionless electrostatic rotary stepper micromotor. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, 23-27 January, 2011, Cancun, Mexico. pp. 1257-1260. IEEE Micro Electro Mechanical Systems. ISBN 978-1-4244-9633-4
Svetovoy, V.B. and Moktadir, Z. and Elwenspoek, M.C. and Mizuta, H. (2011) Tailoring the thermal Casimir force with graphene. EPL: A Letters Journal Exploring the Frontiers of Physics, 96 (1). 14006. ISSN 0295-5075 *** ISI Impact 1,963 ***
Svetovoy, V.B. and Sanders, R.G.P. and Lammerink, T.S.J. and Elwenspoek, M.C. (2011) Combustion of hydrogen-oxygen mixture in electrochemically generated nanobubbles. Physical review E Statistical, nonlinear, and soft matter physics, 84 (3). 035302. ISSN 1539-3755
Syed Nawazuddin, M.B. and Lammerink, T.S.J. and Wiegerink, R.J. and Berenschot, J.W. and de Boer, M.J. and Elwenspoek, M.C. (2011) Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance. In: Proceedings of rthe 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 Jun 2011, Beijing, China. pp. 434-437. IEEE Electron Devices Society. ISBN 978-1-4577-0157-3
Vermeer, R. and Woldering, L.A. and Abelmann, L. (2011) Effect of electric fields generated by microactuators on the imaging in electron microscopy. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 222-225. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9
Volker, A.W.F. and Blokland, H. and Velthuis, J.F.M. and Lötters, J.C. (2011) Fluid flow meter using thermal tracers. Patent EP2100105 (Assigned).
de Vries, Jeroen and Delalande, M.Y. and Abelmann, L. and Lodder, J.C. (2011) Measurement of the nucleation and propagation field in a single Co/Pt multilayer dot by anomalous Hall effect. In: Digests of the IEEE International Magnetics Conference, INTERMAG, 25-29 April 2011, Taipei, Taiwan. BE_01. IEEE Magnetics Society. ISBN not assigned
de Vries, Jeroen and Keuning, J.D. and Zondervan, L. and Misra, S. and Abelmann, L. (2011) Image-based magnetic control of self-propelling catalytic micro motors. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 234-237. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9
Wiegerink, R.J. and Lammerink, T.S.J. and Haneveld, J. and Hageman, T.A.G. and Lötters, J.C. (2011) Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 Jan 2011, Cancun, Mexico. pp. 1135-1138. IEEE . ISBN 978-1-4244-9633-4
Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2011) Predicted photonic band gaps in diamond-lattice crystals built from silicon truncated tetrahedrons. Journal of applied physics, 110 (4). pp. 043107-043114. ISSN 0021-8979 *** ISI Impact 2,101 ***
van Wolferen, H.A.G.M. and Abelmann, L. (2011) Laser Interference Lithography. In: Lithography: Principles, Processes and Materials. Nova Publishers, Hauppauge NY, USA, pp. 133-148. ISBN 978-1-61122-123-7
Yamahata, C. and Sarajlic, E. and Stranczl, M. and Krijnen, G.J.M. and Gijs, M.A.M. (2011) Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images. In: 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11, 5-9 June 2011, Beijing, China. pp. 1697-1700. IEEE Photonics Society. ISBN 978-1-4577-0156-6
van Zwol, P.J. and Svetovoy, V.B. and Palasantzas, G. (2011) Characterization of optical properties and surface roughness profiles: The casimir force between real materials. In: Casimir Physics. Lecture Notes in Physics 834. Springer Verlag, London, pp. 311-343. ISBN 978-3-642-20288-9

2010

Abelmann, L. and Groenland, J.P.J. and van Honschoten, J.W. and Verputten, H.H.J., ed. (2010) MME2010 21st Micromechanics and Micro systems Europe Workshop : Abstracts. University of Twente, Transducers Science and Technology, Enschede, The Netherlands. ISBN 978-90-81673716
Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and de Ridder, R.M. and Krijnen, G.J.M. (2010) Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides. In: 21st Micromechanics and Micro systems Europe Workshop (MME2010), 26-29 Sept 2010, Enschede, the Netherlands. pp. 120-123. University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science. ISBN 978-90-81673716
Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and de Ridder, R.M. and Krijnen, G.J.M. (2010) Mechanical tuning of optical race-track ring resonators. Procedia Engineering, 5. pp. 424-427. ISSN 1877-7058
Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and de Ridder, R.M. and Krijnen, G.J.M. (2010) Micro bimorph cantilever switches for tuning integrated optical systems. In: The Sense of Contact 12, 8 Apr 2010, Zeist, The Netherlands. pp. 1-2. FHI Federatie Van Technologiebranches. ISBN 978-90-74702-56-0
Abelmann, L. (2010) Magnetic Force Microscopy. In: Encyclopedia of Spectroscopy and Spectrometry. Elsevier, Amsterdam, pp. 1415-1425. ISBN 978-0-12-374417-3
Abelmann, L. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. (2010) Self-assembled three-dimensional non-volatile memories. Micromachines, 1 (1). pp. 1-18. ISSN 2072-666X *** ISI Impact 1,295 ***
Albrechts, B. and Hautzinger, D.S. and Kruger, M. and Elwenspoek, M.C. and Müller, K.M. and Korvink, J.G. (2010) Adsorption studies of DNA origami on silicon dioxide. In: 21st Micromechanics and Micro Systems Europe workshop (MME 2010), 26-29 Sept 2010, Enschede. pp. 1-4. University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science. ISBN 978-90-81673716
Alexandrou, M. and Nutter, P.W. and Delalande, M.Y. and de Vries, Jeroen and Hill, E.W. and Schedin, F. and Abelmann, L. and Thomson, T. (2010) Spatial sensitivity mapping of Hall crosses using patterned magnetic nanostructures. Journal of applied physics, 108 (4). 043920. ISSN 0021-8979 *** ISI Impact 2,101 ***
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Agazzi, L. and Khan, M.R.H. and Roeloffzen, C.G.H. and Wörhoff, K. and Pollnau, M. and de Ridder, R.M. (2010) Low-threshold, single-frequency distributed-feedback waveguide laser in Al2O3:Er3+ on silicon In: Conference on Lasers and Electro-Optics, 16-21 May 2010, San Jose, CA. CTuU4. Optical Society of America. ISBN 978-1-55752-889-6
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Agazzi, L. and Khan, M.R.H. and Roeloffzen, C.G.H. and Wörhoff, K. and Pollnau, M. and de Ridder, R.M. (2010) Ultra-narrow-linewidth, single-frequency distributed feedback waveguide laser in Al2O3:Er3+ on silicon Optics letters, 35 (14). pp. 2394-2396. ISSN 0146-9592 *** ISI Impact 3,040 ***
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and Pollnau, M. and de Ridder, R.M. (2010) High-Quality, Distributed Phase-Shift, Distributed Feedback Cavities in Al2O3 Waveguides In: Bragg Gratings, Photosensitivity, and Poling in Glass Waveguides, 21-24 June 2010, Karlsruhe, Germany. BMB5. Optical Society of America. ISBN not assigned
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and Pollnau, M. and de Ridder, R.M. (2010) 1.7-kHz-linewidth distributed feedback laser in Al2O3:Er3+ In: Europhoton Conference, 30 Aug - 3 Sep 2010, Hamburg, Germany. Paper FrB7. Europhysics Conference Abstract 34C. European Physical Society. ISBN 2-914771-64-9
Brookhuis, R.A. and de Boer, M.J. and Dijkstra, M.A. and Kuijpers, A.A. and van Lierop, D. and Wiegerink, R.J. (2010) A micromirror for optical projection displays. In: 21st Micromechanics and Micro Systems Europe Workshop (MME 2010), 26-29 Sept 2010, Enschede. pp. 1-4. University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science. ISBN 978-90-81673716
Brouwer, D.M. and Otten, A. and Engelen, J.B.C. and Krijnen, B. and Soemers, H.M.J.R. (2010) Long-range elastic guidance mechanisms for electrostatic comb-drive actuators. In: Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology, 31 May - 4 Jun 2010, Delft, The Netherlands. pp. 47-50. Delft University . ISBN 978-0-9553082-8-4
Brunets, N. and Haneveld, J. and Jansen, H.V. and Tas, N.R. (2010) Viscosity of Water in Nano-Confinement. In: Micro- and nanofluidics for cell biology, 18-22 January 2010, Leiden. 1. Lorentz Center. ISSN not assigned
Casas, J. and Steinmann, T. and Krijnen, G.J.M. (2010) Why do insects have such a high density of flow-sensing hairs? Insights from the hydromechanics of biomimetic MEMS sensors. Journal of the Royal Society interface, 7. pp. 1487-1495. ISSN 1742-5689 *** ISI Impact 3,818 ***
Dagamseh, A.M.K. and Bruinink, C.M. and Droogendijk, H. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2010) Engineering of Biomimetic Hair-Flow Sensor Arrays Dedicated to High-Resolution Flow Field Measurements. In: IEEE Sensors 2010 conference, 1-4 November 2010, Hawaii - USA. pp. 2251-2254. IEEE. ISBN 978-1-4244-8168-2
Dagamseh, A.M.K. and Bruinink, C.M. and Kolster, M.L. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2010) Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition. In: DTIP2010 - Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, 4-7 May 2010, Sevilla-Spain. pp. 48-51. EDA Publshing. ISBN 978-2-35500-011-9
Dagamseh, A.M.K. and Krijnen, G.J.M. (2010) Map estimation of air-flow dipole source positions using array signal processing. In: Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE 2010), 18-19 November 2010, Veldhoven, The Netherlands. Technology Foundation STW. ISBN 978-90-73461-67-3
Dagamseh, A.M.K. and Lammerink, T.S.J. and Kolster, M.L. and Bruinink, C.M. and Wiegerink, R.J. and Krijnen, G.J.M. (2010) Dipole-source localization using biomimetic flow-sensor arrays positioned as lateral-line system. Sensors and actuators A: Physical, 162 (2). pp. 355-360. ISSN 0924-4247 *** ISI Impact 2,201 ***
Dao Viet, Dzung D. and Izadi, N. and Anh Ho, V. and Sugiyama, S. and Hirai, S. (2010) A three sensing points tactile finger tip. In: 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology 2010, 6-9 July 2010, Perth, Western Australia. pp. 91-91. The University of Western Australia. ISBN 978-1-74052-207-6
Droogendijk, H. and Krijnen, G.J.M. (2010) Parametric Amplification and Stochastic Resonance in Bio-Inspired Hair Flow Sensors. In: The Sense of Contact 12, 8 Apr 2010, Zeist, The Netherlands. FHI Federatie Van Technologiebranches. ISBN 978-90-74702-56-0
Droogendijk, H. and Krijnen, G.J.M. (2010) Simulation Studies of Parametric Amplification in Bio-inspired Flow Sensors. In: 21st Micromechanics and Micro systems Europe workshop, 26-29 Sep 2010, Enschede, The Netherlands. pp. 149-152. University of Twente - Transducers Science and Technology (TST). ISBN not assigned
Droogendijk, H. and Krijnen, G.J.M. (2010) A study on performance improvement of MEMS hair flow sensors by parametric amplification. In: Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE 2010), 18-19 Nov 2010, Veldhoven, The Netherlands. Technology Foundation STW. ISBN 978-90-73461-67-3
Duan, Xuexin and Zhao, Yiping and Berenschot, J.W. and Tas, N.R. and Reinhoudt, D.N. and Huskens, J. (2010) Large-Area Nanoscale Patterning of Functional Materials by Nanomolding in Capillaries. Advanced functional materials, 20 (15). pp. 2519-2526. ISSN 1616-301X *** ISI Impact 11,382 ***
Elwenspoek, M.C. and Abelmann, L. and Berenschot, J.W. and van Honschoten, J.W. and Jansen, H.V. and Tas, N.R. (2010) Self-assembly of (sub-)micron particles into supermaterials. Journal of micromechanics and microengineering, 20 (6). 064001. ISSN 0960-1317 *** ISI Impact 1,768 ***
Engelen, J.B.C. (2010) Een klok doet geen "pok". In: Jaarboek E.T.S.V. Scintilla 2008-2009. Debakel. University of Twente, Enschede, pp. 159-167. ISBN not assigned
Engelen, J.B.C. and Abelmann, L. and Elwenspoek, M.C. (2010) Optimized comb drive finger shape for shock-resistant actuation. In: 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 , 24-28 Jan 2010 , Wanchai, Hong Kong . pp. 1147-1150. IEEE. ISBN 978-1-4244-5763-2
Engelen, J.B.C. and Abelmann, L. and Elwenspoek, M.C. (2010) Optimized comb-drive finger shape for shock-resistant actuation. Journal of micromechanics and microengineering, 20 (10). 105003. ISSN 0960-1317 *** ISI Impact 1,768 ***
Engelen, J.B.C. and de Boer, H.L. and Beekman, J.G. and Been, A.J. and Folkertsma, G.A. and Fortgens, L. and de Graaf, D. and Vocke, S. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2010) A Musical instrument in MEMS. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 193-196. University of Twente - TST. ISBN 978-90-81673716
Engelen, J.B.C. and Delalande, M.Y. and le Fèbre, A.J. and Bolhuis, T. and Shimatsu, T. and Kikuchi, N. and Abelmann, L. and Lodder, J.C. (2010) Thermally induced switching field distribution of a single CoPt dot in a large array. Nanotechnology, 21 (3). pp. 035703-035709. ISSN 0957-4484 *** ISI Impact 3,573 ***
Escalante, M. and Lenferink, A. and Zhao, Yiping and Tas, N.R. and Huskens, J. and Hunter, C.N. and Subramaniam, V. and Otto, C. (2010) Long-Range Energy Propagation in Nanometer Arrays of Light Harvesting Antenna Complexes. Nano letters, 10 (4). pp. 1450-1457. ISSN 1530-6984 *** ISI Impact 13,779 ***
Haneveld, J. and Lammerink, T.S.J. and de Boer, M.J. and Sanders, R.G.P. and Mehendale, A. and Lötters, J.C. and Dijkstra, M.A. and Wiegerink, R.J. (2010) Modeling, design, fabrication and characterization of a micro Coriolis mass flow sensor. Journal of micromechanics and microengineering, 20 (6). 125001. ISSN 0960-1317 *** ISI Impact 1,768 ***
Hogervorst, R.P. and Krijnen, B. and Brouwer, D.M. and Engelen, J.B.C. and Staufer, U. (2010) A single-mask thermal displacement sensor in MEMS. In: Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology, 31 May - June 4 2010, Delft, The Netherlands. pp. 462-465. Delft University. ISBN 978-0-9553082-8-4
van Honschoten, J.W. and Berenschot, J.W. and Ondarcuhu, T. and Sanders, R.G.P. and Sundaram, J. and Elwenspoek, M.C. and Tas, N.R. (2010) Elastocapillary fabrication of three-dimensional microstructures. Applied physics letters, 97 (1). 014103/1-014103/3. ISSN 0003-6951 *** ISI Impact 3,142 ***
van Honschoten, J.W. and Brunets, N. and Tas, N.R. (2010) Capillarity at the nanoscale. Chemical Society Reviews, 39. pp. 1096-1114. ISSN 0306-0012 *** ISI Impact 34,090 ***
van Honschoten, J.W. and Tas, N.R. and Elwenspoek, M.C. (2010) The profile of a capillary liquid bridge between solid surfaces. American journal of physics, 78 (3). pp. 277-287. ISSN 0002-9505 *** ISI Impact 1,012 ***
Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Krijnen, G.J.M. (2010) Fabrication of superficial neuromast inspired capacitive flow sensors. Journal of micromechanics and microengineering, 20 (8). 085041. ISSN 0960-1317 *** ISI Impact 1,768 ***
Jaganatharaja, R.K. and Bruinink, C.M. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2010) Biomimetic Hair Sensor Arrays: From Inspiration To Implementation. In: The Sense of Contact 12, 08 Apr 2010, Zeist, the Netherlands. FHI Federatie Van Technologiebranches. ISBN 978-90-74702-56-0
Jansen, H.V. and de Boer, M.J. and Ma, Kechun and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF6 plasma Journal of micromechanics and microengineering, 20 (7). 075027. ISSN 0960-1317 *** ISI Impact 1,768 ***
de Jong, B.R. and Brouwer, D.M. and de Boer, M.J. and Jansen, H.V. and Soemers, H.M.J.R. and Krijnen, G.J.M. (2010) Design and Fabrication of a Planar Three-DOFs MEMS-Based Manipulator. Journal of microelectromechanical systems, 19 (5). pp. 1116-1130. ISSN 1057-7157 *** ISI Impact 1,939 ***
Khatib, M.G. and Hartel, P.H. (2010) Optimizing MEMS-Based Storage Devices for Mobile Battery-Powered Systems. ACM Transactions on Storage, 6 (1). pp. 1-37. ISSN 1553-3077 *** ISI Impact 1,033 ***
Khatib, M.G. and Hartel, P.H. and van Dijk, H.W. (2010) Energy-Efficient Streaming Using Non-volatile Memory. Journal of Signal Processing Systems, 60 (2). pp. 149-168. ISSN 1939-8018 *** ISI Impact 0,508 ***
Koelmans, W.W. and van Honschoten, J.W. and de Vries, Jeroen and Vettiger, P. and Abelmann, L. and Elwenspoek, M.C. (2010) Parallel optical readout of cantilever arrays in dynamic mode. Nanotechnology, 21 (39). pp. 395503-395506. ISSN 0957-4484 *** ISI Impact 3,573 ***
Koelmans, W.W. and Peters, T. and Abelmann, L. and Elwenspoek, M.C. (2010) Fabrication of cantilever arrays with tips for parallel optical readout. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 277-280. University of Twente, Transducers Science and Technology. ISBN 978-90-81673716
Koelmans, W.W. and Sebastian, A. and Despont, M. and Pozidis, H. (2010) Force modulation for improved conductive-mode atomic force microscopy. In: Proceedings of the 10th IEEE Conference on Nanotechnology, IEEE-NANO 2010, 17-20 Aug 2010, Seoul, South-Korea. pp. 875-878. IEEE. ISBN 978-1-4244-7033-4
Krijnen, B. and Hogervorst, R.P. and Engelen, J.B.C. and van Dijk, J.W. and Brouwer, D.M. and Abelmann, L. (2010) Single-mask thermal displacement sensor in MEMS. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 52-55. University of Twente - TST. ISBN 978-90-81673716
Krijnen, G.J.M. and Lammerink, T.S.J. and Wiegerink, R.J. (2010) Learning from Crickets: Artificial Hair-Sensor Array Developments. In: IEEE Sensors 2010 Conference, 1-4 Nov 2010, Waikoloa, Hawaii, USA. pp. 2218-2223. IEEE. ISBN 978-1-4244-8168-2
Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2010) A modular assembly method of a feed and thruster system for Cubesats. Journal of micromechanics and microengineering, 20 (11). 115011. ISSN 0960-1317 *** ISI Impact 1,768 ***
Mehendale, A. and Hagedoorn, W. and Lötters, J.C. (2010) Transformer core. Patent US7843306 (Assigned).
Mehendale, A. and Lötters, J.C. (2010) Flowmeter of the Coriolis type. Patent US7677112 (Assigned).
Mogulkoc, B. (2010) Reflow Bonding of Burosilicate Glass Tubes of Silicon Substrates as Fluidic Interconnect. PhD thesis, University of Twente. ISBN 978-90-365-3083-5
Mogulkoc, B. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2010) Incorporation of in-plane electrical internonnects to the reflow bonding. In: 21st Micromechanics and Micro systems Europe workshop (MME2010), 26-29 Sept 2010, Enschede. pp. 1-4. Universiteit Twente - TST. ISBN 978-90-81673716
Mogulkoc, B. and Knowles, K.M. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2010) Surface Devitrification and the Growth of Cristobalite in Borofloat® (Borosilicate 8330) Glass. Journal of the American Ceramic Society, 93 (9). pp. 2713-2719. ISSN 0002-7820 *** ISI Impact 2,787 ***
Nazeer, H. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2010) Determination of young's modulus of PZT-influence of cantilever orientation. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 257-260. University of Twente - TST. ISBN 978-90-81673716
Nazeer, H. and Woldering, L.A. and Abelmann, L. and Nguyen, Minh Duc and Rijnders, A.J.H.M. and Elwenspoek, M.C. (2010) Influence of silicon orientation and cantilever undercut on the determination of Young's modulus of pulsed laser deposited PZT. In: Proceedings of the 36th International Micro & Nano Engineering Conference (MNE 2010), 19-22 Sept 2010, Genoa, Italy. MNE 2010 Organisation. ISBN not assigned
Nguyen, Minh Duc and Nazeer, H. and Karakaya, K. and Pham, V.S. and Steenwelle, R. and Dekkers, M. and Abelmann, L. and Blank, D.H.A. and Rijnders, A.J.H.M. (2010) Characterization of epitaxial Pb(Zr,Ti)O3 thin films deposited by pulsed laser deposition on silicon cantilevers Journal of micromechanics and microengineering, 20 (8). pp. 085022-085032. ISSN 0960-1317 *** ISI Impact 1,768 ***
Palasantzas, G. and Svetovoy, V.B. and van Zwol, P.J. (2010) Optical properties and kinetic roughening influence on dispersive casimir and van der Waals forces. International Journal of Modern Physics B, 24 (31). pp. 6013-6024. ISSN 0217-9792 *** ISI Impact 0,850 ***
Pham, V.S. and Kauppinen, L.J. and Dijkstra, M. and van Wolferen, H.A.G.M. and de Ridder, R.M. and Hoekstra, H.J.W.M. (2010) Mechano-optical sensors for hydrogen gas: Fabrication and Proof of concept. In: The Sense of Contact 12, 8 April 2010, Zeist, the Netherlands. Technology Foundation STW. ISBN 978-90-74702-56-0
Pham, V.S. and Kauppinen, L.J. and Dijkstra, M. and van Wolferen, H.A.G.M. and de Ridder, R.M. and Hoekstra, H.J.W.M. (2010) Cantilever Deflection Read-out with a Grated Waveguide Optical Cavity. In: Proceedings of the 15th European Conference on Integrated Optics, ECIO 2010, 6-9 April 2010, Cambridge, UK. ThE6. IEEE Photonics Society. ISBN not assigned
Sarajlic, E. and Geerlings, Joël and Berenschot, J.W. and Siekman, M.H. and Tas, N.R. and Abelmann, L. (2010) Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 24-27. University of Twente - TST. ISBN 978-90-81673716
Sarajlic, E. and Vermeer, R. and Delalande, M.Y. and Siekman, M.H. and Huijink, R. and Fujita, H. and Abelmann, L. (2010) Batch fabrication of scanning microscopy probes for thermal and magnetic imaging using standard micromachining. In: 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systemes, MEMS 2010, 24-28 Jan 2010, Wanchai, Hong Kong. pp. 328-331. IEEE Magnetics Society. ISSN 1084-6999 ISBN 978-1-4244-5761-8
Sarajlic, E. and Yamahata, C. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. (2010) High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology. Micromachines, 1 (2). pp. 48-67. ISSN 2072-666X *** ISI Impact 1,295 ***
Sinno, I. and Sanz-Velasco, A. and Kang, S. and Jansen, H.V. and Olsson, E. and Enoksson, P. and Svensson, K. (2010) Fabrication of nanoscale electrostatic lenses. Journal of micromechanics and microengineering, 20 (9). pp. 1-7. ISSN 0960-1317 *** ISI Impact 1,768 ***
Syed Nawazuddin, M.B. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2010) Measurement setup for detecting the Casimir force between parallel plates separated at a sub-micron distance. Journal of micromechanics and microengineering, 20 (6). 064005. ISSN 0960-1317 *** ISI Impact 1,768 ***
Tas, N.R. and Escalante, M. and van Honschoten, J.W. and Jansen, H.V. and Elwenspoek, M.C. (2010) Capillary Negative Pressure Measured by Nanochannel Collapse. Langmuir, 26 (3). pp. 1473-1476. ISSN 0743-7463 *** ISI Impact 3,993 ***
Tilmans, H.A.C. and Beyne, E. and Jansen, H.V. and De Raedt, W. (2010) System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent US7835157 (Assigned).
Torricelli, G. and van Zwol, P.J. and Shpak, O. and Binns, C. and Palasantzas, G. and Kooi, B.J. and Svetovoy, V.B. (2010) Switching Casimir forces with phase-change materials. Physical review A, 82 (1). 010101R. ISSN 1050-2947
de Vries, Jeroen and Abelmann, L. and Manz, A. and Elwenspoek, M.C. (2010) Tungsten-siliconnitride medium for mega- to gigayear data storage. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 261-264. University of Twente, Transducers Science and Technology. ISBN 978-90-81673716
de Vries, Jeroen and Delalande, M.Y. and Abelmann, L. and Alexandrou, M. and Schedin, F. and Nutter, P. and Hill, E.W. and Thomson, T. (2010) Simulation of position sensitivity of the anomalous Hall effect on a single magnetic dot. In: Proceedings of the International Symposium on Advanced Magnetic Materials and Applications, ISAMMA 2010, 12-16 Jul 2010, Sendai, Japan. Journal of Physics: Conference Series 266. IOP Publishing. ISBN 9781617823008
Yagubizade, H. and Berenschot, J.W. and Jansen, H.V. and Elwenspoek, M.C. and Tas, N.R. (2010) Silicon Nanowire Fabrication Using Edge and Corner Lithography. In: IEEE Nanotechnology Materials and Devices Conference, NMDC 2010, 12-14 Oct 2010, Monterey, CA, USA. pp. 128-131. IEEE Nanotechnology Council. ISBN 978-1-4244-8896-4
Yamahata, C. and Sarajlic, E. and Krijnen, G.J.M. and Gijs, M.A.M. (2010) Subnanometer Translation of Microelectromechanical Systems Measured by Discrete Fourier Analysis of CCD Images. Journal of microelectromechanical systems, 19 (5). pp. 1273-1275. ISSN 1057-7157 *** ISI Impact 1,939 ***
Yntema, D.R. and Haneveld, J. and Engelen, J.B.C. and Brookhuis, R.A. and Sanders, R.G.P. and Wiegerink, R.J. and Elwenspoek, M.C. (2010) Listening to MEMS: An acoustic vibrometer. In: Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on, 24-28 Jan 2010, Hong Kong. pp. 1-4. MEMS 2010. ISSN 1084-6999 ISBN 978-1-4244-5763-2
Zhao, Yiping (2010) High-Resolution Stamp Fabrication by Edge Lithography. PhD thesis, University of Twente. ISBN 978-90-365-3036-1
Zhao, Yiping and Jansen, H.V. and de Boer, M.J. and Berenschot, J.W. and Bouwes, D. and Girones, M. and Huskens, J. and Tas, N.R. (2010) Combining retraction edge lithography and plasma etching for arbitrary contour nanoridge fabrication. Journal of micromechanics and microengineering, 20 (9). pp. 1-13. ISSN 0960-1317 *** ISI Impact 1,768 ***

2009

Abdulla, S.M.C. and Berenschot, J.W. and de Boer, M.J. and Kauppinen, L.J. and de Ridder, R.M. and Krijnen, G.J.M. (2009) Optimisation study of micro cantilevers for switching of photonic band gap crystals. In: Proceedings of the International Conference on Photonics in Switching 2009, 15-19 Sep 2009, Pisa, Italy. pp. 1-2. IEEE Photonics in Switching. ISBN 978-1-4244-3856-3
Abelmann, L. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. (2009) Self assembled three-dimensional nonvolatile memories. Technical Report TR-CTIT-09-29, Centre for Telematics and Information Technology University of Twente, Enschede. ISSN 1381-3625
Alberts, C.J. and de Man, S. and Berenschot, J.W. and Gadgil, V.J. and Elwenspoek, M.C. and Iannuzzi, D. (2009) Fiber-top refractometer. Measurement science and technology, 20 (3). 034005. ISSN 0957-0233 *** ISI Impact 1,492 ***
Been, A.J. and Folkertsma, G.A. and Verputten, H.H.J. and Bolhuis, T. and Abelmann, L. (2009) Reduction of time-varying nanotesla magnetic fields from electric power lines by twisting. Journal of Electron Microscopy, 58 (4). pp. 251-252. ISSN 0022-0744 *** ISI Impact 1,285 ***
Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2009) Chemically anisotropic single-crystalline silicon nanotetrahedra. Nanotechnology, 20 (47). pp. 1-7. ISSN 0957-4484 *** ISI Impact 3,573 ***
Berenschot, J.W. and Wissink, J.M. and Tas, N.R. and de Boer, M.J. (2009) Microneedle, microneedle array and production method therefor. Patent NL2001718 (Assigned).
Bernhardi, E.H. and van Wolferen, H.A.G.M. and Dijkstra, M. and Agazzi, L. and Wörhoff, K. and Pollnau, M. and de Ridder, R.M. (2009) Designing an Integrated Al2O3:Er3+ Distributed Feedback Laser In: Proceedings of the 2009 Annual Symposium of the IEEE Photonics Benelux Chapter, 05-06 Nov 2009, Brussels, Belgium. pp. 197-200. VUBPress Brussels University Press. ISBN 978-90-5487-650-2
van den Broek, D.M. and Elwenspoek, M.C. (2009) Effect of cavity pressure on the performance of the explosive micro-bubble actuator. Microelectronic engineering, 86 (4-6). pp. 1271-1273. ISSN 0167-9317 *** ISI Impact 1,277 ***
Brombacher, C. and Saitner, M. and Pfahler, C. and Plettl, A. and Ziemann, P. and Makarov, D. and Assmann, D. and Siekman, M.H. and Abelmann, L. and Albrecht, M. (2009) Tailoring particle arrays by isotropic plasma etching: an approach towards percolated perpendicular media. Nanotechnology, 20 (10). pp. 105304-105308. ISSN 0957-4484 *** ISI Impact 3,573 ***
Brouwer, D.M. and de Jong, B.R. and de Boer, M.J. and Jansen, H.V. and van Dijk, J. and Krijnen, G.J.M. and Soemers, H.M.J.R. (2009) MEMS-based clamp with a passive hold function for precision position retaining of micromanipulators. Journal of micromechanics and microengineering, 19 (6). pp. 1-20. ISSN 0960-1317 *** ISI Impact 1,768 ***
Bruinink, C.M. and Jaganatharaja, R.K. and de Boer, M.J. and Berenschot, J.W. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Advancements in technology and design of biomimetic flow-sensor arrays. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), 25-29 Jan 2009, Sorrento, Italy. pp. 152-155. IEEE Computer Society. ISSN 1084-6999 ISBN 978-1-4244-2978-3
Bruinink, C.M. and Jaganatharaja, R.K. and de Boer, M.J. and Berenschot, J.W. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Developing the ultimate biomimetic flow-sensor array. In: Proceedings of the 1st International Conference on Natural and Biomimetic Mechanosensing, 26-28 Oct 2009, Dresden, Germany. 65. Forschungszentrum Juelich GmbH. ISSN 1433-5565 ISBN 978-3-89336-583-8
Cuperus, R. and Flokstra, F.F. and Droogendijk, H. and Wiegerink, R.J. and Flokstra, Jaap (2009) Gravity gradiometer system for Earth Exploration. In: MicroNanoConference 2009, 5-6 Nov 2009, Delft, The Netherlands. MinacNed. ISBN not assigned
Dagamseh, A.M.K. and Bruinink, C.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2009) Interfacing and processing artificial hairs array for flow pattern recognition. In: The Sense of Contact 11, 08 April 2009, Zeist, The Netherlands. FHI Federatie Van Technologiebranches. ISBN 978-90-74702-55-3
Dagamseh, A.M.K. and Krijnen, G.J.M. (2009) Thermal noise estimation in bio-inspired hair flow sensor. In: Proceedings of the 1st International Conference on Natural and Biomimetic Mechanosensing, 26-28 October 2009, Dresden, Germany. 64. Forschungszentrum Julich Gmbh. ISSN 1433-5565 ISBN 978-3-89336-583-8
Dagamseh, A.M.K. and Lammerink, T.S.J. and Bruinink, C.M. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Dipole source localisation using bio-mimetic flow-sensor arrays. Procedia Chemistry, 1 (1). pp. 891-894. ISSN 1876-6196
Dagamseh, A.M.K. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) A simulation study of the dipole source localisation applied on bio-mimetic flow-sensor linear array. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 26-27 November 2009, Veldhoven, The Netherlands. pp. 534-537. Technology Foundation STW. ISBN 978-90-73461-62-8
Dash, S.P. and Sharma, S. and Patel, R.S. and de Jong, M.P. and Jansen, R. (2009) Electrical creation of spin polarization in silicon at room temperature. Nature, 462 (4). pp. 491-494. ISSN 0028-0836 *** ISI Impact 38,138 ***
Delalande, M.Y. and Engelen, J.B.C. and le Fèbre, A.J. and Abelmann, L. and Lodder, J.C. (2009) Thermally induced switching field distribution of individual single nanomagnets in a large assembly. In: Proceedings of the European Workshop on Self-Organized Nanomagnets, 29 March- 3 April 2009, Aussois, France. 30. CNRS. ISBN not assigned
van Delft, K.M. and Eijkel, J.C.T. and Mijatovic, D. and Druzhinina, T.S. and Rathgen, H. and Tas, N.R. and van den Berg, A. and Mugele, F.G. (2009) Erratum: Micromachined Fabry-Pérot Interferometer with Embedded Nanochannels for Nanoscale Fluid Dynamics. Nano letters, 9 (8). pp. 1-2. ISSN 1530-6984 *** ISI Impact 13,779 ***
Dijkstra, M.A. (2009) Low-Drift Micro Flow Sensors. PhD thesis, University of Twente. ISBN 978-90-365-2856-6
Dijkstra, M.A. and Lammerink, T.S.J. and de Boer, M.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2009) Ambient temperature-gradient compensated low-drift thermopile flow sensor. In: 22nd IEEE International Conference on MEMS, 25-29 January 2009, Sorrento, Italy. pp. 479-482. Institute of Electrical and Electronics Engineers, Inc.. ISSN 1084-6999 ISBN 978-1-4244-2977-6
Duan, Xuexin and Zhao, Yiping and Perl, A. and Berenschot, J.W. and Reinhoudt, D.N. and Huskens, J. (2009) High-Resolution Contact Printing with Chemically Patterned Flat Stamps Fabricated by Nanoimprint Lithography. Advanced materials, 21 (27). pp. 2798-2802. ISSN 0935-9648 *** ISI Impact 18,960 ***
Engelen, J.B.C. and Lantz, M.A. and Rothuizen, H.E. and Abelmann, L. and Elwenspoek, M.C. (2009) Improved performance of large stroke comb-drive actuators by using a stepped finger shape. In: The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 21-25 June 2009, Denver, Colorado, USA. pp. 1762-1765. IEEE. ISBN 978-1-4244-4190-7
Engelen, J.B.C. and Rothuizen, H.E. and Drechsler, U. and Stutz, R. and Despont, M. and Abelmann, L. and Lantz, M.A. (2009) A Mass-balanced through-wafer electrostatic x/y-scanner for probe data storage. Microelectronic Engineering, 86 (4-6). pp. 1230-1233. ISSN 0167-9317 *** ISI Impact 1,277 ***
Flokstra, Jaap and Cuperus, R. and Wiegerink, R.J. and Essen, M.C. (2009) A MEMS-based gravity gradiometer for future planetary missions. Cryogenics, 49 (11). pp. 665-668. ISSN 0011-2275 *** ISI Impact 1,026 ***
Haneveld, J. and Lammerink, T.S.J. and de Boer, M.J. and Wiegerink, R.J. (2009) Micro coriolis mass flow sensor with integrated capacitive readout. In: IEEE 22nd International Conference on MEMS, 25-29 January 2009, Sorrento, Italy. pp. 463-466. Institute of Electrical and Electronics Engineering, Inc.. ISSN 1084-6999 ISBN 978-1-4244-2977-6
Hoang, Thi Hanh and Segers-Nolten, I.M. and Berenschot, J.W. and de Boer, M.J. and Tas, N.R. and Haneveld, J. and Elwenspoek, M.C. (2009) Fabrication and interfacing of nanochannel devices for single-molecule studies. Journal of micromechanics and microengineering, 19 (065017). pp. 1-10. ISSN 0960-1317 *** ISI Impact 1,768 ***
van Honschoten, J.W. (2009) Ruis bij de MicMec. In: Scintilla's jaarboek 2007-2008 Ruis. ETSV Scintilla Universiteit Twente, Enschede, pp. 83-94. ISBN not assigned
van Honschoten, J.W. and Berenschot, J.W. and Sanders, R.G.P. and Abelmann, L. and Tas, N.R. and Elwenspoek, M.C. (2009) Fabrication of three-dimensional microstructures using capillary forces. In: MME 09 - Proceedings 20th MicroMechanics Europe 2009, 20-22 September 2009, Toulouse, France. pp. 1-4. Laas-CNRS. ISBN not assigned
van Honschoten, J.W. and Escalante, M. and Tas, N.R. and Elwenspoek, M.C. (2009) Formation of liquid menisci in flexible nanochannels. Journal of colloid and interface science, 329 (1). pp. 133-139. ISSN 0021-9797 *** ISI Impact 3,782 ***
van Honschoten, J.W. and Escalante, M. and Tas, N.R. and Elwenspoek, M.C. (2009) Corrigendum to “Formation of liquid menisci in flexible anochannels". Journal of colloid and interface science, 332 (2). pp. 520-520. ISSN 0021-9797 *** ISI Impact 3,782 ***
van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. (2009) An integrated 3D sound intensity sensor using four-wire particle velocity sensors: II. Modelling. Journal of micromechanics and microengineering, 20 (1). 015043. ISSN 0960-1317 *** ISI Impact 1,768 ***
Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Biomimetic aquatic hair sensors fabrication. In: The sense of contact, workshop sensortechnology, 8 Apr 2009, Zeist, The Netherlands. Technology foundation STW. ISBN 978-90-74702-55-3
Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) A fabrication scheme for biomimetic aquatic hair sensors. In: Proceedings of the 1st International Conference on Natural and Biomimetic Mechanosensing, 26-28 October 2009, Dresden, Germany. pp. 66-66. Forschungszentrum Julich Gmbh. ISSN 1433-5565 ISBN 978-3-89336-583-8
Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Mogdans, J. and Krijnen, G.J.M. (2009) Fabrication of dense flow sensor arrays on flexible membranes. In: Proceedings of the 15th International Conference on Solid State Sensors, Actuators and Microsystems, 21-25 Jun 2009, Denver, Colorado, USA. pp. 1075-1078. IEEE. ISBN 978-1-4244-4193-8
Jaganatharaja, R.K. and Bruinink, C.M. and Hagedoorn, B.M. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Highly sensitive, biomimetic hair sensor arrays for sensing low-frequency air flows. In: Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 21-25 Jun 2009, Denver, U.S.A. pp. 1541-1544. IEEE. ISBN 978-1-4244-4193-8
Jaganatharaja, R.K. and Bruinink, C.M. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Highly sensitive biomimetic flow sensor arrays. In: The Sense of Contact 11, 08 Apr 2009, Zeist. FHI Federatie Van Technologiebranches. ISBN 978-90-74702-55-3
Jaganatharaja, R.K. and Bruinink, C.M. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Optimized biomimetic hair sensor arrays for sensing oscillating air flows. In: Proceedings of the 1st International Conference on Natural and Biomimetic Mechanosensing, 26-28 Oct 2009, Dresden, Germany. 16. Forschungszentrum Juelich GmbH. ISSN 1433-5565 ISBN 978-3-89336-583-8
Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2009) Poor man's nanofabrication. In: International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 Nov 2009, Vung Tau, Vietnam . Vietnam National University. ISBN not assigned
Jansen, H.V. and de Boer, M.J. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2009) Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment. Journal of micromechanics and microengineering, 19 (3). 033001. ISSN 0960-1317 *** ISI Impact 1,768 ***
Khatib, M.G. and van Dijk, H.W. (2009) Fast Configuration of MEMS-Based Storage Devices for Streaming Applications. In: Proceedings of the 2009 IEEE/ACM/IFIP 7th Workshop on Embedded Systems for Real-Time Multimedia, 15-16 Oct 2009, Grenoble. pp. 55-63. IEEE. ISBN 978-1-4244-5170-8
Khatib, M.G. and Hartel, P.H. (2009) Policies for Probe-Wear Leveling in MEMS-Based Storage Devices. In: Proceedings of the 17th Annual Meeting of the IEEE/ACM International Symposium on Modeling, Analysis & Simulation of Computer and Telecommunication Systems (MASCOTS), 21-23 Sep 2009, London, UK. pp. 152-161. IEEE Computer Society. ISSN 1526-7539 ISBN 978-1-4244-4928-6
Koelmans, W.W. and van Honschoten, J.W. and Vettiger, P. and Abelmann, L. and Elwenspoek, M.C. (2009) Parallel optical readout of a cantilever array in dynamic mode. In: Proceedings of the International Workshop on Nanomechanical cantilever sensors 2009, 20-22 May 2009, Jeju, South Korea. Smart Materials and Sensors Laboratory. ISBN not assigned
Krijnen, G.J.M. and Wiegerink, R.J. (2009) Lifelike MEMS en wat krekels ons influisteren. De Vonk, 3. pp. 4-12. ISSN 0925-5427
Kuijpers, A.A. and Lierop, D. and Sanders, R.H.M. and Tangenberg, J. and Moddejonge, H. and Eikenbroek, J.W.T. and Lammerink, T.S.J. and Wiegerink, R.J. (2009) Towards embedded control for resonant scanning MEMS micromirror. Procedia Chemistry, 1 (1). pp. 1307-1310. ISSN 1876-6196
Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. and Lötters, J.C. (2009) Flowmeter with silicon flow tube. Patent NL1034905 (Assigned).
Louwerse, M.C. (2009) Cold Gas Micro Propulsion. PhD thesis, University of Twente. ISBN 978-90-365-2903-7
Louwerse, M.C. and Jansen, H.V. and Groenendijk, M.N.W. and Elwenspoek, M.C. (2009) Nozzle fabrication for micropropulsion of a microsatellite. Journal of micromechanics and microengineering, 19 (4). pp. 1-9. ISSN 0960-1317 *** ISI Impact 1,768 ***
Mogulkoc, B. and Jansen, H.V. and Berenschot, J.W. and ter Brake, H.J.M. and Knowles, K.M. and Elwenspoek, M.C. (2009) Characterization of MEMS-on-tube assembly: reflow bonding of borosilicate glass (Duran ®) tubes to silicon substrates. Journal of micromechanics and microengineering, 19 (085027). pp. 1-10. ISSN 0960-1317 *** ISI Impact 1,768 ***
Nazeer, H. and Abelmann, L. and Tas, N.R. and van Honschoten, J.W. and Siekman, M.H. and Elwenspoek, M.C. (2009) Determination of young's modulus of PZT and CO80Ni20 thin films by means of micromachined cantilevers In: Proceedings of the 20th Micromechanics Europe Workshop, 21-23 Sept 2009, Toulouse, France. pp. 278-281. LAAS-CNRS. ISBN not assigned
Pham, V.S. and Kauppinen, L.J. and Dijkstra, M. and van Wolferen, H.A.G.M. and de Ridder, R.M. and Hoekstra, H.J.W.M. (2009) Photonic crystal waveguides integrated with microcantilevers as a novel platform for gas sensors. In: Proceedings of the 7th International Symposium on Modern Optics and Its Applications (ISMOA), 10-14 August 2009, Bandung, Indonesia. pp. 68-68. Bandung Institute of Technology. ISBN not assigned
Pham, V.S. and Kauppinen, L.J. and Dijkstra, M. and van Wolferen, H.A.G.M. and de Ridder, R.M. and Hoekstra, H.J.W.M. (2009) Fabrication of mechano-optical sensors for hydrogen gas. In: Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 26-27 Nov 2009, Veldhoven, the Netherlands. pp. 44-47. Technology Foundation STW. ISBN 978-90-73461-62-8
Pham, V.S. and Kauppinen, L.J. and Dijkstra, M. and van Wolferen, H.A.G.M. and de Ridder, R.M. and Hoekstra, H.J.W.M. (2009) Simulation and fabrication of a mechano-optical sensor for nano-displacements. In: 1st Nano Today Conference, 2-5 Aug 2009, Biopolis, Singapore. pp. 33-33. Institute of Bioengineering and Nanotechnology, Singapore. ISBN not assigned
Profijt, H.B. and Pigot, C. and Reyne, G. and Grechishkin, R.M. and Cugat, O. (2009) Stable diamagnetic self-levitation of a micro-magnet by improvement of its magnetic gradients. Journal of magnetism and magnetic materials, 321 (4). pp. 259-262. ISSN 0304-8853 *** ISI Impact 2,357 ***
Syed Nawazuddin, M.B. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2009) Parallel plate structures for optical modulation and casimir force measurement. In: MME 09 - Proceedings 20th MicroMechanics Europe 2009, 20-22 September 2009, Toulouse, France. pp. 1-4. Laas-CNRS. ISBN not assigned
Tas, N.R. and Haneveld, J. and Jansen, H.V. and Brunets, N. and van Honschoten, J.W. (2009) Capillarity effect in silicon based nanochannels. In: Proceedings Second International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 Nov 2009, Vung Tau, Vietnam. pp. 1-1. IWNA 2009 International Conference. ISBN not assigned
Tiggelaar, R.M. and Groenland, A.W. and Sanders, R.G.P. and Gardeniers, J.G.E. (2009) Electrical properties of low pressure chemical vapor deposited silicon nitride thin films for temperatures up to 650 °C. Journal of applied physics, 105 (3). 033714. ISSN 0021-8979 *** ISI Impact 2,101 ***
Tiggelaar, R.M. and Sanders, R.G.P. and Groenland, A.W. and Gardeniers, J.G.E. (2009) Stability of thin platinum films implemented in high-temperature microdevices. Sensors and actuators A: Physical, 152 (1). pp. 39-47. ISSN 0924-4247 *** ISI Impact 2,201 ***
Unnikrishnan, S. (2009) Micromachined Dense Palladium Electrodes for Thin-film Solid Acid Fuel Cells. PhD thesis, University of Twente. ISBN 978-90-365-2949-5
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) MEMS within a Swagelok®: a new platform for microfluidic devices. Lab on a chip, 9 (13). pp. 1966-1969. ISSN 1473-0197 *** ISI Impact 5,586 ***
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) Microfluidics within a Swagelok®: A MEMS-on-tube assembly. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, 25-29 January 2009, Sorrento, Italy. pp. 1-4. Technical Digest. ISSN 1084-6999
Unnikrishnan, S. and Jansen, H.V. and Falke, F.H. and Tas, N.R. and van Wolferen, H.A.G.M. and de Boer, M.J. and Sanders, R.G.P. and Elwenspoek, M.C. (2009) Transition flow through an ultra-thin nanosieve. Nanotechnology, 20 (30). pp. 1-6. ISSN 0957-4484 *** ISI Impact 3,573 ***
Wiegerink, R.J. and Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. (2009) Thermal and Coriolis type micro flow sensors based on surface channel technology. Procedia Chemistry, 1 (1). pp. 1455-1458. ISSN 1876-6196
Yntema, D.R. and van Honschoten, J.W. and Wiegerink, R.J. (2009) An integrated 3D sound intensity sensor using four-wire particle velocity sensors: I. Design and characterization. Journal of micromechanics and microengineering, 20 (1). 015042. ISSN 0960-1317 *** ISI Impact 1,768 ***
Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Sub-10 nm silicon ridge nanofabrication by advanced edge lithography for NIL applications. Microelectronic engineering, 86 (4-6). pp. 832-835. ISSN 0167-9317 *** ISI Impact 1,277 ***
Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Multi-silicon ridge nanofabrication by repeated edge lithography. Nanotechnology, 20 (315305). pp. 1-7. ISSN 0957-4484 *** ISI Impact 3,573 ***
van Zwol, P.J. and Svetovoy, V.B. and Palasantzas, G. (2009) Distance upon contact: Determination from roughness profile. Physical review B: Condensed matter and materials physics, 80 (23). 235401. ISSN 1098-0121

2008

Abelmann, L. and le Fèbre, A.J. (2008) Doorslaan in veld emissie. In: Doorgeslagen. Jaarboek E.T.S.V. Scintilla 2007-2008. University of Twente, Enschede, pp. 116-128. ISBN not assigned
Antezza, M. and Pitaevskii, L.P. and Stringari, S. and Svetovoy, V.B. (2008) Casimir-Lifshitz force out of thermal equilibrium. Physical review A, 77 (2). 022901. ISSN 1050-2947
Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2008) 3D-Nanomachining using corner lithography. In: 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, 6-9 Jan 2008, Sanya, China. pp. 729-732. IEEE Computer Society. ISBN 978-1-4244-1907-4
Berenschot, J.W. and Wissink, J.M. and Tas, N.R. and de Boer, M.J. (2008) Microneedle, microneedle array and production method therefor. Patent NL20082001718 (Application).
Bos, J.W. and Hoitink, R.W.J. and Besseling, J.H. and Lötters, J.C. (2008) Flow sensor of the thermal type. Patent US7437928 (Assigned).
van den Broek, D.M. (2008) Explosive micro-bubble actuator. PhD thesis, University of Twente. ISBN 978-90-365-2743-9
van den Broek, D.M. and Elwenspoek, M.C. (2008) Explosive micro-bubble actuator. Sensors and actuators A: Physical, 145-146 (1-2). pp. 387-393. ISSN 0924-4247 *** ISI Impact 2,201 ***
van den Broek, D.M. and Elwenspoek, M.C. (2008) Bubble nucleation in an explosive micro-bubble actuator. Journal of micromechanics and microengineering, 18 (6). 064003. ISSN 0960-1317 *** ISI Impact 1,768 ***
Bruinink, C.M. and Burresi, M. and de Boer, M.J. and Segerink, F.B. and Jansen, H.V. and Berenschot, J.W. and Reinhoudt, D.N. and Huskens, J. and Kuipers, L. (2008) Nanoimprint Lithography for Nanophotonics in Silicon. Nano Letters, 8 (9). pp. 2872-2877. ISSN 1530-6984 *** ISI Impact 13,779 ***
Dagamseh, A.M.K. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2008) Interfacing of artificial hairs array for complex flow pattern recognition. In: Micromechanics Europe Workshop 2008, 28-30 Sep 2008, Aachen. pp. 129-132. RWTH Aachen University. ISBN 978-3-00-025529-8
Delalande, M.Y. and Engelen, J.B.C. and le Fèbre, A.J. and Abelmann, L. and Lodder, J.C. (2008) Switching field distribution of arrays of Co-Pt Nanodots determined by anomalous hall effect measurements. In: Proceedings of the Asian Magnetics Conference 2008, 10 - 13 Dec 2008, Busan, Korea. Korea University. ISBN not assigned
Delalande, M.Y. and le Fèbre, A.J. and van Wolferen, H.A.G.M. and Abelmann, L. and Lodder, J.C. (2008) Magnetic properties of CoPt thin films and nanosized dots patterned by Laser Interference Lithography (LIL). In: Proceedings of the 12eme Colloque Louis Neel, 30 Sept - 3 Oct 2008, La grande Motte, France. CEMES. ISBN not assigned
Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels. Sensors and actuators A: Physical, 143 (1). pp. 1-6. ISSN 0924-4247 *** ISI Impact 2,201 ***
Dijkstra, M.A. and Lammerink, T.S.J. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift U-Shaped Thermopile Flow Sensor. In: Sensors, 2008 IEEE, 26-29 Oct 2008, Lecce, Italy. pp. 66-69. IEEE. ISSN 1930-0395 ISBN 978-1-4244-2580-8
Dijkstra, M.A. and Lammerink, T.S.J. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift flow sensor with zero-offset thermopile-based power feedback. In: Proceedings of Design, Test, Integration and Packaging of MEMS/MOEMS, 9-11 Apr 2008, Nice. 4. EDA Publisher. ISBN 978-2-35500-006-5
Engelen, J.B.C. and Khatib, M.G. (2008) A ''Millipede'' scanner model - Energy consumption and performance. Technical Report TR-CTIT-08-51, Centre for Telematics and Information Technology University of Twente, Enschede. ISSN 1381-3625
Engelen, J.B.C. and Rothuizen, H.E. and Drechsler, U. and Stutz, R. and Despont, M. and Lantz, M.A. (2008) Mass-balanced through-wafer electrostatic x/y-scanner for parallel probe data storage. In: 34th International Conference on Micro & Nano Engineering, 15-19 Sep 2008, Athens, Greece. 92. Ergo Publications. ISBN not assigned
Escalante, M. and Zhao, Yiping and Ludden, M.J.W. and Vermeij, R. and Olsen, J.D. and Berenschot, J.W. and Hunter, C.N. and Huskens, J. and Subramaniam, V. and Otto, C. (2008) Nanometer arrays of functional light harvesting antenna complexes by nanoimprint lithography and host--guest interactions. Journal of the American Chemical Society, 130 (28). pp. 8892-8893. ISSN 0002-7863 *** ISI Impact 13,038 ***
Fazal, I. and Elwenspoek, M.C. (2008) Piezoelectric microvalve for precise control of gas flow at high pressure. In: 2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007, 4-7 Sept 2007, Las Vegas, NV, United States. pp. 841-844. American Society of Mechanical Engineers. ISBN 0791848027
Fazal, I. and Elwenspoek, M.C. (2008) Fusion-bonded fluidic interconnects. Journal of micromechanics and microengineering, 18 (5). 055011. ISSN 0960-1317 *** ISI Impact 1,768 ***
le Fèbre, A.J. (2008) Field emission sensing for non-contact probe recording. PhD thesis, University of Twente. ISBN 978-90-8570-300-6
le Fèbre, A.J. and Abelmann, L. and Lodder, J.C. (2008) Field emisssion at nanometer distances for high-resolution positioning. Journal of vacuum science and technology B: microelectronics, processing and phenomena, 26 (2). pp. 724-729. ISSN 1071-1023 *** ISI Impact 1,398 ***
Haneveld, J. and Lammerink, T.S.J. and Dijkstra, M.A. and Droogendijk, H. and de Boer, M.J. and Wiegerink, R.J. (2008) Highly sensitive micro coriolis mass flow sensor. In: MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems, 13-17 Jan 2008, Tucson, AZ, United States. pp. 920-923. IEEE Computer Society. ISBN 978-1-4244-1793-3
Haneveld, J. and Tas, N.R. and Brunets, N. and Jansen, H.V. and Elwenspoek, M.C. (2008) Capillary filling of sub- 10 nm nanochannels. Journal of applied physics, 104 (1). 14309. ISSN 0021-8979 *** ISI Impact 2,101 ***
Hartel, P.H. and Abelmann, L. and Khatib, M.G. (2008) Towards Tamper-Evident Storage on Patterned Media. In: 6th USENIX Conf. on File and Storage Technologies (FAST), Feb. 26-29, 2008, San Jose, California. pp. 283-296. USENIX Association. ISBN 978-1-931971-56-0
van Honschoten, J.W. and Escalante, M. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2008) Erratum:"Elastocapillary filling of deformable nanochannels" [J. Appl. Phys. 101, 094310 (2007)]. Journal of applied physics, 103 (2). pp. 1-1. ISSN 0021-8979 *** ISI Impact 2,101 ***
van Honschoten, J.W. and Koelmans, W.W. and Konings, S.M. and Abelmann, L. and Elwenspoek, M.C. (2008) Nanotesla torque magnetometry using a microcantilever. In: Eurosensors XXII, 7 - 10 Sept 2008, Dresden, Germany. pp. 597-600. Eurosensors Committee. ISBN 978-3-00-025217-4
van Honschoten, J.W. and Tas, N.R. and Svetovoy, V.B. and Escalante, M. and Elwenspoek, M.C. (2008) Formation of liquid menisci in flexible nanochannels. In: Proceedings of MicroTas 2008, Oct 2008, San Diego. pp. 1504-1506. University of San Diego. ISBN 978-0-9798064-1-4
van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Modeling and characterization of the sensitivity of a hot-wire particle velocity sensor. In: MME 2008, 28-30 Sept 2008, Aachen. RWTH Aachen University. ISBN 978-3-00-025529-8
van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Analysis of the angular sensitivity of an innovative particle velocity sensor. In: Proceedings of IEEE Sensors 2008, Oct 2008, Lecce, Italy. 4. Lecce University. ISBN 9781424425815
Iannuzzi, D. and De Man, S. and Alberts, C.J. and Berenschot, J.W. and Elwenspoek, M.C. and Said, A.A. and Dugan, M. (2008) Fiber-top micromachined devices. In: 19th International Conference on Optical Fibre Sensors, 15-18 April 2008, Perth, WA, Australia. 700403. Proceedings SPIE 7004. SPIE. ISSN 0277-786X
Iannuzzi, D. and Deladi, S. and Elwenspoek, M.C. (2008) Optical device comprising a cantilever and method of fabrication and use thereof. Patent US20080094352 (Application).
Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Krijnen, G.J.M. (2008) Fabrication scheme for dense aquatic flow sensor arrays. In: Proceedings of Eurosensors XXII, 7-10 Sep 2008, Dresden, Germany. pp. 912-915. Verein Deutscher Ingenieure e.V. (VDI). ISBN 978-3-00-025217-4
Izadi, N. and Krijnen, G.J.M. and Wiegerink, R.J. (2008) Biomimetic aquatic hair sensors design. In: The Sense of Contact, workshop sensortechnology, 9 Apr 2008, Zeist, The Netherlands. Technology foundation STW. ISBN 978-90-74702-54-6
Izadi, N. and Verlaat, B. and Berenschot, J.W. and Wiegerink, R.J. and de Boer, M.J. and Mogdans, J. and Krijnen, G.J.M. (2008) Design and fabrication process for artificial lateral line flow sensors. In: Proceedings of the International Conference on Sensor and Sensing in Biology and Engineering, 12-16 Oct 2008, Cetraro, Italy. Engineering Conferences International. ISBN not assigned
Jaganatharaja, R.K. and Bruinink, C.M. and Izadi, N. and Lammerink, T.S.J. and Wiegerink, R.J. and Casas, J. and Krijnen, G.J.M. (2008) Optimization Of Bio-inspired Hair Sensor Arrays. In: 34th International Conference on Micro & Nano Engineering, 15-19 Sep 2008, Athens, Greece. Micro & Nano Engineering Committee. ISBN not assigned
Jaganatharaja, R.K. and Bruinink, C.M. and Izadi, N. and Lammerink, T.S.J. and Wiegerink, R.J. and Casas, J. and Krijnen, G.J.M. (2008) Optimization Of Bio-inspired Hair Sensor Arrays. In: Sensors and Sensing in Biology and Engineering Conference, 12-16, 2008, Cetraro, Italy. Engineering Conferences International. ISBN not assigned
Jaganatharaja, R.K. and Izadi, N. and Floris, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2008) Model-based optimization of tunable, biomimetic hair sensor arrays. In: The Sense of Contact 10, 09 Apr 2008, Zeist. FHI Federatie Van Technologiebranches. ISBN 978-90-74702-54-6
Janssen, K.G.H. and Hoang, Thi Hanh and Floris, J. and de Vries, Jeroen and Tas, N.R. and Eijkel, J.C.T. and Hankemeier, T. (2008) Solution titration by wall deprotonation during capillary filling of silicon oxide nanochannels. Analytical Chemistry, 80 (21). pp. 8095-8101. ISSN 0003-2700 *** ISI Impact 5,886 ***
Kauppinen, L.J. and Hoekstra, H.J.W.M. and Dijkstra, M. and de Ridder, R.M. and Krijnen, G.J.M. (2008) Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections. In: Proceedings of the 14th European Conference on Integrated Optics (ECIO), 11-13 June 2008, Eindhoven, The Netherlands. pp. 111-114. Eindhoven University of Technology. ISBN 978-90-386-1317-8
Kauppinen, L.J. and Hoekstra, H.J.W.M. and Dijkstra, M. and de Ridder, R.M. and Krijnen, G.J.M. (2008) Grated waveguide-based optical cavities as compact sensors for sub-nanometre cantilever deflections, and small refractive-index changes. In: Book of Abstracts 9th European Conference on Optical Chemical Sensors and Biosensors (Europtrode IX), 30-3-2008-02-04-2008, Dublin, Ireland. P084. Dublin City University. ISBN not assigned
Khatib, M.G. and Engelen, J.B.C. and Hartel, P.H. (2008) Shutdown Policies for MEMS-Based Storage Devices -- Analytical Models. Technical Report TR-CTIT-08-03, Centre for Telematics and Information Technology University of Twente, Enschede. ISSN 1381-3625
Kohlheyer, D. and Unnikrishnan, S. and Besselink, G.A.J. and Schlautmann, S. and Schasfoort, R.B.M. (2008) A microfluidic device for array patterning by perpendicular electrokinetic focusing. Microfluidics and Nanofluidics, 4 (6). pp. 557-564. ISSN 1613-4982 *** ISI Impact 2,537 ***
Krijnen, G.J.M. and Casas, J. (2008) Imitating cricket mechanosensory hairs: dream or reality? (Invited) In: Sensors and Sensing in Biology and Engineering 2008, 12-16 Oct 2008, Grand Hotel San Michele, Cetraro (Calabria), Italy. pp. 26-27. Engineering Conferences International. ISBN not assigned
Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. and Lötters, J.C. (2008) Flowmeter with silicon flow tube. Patent NL20081034905 (Application).
Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. and Wiegerink, R.J. (2008) Flowmeter. Patent US20080335045 (Application).
Lerou, P.P.P.M. and ter Brake, H.J.M. and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Rogalla, H. (2008) Micromachined Joule-Thomson coolers. In: AIP Conference Proceedings, 16-20 July 2007, Chattanooga, Tennessee, USA. pp. 614-621. Advances in Cryogenic Engineering, Transactions of the Cryogenic Engineering Conference - CEC 985 (1). American Institute of Physics. ISSN 0094-243X ISBN 978-0-7354-0504-2
Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2008) Modular Thruster and Feeding System for Micro-Satellite. In: MME 2008, 19th MicroMechanics Europe Workshop, 28-30 September 2008, Aachen, Germany. pp. 17-20. VDI/VDE IT. ISBN 978-3-00-025529-8
Louwerse, M.C. and Jansen, H.V. and Groenendijk, M.N.W. and Elwenspoek, M.C. (2008) Nozzle fabrication for Micro Propulsion of a Micro-Satellite. In: MME 2008, 19th MicroMechanics Europe Workshop, 28-30 September 2008, Aachen, Germany. pp. 45-48. VDI/VDE IT. ISBN 978-3-00-025529-8
Mehendale, A. and Hagedoorn, W. and Lötters, J.C. (2008) Transformer core. Patent US20080117050 (Application).
Mehendale, A. and Lötters, J.C. (2008) Flowmeter of the Coriolis type. Patent US20080167257 (Application).
Mogulkoc, B. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2008) Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects. In: Proceedings of the 19th micromechanics Europe conference, 28-30 Sept 2008, Aachen, Germany. VDI/VDE. ISBN 978-3-00-025529-8
Okamoto, S. and Kikuchi, N. and Kato, T. and Kitakami, O. and Mitsuzuka, K. and Shimatsu, T. and Muraoka, H. and Aoi, H. and Lodder, J.C. (2008) Magnetization behavior of nanomagnets for patterned media application. Journal of magnetism and magnetic materials, 320 (22). pp. 2874-2879. ISSN 0304-8853 *** ISI Impact 2,357 ***
Onoue, T. and Siekman, M.H. and Abelmann, L. and Lodder, J.C. (2008) Heat assisted magnetic probe recording onto a thin film with perpendicular magnetic anisotropy. Journal of physics D: applied physics, 41 (15). 155008. ISSN 0022-3727 *** ISI Impact 2,772 ***
Pham, V.S. and Kauppinen, L.J. and Hoekstra, H.J.W.M. and Dijkstra, M. and van Wolferen, H.A.G.M. and Krijnen, G.J.M. and de Ridder, R.M. (2008) Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements. In: Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter, 27,28 November 2008, Enschede, The Netherlands. pp. 155-158. IEEE LEOS Benelux Chapter. ISBN 978-90-365-2768-2
Svetovoy, V.B. (2008) Application of the Lifshitz theory to poor conductors. Physical review letters, 101 (16). 163603. ISSN 0031-9007 *** ISI Impact 7,645 ***
Svetovoy, V.B. and van Zwol, P.J. and Palasantzas, G. and De Hosson, J.T.M. (2008) Optical properties of gold films and the Casimir force. Physical review B: Condensed matter and materials physics, 77 (3). 035439. ISSN 1098-0121
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2008) Wafer scale nano-membrane supported on a silicon microsieve using thin-film transfer technology. Journal of micromechanics and microengineering, 18 (6). 064005. ISSN 0960-1317 *** ISI Impact 1,768 ***
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Fazal, I. and Louwerse, M.C. and Mogulkoc, B. and Sanders, R.G.P. and de Boer, M.J. and Elwenspoek, M.C. (2008) A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent EP20080007746 (Application).
Vanapalli, S. (2008) High-frequency Operation and Miniaturization aspects of Pulse-tube Cryocoolers. PhD thesis, University of Twente. ISBN 978-90-365-2652-4
Vanapalli, S. and ter Brake, H.J.M. and Jansen, H.V. and Zhao, Yiping and Holland, H.J. and Burger, J.F. and Elwenspoek, M.C. (2008) High frequency pressure oscillator for microcryocoolers. Review of scientific instruments, 79 (4). 045103. ISSN 0034-6748 *** ISI Impact 1,336 ***
Wissink, J. and Berenschot, J.W. and Tas, N.R. (2008) Atom sharp needles, the missing link in microneedle drug delivery. In: Proceedings of Medical Devices Conference, 6 Oct 2008, Kopenhagen. pp. 23-26. Medical Devices Committee. ISBN not assigned
Woldering, L.A. and Tjerkstra, R.W. and Jansen, H.V. and Setija, I. and Vos, W.L. (2008) Periodic arrays of deep nanopores made in silicon with reactive ion etching and deep UV lithography. Nanotechnology, 19 (14). pp. 1-11. ISSN 0957-4484 *** ISI Impact 3,573 ***
Yang, Chung-Kai and le Fèbre, A.J. and Pandraud, G. and van der Drift, E. and French, P.J. (2008) Field emission for cantilever sensors. Journal of vacuum science and technology B: microelectronics, processing and phenomena, 26 (3). pp. 927-933. ISSN 1071-1023 *** ISI Impact 1,398 ***
Yntema, D.R. (2008) An integrated three-dimensional sound-intensity-probe. PhD thesis, University of Twente. ISBN 978-90-365-2733-0
Yntema, D.R. and van Honschoten, J.W. and Wiegerink, R.J. (2008) Integrated 3D sound intensity sensor with four-wire particle velocity sensors. In: Proceedings of DTIP 2008, 9-11 April 2008, Nice. 3. EDA Publishing Association. ISBN 978-2-35500-006-5
Yntema, D.R. and van Honschoten, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) A complete three-dimensional sound intensity sensor integrated on a single chip. Journal of micromechanics and microengineering, 18 (11). pp. 1-9. ISSN 0960-1317 *** ISI Impact 1,768 ***
Zhao, Yiping and Berenschot, J.W. and de Boer, M.J. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Fabrication of a silicon oxide stamp by edge lithography reinforced with silicon nitride for nanoimprint lithography. Journal of micromechanics and microengineering, 18 (18). 064013. ISSN 0960-1317 *** ISI Impact 1,768 ***
Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Monolithics silicon nano-ridge fabrication by edge lithography and wet anisotropic etching of silicon. In: 34th International Conference on Micro & Nano Enginering, 15-18 Sept 2008, Greece. 221. Ergo publications. ISBN not assigned

2007

Abdulla, S.M.C. and Krijnen, G.J.M. (2007) Optimised Frequency Range of Active Joints for Nanometre Range Stroke. In: MicroMechanics Europe Workshop 2007, 16-18 Sep 2007, Guimarães, Portugal. pp. 211-214. University of Minho. ISBN 978-972-98603-3-1
Abdulla, S.M.C. and Krijnen, G.J.M. (2007) Bimorph based Active Joints for Nanometre scale Actuation. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven,The Netherlands. pp. 568-571. Technology Foundation STW. ISBN 978-90-73461-49-9
Alonso-González, P. and González, L. and González, Y. and Fuster, D. and Fernández-Martinez, I. and Martin-Sánchez, J. and Abelmann, L. (2007) New process for high optical quality InAs quantum dots grown on patterned GaAs(001) substrates. Nanotechnology, 18 (35). 355302. ISSN 0957-4484 *** ISI Impact 3,573 ***
Bos, J.W. and Hoitink, R.W.J. and Besseling, J.H. and Lötters, J.C. (2007) Flow sensor of the thermal type. Patent US20070798983 (Application).
van den Broek, D.M. and Elwenspoek, M.C. (2007) Explosive micro-bubble actuator. In: Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International, 10-14 Juni, Lyon - Frankrijk. pp. 2441-2444. IEEE Computer Society. ISBN 1-4244-0842-3
Brouwer, D.M. (2007) Design principles for six degrees-of-freedom MEMS-based precision manipulators. PhD thesis, University of Twente. ISBN 978-90-365-2510-7
van Delft, K.M. and Eijkel, J.C.T. and Mijatovic, D. and Druzhinina, T.S. and Rathgen, H. and Tas, N.R. and van den Berg, A. and Mugele, F.G. (2007) Micromachined Fabry-Perot interferometer with embedded nanochannels for nanoscale fluid dynamics. Nano letters, 7 (2). pp. 345-350. ISSN 1530-6984 *** ISI Impact 13,779 ***
Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) A versatile surface channel concept for microfluidic applications. Journal of micromechanics and microengineering, 17 (10). pp. 1971-1977. ISSN 0960-1317 *** ISI Impact 1,768 ***
Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. In: Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on, 21-25 January, Kobe, Japan. pp. 123-126. IEEE Computer Society. ISBN 1-4244-0951-9
Fazal, I. (2007) Development of a gas microvalve based on fine and micromachining. PhD thesis, University of Twente. ISBN 978-90-365-2571-8
Fazal, I. and Elwenspoek, M.C. (2007) Design and analysis of a high pressure piezoelectric actuated microvalve. Journal of micromechanics and microengineering, 17 (11). pp. 2366-2379. ISSN 0960-1317 *** ISI Impact 1,768 ***
Fazal, I. and Elwenspoek, M.C. (2007) Design challenges for stepper motor actuated microvalve based on fine and micro-machining. In: 18th Workshop on MicroMechanics Europe MME 2007, 16-18 September 2007, Guimaraes, Portugal. pp. 219-222. University of Minho. ISBN 978-972-98603-3-1
le Fèbre, A.J. and Abelmann, L. and Lodder, J.C. (2007) Field Emission to control nanometer tip-medium distances in probe storage. In: Technical digest of the International Vacuum Nanoelectronics Conference (IVNC 2007), 08 July - 12 July 2007, Chigaco, USA. pp. 223-224. IEEE Computer Society. ISBN 1-4244-1134-3
le Fèbre, A.J. and Luttge, R. and Abelmann, L. and Lodder, J.C. (2007) Field emission to control tip-sample distance in magnetic probe recording. In: International Conference on Nanoscience and Technology 2006, 30 July - 4 Aug 2006, Basel, Switzerland. pp. 673-677. Journal of Physics: Conference Series (JPCS) 61. IOP Publishing Ltd. ISSN 1742-6588
le Fèbre, A.J. and Siekman, M.H. and Abelmann, L. and Lodder, J.C. (2007) Displacement sensing by field emission with nanometer resolution. In: Transducers 2007 & Eurosensors XXI Digest of Technical Papers, 10 June - 14 June 2007, Lyon, France. pp. 2361-2364. IEEE Computer Society. ISBN 1-4244-0841-5
Floris, J. and Izadi, N. and Jaganatharaja, R.K. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2007) Adaptation for frequency focusing and increased sensitivity in biomimetic flow sensors using electrostatic spring softening. In: Proceedings of The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, 10-14 Jun 2007, Lyon, France. pp. 1267-1270. IEEE. ISBN 1-4244-0841-5
Gielens, F.C. and Tong, Hien Duy and Vorstman, M.A.G. and Keurentjes, J.T.F. (2007) Measurement and modeling of hydrogen transport through high-flux Pd membranes. Journal of membrane science, 289 (1-2). pp. 15-25. ISSN 0376-7388 *** ISI Impact 5,557 ***
Groenland, J.P.J. (2007) Magnetische registratie. In: Poly-elektronica zakboek. Reed Business bv, Doetinchem, D4/2-D4/22, D4/31. ISBN 978-90-6228-484-9
Groenland, J.P.J. and Abelmann, L. (2007) Two-dimensional coding for probe recording on magnetic patterned media. IEEE Transactions on Magnetics, 43 (6). pp. 2307-2309. ISSN 0018-9464 *** ISI Impact 1,277 ***
Groenland, J.P.J. and Abelmann, L. (2007) Two-dimensional data detection for probe recording on patterned media. In: Abstracts of the 10th Joint MMM/Intermag Conference 2007, 7-11 Jan 2007, Baltimore, MD, USA. pp. 428-428. American Institute of Physics. ISBN not assigned
Hartel, P.H. and Abelmann, L. (2007) Towards compliant data retention with probe storage on patterned media. Technical Report TR-CTIT-07-49, Centre for Telematics and Information Technology University of Twente, Enschede. ISSN 1381-3625
Hoang, Thi Hanh and Segers-Nolten, I.M. and Tas, N.R. and de Boer, M.J. and Subramaniam, V. and Elwenspoek, M.C. (2007) Fabrication of 1d nanochannels with thin glass wafers for single molecule studies. In: Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, 20-24 May 2007, Santa Clara, California, USA. pp. 260-263. NSTI. ISBN 1-4200-6184-4
Hoexum, A.M. (2007) Unleashed Microactuators electrostatic wireless actuation for probe-based data storage. PhD thesis, University of Twente. ISBN 978-90-365-2498-8
van Honschoten, J.W. and Escalante, M. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2007) Elastocapillary filling of deformable nanochannels. Journal of applied physics, 101. 094310. ISSN 0021-8979 *** ISI Impact 2,101 ***
van Honschoten, J.W. and Yntema, D.R. and Svetovoy, V.B. and Dijkstra, M.A. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Analysis of the performance of a particle velocity sensor between two cylindrical obstructions. Journal of the Acoustical Society of America, 121 (5). pp. 2711-2722. ISSN 0001-4966 *** ISI Impact 1,572 ***
van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Analysis of a three-dimensional particle velocity sensor for design optimization. Journal of micromechanics and microengineering, 17. S137-S146. ISSN 0960-1317 *** ISI Impact 1,768 ***
Iannuzzi, D. and Deladi, S. and Slaman, M. and Rector, J.H. and Schreuders, H. and Elwenspoek, M.C. (2007) A fiber-top cantilever for hydrogen detection. Sensors and actuators B: Chemical, 121 (2). pp. 706-708. ISSN 0925-4005 *** ISI Impact 4,758 ***
Iannuzzi, D. and Heeck, K. and Slaman, M. and de Man, S. and Rector, J.H. and Schreuders, H. and Berenschot, J.W. and Gadgil, V.J. and Sanders, R.G.P. and Elwenspoek, M.C. and Deladi, S. (2007) Fibre-top cantilevers: design, fabrication and applications. Measurement science and technology, 18 (10). pp. 3247-3252. ISSN 0957-0233 *** ISI Impact 1,492 ***
Izadi, N. and Jaganatharaja, R.K. and Floris, J. and Krijnen, G.J.M. (2007) Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing. In: Proceedings of the ninth International Symposium on Design, Test, integration and packaging of MEMS / MOEMS, 25-27 Apr 2007, Stresa, Italy. pp. 112-115. EDA Publishing. ISBN 978-2-35500-000-3
Izadi, N. and Jaganatharaja, R.K. and Krijnen, G.J.M. (2007) Optimization of biomimetic hair sensors. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 584-588. Technology Foundation STW. ISBN 978-90-73461-49-9
Jaganatharaja, R.K. and Izadi, N. and Floris, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2007) Model-based optimization and adaptivity of cricket-inspired biomimetic artificial hair sensor arrays. In: MicroMechanics Europe Workshop 2007, 16-18 Sep 2007, Guimarães, Portugal. pp. 203-206. University of Minho. ISBN 978-972-98603-3-1
Jaganatharaja, R.K. and Izadi, N. and Floris, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2007) Adaptive, cricket-inspired artificial hair sensor arrays. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 589-593. Technology Foundation STW. ISBN 978-90-73461-49-9
Koelmans, W.W. and de Bruin, G. (2007) Diamagnetische levitatie. De Vonk, 25 (4). pp. 4-6. ISSN 0925-5427
Krijnen, G.J.M. and Floris, J. and Dijkstra, M.A. and Lammerink, T.S.J. and Wiegerink, R.J. (2007) Biomimetic micromechanical adaptive flow-sensor arrays. (Invited) In: Proceedings of "SPIE Europe Microtechnologies for the New Millennium 2007", 2-4 May 2007, Maspalomas, Gran Canaria, Spain. 65920F. Proceedings of SPIE, Bioengineered and Bioinspired Systems 6592. SPIE. ISBN 978-0-8194-6726-3
Krijnen, G.J.M. and Lammerink, T.S.J. and Wiegerink, R.J. and Casas, J. (2007) Cricket inspired flow-sensor arrays. (Invited) In: IEEE Sensors 2007, 28-31 Oct 2007, Atlanta, USA. pp. 539-546. IEEE. ISSN 1930-0395 ISBN 1-4244-1262-5
Lerou, P.P.P.M. and Venhorst, G.C.F. and Veenstra, T.T. and Jansen, H.V. and Burger, J.F. and Holland, H.J. and ter Brake, H.J.M. and Rogalla, H. (2007) All-Micromachined Joule-Thomson Cold Stage. In: Proceedings of the 14th International Cryocooler Conference, 16-20 July 2007, Annapolis, MD, USA. pp. 437-441. International Cryocooler Conference. ISBN not assigned
Lisfi, A. and Williams, C.M. and Nguyen, Long Thang and Lodder, J.C. and Coleman, A. and Corcoran, H. and Johnson, A. and Chang, P. and Kumar, A. and Morgan, W. (2007) Reorientation of magnetic anisotropy in epitaxial cobalt ferrite thin films. Physical review B: Condensed matter and materials physics, 76 (5). 054405(1)-054405(6). ISSN 1098-0121
Louwerse, M.C. and Jansen, H.V. and Moerel, J.L.P.A. and Sanders, H.M. and Zandbergen, B.T.C. (2007) Modular Micro Propulsion System. In: National MicroNano conference 2007, 15-16 November 2007, Wageningen, Netherlands. 22. MicacNed. ISBN not assigned
Luttge, R. and Berenschot, J.W. and de Boer, M.J. and Altpeter, D.M. and Vrouwe, E.X. and van den Berg, A. and Elwenspoek, M.C. (2007) Integrated lithographic molding for microneedle-based devices. Journal of microelectromechanical systems, 16 (4). pp. 872-884. ISSN 1057-7157 *** ISI Impact 1,939 ***
Luttge, R. and van Wolferen, H.A.G.M. and Abelmann, L. (2007) Laser interferometric nanolithography using a new positive chemical amplified resist. Journal of vacuum science and technology B, 25 (6). pp. 2476-2480. ISSN 1071-1023 *** ISI Impact 1,398 ***
Mitsuzuka, K. and Kikuchi, N. and Shimatsu, T. and Kitakami, O. and Aoi, H. and Muraoka, H. and Lodder, J.C. (2007) Switching field and thermal stability of CoPt/Ru dot arrays with various thicknesses. IEEE Transactions on Magnetics, 43 (6). pp. 2160-2162. ISSN 0018-9464 *** ISI Impact 1,277 ***
Moktadir, Z. and van Honschoten, J.W. and Elwenspoek, M.C. (2007) Long range diffusion noise in platinum microwires with metallic adhesion layers. Applied physics letters, 90 (23). 233506. ISSN 0003-6951 *** ISI Impact 3,142 ***
Murillo Vallejo, R. and Siekman, M.H. and Bolhuis, T. and Abelmann, L. and Lodder, J.C. (2007) Thermal stability and switching field distribution of CoNi/Pt patterned media. Microsystem technologies, 13 (2). pp. 177-180. ISSN 0946-7076 *** ISI Impact 0,974 ***
Nguyen, Quoc Duy (2007) Electrochemistry in anisotropic etching of silicon in alkaline solutions. PhD thesis, University of Twente. ISBN 978-90-365-2551-0
Nguyen, Quoc Duy and Elwenspoek, M.C. (2007) Influence of applied potentials on anisotropic etching of silicon described using kinematic wave etch model. Journal of the Electrochemical Society, 154 (12). D684-D691. ISSN 0013-4651 *** ISI Impact 3,014 ***
Patrascu, M. and Stramigioli, S. and de Boer, M.J. and Krijnen, G.J.M. (2007) Nanometer range closed-loop control of a stepper micro-motor for data storage. In: Proceedings of 2007 ASME International Mechanical Engineering Congress and Exposition, 11-15 Nov 2007, Seattle, Washington, USA. pp. 1-9. ASME. ISBN 0791838129
Svetovoy, V.B. (2007) Evanescent character of the repulsive thermal casimir force. Physical review A, 76 (6). 062102-1-062102-4. ISSN 1050-2947
Svetovoy, V.B. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Experimental investigation of anisotropy in isotropic silicon etching. Journal of micromechanics and microengineering, 17 (11). pp. 2344-2351. ISSN 0960-1317 *** ISI Impact 1,768 ***
Thomson, T. and Abelmann, L. and Groenland, J.P.J. (2007) Magnetic data storage: past, present and future. In: Magnetic Nanostructures in Modern Technology. NATO Science for Peace and Security Series Subseries: NATO Science for Peace and Security Series B: Physics and Biophysics. Springer Verlag, Berlin, pp. 237-306. ISBN 978-1-4020-6336-7
Tiggelaar, R.M. and Berenschot, J.W. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Dorsman, R. and Kleijn, C.R. (2007) Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in si (110). Journal of vacuum science and technology B, 25 (4). pp. 1207-1216. ISSN 1071-1023 *** ISI Impact 1,398 ***
Tilmans, H.A.C. and Beyne, E. and Jansen, H.V. and De Raedt, W. (2007) System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent US20070951739 (Application).
Tilmans, H.A.C. and Beyne, E. and Jansen, H.V. and de Raedt, W. (2007) Fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent EP1251577 (Assigned).
Tong, Hien Duy and Jansen, H.V. and Tas, N.R. and Gadgil, V.J. and Carlen, E.T. and van den Berg, A. (2007) Simple technique for direct patterning of nanowires using a nanoslit shadow-mask. In: International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS), 10-14 June 2007, Paris. pp. 191-194. TRANSDUCERS 1. IEEE. ISBN 1-4244-0842-3
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Wafer scale nano-membranes supported on a silicon microsieve. In: Micromechanics Europe 2007, 16-18 September 2007, Portugal. pp. 127-130. University of Minho. ISBN 978-972-98603-3-1
Vanapalli, S. and ter Brake, H.J.M. and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Veenstra, T.T. and Elwenspoek, M.C. (2007) Pressure drop of laminar gas flow in a microchannel containing various pillar matrices. Journal of micromechanics and microengineering, 17 (7). pp. 1381-1386. ISSN 0960-1317 *** ISI Impact 1,768 ***
Vanapalli, S. and Lewis, M. and Gan, Z. and Radebaugh, R. (2007) 120 Hz pulse tube cryocooler for fast cooldown to 50 K. Applied physics letters, 90. pp. 072504-3. ISSN 0003-6951 *** ISI Impact 3,142 ***
Volker, A.W.F. and Blokland, H. and Velthuis, J.F.M. and Lötters, J.C. (2007) Fluid flow meter using thermal tracers. Patent EP20070834679 (Application).
Wiegerink, R.J. and Floris, J. and Jaganatharaja, R.K. and Izadi, N. and Lammerink, T.S.J. and Krijnen, G.J.M. (2007) Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets. In: Sensors, IEEE 2007, 28-31 October, Atlanta, USA. pp. 1073-1076. IEEE Computer Society. ISSN 1930-0395 ISBN 978-1-4244-1262-4
Yang, Chung-Kai and le Fèbre, A.J. and Pandraud, G. and van der Drift, D. and French, P.J. (2007) Field Emission for resonance sensing in MEMS/NEMS. In: 20th International Vacuum Nanoelectronics Conference, 8-12 July 2007, Chicago, USA. pp. 72-73. IEEE Computer Society. ISBN 1-4244-1134-3
Yntema, D.R. and Druyvesteyn, W.F. and Wiegerink, R.J. (2007) Choosing the most appropriate sensor for acoustic measurements. In: Proceedings of the 19th International Congress on Acoustics, 02-07 Sep 2007, Madrid, Spain. pp. 1-6. Loudspeakers and sound reinforcement 38. Spanish Acoustical Society. ISBN 84-87985-12-2
Yntema, D.R. and Wiegerink, R.J. and van Honschoten, J.W. and Elwenspoek, M.C. (2007) Fully integrated three dimensional sound intensity sensor. In: Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on, 21-25 January, Kobe, Japan. pp. 51-54. IEEE Computer Society. ISBN 978-1-4244-0950-1
Zhang, Li and Bain, J.A. and Zhu, Jian-Gang and Abelmann, L. and Onoue, T. (2007) The role of MFM signal in mark size measurement in probe-based magnetic recording on CoNi/Pt multilayers. Physica B, 387 (1-2). pp. 328-332. ISSN 0921-4526 *** ISI Impact 1,352 ***
Zhao, Yiping and Berenschot, J.W. and de Boer, M.J. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2007) Silicon oxide nanoimprint stamp fabrication by edge lithography reinforced with silicon nitride. In: 18th MicroMechanics Europe Workshop, MME 2007, 16-18 September 2007, Guimaraes, Portugal. pp. 253-256. Micro Mechanics Europe. ISBN 9789729860331

2006

Antezza, M. and Pitaevskii, L.P. and Stringari, S. and Svetovoy, V.B. (2006) Casimir-lifshitz force out of thermal equilibrium and asymptotic nonadditivity. Physical review letters, 97. 223203. ISSN 0031-9007 *** ISI Impact 7,645 ***
Besseling, J.H. and Lötters, J.C. (2006) Mass flowmeter for measuring by the CT method. Patent US7028544 (Assigned).
Brouwer, D.M. and de Jong, B.R. and de Boer, M.J. and Soemers, H.M.J.R. (2006) Rotational precision mems-based clamping mechanism for stable fixation of elastic mechanisms. In: Proceedings of the Annual Meeting of the American Society of Precision Engineering (ASPE), October 15-20, 2006, Monterey CA, USA. pp. 275-278. MEMS, LIGA & Nanotechnology. American Society for Precision Engineering. ISSN not assigned
Brouwer, D.M. and de Jong, B.R. and Soemers, H.M.J.R. and van Dijk, J. (2006) Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application. Journal of micromechanics and microengineering, 16 (6). pp. 7-12. ISSN 0960-1317 *** ISI Impact 1,768 ***
Bruinink, C.M. and Peter, M. and Maury, P.A. and de Boer, M.J. and Kuipers, L. and Huskens, J. and Reinhoudt, D.N. (2006) Capillary force lithography: fabrication of functional polymer templates as versatile tools for nanolithography. Advanced functional materials, 16. pp. 1555-1565. ISSN 1616-301X *** ISI Impact 11,382 ***
Davelaar, B.J. and Abelmann, L. (2006) Comment on Wang, Liu, and Wang (2003). Synthese, 153 (3). pp. 457-458. ISSN 0039-7857 *** ISI Impact 0,723 ***
Deladi, S. and Iannuzzi, D. and Gadgil, V.J. and Schreuders, H. and Elwenspoek, M.C. (2006) Carving fiber-top optomechanical transducers from an optical fiber. Journal of micromechanics and microengineering, 16. pp. 886-889. ISSN 0960-1317 *** ISI Impact 1,768 ***
Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Versatile surface channel concept for microfluidic applications. In: Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006, 3-5 Sept 2006, Southampton - England. pp. 37-40. Southampton University Press. ISBN 08543-2848-3
Dijkstra, M.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Nano-flow thermal sensor applying dymamic w-2w sensing method. In: Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006, 3-5 Sept 2006, Southampton - England. pp. 1-4. Southampton University Press. ISBN 085432 848 3
Eijkel, J.C.T. and van Delft, K.M. and Mijatovic, D. and Rathgen, H. and Tas, N.R. and Mugele, F.G. and van den Berg, A. (2006) Nanochannels with integrated Fabry-Perot interferometry: a new tool for nanofluidics. In: Proceedings of microTAS 2006 Conference, 5-9 Nov 2006, Tokyo, Japan. pp. 615-617. Micro Total Analysis Systems 2006-1. Japan Academic Association Inc. ISBN 4-9903269-0-3
Esquivel-Sirvent, R. and Villarreal, C. and Mochan, W.L. and Contreras-Reyes, A.M. and Svetovoy, V.B. (2006) Spatial dispersion in Casimir forces: a brief review. Journal of physics A: mathematical and general, 39. pp. 6323-6331. ISSN 0305-4470
Fazal, I. and Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2006) Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machining. Journal of micromechanics and microengineering, 16. pp. 1207-1214. ISSN 0960-1317 *** ISI Impact 1,768 ***
Fazal, I. and Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2006) Stepper Motor Actuated Microvalve. Journal of Physics: Conference Series, 34. pp. 1032-1037. ISSN 1742-6588
le Fèbre, A.J. and Lodder, J.C. and Abelmann, L. (2006) Tip-sample distance control for magnetic probe recording. In: Proceedings of the 2006 Joint European Workshop IMST 2006 and E*PCOS 2006, 29 May - 31 May 2006, Grenoble, France. pp. 253-254. IMST/EPCOS, Minatec Center. ISBN not assigned
Fernández, L.J. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2006) Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications. Journal of micromechanics and microengineering, 16. pp. 862-868. ISSN 0960-1317 *** ISI Impact 1,768 ***
Fernández, L.J. and Wiegerink, R.J. and Flokstra, Jaap and Sesé, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) A capacitive rf power sensor based on mems technology. Journal of micromechanics and microengineering, 16. S1099-S1107. ISSN 0960-1317 *** ISI Impact 1,768 ***
Girones, M. and Akbarsyah, I.J. and Nijdam, W. and van Rijn, C.J.M. and Jansen, H.V. and Lammertink, R.G.H. and Wessling, M. (2006) Polymeric microsieves produced by phase separation micromolding. Journal of membrane science, 283 (1-2). pp. 411-424. ISSN 0376-7388 *** ISI Impact 5,557 ***
Haneveld, J. (2006) Nanochannel Fabrication and characterization using bond micromachining. PhD thesis, University of Twente. ISBN 90-365-2312-5
Haneveld, J. and Berenschot, J.W. and Maury, P.A. and Jansen, H.V. (2006) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. Journal of micromechanics and microengineering, 16. S24-S28. ISSN 0960-1317 *** ISI Impact 1,768 ***
Haneveld, J. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2006) Fabrication and capillary filling of sub-10nm nanochannels. In: Proceedings of the NanoNed / MicroNed Symposium II Eindhoven 2006, 16-17 Nov, Eindhoven. 192. Technische Universiteit Eindhoven. ISBN not assigned
Haneveld, J. and Lammerink, T.S.J. and Dijkstra, M.A. and Wiegerink, R.J. (2006) Micro coriolis flow sensor. In: Proceedings of the NanoNed / MicroNed Symposium II, 16-17 Nov 2006, Eindhoven. 174. University of Eindhoven. ISBN not assigned
van Honschoten, J.W. and Yntema, D.R. and Dijkstra, M.A. and Svetovoy, V.B. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Analysis of packaging effects on the performance of the microflown. In: Proceedings of DTIP of MEMS & MOEMS 2206, 26-28 April 2006, Stresa Italy. pp. 1-6. TIMA Editions/DTIP. ISBN 2-916187-03-0
van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Directional sensitivity of a three dimensional particle velocity sensor. In: Proceedings of the 17 workshop on Micromachining, Micromechanics and Microsystems, 3-5 Sept 2006, Southampton. pp. 201-204. Southampton University Press. ISBN 085432-848-3
Iannuzzi, D. and Deladi, S. and Berenschot, J.W. and De Man, S. and Heeck, K. and Elwenspoek, M.C. (2006) Fiber-top atomic force microscope. Review of scientific instruments, 77. 106105-1-106105-3. ISSN 0034-6748 *** ISI Impact 1,336 ***
Iannuzzi, D. and Deladi, S. and Elwenspoek, M.C. (2006) Fiber-top cantilevers: a new sensor on the tip of a fiber. Optics and Photonics News, 17 (12). pp. 39-39. ISSN 1047-6938
Iannuzzi, D. and Deladi, S. and Gadgil, V.J. and Sanders, R.G.P. and Schreuders, H. and Elwenspoek, M.C. (2006) Monolithic fiber-top sensor for critical environments and standard applications. Applied physics letters, 88 (053501). pp. 1-3. ISSN 0003-6951 *** ISI Impact 3,142 ***
de Jong, B.R. (2006) A six degrees of freedom mems manipulator. PhD thesis, University of Twente. ISBN 90-365-2413-X
de Jong, B.R. and Brouwer, D.M. and Jansen, H.V. and de Boer, M.J. and Lammertink, T.G. and Stramigioli, S. and Krijnen, G.J.M. (2006) A planar 3 dof sample manipulator for nano-scale characterization. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, 2006, May 2006, Istanbul. pp. 750-753. IEEE Computer Society. ISSN 0018-9219 ISBN 0-7803-9475-5
Krijnen, G.J.M. and Dijkstra, M.A. and van Baar, J.J.J. and Lammerink, T.S.J. and Wiegerink, R.J. (2006) Biomimetic, distributed micromechanical flow-sensing. (Invited) In: Proceedings of 20th eurosensors conference, 17-20 Sept. 2006, Göteborg - Sweden. pp. 1-2. Chalmers University of Technology. ISBN 9163192810
Krijnen, G.J.M. and Dijkstra, M.A. and van Baar, J.J.J. and Shankar, S.S. and Kuipers, W.J. and de Boer, J.H. and Altpeter, D.M. and Lammerink, T.S.J. and Wiegerink, R.J. (2006) Mems based hair flow-sensors as model systems for acoustic perception studies. Nanotechnology, 17. S84-S89. ISSN 0957-4484 *** ISI Impact 3,573 ***
Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2006) A micromachined capacitive incremental position sensor: part 2. experimental assessment. Journal of micromechanics and microengineering, 16 (6). S125-S134. ISSN 0960-1317 *** ISI Impact 1,768 ***
Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2006) A micromachined capacitive incremental position sensor: part 1. Analysis and simulations. Journal of micromechanics and microengineering, 16. S116-S124. ISSN 0960-1317 *** ISI Impact 1,768 ***
Kuipers, W.J. and van Baar, J.J.J. and Dijkstra, M.A. and Wiegerink, R.J. and Lammerink, T.S.J. and de Boer, J.H. and Krijnen, G.J.M. (2006) Drag force actuated bistable microswitches for flow sensing. In: Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on, 22-26 Jan. 2006, Istanbul - Turkey. pp. 658-661. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-9475-5
Lötters, J.C. (2006) Mass flowmeter. Patent US6988400 (Assigned).
Lerou, P.P.P.M. and Vanapalli, S. and Jansen, H.V. and Burger, J.F. and Veenstra, T.T. and Venhorst, G.C.F. and Holland, H.J. and Elwenspoek, M.C. and ter Brake, H.J.M. and Rogalla, H. (2006) Microcooling Developments at the University of Twente. In: Advances in cryogenic engineering: transactions of the cryogenic engineering. AIP Conference Proceedings 823. American Institute of Physics, Maryland, pp. 1-8. ISSN 0094-243X ISBN 9780735403178
Lodder, J.C. (2006) Patterned Nanomagnetic Films. In: Advanced Magnetic Nanostructures. Springer Verlag, New York, pp. 261-288. ISBN 978-0-387-23309-3
Louwerse, M.C. and Jansen, H.V. and Moerel, J.L.P.A. and Sanders, H.M. and Zandbergen, B.T.C. (2006) Design of a cold gas micro thruster. In: Proceeding of NanoNed/MicroNed Symposium II, 16-17 Nov 2006, Eindhoven. 180. Eindhoven University Press. ISBN not assigned
Louwerse, M.C. and Sanders, H.M. and Jansen, H.V. (2006) Microsysteemtechnologie verpakt in een buisje. Ruimtevaart. pp. 11-15. ISSN 1382-2446
Luttge, R. (2006) Exposure: an art from the past carrying the economical success of the 21st century. In: Belichting. E.T.S.V. Scintilla Jaarboek 2005-2006. ETSV Scintilla Universiteit Twente, Enschede, pp. 109-116. ISBN not assigned
Mehendale, A. and Lötters, J.C. and Zwikker, J.M. (2006) Mass flowmeter of the coriolis type. Patent US20060412175 (Application).
Mehendale, A. and Lötters, J.C. and Zwikker, J.M. (2006) Mass flowmeter of the coriolis type. Patent US7353718 (Assigned).
Mitsuzuka, K. and Kikuchi, N. and Shimatsu, T. and Kitakami, O. and Aoi, H. and Muraoka, H. and Lodder, J.C. (2006) Pt content dependence of magnetic properties of CoPt/Ru patterned films. IEEE Transactions on Magnetics, 42 (12). pp. 3883-3885. ISSN 0018-9464 *** ISI Impact 1,277 ***
Nguyen, Quoc Duy and Elwenspoek, M.C. (2006) Characterisation of anisotropic etching in KOH using network etch rate function model: influence of an applied potential in terms of microscopic properties. Journal of physics: conference series, 34 (1). pp. 1038-1043. ISSN 1742-6588
Pirozhenko, I. and Lambrecht, A. and Svetovoy, V.B. (2006) Sample dependence of the casimir force. New Journal of Physics, 8. pp. 238-253. ISSN 1367-2630 *** ISI Impact 3,570 ***
Rottenberg, X. and Jansen, H.V. and Tilmans, H.A.C. and de Raedt, W. (2006) Switchable capacitor and method of making the same. Patent US7002439 (Assigned).
Sarajlic, E. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) Fabrication and characterization of an electrostatic contraction beams micromotor. In: 19th IEEE International Conference on MEMS 2006, 22-26 Jan. 2006, Istanbul - Turkey. pp. 814-817. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-9475-5
Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators. Sensors and actuators A: Physical, 130-131. pp. 340-345. ISSN 0924-4247 *** ISI Impact 2,201 ***
Steinmann, T. and Casas, J. and Krijnen, G.J.M. and Dangles, O. (2006) Air-flow sensitive hairs: boundary layers in oscillatory flows around arthropod appendages. The Journal of Experimental Biology, 209. pp. 4398-4408. ISSN 0022-0949 *** ISI Impact 2,914 ***
Svetovoy, V.B. and Berenschot, J.W. and Elwenspoek, M.C. (2006) Precise test of the diffusion-controlled wet isotropic etching of silicon via circular mask openings. Journal of the Electrochemical Society, 153 (9). C641-C647. ISSN 0013-4651 *** ISI Impact 3,014 ***
Svetovoy, V.B. and Berenschot, J.W. and Elwenspoek, M.C. (2006) Experimental verification of the diffusion theory for wet isotropic etching of si via circular mask openings. In: Fifth International Workshop on Physical Chemistry of Wet Etching of Semiconductors, 19-21 June 2006, Saarbrücken, Germany. University of Saarbrücken. ISBN not assigned
Svetovoy, V.B. and Esquivel, R. (2006) The casimir free energy in high- and low-temperature limits. Journal of physics A: mathematical and general, 39. pp. 6777-6784. ISSN 0305-4470
Tas, N.R. and Haneveld, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) Surface Tension Effects in Nanochannels: Capillary Filling and Negative Pressure. (Invited) In: Meeting abstracts 210th ECS Meeting, 29 Oct - 3 Nov 2006, Cancun, Mexico. pp. 1-1. Electrochemical Society. ISSN 1091-8213
Timmer, B.H. and van Delft, K.M. and Koelmans, W.W. and Olthuis, W. and van den Berg, A. (2006) Selective low concentration ammonia sensing in a microfluidic lab-on-a-chip. IEEE sensors journal, 6 (3). pp. 829-835. ISSN 1530-437X *** ISI Impact 1,889 ***
Vargas, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2006) Seedless electroplating on patterned silicon. Journal of micromechanics and microengineering, 16 (6). pp. 1-6. ISSN 0960-1317 *** ISI Impact 1,768 ***
Winkel, J.C. and Yntema, D.R. and Druyvesteyn, W.F. and de Bree, H.E. (2006) A particle velocity based method for separating all multi incoherent sound sources. In: Proceedings of the 31st FISITA World Automotive Congress, 22-27 Oct 2006, Yokohama, Japan. pp. 1-9. Society of Automotive Engineers of Japan (JSAE) and FISITA. ISBN 4-915219-83-6
Yntema, D.R. and de Bree, H.E. and van Heck, J.G.A.M. (2006) An intuitive handheld acoustic noise source finder. In: proceedings from the FISITA 2006 World Automotive Congress, 22-27 Oct. 2006, Yokohama, Japan. FISITA 2006 World Automotive Congress. FISITA JSAE. ISBN 4-915219-83-6
Yntema, D.R. and Druyvesteyn, W.F. and Elwenspoek, M.C. (2006) A four particle velocity sensor device. Journal of the Acoustical Society of America, 119. pp. 943-951. ISSN 0001-4966 *** ISI Impact 1,572 ***
Yntema, D.R. and van Honschoten, J.W. and de Bree, H.E. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) A three dimensional microflown. In: Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on, 22-26 Jan. 2006, Instanbul - Turkey. pp. 654-657. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-9475-5
Zhang, Li and Bain, J.A. and Zhu, Jian-Gang and Abelmann, L. and Onoue, T. (2006) The effect of external magnetic field on mark size in heat-assisted probe recording on CoNi/Pt multilayers. Journal of applied physics, 99 (023902). pp. 1-5. ISSN 0021-8979 *** ISI Impact 2,101 ***
Zhang, Li and Bain, J.A. and Zhu, Jian-Gang and Abelmann, L. and Onoue, T. (2006) A model of heat transfer in STM-based magnetic recording on CoNi/Pt multilayers. Physica B, 381. pp. 204-208. ISSN 0921-4526 *** ISI Impact 1,352 ***
Zhang, Li and Bain, J.A. and Zhu, Jian-Gang and Abelmann, L. and Onoue, T. (2006) Heat-assisted magnetic probe recording on a granular CoNi/Pt multilayered film. Journal of physics D: applied physics, 39. pp. 2485-2487. ISSN 0022-3727 *** ISI Impact 2,772 ***
Zhang, Li and Bain, J.A. and Zhu, Jian-Gang and Abelmann, L. and Onoue, T. (2006) Characterization of heat-assisted magnetic probe recording on CoNi/Pt multilayers. Journal of magnetism and magnetic materials, 305 (1). pp. 16-23. ISSN 0304-8853 *** ISI Impact 2,357 ***
Zhang, Li and Bain, J.A. and Zhu, Jian-Gang and Abelmann, L. and Onoue, T. (2006) Dynamic domain motion of thermal-magnetically formed marks on CoNi/Pt multilayers. Journal of applied physics, 100 (053901). pp. 1-5. ISSN 0021-8979 *** ISI Impact 2,101 ***

2005

van Baar, J.J.J. and Dijkstra, M.A. and Wiegerink, R.J. and Lammerink, T.S.J. and de Boer, J.H. and Krijnen, G.J.M. (2005) Arrays of cricket-inspired sensory hairs with capacitive motion detection. In: Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, 30-01 / 03-02-2005, Miami. pp. 646-649. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5
Benito-Lopez, F. and Verboom, W. and Kakuta, M. and Gardeniers, J.G.E. and Egberink, R.J.M. and Oosterbroek, R.E. and van den Berg, A. and Reinhoudt, D.N. (2005) Optical fiber-based-on-line UV/Vis spectroscopic monitoring of chemical reaction kinetics under high pressure in a capillary microreactor. Chemical communications, 22. pp. 2857-2859. ISSN 1359-7345 *** ISI Impact 6,567 ***
Blom, M.T. and Chmela, E. and van der Heyden, F.H.J. and Oosterbroek, R.E. and Tijssen, R.P. and Elwenspoek, M.C. and van den Berg, A. (2005) A differential viscosity detector for use in miniaturized chemical separation systems. Journal of microelectromechanical systems, 14 (1). pp. 70-80. ISSN 1057-7157 *** ISI Impact 1,939 ***
Blom, M.T. and van 't Oever, R. and Claes, P. and Verboom, W. and O'Donohue, S. and van den Berg, A. and Reinhoudt, D.N. (2005) A micro differential viscosity detector for polymer separation system. In: MicroTAS 2005 Conference -9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 9-13 October 2005, Boston, MA, USA. pp. 988-990. Micro total analysis systems 2005. Transducer Research Foundation. ISBN 9780444511003
Brivio, M. and Liesener, A. and Oosterbroek, R.E. and Verboom, W. and Karst, U. and van den Berg, A. and Reinhoudt, D.N. (2005) Chip-based on-line nanospray MS method enabling study of the kinetics of isocyanate derivatization reactions. Analytical chemistry, 77 (21). pp. 6852-6856. ISSN 0003-2700 *** ISI Impact 5,886 ***
Brivio, M. and Liesner, A. and Oosterbroek, R.E. and Verboom, W. and Karst, U. and van den Berg, A. and Reinhoudt, D.N. (2005) Kinetic study of an on-chip isocyanate derivatization reaction by on-line nano-esi ms. In: MicroTAS 2005 Conference - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 9-13 Oct 2005, Boston, MA, USA. pp. 927-929. Transducer Research Foundation. ISBN 0-9743611-1-9
Brivio, M. and Oosterbroek, R.E. and Verboom, W. and van den Berg, A. and Reinhoudt, D.N. (2005) Simple chip-based interfaces for on-line monitoring of supramolecular interactions by nano-ESI MS. Lab on a chip, 5. pp. 1111-1122. ISSN 1473-0197 *** ISI Impact 5,586 ***
Brivio, M. and Tas, N.R. and Goedbloed, M.H. and Gardeniers, J.G.E. and Verboom, W. and van den Berg, A. and Reinhoudt, D.N. (2005) A maldi-chip integrated system with a monitoring window. Lab on a chip, 5 (4). pp. 378-381. ISSN 1473-0197 *** ISI Impact 5,586 ***
Brouwer, D.M. and de Jong, B.R. and Soemers, H.M.J.R. and van Dijk, J. (2005) Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force un-powerd for TEM application. In: Proceedings of the 16th MME MicroMechanics Europe Workshop, 4-6 September, Göteborg, Sweden. pp. 1-4. Chalmers University. ISBN 91-631-7553-3
Dao, T.N.N. and Kikuchi, N. and Abelmann, L. and Lodder, J.C. (2005) Micromagnetic simulation of Non Uniform Nanodots with Perpendicular Anisotropy. In: International Magnetics Conference - INTERMAG Asia 2005, 4-8 April 2005, Nagoya, Japan. pp. 1847-1848. IEEE Magnetics Society. ISBN 0-7803-9009-1
Deladi, S. (2005) MEMS generated and afm-based surface modification. PhD thesis, University of Twente. ISBN 90-365-2138-6
Deladi, S. and Berenschot, J.W. and de Boer, M.J. and Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2005) In situ characterization technique for nanotribological investigations. Review of scientific instruments, 76. pp. 016102-016104. ISSN 0034-6748 *** ISI Impact 1,336 ***
Deladi, S. and Berenschot, J.W. and Tas, N.R. and de Boer, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of micromachined fountain pen with in situ characterization possibility of nanoscale surface modification. Journal of micromechanics and microengineering, 15. pp. 528-534. ISSN 0960-1317 *** ISI Impact 1,768 ***
Deladi, S. and Sarajlic, E. and Kuijpers, A.A. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Applications of the microelectromechanical systems in nanoscience. In: Proceedings of the II Eccomas Conference on Smart Structures and Materials, 18-21 July 2005, Lissabon, Portugal. pp. 1-15. Instituto de Engenharia Mecânica. ISBN 972-8688-42-3
Deladi, S. and Tas, N.R. and Berenschot, J.W. and de Boer, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005, 30-01 / 03-02-2005, Miami. pp. 564-567. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5
Deladi, S. and Tas, N.R. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Multifunctional tool for expanding afm-based applications. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 5-9 June 2005, Seoul. pp. 159-162. Digest of Technical Papers. TRANSDUCERS '05 1. IEEE Computer Society. ISBN 0-7803-8994-8
Dijkstra, M.A. and van Baar, J.J.J. and Wiegerink, R.J. and Lammerink, T.S.J. and de Boer, J.H. and Krijnen, G.J.M. (2005) Artificial sensory hairs based on the flow sensitive receptor hairs of crickets. Journal of micromechanics and microengineering, 15. S132-S138. ISSN 0960-1317 *** ISI Impact 1,768 ***
Esquivel, R. and Svetovoy, V.B. (2005) Nonlocal thin films in calculations of the casimir force. Physical review B: Condensed matter and materials physics, 72 (4). 45443. ISSN 1098-0121
Fazal, I. and Berenschot, J.W. and de Boer, J.H. and Jansen, H.V. and Elwenspoek, M.C. (2005) Bond strength tests between silicon wafers and duran tubes (fusion bonded fluidic interconnects). In: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., 5-9 June 2005, Seoul. pp. 936-939. Solid-State Sensors, Actuators and Microsystems 1. IEEE Computer Society. ISBN 0-7803-8994-8
Fernández, L.J. (2005) A capacitive rf power sensor based on mems technology. PhD thesis, University of Twente. ISBN 90-365-2294-3
Fernández, L.J. and Arz, U. and Schubert, D. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, Jaap (2005) A cmos compatible process for improved rf performance on highly doped substrates. In: Proceedings. 9th IEEE Workshop on Signal Propagation on Interconnects, 2005., 10-13 May 2005, Garmisch Partenkirchen. pp. 167-170. IEEE Computer Society. ISBN 0-7803-9054-7
Fernández, L.J. and Berenschot, J.W. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2005) Fabrication of thick silicon nitride blocks for integration of rf devices. Electronics letters, 41 (3). pp. 1-2. ISSN 0013-5194 *** ISI Impact 0,854 ***
Fernández, L.J. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2005) Radio frequency power sensor based on mems technology with ultra low loss. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005., 30-01 / 03-02-2005, Miami. pp. 191-194. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5
Fox, M.B. and Esveld, E. and Luttge, R. and Boom, R. (2005) A new pulsed electric field microreactor: comparison between the laboratory and microtechnology scale. Lab on a chip, 5 (9). pp. 943-948. ISSN 1473-0197 *** ISI Impact 5,586 ***
Haneveld, J. and Berenschot, J.W. and Pascale, M. and Jansen, H.V. (2005) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 72-75. Chalmers University . ISBN 9163175533
Haq, E. and Banerjee, T. and Siekman, M.H. and Lodder, J.C. and Jansen, R. (2005) Spin-filtering of non-equilibrium holes in semiconductor-ferromagnet hybrid structure. In: IEEE International Magnetics Conference - INTERMAG Asia, 4-8 April 2005, Nagoya, Japan. pp. 1201-1202. Physics of Spin Injection Sessions FA (FA-06). IEEE Magnetics Society. ISBN 0-7803-9009-1
Hoevers, H.F.C. and Ridder, M.L. and Germeau, A. and Bruijn, M.P. (2005) Radiative ballistic phonon transport in silicon-nitride membranes at low temperatures. Applied physics letters, 86. 251903. ISSN 0003-6951 *** ISI Impact 3,142 ***
van Honschoten, J.W. and Svetovoy, V.B. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Optimization of a thermal flow sensor for acoustic particle velocity measurements. Journal of microelectromechanical systems, 14 (3). pp. 436-443. ISSN 1057-7157 *** ISI Impact 1,939 ***
de Jong, B.R. and Brouwer, D.M. and Jansen, H.V. and de Boer, M.J. and Krijnen, G.J.M. (2005) Nanometer resolution TEM sample manipulator for rotational and translational positioning. In: Proceedings of EuroSensors XIX 2005, 11-14 September 2005, Barcelona, Spain. pp. 1-4. Elsevier. ISBN 84-475-2984-3
de Jong, B.R. and Jansen, H.V. and de Boer, M.J. and Krijnen, G.J.M. (2005) Tailored Etch-Profiles of high aspect ratio trenches to prevent voids after refill with LPCVD sirn. In: 16th MicroMechanics Europe Workshop, 4-6 September 2005, Gotheborg, Sweden. pp. 1-4. Chalmers University of Technology. ISBN 9163175533
Kohlheyer, D. and Unnikrishnan, S. and Schlautmann, S. and Besselink, G.A.J. and Tudos, A.J. and Schasfoort, R.B.M. (2005) Laminar Flow Microarray Patterning by Perpendicular Electrokinetic Focusing. In: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2005, 9-13 October 2005, Boston, MA, USA. pp. 1337-1339. The Transducer Research Foundation. ISBN 9780974361116
Krijnen, G.J.M. and Dijkstra, M.A. and van Baar, J.J.J. and de Boer, J.H. and Lammerink, T.S.J. and Wiegerink, R.J. (2005) MEMS based hair flow-sensors as model systems for acoustic perception studies. In: International Conference on Bio-Nano-Information Fusion, 20-22 July 2005, Marina del Rey, CA, USA. pp. 1-4. IOP Science. ISBN not assigned
Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2005) Analysis Of Micromachined Capacitive Incremental Position Sensor. In: 16th MicroMechanics European Workshop, 4-6 Sep 2005, Gotheborg, Sweden. pp. 1-4. Elsevier. ISBN 978-0-4445-1037-2
Lötters, J.C. (2005) Mass flowmeter. Patent US6945106 (Assigned).
Lemay, S.G. and van den Broek, D.M. and Storm, A.J. and Krapf, D. and Smeets, R.M.M. and Heering, H.A. and Dekker, C. (2005) Lithographically fabricated nanopore-based electrodes for electrochemistry. Analytical chemistry, 77 (6). pp. 1911-1915. ISSN 0003-2700 *** ISI Impact 5,886 ***
Nguyen, Quoc Duy and Elwenspoek, M.C. (2005) Influence of an Applied Potential on the Anisotropic Etch rates of Silicon in KOH. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 45-48. Chalmers University of Technology. ISBN 978-0-4445-1037-2
Park, B.G. and Banerjee, T. and Min, B.C. and Sanderink, J.G.M. and Lodder, J.C. and Jansen, R. (2005) Probing spin-polarized tunneling at high bias and temperature with a magnetic tunnel transistor. In: International Magnetics Conference - INTERMAG Asia, 4-8 April 2005, Nagoya, Japan. pp. 1199-1200. IEEE Magnetics Society. ISBN 0-7803-9009-1
Sarajlic, E. (2005) Electrostatic microactuators fabricated by vertical trench isolation technology. PhD thesis, University of Twente. ISBN 90-365-2212-9
Sarajlic, E. and Berenschot, J.W. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Bidirectional electrostatic linear shuffle motor with two degrees of freedom. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005., 30-01 / 03-02-2005, Miami. pp. 391-394. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5
Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of 3d nanowire frames by conventional micromachining technology. In: Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems 2005, 5-9 June 2005, Seoul. pp. 27-30. IEEE Computer Society. ISBN 0-7803-8994-8
Sarajlic, E. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology. In: Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, 5-9 June 2005, Seoul. pp. 53-56. IEEE Computer Society. ISBN 0-7803-8994-8
Sarajlic, E. and de Boer, M.J. and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Bulk micromachining technology for fabrication of two-level mems in standard silicon substrate. In: Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems 2005, 5-9 June 2005, Seoul. pp. 1404-1405. IEEE Computer Society. ISBN 0-7803-8994-8
Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Surface micromachined fabrication of piezoelectric ain unimorph suspension devices for rf resonator applications. In: Proceedings of the 13th International Conferences on Solid-State Sensors, Actuators and Microsystems 2005, 5-9 June 2005, Seoul. pp. 1362-1365. IEEE Computer Society. ISBN 0-7803-8994-8
Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators. In: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS (DTIP), 1-3 June 2005, Montreux, Switzerland. DTIP of MEMS & MOEMS. ISBN 2-84813-057-1
Saravanan, S. and Dijkstra, M. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) AIN thin film unimorph piezoelectric actuators on polysilicon microbridges. In: 16th MME MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 320-323. Chalmers University. ISBN 91-631-7553-3
Saravanan, S. and Keim, E.G. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Growth and surface characterization of piezoelectric AlN thin films on silicon (100) and (110) substrates. In: Microscopy of Semiconducting Materials. Springer Proceedings in Physics 107. Springer, pp. 75-78. ISSN 0930-8989 ISBN 978-3-540-31914-6
Schmuhl, R. and Nijdam, A.J. and Sekulic, J. and Chowdhury, R. and van Rijn, C.J.M. and van den Berg, A. and ten Elshof, J.E. and Blank, D.H.A. (2005) Si-supported mesoporous and microporous oxide interconnects as electrophoretic gates for application in microfluidic devices. Analytical chemistry, 77 (1). pp. 178-184. ISSN 0003-2700 *** ISI Impact 5,886 ***
Svetovoy, V.B. and Esquivel, R. (2005) Nonlocal impedances and the casimir entropy at low temperatures. Physical review E Statistical, nonlinear, and soft matter physics, 72 (3). 36113. ISSN 1539-3755
Tiggelaar, R.M. and Berenschot, J.W. and de Boer, J.H. and Sanders, R.G.P. and Gardeniers, J.G.E. and Oosterbroek, R.E. and van den Berg, A. and Elwenspoek, M.C. (2005) Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes. Lab on a chip, 5. pp. 326-336. ISSN 1473-0197 *** ISI Impact 5,586 ***
Tiggelaar, R.M. and Berenschot, J.W. and van Male, P. and Oosterbroek, R.E. and Gardeniers, J.G.E. and de Croon, M.H.J.M. and Schouten, J.C. and van den Berg, A. and Elwenspoek, M.C. (2005) Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane. Sensors and actuators A: Physical, 119 (1). pp. 196-205. ISSN 0924-4247 *** ISI Impact 2,201 ***
Tong, Hien Duy and van den Berg, A. and Gardeniers, J.G.E. and Jansen, H.V. and Gielens, F.C. and Elwenspoek, M.C. (2005) Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane. Thin solid films, 479 (1-2). pp. 89-94. ISSN 0040-6090 *** ISI Impact 1,761 ***
Tong, Hien Duy and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, H.V. and Berenschot, J.W. and de Boer, M.J. and de Boer, J.H. and van Rijn, C.J.M. and Elwenspoek, M.C. (2005) Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation. Journal of microelectromechanical systems, 14 (1). pp. 113-123. ISSN 1057-7157 *** ISI Impact 1,939 ***
Valero, A. and Luttge, R. and van Nieuwkasteele, J.W. and Andersson-Svahn, S.M.H. and van den Berg, A. (2005) Flow-through microfluidic chip for cell transfection by electropermeabilization. In: MicroTAS 2005 Conference - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 9-13 Oct 2005, Boston, MA, USA. pp. 1395-1397. Transducer Research Foundation. ISBN 9780974361116
Valero, A. and Merino, F. and Wolbers, F. and Luttge, R. and Vermes, I. and Andersson-Svahn, S.M.H. and van den Berg, A. (2005) Apoptotic cell death dynamics of HL60 cells studied using a microfluidic cell trap device. Lab on a chip, 5 (1). pp. 49-55. ISSN 1473-0197 *** ISI Impact 5,586 ***
Vanapalli, S. and Burger, J.F. and Veenstra, T.T. and Holland, H.J. and Venhorst, G.C.F. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2005) Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 354-357. Chalmers University of Technology. ISBN 978-0-4445-1037-2
Vargas, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2005) Direct Electroplating on Highly Doped Patterned Silicon Wafers. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 1-4. Elsevier. ISBN 978-0-4445-1037-2
Vrouwe, E.X. (2005) Quantitative microchip capillary electrophoresis for inorganic ion analysis at the point of care. PhD thesis, University of Twente. ISBN 90-9019293-X
Vrouwe, E.X. and Luttge, R. and Olthuis, W. and van den Berg, A. (2005) Microchip analysis of lithium in blood using moving boundary electrophoresis and zone electrophoresis. Electrophoresis, 26 (15). pp. 3032-3042. ISSN 0173-0835 *** ISI Impact 2,482 ***
Wensink, H. and Benito-Lopez, F. and Hermes, D.C. and Verboom, W. and Gardeniers, J.G.E. and Reinhoudt, D.N. and van den Berg, A. (2005) Measuring reaction kinetics in a lab-on-a-Chip by microcoil NMR. Lab on a chip, 5 (3). pp. 280-284. ISSN 1473-0197 *** ISI Impact 5,586 ***
Wiegerink, R.J. and van Baar, J.J.J. and de Boer, J.H. and Ridder, M.L. and Bruijn, M.P. and Germeau, A. and Hoevers, H.F.C. (2005) Cryogenic imaging x-ray spectrometer. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005., 30-01 / 03-02-2005, Miami. pp. 56-59. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5
Wolbers, F. and ter Braak, P.M. and Le Gac, S. and Luttge, R. and Andersson-Svahn, S.M.H. and Vermes, I. and van den Berg, A. (2005) Evaluation of the viability of HL60 cells in contact with commonly used microchip materials. In: MicroTAS 2005 Conference - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 9-13 Oct 2005, Boston, MA, USA. pp. 1288-1290. Transducer Research Foundation. ISSN 1556-5890 ISBN 9780444511003
Yeshurun, Y. and Hefetz, M. and Berenschot, J.W. and de Boer, M.J. and Altpeter, D.M. and Boom, G. (2005) Polymer Microneedles. Patent US6924087 (Assigned).
Yntema, D.R. and de Bree, H.E. (2005) A Microflown based sound pressure microphone suitable for harsh environments. In: National Conference on Noise Control Engineering, NOISE-CON 2005, 17-19 Oct 2005, Minneapolis, Minnesota, USA. pp. 1-8. INCE-USA. ISBN not assigned

2004

Besseling, J.H. and Lötters, J.C. (2004) Mass flowmeter for measuring by the CT method. Patent US20040834104 (Application).
Bruinink, C.M. and Peter, M. and de Boer, M.J. and Kuipers, L. and Huskens, J. and Reinhoudt, D.N. (2004) Stamps for submicrometer soft lithography fabricated by capillary force lithography. Advanced materials, 16 (13). pp. 1086-1090. ISSN 0935-9648 *** ISI Impact 18,960 ***
Deladi, S. and Berenschot, J.W. and de Boer, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) An AFM-based device for in-situ characterization of nano-wear. In: 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004), 25-29 Jan 2004, Maastricht. pp. 181-184. IEEE Computer Society. ISBN 9780780382657
Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Distinction of the irreversible and reversible actuation regions of b-doped poly-si based electrothermal actuators. Journal of micromechanics and microengineering, 14. S31-S36. ISSN 0960-1317 *** ISI Impact 1,768 ***
Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Parallel-beams/lever electrothermal out-of-plane actuator. Microsystem technologies, 10 (5). pp. 393-399. ISSN 0946-7076 *** ISI Impact 0,974 ***
Deladi, S. and Svetovoy, V.B. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Flash release - an alternative for releasing complex mems devices. Journal of micromechanics and microengineering, 14 (12). pp. 1659-1664. ISSN 0960-1317 *** ISI Impact 1,768 ***
Deladi, S. and Tas, N.R. and Berenschot, J.W. and Krijnen, G.J.M. and de Boer, M.J. and de Boer, J.H. and Peter, M. and Elwenspoek, M.C. (2004) Micromachined fountain pen for atomic force microscope-based nanopatterning. Applied physics letters, 85 (22). pp. 5361-5363. ISSN 0003-6951 *** ISI Impact 3,142 ***
Esquivel, R. and Svetovoy, V.B. (2004) Correction to the casimir force due to the anomalous skin effect. Physical review A, 69 (6). 62102. ISSN 1050-2947
Fernández, L.J. and Sesé, J. and Jansen, H.V. and Wiegerink, R.J. and Flokstra, Jaap (2004) Optimization of a capacitive MEMS power sensor for radio frequency applications. In: 15th MicroMechanics Europe Workshop, MME 2004, 5-7 Sept 2004, Leuven. pp. 257-260. MicroMechanics Europe. ISBN 9056825356
Fernández, L.J. and Visser, E. and Sesé, J. and Wiegerink, R.J. and Jansen, H.V. and Flokstra, Jaap and Elwenspoek, M.C. (2004) Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing. In: Conference on Precision Electromagnetic Measurements 2004, 27 Jun - 2 Jul 2004, London. pp. 117-118. IEEE Electromagnetic Compatibility Society. ISBN 0-7803-8494-6
Hoang, Thi Hanh and Tong, Hien Duy and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2004) Fabrication and characterization of dual sputtered pd-Cu alloy films for hydrogen separation membranes. Materials Letters, 58 (3-4). pp. 525-528. ISSN 0167-577X *** ISI Impact 2,437 ***
van Honschoten, J.W. (2004) Modelling and optimisation of the Microflown. PhD thesis, University of Twente. ISBN 90-365-2030-4
van Honschoten, J.W. and Druyvesteyn, W.F. and Kuipers, H. and Raangs, R. and Krijnen, G.J.M. (2004) Noise reduction in acoustic measurements with a particle velocity sensor by means of a cross-correlation technique. Acta acustica united with Acustica, 90 (2). pp. 349-355. ISSN 1610-1928 *** ISI Impact 0,897 ***
van Honschoten, J.W. and Krijnen, G.J.M. and Svetovoy, V.B. and de Bree, H.E. and Elwenspoek, M.C. (2004) Analytic model of a two-wire thermal sensor for flow and sound measurements. Journal of micromechanics and microengineering, 14 (11). pp. 1468-1477. ISSN 0960-1317 *** ISI Impact 1,768 ***
van Honschoten, J.W. and Svetovoy, V.B. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Determination of the sensitivity behavior of an acoustic, thermal flow sensor by electronic characterization. Sensors and actuators A: Physical, 112 (1). pp. 1-9. ISSN 0924-4247 *** ISI Impact 2,201 ***
Kuijpers, A.A. (2004) Micromachined capacitive long-range displacement sensor for nanopositioning of microatuator systems. PhD thesis, University of Twente. ISBN 90-365-2119-X
Kuijpers, A.A. and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2004) Capacitive long-range position sensor for microactuators. In: Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS), 25-29 January, Maastricht. pp. 544-547. Micro Electro Mechanical Systems. IEEE Computer Society. ISBN 0-7803-8265-x
Lötters, J.C. (2004) Mass flowmeter. Patent US20040841461 (Application).
Lötters, J.C. (2004) Mass flowmeter. Patent US20040843412 (Application).
Lerou, P.P.P.M. and Jansen, H.V. and Venhorst, G.C.F. and Burger, J.F. and Veenstra, T.T. and Holland, H.J. and ter Brake, H.J.M. and Elwenspoek, M.C. and Rogalla, H. (2004) Progress in Micro Joule-Thomson Cooling at Twente University. In: Proceedings of the 13th International Cryocooler Conference, 29 March - 1 April 2004, New Orleans. pp. 489-496. Springer Science + Business. ISSN 1570-2235 ISBN 0-387-23901-4
Rusu, C.R. and Jansen, H.V. and Gunn, R. and Witvrouw, A. (2004) Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process. Microsystem technologies, 10 (5). pp. 364-371. ISSN 0946-7076 *** ISI Impact 0,974 ***
Sarajlic, E. and Berenschot, J.W. (2004) Method for manufacturing a nanstructure. Patent WO2004NL00902 (Application).
Sarajlic, E. and de Boer, M.J. and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Advanced plasma processing combined with trench isolation technology for fabrication and fast prototyping of high aspect ratio MEMS in standard silicon wafers. Journal of micromechanics and microengineering, 14. S70-S75. ISSN 0960-1317 *** ISI Impact 1,768 ***
Tas, N.R. and Haneveld, J. and Jansen, H.V. and Elwenspoek, M.C. and van den Berg, A. (2004) Capillary filling speed of water in nanochannels. Applied physics letters, 85 (15). pp. 3274-3276. ISSN 0003-6951 *** ISI Impact 3,142 ***
Tiggelaar, R.M. (2004) Silicon-technology based microreactors for high-temperature heterogeneous partial oxidation reactions. PhD thesis, University of Twente. ISBN 90-365-2098-3
Tiggelaar, R.M. and Loeters, P.W.H. and van Male, P. and Oosterbroek, R.E. and Gardeniers, J.G.E. and de Croon, M.H.J.M. and Schouten, J.C. and Elwenspoek, M.C. and van den Berg, A. (2004) Thermal and mechanical analysis of a microreactor for high temperature catalytic gas phase reactions. Sensors and actuators A: Physical, 112 (2-3). pp. 267-277. ISSN 0924-4247 *** ISI Impact 2,201 ***
Tong, Hien Duy (2004) Microfabricated palladium-based membranes for hydrogen separation. PhD thesis, University of Twente. ISBN 90-365-2058-4
Tong, Hien Duy and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, H.V. and van Rijn, C.J.M. and Elwenspoek, M.C. and Nijdam, W. (2004) Microfabricated palladium-silver alloy membranes and their application in hydrogen separation. Industrial and engineering chemistry research, 43 (15). pp. 4182-4187. ISSN 0888-5885 *** ISI Impact 2,567 ***
Tong, Hien Duy and Jansen, H.V. and Gadgil, V.J. and Bostan, C.G. and Berenschot, J.W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2004) Silicon nitride nanosieve membrane. Nano letters, 4 (2). pp. 283-287. ISSN 1530-6984 *** ISI Impact 13,779 ***
Wensink, H. and Hermes, D.C. and van den Berg, A. (2004) High signal to noise ratio in low field nmr on chip, simulations and experimental results. In: Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS), 25-29 January, Maastricht. pp. 407-410. Micro Electro Mechanical Systems, 2004. IEEE Computer Society. ISBN 0-7803-8265-x

2003

van Baar, J.J.J. and Dijkstra, M.A. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2003) Fabrication of arrays of artificial hairs for complex flow pattern recognition. In: Sensors, 2003. Proceedings of IEEE, 22-24 October, Toronto, Canada. pp. 332-336. IEEE Computer Society. ISBN 0-7803-8133-5
van Baar, J.J.J. and Verwey, W.A. and Dijkstra, M.A. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Micromachined two dimensional resistor arrays for determination of gas parameters. In: TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003, 8-12 June, Boston, USA. pp. 1606-1609. IEEE Computer Society. ISBN 0-7803-7731-1
Bruijn, M.P. and Bergmann Tiest, W.M. and Hoevers, H.F.C. and Krouwer, E. and van der Kuur, J. and Ridder, M.L. and Moktadir, Z. and Wiegerink, R.J. and van Gelder, D. and Elwenspoek, M.C. (2003) Development of arrays of transition edge sensors for application in X-ray astronomy. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 513 (1-2 spec iss). pp. 143-146. ISSN 0168-9002 *** ISI Impact 1,200 ***
Damean, N. and Regtien, P.P.L. and Elwenspoek, M.C. (2003) Heat transfer in a mems for microfluidics. Sensors and actuators A: Physical, 105 (2). pp. 137-149. ISSN 0924-4247 *** ISI Impact 2,201 ***
Deladi, S. and de Boer, M.J. and Krijnen, G.J.M. and Rosén, D. and Elwenspoek, M.C. (2003) Innovative process development for a new micro-tribosensor using surface micromachining. Journal of micromechanics and microengineering, 13. S17-S22. ISSN 0960-1317 *** ISI Impact 1,768 ***
Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Parallel-beams/lever electrothermal out-of-plane actuator. In: Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on, 5-7 May, Mandelieu-la Napoule, France. pp. 103-107. IEEE Computer Society. ISBN 0-7803-7066-X
Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) FEM assisted design and simulation of novel electrothermal actuators. In: Proceedings of the Nanotechnology Conference and Trade Show - Nanotech 2003, 23-27 Feb 2003, San Francisco, United States. pp. 400-403. Computational Publications. ISBN 0972842209
Ekkels, P. and Tjerkstra, R.W. and Krijnen, G.J.M. and Berenschot, J.W. and Brugger, J. and Elwenspoek, M.C. (2003) Fabrication of functional structures on thin silicon nitride membranes. Microelectronic engineering, 67-68. pp. 422-429. ISSN 0167-9317 *** ISI Impact 1,277 ***
Fernández, L.J. and Visser, E. and Sesé, J. and Jansen, H.V. and Wiegerink, R.J. and Flokstra, Jaap (2003) Novel rf power sensor based on capacitive MEMS technology. In: 14th MicroMechanics Europe Workshop, MME 2003, 2-4 Nov 2003, Delft. pp. 41-44. MicroMechanics Europe. ISBN 9080826618
Fernández, L.J. and Visser, E. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jan and Jansen, H.V. and Elwenspoek, M.C. (2003) Radio frequency power sensor based on MEMS technology. In: Sensors, 2003. Proceedings of IEEE, 22-24 Oct., Toronto, Canada. pp. 549-552. IEEE Computer Society. ISBN 0-7803-8133-5
Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2003) Wet anisotropic etching for fluidic 1d nanochannels. Journal of micromechanics and microengineering, 13 (4). S62-S66. ISSN 0960-1317 *** ISI Impact 1,768 ***
van der Heyden, F.H.J. and Blom, M.T. and Gardeniers, J.G.E. and Chmela, E. and Elwenspoek, M.C. and Tijssen, R.P. and van den Berg, A. (2003) A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector. Sensors and actuators B: Chemical, 92 (1-2). pp. 102-109. ISSN 0925-4005 *** ISI Impact 4,758 ***
de Jong, B.R. and Bula, W.P. and Zalewski, D. and van Baar, J.J.J. and Wiegerink, R.J. (2003) Pirani pressure sensor with distributed temperature measurement. In: Proceedings of IEEE Sensors, 22-24 Oct 2003, Toronto, Canada. pp. 718-722. IEEE Computer Society. ISBN 0-7803-8133-5
Krijnen, G.J.M. and Haanstra, R. and Potters, E. and Berenschot, J.W. and Harach, von, S. and Elwenspoek, M.C. (2003) Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in sem and fib-machines. In: Transducers 2003, The 12th international conference on solid state sensors, actuators and microsystems, june 8-12, 2003, Boston, USA . pp. 268-271. IEEE Robotics and Automation Society. ISBN 0-7803-7731-1
Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2003) 2d-finite-element simulations for long-range capacitive position sensor. Journal of micromechanics and microengineering, 13 (4). S183-S189. ISSN 0960-1317 *** ISI Impact 1,768 ***
Le Minh, Phuong and Holleman, J. and Wallinga, H. and Berenschot, J.W. and Tas, N.R. and van den Berg, A. (2003) Novel integration of a microchannel with a silicon light emitting diode antifuse. Journal of Micromechanics and Microengineering, 13 (3). pp. 425-429. ISSN 0960-1317 *** ISI Impact 1,768 ***
Ridder, M.L. and Bruijn, M.P. and Hoevers, H.F.C. and Germeau, A. and Baars, N.H.R. and Krouwer, E. and van Baar, J.J.J. and Wiegerink, R.J. (2003) Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures. In: Proceedings of IEEE Sensors 2003, 22-24 Oct 2003, Toronto, Canada. pp. 353-357. IEEE Computer Society. ISBN 0-7803-8133-5
Rottenberg, X. and Jansen, H.V. and Tilmans, H.A.C. and De Raedt, W. (2003) Switchable capacitor. Patent EP20030020159 (Application).
Rottenberg, X. and Jansen, H.V. and Tilmans, H.A.C. and de Raedt, W. (2003) Switchable capacitor and method of making the same. Patent US20030663340 (Application).
Rusu, C.R. and Jansen, H.V. and Gunn, R. and Witvrouw, A. (2003) Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process. In: Symposium on design, test, integration and packaging of MEMS 2003, 5-7 May 2003, Mandelieu-La Napoule, France. pp. 245-250. IEEE Computer Society. ISBN 0-7803-7066-X
Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Versatile trench isolation technology for the fabrication of microactuators. Microelectronic engineering, 67-68 (1). pp. 430-437. ISSN 0167-9317 *** ISI Impact 1,277 ***
Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Low volume, large force (>1mN) and nanometer resolution, electrostatic microactuator for low displacement applications. In: Proceedings of the Nanotechnology Conference and Trade Show - Nanotech 2003, 23 - 27 Feb 2003, San Francisco, United States. pp. 392-395. Computational Publications. ISBN 0-9728422-0-9
Sarajlic, E. and de Boer, M.J. and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Integration of trench isolation technolgy and plasma release for advanced MEMS design on standard silicon wafers. In: 14th MicroMechanics Europe Workshop, MME 2003, 2-4 Nov 2003, Delft. pp. 123-126. Eburon. ISBN 9080826618
Tas, N.R. and Gui, C. and Elwenspoek, M.C. (2003) Static friction in elastic adhesion contacts in MEMS. Journal of Adhesion Science and Technology, 17 (4). 547-561. ISSN 0169-4243 *** ISI Impact 0,863 ***
Tas, N.R. and Mela, P. and Kramer, T. and Berenschot, J.W. and van den Berg, A. (2003) Capillarity Induced Negative Pressure of Water Plugs in Nanochannels. Nano letters, 3 (11). pp. 1537-1540. ISSN 1530-6984 *** ISI Impact 13,779 ***
Tas, N.R. and Sonnenberg, A.H. and Molenaar, R. and Elwenspoek, M.C. (2003) Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage. Journal of micromechanics and microengineering, 13 (1). N6-N15. ISSN 0960-1317 *** ISI Impact 1,768 ***
Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Prak, A. and Mateman, R. and Wissink, J.M. and van den Berg, A. (2003) Analysis systems for the detection of ammonia based on micromachined components modular hybrid versus monolithic integrated approach. Sensors and Actuators B: Chemical, 92 (1-2). pp. 25-36. ISSN 0925-4005 *** ISI Impact 4,758 ***
Tjerkstra, R.W. and Ekkels, P. and Krijnen, G.J.M. and Egger, S. and Berenschot, J.W. and Ma, Kechun and Brugger, J. (2003) Fabrication of an active nanostencil with integrated microshutters. In: TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003, 8-12 June, Boston, USA. pp. 1651-1654. IEEE Computer Society. ISBN 0-7803-7731-1
Tong, Hien Duy and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Wensink, H. and Jansen, H.V. and Nijdam, A.J. and Elwenspoek, M.C. and Gielens, F.C. and van Rijn, C.J.M. (2003) Microfabrication of palladium-silver alloy membranes for hydrogen separation. Journal of microelectromechanical systems, 12 (5). pp. 622-629. ISSN 1057-7157 *** ISI Impact 1,939 ***
Tong, Hien Duy and Gielens, F.C. and Hoang, Thi Hanh and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2003) A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes. In: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, 8-12 June 2003, Boston, USA. pp. 1742-1745. IEEE Electron Devices Society. ISBN 0-7803-7731-1
Tong, Hien Duy and Gielens, F.C. and Hoang, Thi Hanh and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2003) Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation. In: SESENS 2002, 29 Nov 2002, Veldhoven, the Netherlands. pp. 688-691. Technology Foundation STW. ISBN not assigned
Tong, Hien Duy and Hoang, Thi Hanh and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2003) Preparation of a dual sputtering PD-Cu alloy film and its application in hydrogen separation. In: 14th MicroMechanics Europe Workshop, MME 2003, 2-4 Nov 2003, Delft. pp. 1-4. Micro Mechanics Europe. ISBN 9080826618
Yeshurun, Y. and Hefetz, M. and Berenschot, J.W. and de Boer, M.J. and Altpeter, D.M. and Boom, G. (2003) Polymer Microneedles. Patent US20030397359 (Application).

2002

van Baar, J.J.J. (2002) Distributed thermal micro sensors for fluid flow. PhD thesis, University of Twente. ISBN 9-036-51828-8
van Baar, J.J.J. and Wiegerink, R.J. and Berenschot, J.W. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Pressure sensor based on distributed temperature sensing. In: Proceedings of IEEE Sensors, 12 -14 June 2002, Orlando, USA. pp. 964-968. IEEE Computer Society. ISBN 0-7803-7454-1
van Baar, J.J.J. and Wiegerink, R.J. and Lammerink, T.S.J. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Combined-Pirani/bending membrane-pressure sensor. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 20-24 JAN 2002, Las Vegas, NV. pp. 328-331. IEEE Computer Society. ISBN 0-7803-7185-2
Bartic, C. and Jansen, H.V. and Campitelli, A. and Borghs, S. (2002) Ta2O5 as gate dielectric material for low-voltage organic thin-film transistors Organic Electronics, 3 (2). pp. 65-72. ISSN 1566-1199 *** ISI Impact 3,471 ***
Berenschot, J.W. and Tas, N.R. and Lammerink, T.S.J. and Elwenspoek, M.C. and van den Berg, A. (2002) Advanced sacrificial poly-Si technology for fluidic systems. Journal of micromechanics and microengineering, 12 (5). pp. 621-624. ISSN 0960-1317 *** ISI Impact 1,768 ***
Blom, M.T. (2002) On-chip separation and sensing systems for hydrodynamic chromatography. PhD thesis, University of Twente. ISBN 9036518415
Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Tijssen, R.P. and Elwenspoek, M.C. and van den Berg, A. (2002) Design and fabrication of a hydrodynamic chromatography chip. Sensors and Actuators B: Chemical, 82 (1). pp. 111-116. ISSN 0925-4005 *** ISI Impact 4,758 ***
de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Smulders, E.J.T. and Gilde, M.-J. and Roelofs, G.H.M. and Sasserath, J.N. and Elwenspoek, M.C. (2002) Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures. Journal of microelectromechanical systems, 11 (4). pp. 385-401. ISSN 1057-7157 *** ISI Impact 1,939 ***
Brivio, M. and Fokkens, R.H. and Verboom, W. and Reinhoudt, D.N. and Tas, N.R. and Goedbloed, M.H. and van den Berg, A. (2002) Integrated microfluidic system enabling (bio)chemical reactions with on-line MALDI-TOF mass spectrometry. Analytical chemistry, 74 (16). pp. 3972-3976. ISSN 0003-2700 *** ISI Impact 5,886 ***
De Korte, P.A.J. and Hoevers, H.F.C. and Den Herder, J.W.A. and Bleeker, J.A.M. and Bergmann Tiest, W.M. and Bruijn, M.P. and Ridder, M.L. and Wiegerink, R.J. and Kaastra, J.S. and Van der Kuur, J. and Mels, W.A. (2002) A TES X-ray microcalorimeter-array for imaging spectroscopy. In: Proceedings of SPIE - The International Society for Optical Engineering, 24-28 Aug 2002, Waikoloa, HI, United States. pp. 779-789. The International Society for Optical Engineering. ISSN 0277-786X
Deladi, S. and Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2002) Three dimensional adhesion model for arbitrary rough surfaces. In: International Conference on Computational Nanoscience and Nanotechnology - ICCN 2002, 21 - 25 april 2002, San Juan, Puerto Rico. pp. 326-329. Computational Publications. ISBN 0-9708275-6-3
Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2002) Wet anisotropic etching for fluidic 1D nanochannels. In: Micromechanics Europe Workshop, MME 2002, 6-8 Oct 2002, Sinaia, Romania. pp. 47-50. MicroMechanics Europe.
van Honschoten, J.W. and Svetovoy, V.B. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Determination of the Sensitivity Behaviour of an Acoustic and Thermal Flow Sensor by Electronic Characterisation. In: Proceedings of the First IEEE International Conference on Sensors - IEEE Sensors 2002, 12 -14 June 2002, Orlando, USA. pp. 1298-1303. IEEE Computer Society. ISBN 0-7803-7454-1
Krijnen, G.J.M. and Kuijpers, A.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2002) Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation. In: Proceedings of SPIE - The International Society for Optical Engineering, 21 - 23 May 2002, Presquile de Giens, France. pp. 201-206. The International Society for Optical Engineering. ISSN 0277-786X ISBN 0-8194-4529-0
Kuiper, S. and Brink, R. and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Ceramic microsieves: influence of perforation shape and distribution on flow resistance and membrane strength. Journal of membrane science, 196 (2). pp. 149-157. ISSN 0376-7388 *** ISI Impact 5,557 ***
Kuiper, S. and van Rijn, C.J.M. and Nijdam, W. and Raspe, O. and van Wolferen, H.A.G.M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Filtration of lager beer with microsieves: Flux, permeate haze and in-line microscope observations. Journal of Membrane Science, 196 (2). pp. 159-170. ISSN 0376-7388 *** ISI Impact 5,557 ***
Le Minh, Phuong and Holleman, J. and Berenschot, J.W. and Tas, N.R. and van den Berg, A. (2002) Monolithic integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. In: Proceedings of the 32nd European Solid-State Device Research Conference ESSDERC 2002, 24-26 September 2002, Florence, Italy. pp. 451-454. IEEE Computer Society. ISBN 88-900847-8-2
Moktadir, Z. and Bruijn, M.P. and Wiegerink, R.J. and Elwenspoek, M.C. and Ridder, M.L. and Mels, W.A. (2002) Limitations of Heat Conductivity in Cryogenic Sensors Due to Surface Roughness. In: Proceedings of IEEE Sensors, 12 - 14 June 2002, Orlando, Florida. pp. 1024-1027. IEEE Computer Society. ISBN 0-7803-7454-1
Rottenberg, X. and Jansen, H.V. and Fiorini, P. and De Raedt, W. and Tilmans, H.A.C. (2002) Novel RF-MEMS capacitive switching structures. In: 32nd European Microwave Conference, EuMC 2002, 23-26 Sept 2002, Milan, Italy. pp. 1-4. IEEE. ISBN not assigned
Tas, N.R. and Berenschot, J.W. and Lammerink, T.S.J. and Elwenspoek, M.C. and van den Berg, A. (2002) Nanofluidic bubble pump using surface tension directed gas injection. Analytical Chemistry, 74 (9). pp. 2224-2227. ISSN 0003-2700 *** ISI Impact 5,886 ***
Tas, N.R. and Berenschot, J.W. and Mela, P. and Jansen, H.V. and Elwenspoek, M.C. and van den Berg, A. (2002) 2D-Confined Nanochannels Fabricated by Conventional Micromachining. Nano letters, 2 (9). pp. 1031-1032. ISSN 1530-6984 *** ISI Impact 13,779 ***
Tas, N.R. and Lammerink, T.S.J. and Berenschot, J.W. and Elwenspoek, M.C. and van den Berg, A. (2002) Scaling behaviour of pressure-driven micro-hydraulic systems. In: Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems, 21 - 25 april 2002, San Juan, Puerto Rico. pp. 174-177. Computational Publications. ISBN 0970827571
Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and van den Berg, A. (2002) A light detection cell to be used in a micro analysis system for ammonia. Talanta, 56 (2). pp. 331-339. ISSN 0039-9140 *** ISI Impact 4,035 ***
Tilmans, H.A.C. and Beyne, E. and Jansen, H.V. and de Raedt, W. (2002) Fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent EP20020076528 (Application).
Tong, Hien Duy and Gielens, F.C. and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2002) Fabrication and characterization of MEMS based wafer-scale palladium-silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 20-24 Jan 2002, Las Vegas, NV. pp. 268-271. IEEE Computer Society. ISBN 0-7803-7185-2
Veenstra, T.T. and Sharma, N.R. and Forster, F.K. and Gardeniers, J.G.E. and Elwenspoek, M.C. and van den Berg, A. (2002) The design of an in-plane compliance structure for microfluidical systems. Sensors and actuators B (Chemical), 81 (2-3). pp. 377-383. ISSN 0925-4005 *** ISI Impact 4,758 ***
Wensink, H. (2002) Fabrication of microstructures by powder blasting. PhD thesis, University of Twente. ISBN 90-365-1698-6
Wensink, H. and Elwenspoek, M.C. (2002) Reduction of sidewall inclination and blast lag of powder blasted channels. Sensors and Actuators A: Physical, 102 (1-2). pp. 157-164. ISSN 0924-4247 *** ISI Impact 2,201 ***
Wensink, H. and Elwenspoek, M.C. (2002) A closer look at the ductile-brittle transition in solid particle erosion. Wear, 253 (9-10). pp. 1035-1043. ISSN 0043-1648 *** ISI Impact 2,323 ***
Wensink, H. and Schlautmann, S. and Goedbloed, M.H. and Elwenspoek, M.C. (2002) Fine tuning the roughness of powder blasted surfaces. Journal of micromechanics and microengineering, 12 (5). pp. 616-620. ISSN 0960-1317 *** ISI Impact 1,768 ***

2001

van Baar, J.J.J. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) Pirani pressure sensor with distributed temperature sensing. In: ASME International Mechanical Engineering Congress and Exposition, Proceedings, 11-16 November 2001, New York, NY, USA. pp. 2689-2696. American Society of Mechanical Engineers. ISBN 0791835553
van Baar, J.J.J. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) Micromachined structures for thermal measurements of fluid and flow parameters. Journal of micromechanics and microengineering, 11 (4). pp. 311-318. ISSN 0960-1317 *** ISI Impact 1,768 ***
Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Berenschot, J.W. and Elwenspoek, M.C. and Tijssen, R.P. and van den Berg, A. (2001) Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections. Journal of micromechanics and microengineering, 11 (4). pp. 382-385. ISSN 0960-1317 *** ISI Impact 1,768 ***
Blom, M.T. and Tas, N.R. and Pandraud, G. and Chmela, E. and Gardeniers, J.G.E. and Tijssen, R.P. and Elwenspoek, M.C. and van den Berg, A. (2001) Failure mechanisms of pressurized microchannels, model, and experiments. Journal of microelectromechanical systems, 10 (1). pp. 158-164. ISSN 1057-7157 *** ISI Impact 1,939 ***
Burger, G.J. and Holland, H.J. and Berenschot, J.W. and Seppenwodde, J.H. and ter Brake, H.J.M. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2001) 169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 21-25 Jan 2001, interlaken. pp. 418-421. IEEE Computer Society. ISBN 0-7803-5998-4
Gui, C. and Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and van den Berg, A. and Elwenspoek, M.C. (2001) Selective Wafer Bonding by Surface Roughness Control. Journal of the Electrochemical Society, 148 (4). g225-g228. ISSN 0013-4651 *** ISI Impact 3,014 ***
van Honschoten, J.W. and Krijnen, G.J.M. and Svetovoy, V.B. and de Bree, H.E. and Elwenspoek, M.C. (2001) Optimisation of a two-wire thermal sensor for flow and sound measurements. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 21-25 Jan 2001, Interlaken. pp. 523-526. IEEE Computer Society. ISBN 0-7803-5998-4
Jansen, H.V. and de Boer, M.J. and Wensink, H. and Kloeck, B. and Elwenspoek, M.C. (2001) The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source Microelectronics journal, 32 (9). pp. 769-777. ISSN 0026-2692 *** ISI Impact 0,876 ***
Kuiper, S. and van Wolferen, H.A.G.M. and van Rijn, C.J.M. and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) Fabrication of microsieves with sub-micron pore size by laser interference lithography. Journal of micromechanics and microengineering, 11 (1). pp. 33-37. ISSN 0960-1317 *** ISI Impact 1,768 ***
Lötters, J.C. and Boer, H.J. and Jouwsma, W. (2001) Mass flowmeter. Patent US 2001027684 (Application).
Musa, S. and Lagali, N.S. and Sengo, G. and Krijnen, G.J.M. and Driessen, A. (2001) Fabrication and characterization of planar waveguide couplers for multimode fiber-based local area networks. In: Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, 11-15 Nov 2001, San Diego, CA. pp. 234-235. IEEE Computer Society. ISSN 1092-8081
Nijdam, A.J. (2001) Anisotropic wet-chemical etching of silicon pits, peaks, principles, pyramids and particles. PhD thesis, University of Twente. ISBN 90 365 15351
Nijdam, A.J. and Gardeniers, J.G.E. and Berenschot, J.W. and Van Veenendaal, E. and Van Suchtelen, J. and Elwenspoek, M.C. (2001) Influence of the angle between etched (near) Si{111} surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon Journal of micromechanics and microengineering, 11 (5). pp. 499-503. ISSN 0960-1317 *** ISI Impact 1,768 ***
Nijdam, A.J. and Van Veenendaal, E. and Cuppen, H.M. and Van Suchtelen, J. and Reed, M.L. and Gardeniers, J.G.E. and Van Enckevort, W.J.P. and Vlieg, E. and Elwenspoek, M.C. (2001) Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: Experiments and Monte Carlo simulation Journal of applied physics, 89 (7). pp. 4113-4123. ISSN 0021-8979 *** ISI Impact 2,101 ***
Rusu, C.R. and Oever, R.V. and de Boer, M.J. and Jansen, H.V. and Berenschot, J.W. and Bennink, M.L. and Kanger, J.S. and de Grooth, B.G. and Elwenspoek, M.C. and Greve, J. and Brugger, J. and van den Berg, A. (2001) Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers. Journal of microelectromechanical systems, 10 (2). pp. 238-246. ISSN 1057-7157 *** ISI Impact 1,939 ***
Schlautmann, S. and Wensink, H. and Schasfoort, R.B.M. and Elwenspoek, M.C. and van den Berg, A. (2001) Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensors. Journal of micromechanics and microengineering, 11 (4). pp. 386-389. ISSN 0960-1317 *** ISI Impact 1,768 ***
Tilmans, H.A.C. and Ziad, H. and Jansen, H.V. and Di Monaco, O. and Jourdain, A. and de Raedt, W. and Rottenberg, X. and de Backer, E. and Decaussernaeker, A. and Baert, K. (2001) Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab. In: International Electron Devices Meeting, 2-5 Dec 2001, Washington. IEEE Electron Devices Society. ISBN 0-7803-7050-3
Tong, Hien Duy and Zwijze, A.F. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) Platinum patterning by a modified lift-off technique and its application in a silicon load cell. Sensors and materials, 13 (4). pp. 235-246. ISSN 0914-4935 *** ISI Impact 0,489 ***
Van Veenendaal, E. and Cuppen, H.M. and Van Enckevort, W.J.P. and Van Suchtelen, J. and Nijdam, A.J. and Elwenspoek, M.C. and Vlieg, E. (2001) A Monte Carlo study of etching in the presence of a mask junction. Journal of micromechanics and microengineering, 11 (4). pp. 409-415. ISSN 0960-1317 *** ISI Impact 1,768 ***
van Veenendaal, E. (2001) From an atomistic to a continuum description of crystal growth. PhD thesis, Kat. Universiteit Nijmegen. ISBN 90-373-0560-1
van Veenendaal, E. and van Suchtelen, J. and van Beurden, P. and Cuppen, H.M. and van Enckevort, W.J.P. and Nijdam, A.J. and Elwenspoek, M.C. and Vlieg, E. (2001) Monte Carlo simulation of wet chemical etching of silicon. Sensors and materials, 13 (6). pp. 343-350. ISSN 0914-4935 *** ISI Impact 0,489 ***
Veenstra, T.T. (2001) MAFIAS: an integrated lab-on-a-chip for the measurement of ammonium. PhD thesis, University of Twente. ISBN 90-365-1602-1
Veenstra, T.T. and Berenschot, J.W. and Gardeniers, J.G.E. and Sanders, R.G.P. and Elwenspoek, M.C. and van den Berg, A. (2001) Use of Selective Anodic Bonding to Create Micropump Chambers with Virtually No Dead Volume. Journal of the Electrochemical Society, 148 (2). G68-G72. ISSN 0013-4651 *** ISI Impact 3,014 ***

2000

Blom, M.T. and Tas, N.R. and Pandraud, G. and Chmela, E. and Gardeniers, J.G.E. and Tijssen, R.P. and Elwenspoek, M.C. and van den Berg, A. (2000) Failure mechanisms of pressurized microchannels, model and experiments. In: Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on, 23-27 Jan 2000, Miyazaki, Japan. pp. 199-204. IEEE Computer Society. ISBN 0-7803-5273-4
de Boer, M.J. and Tjerkstra, R.W. and Berenschot, J.W. and Jansen, H.V. and Burger, G.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. and van den Berg, A. (2000) Micromachining of buried micro channels in silicon. Journal of microelectromechanical systems, 9 (1). pp. 94-103. ISSN 1057-7157 *** ISI Impact 1,939 ***
de Bree, H.E. and van der Eerden, F.J.M. and van Honschoten, J.W. (2000) A novel technique for measuring the reflection coefficient of sound absorbing materials. In: International Conference on Noise and Vibration, ISMA 25, 13-15 Sep 2000, Leuven, Belgium. pp. 1-8. ISMA 25. ISBN not assigned
Brugger, J. and Berenschot, J.W. and Kuiper, S. and Nijdam, W. and Otter, B. and Elwenspoek, M.C. (2000) Resistless patterning of sub-micron structures by evaporation through nanostencils. Microelectronic Engineering, 53 (1). pp. 403-405. ISSN 0167-9317 *** ISI Impact 1,277 ***
van Honschoten, J.W. and van Baar, J.J.J. and de Bree, H.E. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Application of a microflown as a low-cost level sensor. Journal of Micromechanics and Microengineering, 10 (2). pp. 250-253. ISSN 0960-1317 *** ISI Impact 1,768 ***
Kuiper, S. (2000) Development and application of microsieves. PhD thesis, University of Twente. ISBN 90-3651-475-4
Kuiper, S. and de Boer, M.J. and van Rijn, C.J.M. and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Wet and dry etching techniques for the release of sub-micrometre perforated membranes. Journal of micromechanics and microengineering, 10 (2). pp. 171-174. ISSN 0960-1317 *** ISI Impact 1,768 ***
Kuiper, S. and van Rijn, C.J.M. and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Determination of particle-release conditions in microfiltration: A simple single-particle model tested on a model membrane. Journal of membrane science, 180 (1). pp. 15-28. ISSN 0376-7388 *** ISI Impact 5,557 ***
Lammerink, T.S.J. and Tas, N.R. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) New class of thermal flow sensors using \[\Delta\]T = 0 as a control signal. In: 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), 23 - 27 Jan 2000, Miyazaki, Japan. pp. 525-530. IEEE Computer Society. ISBN 0-7803-5273-4
Musa, S. and Lagali, N.S. and Krijnen, G.J.M. and Driessen, A. (2000) Low-cost multimode waveguide couplers for multimode fiber-based local area networks. In: Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, 13 - 16 Nov 2000, Rio Grande. pp. 468-469. IEEE Computer Society. ISSN 1092-8081
Neagu, C.R. and Jansen, H.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2000) The electrolysis of water: An actuation principle for MEMS with a big opportunity. Mechatronics, 10 (4-5). pp. 571-581. ISSN 0957-4158 *** ISI Impact 1,871 ***
Nijdam, A.J. and Gardeniers, J.G.E. and Gui, C. and Elwenspoek, M.C. (2000) Etching pits and dislocations in Si{111} Sensors and actuators A: Physical, 86 (3). pp. 238-247. ISSN 0924-4247 *** ISI Impact 2,201 ***
Nijdam, A.J. and van Veenendaal, E. and Gardeniers, J.G.E. and Kentgens, A.P.M. and Nachtegaal, G.H. and Elwenspoek, M.C. (2000) 29Si-nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions. Journal of the Electrochemical Society, 147 (6). pp. 2195-2198. ISSN 0013-4651 *** ISI Impact 3,014 ***
Oosterbroek, R.E. and Berenschot, J.W. and Jansen, H.V. and Nijdam, A.J. and Pandraud, G. and van den Berg, A. and Elwenspoek, M.C. (2000) Etching methodologies in <111>-oriented silicon wafers. Journal of microelectromechanical systems, 9 (3). pp. 390-398. ISSN 1057-7157 *** ISI Impact 1,939 ***
Palasantzas, G. and Svetovoy, V.B. and Van Zwol, P.J. (2000) Influence of ultrathin water layer on the van der Waals/Casimir force between gold surfaces. Physical review B: Condensed matter and materials physics, 79 (23). 235434. ISSN 1098-0121
Rusu, C.R. and Van 't Oever, R. and de Boer, M.J. and Jansen, H.V. and Berenschot, J.W. and Bennink, M.L. and Kanger, J.S. and De Grooth, B.G. and Elwenspoek, M.C. and Greve, J. and van den Berg, A. and Brugger, J. (2000) Fabrication of micromachined pipettes in a flow channel for single molecule handling of DNA. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 23 Jan - 27 Jan 2000, Miyazaki, Jpn. pp. 429-434. IEEE Computer Society. ISBN 0-7803-5273-4
Rusu, C.R. and Van 't Oever, R. and de Boer, M.J. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. and Bennink, M.L. and Kanger, J.S. and De Grooth, B.G. and Greve, J. and Brugger, J. and van den Berg, A. (2000) Micromachined pipettes integrated in a flow channel for single DNA molecule study by optical trapping. In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3912, 26-27 Jan 2000, San Jose, CA, USA. pp. 41-49. Society of Photo-Optical Instrumentation Engineers. ISBN 0-8194-3528-7
Tas, N.R. (2000) Electrostatic microwalkers: Micro Electromechanics and Micro Tribology. PhD thesis, University of Twente. ISBN 90-3651-435-5
Tas, N.R. and Gui, C. and Elwenspoek, M.C. (2000) Static friction in elastic adhesive MEMS contacts, models and experiment. In: Proceedings of the IEEE Micro Electro Mechanical Systems, 23 - 27 Jan 2000, Miyazaki, Japan. pp. 193-198. IEEE Computer Society. ISBN 0-7803-5273-4
Tas, N.R. and Lammerink, T.S.J. and Leussink, P.J. and Berenschot, J.W. and de Bree, H.E. and Elwenspoek, M.C. (2000) Towards thermal flowsensing with pL/s resolution. In: Proceedings of SPIE - The International Society for Optical Engineering, 18-19 Sept 2000, Santa Clara, CA, USA. pp. 106-121. Society of Photo-Optical Instrumentation Engineers. ISSN 0277-786X
Tjerkstra, R.W. and Gardeniers, J.G.E. and Kelly, J.J. and van den Berg, A. (2000) Multi-walled microchannels: free-standing porous silicon membranes for use in $\mu$TAS. Journal of microelectromechanical systems, 9 (4). pp. 495-501. ISSN 1057-7157 *** ISI Impact 1,939 ***
Van Veenendaal, E. and Nijdam, A.J. and Van Suchtelen, J. and Sato, K. and Gardeniers, J.G.E. and Van Enckevort, W.J.P. and Elwenspoek, M.C. (2000) Simulation of anisotropic wet chemical etching using a physical model. Sensors and actuators A: Physical, 84 (3). pp. 324-329. ISSN 0924-4247 *** ISI Impact 2,201 ***
van Veenendaal, E. and van Beurden, P. and van Enckevort, W.J.P. and Vlieg, E. and van Suchtelen, J. and Elwenspoek, M.C. (2000) Monte Carlo study of kinetic smoothing during dissolution and etching of the Kossel (100) and silicon (111) surfaces. Journal of Applied Physics, 88 (8). pp. 4595-4604. ISSN 0021-8979 *** ISI Impact 2,101 ***
van Veenendaal, E. and van Suchtelen, J. and van Enckevort, W.J.P. and Sato, K. and Nijdam, A.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2000) The construction of orientation-dependent crystal growth and etch rate functions II: Application to wet chemical etching of silicon in potassium hydroxide. Journal of applied physics, 87 (12). pp. 8732-8740. ISSN 0021-8979 *** ISI Impact 2,101 ***
Wensink, H. and Berenschot, J.W. and Jansen, H.V. and Elwenspoek, M.C. (2000) High resolution powder blast micromachining. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 23 -27 Jan 2000, Miyazaki, Japa;n. pp. 769-774. IEEE Computer Society. ISBN 0-7803-5273-4
Wensink, H. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2000) Mask materials for powder blasting. Journal of micromechanics and microengineering, 10 (2). pp. 175-180. ISSN 0960-1317 *** ISI Impact 1,768 ***
Wiegerink, R.J. and Zwijze, A.F. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2000) Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. Sensors and Actuators A: Physical, 80 (2). pp. 189-196. ISSN 0924-4247 *** ISI Impact 2,201 ***
Zwijze, A.F. (2000) Micro-machined high capacity silicon load cells. PhD thesis, University of Twente. ISBN 90-3651-507-6
Zwijze, A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Berenschot, J.W. and de Boer, M.J. and Elwenspoek, M.C. (2000) High force 10 kN piezoresistive silicon force sensor with output independent of force distribution. In: Proceedings of SPIE - The International Society for Optical Engineering, 18-19 Sep 2000, Santa Clara, CA, USA. pp. 47-58. Society of Photo-Optical Instrumentation Engineers. ISSN 0277-786X
Zwijze, A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2000) Low-cost piezoresistive silicon load cell independent of force distribution. Journal of micromechanics and microengineering, 10 (2). pp. 200-203. ISSN 0960-1317 *** ISI Impact 1,768 ***

1999

de Bree, H.E. and Druyvesteyn, W.F. and Berenschot, J.W. and Elwenspoek, M.C. (1999) Three-dimensional sound intensity measurements using microflown particle velocity sensors. In: Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 17-21 Jan 1999, Orlando, FL, USA. pp. 124-129. IEEE Computer Society. ISBN 0-7803-5194-0
de Bree, H.E. and Jansen, H.V. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (1999) Bi-directional fast flow sensor with a large dynamic range. Journal of micromechanics and microengineering, 9 (2). pp. 186-189. ISSN 0960-1317 *** ISI Impact 1,768 ***
Burger, J.F. and Van der Wekken, M.C. and Berenschot, J.W. and Holland, H.J. and ter Brake, H.J.M. and Rogalla, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) High pressure check valve for application in a miniature cryogenic sorption cooler. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 17-21 Jan 1999, Orlando, FL, USA. pp. 183-188. IEEE Computer Society. ISBN 0-7803-5194-0
De Nivelle, M.J.M.E. and Bruijn, M.P. and De Korte, P.A.J. and Sánchez, S. and Elwenspoek, M.C. and Heidenblut, T. and Schwierzi, B. and Michalke, W. and Steinbeiss, E. (1999) High-Tc bolometers with silicon-nitride spiderweb suspension for far-infrared detection. IEEE transactions on applied superconductivity, 9 (2, June). pp. 3350-3353. ISSN 1051-8223 *** ISI Impact 1,092 ***
Elwenspoek, M.C. (1999) Thermal flow micro sensors. In: Proceedings of the 1999 International Semiconductor Conference (CAS '99), 05-09 Oct 1999, Sinaia, Romania. pp. 423-435. IEEE Computer Society. ISBN 0-7803-5139-8
Elwenspoek, M.C. (1999) Stationary hillocks on etching silicon. Journal of micromechanics and microengineering, 9 (2). pp. 180-185. ISSN 0960-1317 *** ISI Impact 1,768 ***
Gierkink, S.L.J. and Holzmann, P.J. and Wiegerink, R.J. and Wassenaar, R.F. (1999) Some design aspects of a two-stage rail-to-rail CMOS op amp. Analog integrated circuits and signal processing, 21 (2). pp. 143-152. ISSN 0925-1030 *** ISI Impact 0,417 ***
Gui, C. and Elwenspoek, M.C. and Tas, N.R. and Gardeniers, J.G.E. (1999) The effect of surface roughness on direct wafer bonding. Journal of applied physics, 85 (10). pp. 7448-7454. ISSN 0021-8979 *** ISI Impact 2,101 ***
Gui, C. and Elwenspoek, M.C. and Tas, N.R. and Gardeniers, J.G.E. (1999) The Surface adhesion parameter: A measure for wafer bondability. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 17-21 Jan 1999, Orlando, FL, USA. pp. 290-295. IEEE Computer Society. ISBN 0-7803-5194-0
Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Fabrication of nanomechanical optical devices with aligned wafer bonding. Microsystem technologies, 5 (3). pp. 138-143. ISSN 0946-7076 *** ISI Impact 0,974 ***
Krijnen, G.J.M. and Lammerink, T.S.J. and Lambeck, P.V. and Elwenspoek, M.C. (1999) Optical devices based on fluidic controlled two-mode interference. Journal of micromechanics and microengineering, 9 (2). pp. 203-205. ISSN 0960-1317 *** ISI Impact 1,768 ***
Nijdam, A.J. and Berenschot, J.W. and Van Suchtelen, J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates Journal of micromechanics and microengineering, 9 (2). pp. 135-138. ISSN 0960-1317 *** ISI Impact 1,768 ***
Nijdam, A.J. and Van Suchtelen, J. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Etching of silicon in alkaline solutions: A critical look at the {111} minimum Journal of crystal growth, 198-199 (pt 1). pp. 430-434. ISSN 0022-0248 *** ISI Impact 1,462 ***
Oosterbroek, R.E. (1999) Modelling, design and realization of microfluidic components. PhD thesis, University of Twente. ISBN 90-36513464
Oosterbroek, R.E. and Berenschot, J.W. and Nijdam, A.J. and Pandraud, G. and Elwenspoek, M.C. and van den Berg, A. (1999) New design methodologies in <111>-oriented silicon wafers. In: Proceedings of SPIE - The International Society for Optical Engineering the 1999 Micromachining and Microfabrication Process Technology V, 20-22 Sept 1999, Santa Clara, CA, USA. pp. 384-394. Society of Photo-Optical Instrumentation Engineers. ISSN 0277-786X
Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. and van den Berg, A. (1999) Designing, simulation and realization of in-plane operating micro valves, using new etching techniques. Journal of micromechanics and microengineering, 9 (2). pp. 194-198. ISSN 0960-1317 *** ISI Impact 1,768 ***
Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. and van den Berg, A. (1999) Micromachined pressure/flow-sensor. Sensors and actuators A: Physical, 77 (3). pp. 167-177. ISSN 0924-4247 *** ISI Impact 2,201 ***
van Rijn, C.J.M. and Nijdam, W. and Kuiper, S. and Veldhuis, G.J. and van Wolferen, H.A.G.M. and Elwenspoek, M.C. (1999) Microsieves made with laser interference lithography for micro-filtration applications. Journal of micromechanics and microengineering, 9 (2). pp. 170-172. ISSN 0960-1317 *** ISI Impact 1,768 ***
Tjerkstra, R.W. (1999) Isotropic etching of silicon in fluoride containing solutions as a tool for micromachining. PhD thesis, University of Twente. ISBN 90-36513286
Valkering, T.P. and van Honschoten, J.W. and Hoekstra, H.J.W.M. (1999) Ultra-sharp soliton switching in a directional coupler. Optics communications, 159 (4-6). pp. 215-220. ISSN 0030-4018 *** ISI Impact 1,480 ***
Van Suchtelen, J. and Sato, K. and Van Veenendaal, E. and Nijdam, A.J. and Gardeniers, J.G.E. and Van Enckevort, W.J.P. and Elwenspoek, M.C. (1999) Simulation of anisotropic wet-chemical etching using a physical model. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 17 - 21 Jan 1999, Orlando, FL, USA. pp. 332-337. IEEE Computer Society. ISBN 0-7803-5194-0
Veenstra, T.T. and Lammerink, T.S.J. and Elwenspoek, M.C. and van den Berg, A. (1999) Characterization method for a new diffusion mixer applicable in micro flow injection analysis systems. Journal of micromechanics and microengineering, 9 (2). pp. 199-202. ISSN 0960-1317 *** ISI Impact 1,768 ***
Wensink, H. and Berenschot, J.W. and Jansen, H.V. and Elwenspoek, M.C. (1999) Mask materials in powderblasting. In: Micromechanics Europe Workshop, MME '99, 27-28 Sept 1999, Gif-Sur-Yvette, France. pp. 199-202. Université Paris-sud, Institut d'Électronique Fondamentale.
Wiegerink, R.J. and Zwijze, A.F. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (1999) Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. In: Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 17-21 Jan 1999, Orlando, FL, USA. pp. 558-563. IEEE Computer Society. ISBN 0-7803-5194-0
Zwijze, A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (1999) Low creep and hysteresis load cell based on a force-to-fluid pressure transformation. Sensors and actuators A: Physical, 78 (2-3). pp. 74-80. ISSN 0924-4247 *** ISI Impact 2,201 ***

1998

Berenschot, J.W. and Oosterbroek, R.E. and Lammerink, T.S.J. and Elwenspoek, M.C. (1998) Micromachining of {111} plates in <001> oriented silicon Journal of micromechanics and microengineering, 8 (2). pp. 104-107. ISSN 0960-1317 *** ISI Impact 1,768 ***
den Braber, E.T. and Jansen, H.V. and de Boer, M.J. and Croes, H.J.E. and Elwenspoek, M.C. and Ginsel, L.A. and Jansen, J.A. (1998) Scanning electron microscopic, transmission electron microscopic, and confocal laser scanning microscopic observation of fibroblasts cultured on microgrooved surfaces of bulk titanium substrata. Journal of biomedical materials research, 40 (3). pp. 425-433. ISSN 0021-9304
de Bree, H.E. and Jansen, H.V. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (1998) Bi-directional fast flow sensor with a large dynamic range. In: Proceedings of the Micromechanics Europe, MME 1998, 3-5 June 1998, Ulvik. pp. 194-197. Micro Mechanics Europe.
Bruijn, M.P. and De Nivelle, M.J.M.E. and De Korte, P.A.J. and Sánchez, S. and Elwenspoek, M.C. and Heidenblut, T. and Schwierzi, B. and Michalke, W. and Steinbeiss, E. (1998) Low noise far-infrared detection at 90 K using high-T(c) superconducting bolometers with silicon-nitride beam suspension. In: The 32nd ESLAB Symposium on remote sensing methodology for Earth observation and planetary exploration, 15-18 Sept 1998, Noordwijk, Nederland. pp. 101-106. Estec. ISSN 0379-6566
Burger, J.F. and Berenschot, J.W. and Burger, G.J. and Visscher, H. and Elwenspoek, M.C. (1998) Piezoresistive friction force sensor for tribological research. Journal of micromechanics and microengineering, 8 (2). pp. 138-140. ISSN 0960-1317 *** ISI Impact 1,768 ***
Gardeniers, J.G.E. and Verholen, A.G.B.J. and Tas, N.R. and Elwenspoek, M.C. (1998) Direct measurement of piezoelectric properties of Sol-Gel PZT films. Journal of the Korean Physical Society, 32 (4). S1573-S1577. ISSN 0374-4884 *** ISI Impact 0,445 ***
Gui, C. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (1998) Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures. Sensors and actuators A: Physical, 70 (1-2). pp. 61-66. ISSN 0924-4247 *** ISI Impact 2,201 ***
Gui, C. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Lambeck, P.V. (1998) Present and future role of chemical mechanical polishing in wafer bonding. Journal of the Electrochemical Society, 145 (6). pp. 2198-2204. ISSN 0013-4651 *** ISI Impact 3,014 ***
Gui, C. and Legtenberg, R. and Tilmans, H.A.C. and Fluitman, J.H.J. and Elwenspoek, M.C. (1998) Nonlinearity and hysteresis of resonant strain gauges. Journal of microelectromechanical systems, 7 (1). pp. 122-127. ISSN 1057-7157 *** ISI Impact 1,939 ***
Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Nanomechanical optical devices fabricated with aligned wafer bonding. In: The Eleventh Annual International Workshop on Micro Electro Mechanical Systems, MEMS 98 Proceedings, 25-29 Jan 1998, Heidelberg. pp. 482-487. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-4412-X
Kuiper, S. and van Rijn, C.J.M. and Nijdam, W. and Elwenspoek, M.C. (1998) Development and applications of very high flux microfiltration membranes. Journal of membrane science, 150 (1). pp. 1-8. ISSN 0376-7388 *** ISI Impact 5,557 ***
Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Elwenspoek, M.C. (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part II: Fabrication and performance. Journal of microelectromechanical systems, 7 (1). pp. 87-93. ISSN 1057-7157 *** ISI Impact 1,939 ***
Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Elwenspoek, M.C. (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part I: Design and modeling. Journal of microelectromechanical systems, 7 (1). pp. 79-86. ISSN 1057-7157 *** ISI Impact 1,939 ***
Neagu, C.R. (1998) A Medical Microactuator based on a Electrochemical Principle. PhD thesis, University of Twente. ISBN 90 365 10910
Sánchez, S. and Elwenspoek, M.C. and Gui, C. and De Nivelle, M.J.M.E. and De Vries, R. and De Korte, P.A.J. and Bruijn, M.P. and Wijnbergen, J.J. and Michalke, W. and Steinbeiss, E. and Heidenblut, T. and Schwierzi, B. (1998) A high-TC superconductor bolometer on a silicon nitride membrane. Journal of microelectromechanical systems, 7 (1). pp. 62-68. ISSN 1057-7157 *** ISI Impact 1,939 ***
Tas, N.R. and Wissink, J. and Sander, L. and Lammerink, T.S.J. and Elwenspoek, M.C. (1998) Modeling, design and testing of the electrostatic shuffle motor. Sensors and actuators A: Physical, 70 (1-2). pp. 171-178. ISSN 0924-4247 *** ISI Impact 2,201 ***
Veldhuis, G.J. and Gui, C. and Nauta, T. and Koster, T.M. and Berenschot, J.W. and Lambeck, P.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Mechano-optical waveguide on-off intensity modulator. Optics Letters, 23 (19). pp. 1532-1534. ISSN 0146-9592 *** ISI Impact 3,040 ***
Wensink, H. and de Boer, M.J. and Wiegerink, R.J. and Zwijze, A.F. and Elwenspoek, M.C. (1998) First micromachined silicon load cell for loads up to 1000 kg. In: Proceedings of the 1998 Conference on Micromachined Devices and Components IV, 21-22 Sept 1998, Santa Clara, CA, USA. pp. 424-430. SPIE. ISSN 0277-786X

1997

de Bree, H.E. (1997) The microflown. PhD thesis, University of Twente. ISBN 9-036-50926-2
De Nivelle, M.J.M.E. and Bruijn, M.P. and De Vries, R. and Wijnbergen, J.J. and De Korte, P.A.J. and Sánchez, S. and Elwenspoek, M.C. and Heidenblut, T. and Schwierzi, B. and Michalke, W. and Steinbeiss, E. (1997) Low noise high-Tc superconducting bolometers on silicon nitride membranes for far-infrared detection. Journal of applied physics, 82 (10). pp. 4719-4726. ISSN 0021-8979 *** ISI Impact 2,101 ***
Ducso, C. and Vazsonyi, E. and Adam, M. and Szabo, I. and Barsony, I. and Gardeniers, J.G.E. and van den Berg, A. (1997) Porous silicon bulk micromachining for thermally isolated membrane formation. Sensors and actuators A: Physical, 60 (1-3 pt 1). pp. 235-239. ISSN 0924-4247 *** ISI Impact 2,201 ***
Dumitrescu, M. and Cobianu, C. and Lungu, D. and Dascalu, D.C. and Pascu, A. and van den Berg, A. and Gardeniers, J.G.E. and Kolev, S. and Ducso, C. and Barsony, I. (1997) Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by COSMOS program simulation. In: Proceedings of the 1997 International Semiconductor Conference, CAS. Part 1 (of 2),, 7-11 October 1997, Sinaia, Romania. pp. 145-148. IEEE Computer Society. ISBN 0-7803-3804-9
Gui, C. and Albers, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Lambeck, P.V. (1997) Fusion bonding of rough surfaces with polishing technique for silicon micromachining. Microsystem technologies, 3 (3). pp. 122-128. ISSN 0946-7076 *** ISI Impact 0,974 ***
Gui, C. and Jansen, H.V. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multilayer substrates. In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), 16-19 June 1997, Chicago, IL, USA. pp. 633-636. IEEE Computer Society. ISBN 0-7803-3829-4
Imai, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1997) Output characteristics of a thin-film piezoelectric AE sensor for magnetic head-disk interaction. JSME International Journal, Series C, 40 (1). pp. 33-41. ISSN 0914-8825
Jansen, H.V. and de Boer, M.J. and Wensink, H. and Kloeck, B. and Elwenspoek, M.C. (1997) The black silicon method. VIII. A study of the performance of etching silicon using SF6O2-based chemistry with cryogenical wafer cooling and a high density ICP source In: Micro- and Nano-Engineering 1997, 15 Sept 1997, Athens, Greece. pp. 1-4. Elsevier.
Jansen, H.V. and de Boer, M.J. and Wiegerink, R.J. and Tas, N.R. and Smulders, E.J.T. and Neagu, C.R. and Elwenspoek, M.C. (1997) RIE lag in high aspect ratio trench etching of silicon. Microelectronic engineering, 35 (1-4). pp. 45-50. ISSN 0167-9317 *** ISI Impact 1,277 ***
Kasparian, J. and Elwenspoek, M.C. and Allongue, P. (1997) Digital computation and in situ STM approach of silicon anisotropic etching. Surface science, 388 (1-3). pp. 50-62. ISSN 0039-6028 *** ISI Impact 1,931 ***
Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1997) A fabrication process for electrostatic microactuators with integrated gear linkages. Journal of microelectromechanical systems, 6 (3). pp. 234-241. ISSN 1057-7157 *** ISI Impact 1,939 ***
Legtenberg, R. and Gilbert, J. and Senturia, S.D. and Elwenspoek, M.C. (1997) Electrostatic curved electrode actuators. Journal of microelectromechanical systems, 6 (3). pp. 257-265. ISSN 1057-7157 *** ISI Impact 1,939 ***
Neagu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Kelly, J.J. (1997) An electrochemical active valve. Electrochimica acta, 42 (20-22). pp. 3367-3373. ISSN 0013-4686 *** ISI Impact 4,803 ***
Neagu, C.R. and Jansen, H.V. and Smith, A. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) Characterization of a planar microcoil for implantable microsystems. Sensors and actuators A: Physical, 62 (1-3 pt 3). pp. 599-611. ISSN 0924-4247 *** ISI Impact 2,201 ***
Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and van den Berg, A. and Elwenspoek, M.C. (1997) Designing, realization and characterization of a novel capacitive pressure/flow sensor. In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), 16-19 June 1997, Chicago, IL, USA. pp. 151-154. IEEE Computer Society. ISBN 0-7803-3829-4
van Rijn, C.J.M. and Van der Wekken, M.C. and Nijdam, W. and Elwenspoek, M.C. (1997) Deflection and maximum load of microfiltration membrane sieves made with silicon micromachining. Journal of microelectromechanical systems, 6 (1). pp. 48-54. ISSN 1057-7157 *** ISI Impact 1,939 ***
Sánchez, S. and Elwenspoek, M.C. and Gui, C. and De Nivelle, M.J.M.E. and de Vries, R. and De Korte, P.A.J. and Bruijn, M.P. and Wijnbergen, J.J. and Michalke, W. and Steinbeiss, E. and Heidenblut, T. and Schwierzi, B. (1997) A high-Tc superconductor bolometer on a silicon nitride membrane. In: Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS, 26-30 Jan 1997, Nagoya, Japan. pp. 506-571. IEEE Computer Society. ISBN 0-7803-3744-1
Sánchez, S. and Gui, C. and Elwenspoek, M.C. (1997) Spontaneous direct bonding of thick silicon nitride. Journal of micromechanics and microengineering, 7 (3). pp. 111-113. ISSN 0960-1317 *** ISI Impact 1,768 ***
Spiering, V.L. and Lammerink, T.S.J. and Burger, G.J. and Te Riet, J.-K. and van den Berg, A. (1997) Technologies and applications for micro fluid systems [Sistemi di microanalisi per fluidi]. Oleodinamica-Pneumatica, 38 (11). pp. 92-102. ISSN 1122-5017
Tas, N.R. and Sonnenberg, A.H. and Sander, A.F.M. and Elwenspoek, M.C. (1997) Surface micromachined linear electrostatic stepper motor. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 26-30 Jan 1997, Nagoya, Japan. pp. 215-220. IEEE Computer Society. ISBN 0-7803-3744-1
Tas, N.R. and Wissink, J. and Sander, L. and Lammerink, T.S.J. and Elwenspoek, M.C. (1997) Shuffle motor: a high force, high precision linear electrostatic stepper motor. In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2), 16-19 June 1997, Chicago, IL, USA. pp. 777-780. IEEE Computer Society. ISBN 0-7803-3829-4
Tjerkstra, R.W. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and van den Berg, A. and Elwenspoek, M.C. (1997) Etching technology for chromatography microchannels. Electrochimica acta, 42 (20-22). pp. 3399-3406. ISSN 0013-4686 *** ISI Impact 4,803 ***
Tjerkstra, R.W. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and van den Berg, A. and Elwenspoek, M.C. (1997) Etching technology for microchannels. In: Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS, 26-30 Jan 1997, Nagoya, Japan. pp. 147-152. IEEE Computer Society. ISBN 0-7803-3744-1
Van Toor, M.W. and Lammerink, T.S.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Monsma, D.J. (1997) A novel micromechanical flow controller. Journal of micromechanics and microengineering, 7 (3). pp. 165-169. ISSN 0960-1317 *** ISI Impact 1,768 ***

1996

Berenschot, J.W. and Jansen, H.V. and Burger, G.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1996) Thermally assisted ion beam etching of polytetrafluoroethylene a new technique for high aspect ratio etching of MEMS. In: Proceedings of the 1996 9th Annual International Workshop on Micro Electro Mechanical Systems, 11-15 Feb 1996, San Diego, CA, USA. pp. 277-284. IEEE Computer Society. ISBN 0-7803-2985-6
de Bree, H.E. and Leussink, P.J. and Korthorst, M.T. and Jansen, H.V. and Lammerink, T.S.J. and Elwenspoek, M.C. (1996) The μ-flown: A novel device for measuring acoustic flows. Sensors and actuators A: Physical, 54 (1-3). pp. 552-557. ISSN 0924-4247 *** ISI Impact 2,201 ***
Bressers, P.M.M.C. and Kelly, J.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1996) Surface morphology of p-type (100) silicon etched in aqueous alkaline solution. Journal of the Electrochemical Society, 143 (5). pp. 1744-1750. ISSN 0013-4651 *** ISI Impact 3,014 ***
Burger, G.J. and Smulders, E.J.T. and Berenschot, J.W. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. (1996) High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through. Sensors and actuators A: Physical, 54 (1-3). pp. 669-673. ISSN 0924-4247 *** ISI Impact 2,201 ***
Burger, J.F. and Burger, G.J. and Lammerink, T.S.J. and Imai, S. and Fluitman, J.H.J. (1996) Miniaturised friction force measuring system for tribological research on magnetic storage devices. In: Proceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems, 11-15 Feb 1996, San Diego, CA, USA. pp. 99-104. IEEE Computer Society. ISBN 0-7803-2985-6
De Nivelle, M.J.M.E. and Bruijn, M.P. and Frericks, M. and De Vries, R. and Wijnbergen, J.J. and De Korte, P.A.J. and Sánchez, S. and Elwenspoek, M.C. and Heidenblut, T. and Schwierzi, B. and Michalke, W. and Steinbeiss, E. (1996) A high-Tc superconductor bolometer for remote sensing of atmospheric OH. Journal De Physique. IV : JP, 6 (3). C3-423-C3-428. ISSN 1155-4339
Elwenspoek, M.C. (1996) The form of etch rate minima in wet chemical anisotropic etching of silicon. Journal of micromechanics and microengineering, 6 (4). pp. 405-409. ISSN 0960-1317 *** ISI Impact 1,768 ***
Fluitman, J.H.J. (1996) Microsystems technology: Objectives. Sensors and actuators A: Physical, 56 (1-2). pp. 151-166. ISSN 0924-4247 *** ISI Impact 2,201 ***
Gardeniers, J.G.E. and Tilmans, H.A.C. and Visser, C.C.G. (1996) LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design. Journal of vacuum science and technology A: vacuum, surfaces, and films, 14 (5). pp. 2879-2892. ISSN 0734-2101 *** ISI Impact 1,724 ***
Imai, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1996) Fundamental study on a thin-film ae sensor for measurement of behavior of a multi-pad contact slider. In: Proceedings of the 1996 IEEE International Magnetics Conference (INTERMAG'96). Part 1 (of 3), 9-12 April 1996, Seattle, WA, USA. pp. 3675-3677. IEEE Computer Society. ISSN 0018-9464
Imai, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1996) Output characteristics of a thin-film piezoelectric AE sensor for magnetic head-disk interaction. Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, 62 (595). pp. 928-938. ISSN 0387-5024
Jansen, H.V. and de Boer, M.J. and Elwenspoek, M.C. (1996) The black silicon method VI: high aspect ratio trench etching for MEMS applications. In: Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems 1996, MEMS '96, 11-15 Feb 1996, San Diego, CA, USA. pp. 250-257. IEEE Computer Society. ISBN 0-7803-2985-6
Jansen, H.V. and Gardeniers, J.G.E. and de Boer, M.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) A survey on the reactive ion etching of silicon in microtechnology. Journal of micromechanics and microengineering, 6 (1). pp. 14-28. ISSN 0960-1317 *** ISI Impact 1,768 ***
King, S.L. and Coccia, L.G. and Gardeniers, J.G.E. and Boyd, I.W. (1996) Microstructure of pulsed-laser deposited PZT on polished and annealed MGO substrates. In: Proceedings of the 1996 MRS Spring Symposium, 7-12 April 1996, San Francisco, CA, USA. pp. 157-162. Materials Research Society (MRS). ISSN 0272-9172
King, S.L. and Gardeniers, J.G.E. and Boyd, I.W. (1996) Pulsed-laser deposited ZnO for device applications. In: Proceedings of the 1995 E-MRS Spring Conference, 2 April 1996, Strasbourg, France. pp. 811-818. Elsevier. ISSN 0169-4332
Lammerink, T.S.J. and Spiering, V.L. and Elwenspoek, M.C. and Fluitman, J.H.J. and van den Berg, A. (1996) Modular concept for fluid handling systems: a demonstrator micro analysis system. In: Proceedings of the 1996 9th Annual International Workshop on Micro Electro Mechanical Systems, 11-15 Feb 1996, San Diego, CA, USA. pp. 389-394. IEEE Computer Society. ISBN 0-7803-2985-6
Legtenberg, R. (1996) Electrostatic actuators fabricated by surface micromachining techniques. PhD thesis, University of Twente. ISBN 90-3650796-0
Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Electrostatic microactuators with integrated gear linkages for mechanical power transmission. In: Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS '96, 11-15 Feb 1996, San Diego, CA, USA. pp. 204-209. IEEE Computer Society. ISBN 0-7803-2985-6
Legtenberg, R. and Groeneveld, A.W. and Elwenspoek, M.C. (1996) Comb-drive actuators for large displacements. Journal of micromechanics and microengineering, 6 (3). pp. 320-329. ISSN 0960-1317 *** ISI Impact 1,768 ***
Neagu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Kelly, J.J. (1996) An electrochemical microactuator: Principle and first results. Journal of microelectromechanical systems, 5 (1). pp. 2-9. ISSN 1057-7157 *** ISI Impact 1,939 ***
Popescu, D.S. and Dascalu, D.C. and Elwenspoek, M.C. and Lammerink, T.S.J. (1996) Ultrasonic transducer with thermomechanical excitation and piezoresistive detection. In: Proceedings of the 1996 International Semiconductor Conference, CAS'96. Part 1 (of 2), 9-12 Oct 1996, Sinaia, Romania. pp. 85-88. IEEE Computer Society. ISBN 0-7803-3223-7
van Rijn, C.J.M. and Nijdam, W. and Elwenspoek, M.C. (1996) Microsieve for leukocyte depletion of erythrocyte concentrates. In: Proceedings of the 1996 18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society. Part 1 (of 5), 31 Oct - 3 Nov 1996, Amsterdam, Netherlands. pp. 256-257. IEEE Computer Society. ISSN 0589-1019 ISBN 0-7803-3811-1
Spiering, V.L. and Bergveld, P. and Elwenspoek, M.C. and van den Berg, A. (1996) A µsensor array in a fluidic system for space applications. In: Proceedings Dutch Sensor Conference, 20-21 March 1996, Delft, Netherlands. pp. 143-146. Delft University Press. ISBN 90-407-1321-9
Spiering, V.L. and Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. and van den Berg, A. (1996) Micro analysis systems for fluids [Sistemi di microanalisi per fluidi]. Oleodinamica pneumatica Lubrificazione, 1 (6). pp. 76-83. ISSN 0391-8645
Spiering, V.L. and Lammerink, T.S.J. and Jansen, H.V. and Fluitman, J.H.J. and van den Berg, A. (1996) Technologies and microstructures for separation techniques in chemical analysis. In: Proceedings of SPIE - The International Society for Optical Engineering - Micromachined Devices and Components II, 14-15 Oct 1996, Austin, TX, USA. pp. 91-100. SPIE, The International Society for Optical Engineering. ISSN 0277-786X
Tas, N.R. and Sonnenberg, A.H. and Jansen, H.V. and Legtenberg, R. and Elwenspoek, M.C. (1996) Stiction in surface micromachining. Journal of micromechanics and microengineering, 6 (4). pp. 385-397. ISSN 0960-1317 *** ISI Impact 1,768 ***

1995

de Boer, M.J. and Jansen, H.V. and Elwenspoek, M.C. (1995) The black silicon method V: a study of the fabricating of movable structures for micro electromechanical systems. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 565-568. IEEE Computer Society. ISBN 91-630-3473-5
de Bree, H.E. and Leussink, P.J. and Korthorst, M.T. and Backlund, Y. and Jansen, H.V. (1995) The Wheatstone Gadget : a simple ciruit for the measuring differential resistance variations. In: Sixth Workshop on Micromachining Micromechanics and Microsystems, MME 1995, 3-5 Sept 1995, Copenhagen. pp. 1-4. MicroMechanics Europe. ISBN 8789935004
de Bree, H.E. and Leussink, P.J. and Korthorst, M.T. and Jansen, H.V. and Lammerink, T.S.J. and Elwenspoek, M.C. (1995) The μ-flown: Novel device measuring acoustical flows. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 536-539. IEEE Computer Society. ISBN 91-630-3473-5
Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. and Tokuyama, M. and Hirose, S. (1995) Piezoelectric impact force sensor array for tribological research on rigid disk storage media. In: Proceedings of the 1995 IEEE Micro Electro Mechanical Systems Conference, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 294-299. IEEE Computer Society. ISBN 0-7803-2503-6
Burger, G.J. and Smulders, E.J.T. and Berenschot, J.W. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. (1995) High resolution shadow mask patterning in deep holes and its application to an electrical wafer feed-through. In: Transducers '95 - Eurosensors XI Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 573-576. IEEE Computer Society. ISBN 91-630-3473-5
Craciun, V. and Amirhaghi, S. and Craciun, D. and Elders, J. and Gardeniers, J.G.E. and Boyd, I.W. (1995) Effects of laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition. Applied surface science, 86 (1). pp. 99-106. ISSN 0169-4332 *** ISI Impact 3,150 ***
Craciun, V. and Elders, J. and Gardeniers, J.G.E. and Geretovsky, J. and Boyd, I.W. (1995) Growth of ZnO thin films on GaAs by pulsed laser deposition. Thin solid films, 259 (1). pp. 1-4. ISSN 0040-6090 *** ISI Impact 1,761 ***
Elders, J. and Jansen, H.V. and Elwenspoek, M.C. and Ehrfeld, W. (1995) DEEMO: a new technology for the fabrication of microstructures. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 238-243. IEEE Computer Society. ISBN 0-7803-2503-6
Elwenspoek, M.C. (1995) Physical chemistry of wet chemical anisotropic etching of silicon. In: Proceedings of the ASME Dynamic Systems and Control Division. ASME, New York, NY, USA, pp. 901-907. ISBN 0791817466
Elwenspoek, M.C. and Weustink, M. and Legtenberg, R. (1995) Static and dynamic properties of active joints. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX. Part 2 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 412-415. IEEE Computer Society. ISBN 91-630-3473-5
Gardeniers, J.G.E. and Smith, A. and Cobianu, C. (1995) Characterisation of sol-gel PZT films on Pt-coated substrates. Journal of micromechanics and microengineering, 5 (2). pp. 153-155. ISSN 0960-1317 *** ISI Impact 1,768 ***
Gui, C. and Legtenberg, R. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure. Journal of micromechanics and microengineering, 5 (2). pp. 183-185. ISSN 0960-1317 *** ISI Impact 1,768 ***
Gui, C. and Legtenberg, R. and Tilmans, H.A.C. and Fluitman, J.H.J. and Elwenspoek, M.C. (1995) Nonlinearity and hysteresis of resonant strain gauges. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 157-162. IEEE Computer Society. ISBN 0-7803-2503-6
Hamberg, M.W. and Neagu, C.R. and Gardeniers, J.G.E. and IJntema, D.J. and Elwenspoek, M.C. (1995) Electrochemical micro actuator. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 106-110. IEEE Computer Society. ISBN 0-7803-2503-6
Heideman, R.G. and Lambeck, P.V. and Gardeniers, J.G.E. (1995) High quality ZnO layers with adjustable refractive indices for integrated optics applications. Optical materials, 4 (6). pp. 741-755. ISSN 0925-3467 *** ISI Impact 2,183 ***
Imai, S. and Tokuyama, M. and Hirose, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1995) Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction. IEEE transactions on magnetics, 31 (6). pp. 3009-3011. ISSN 0018-9464 *** ISI Impact 1,277 ***
Jansen, H.V. and de Boer, M.J. and Burger, J.F. and Legtenberg, R. and Elwenspoek, M.C. (1995) Black silicon method II: the effect of mask material and loading on the reactive ion etching of deep silicon trenches. Microelectronic engineering, 27 (1-4). pp. 475-480. ISSN 0167-9317 *** ISI Impact 1,277 ***
Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elders, J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Process for producing micromechanical structures by means of reactieve ion etching. Patent WO1995NL00221 (Application).
Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elwenspoek, M.C. (1995) The black silicon method: A universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. Journal of micromechanics and microengineering, 5 (2). pp. 115-120. ISSN 0960-1317 *** ISI Impact 1,768 ***
Jansen, H.V. and de Boer, M.J. and Otter, B. and Elwenspoek, M.C. (1995) The black silicon method IV: the fabrication of three-dimensional structures in silicon with high aspect ratios for scanning probe microscopy and other applications. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 88-93. IEEE Computer Society. ISBN 0-7803-2503-6
Jansen, H.V. and Gardeniers, J.G.E. and Fluitman, J.H.J. (1995) A survey on the reactive ion etching of silicon in microtechnology. In: Sixth Workshop on Micromachining Micromechanics and Microsystems, MME 1995, 3-5 Sept 1995, Copenhagen. pp. 1-13. MicroMechanics Europe. ISBN 8789935004
van Kuijk, J.C.C. and Lammerink, T.S.J. and de Bree, H.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Multi-parameter detection in fluid flows. Sensors and actuators A: Physical, 47 (1-3 pt 4). pp. 369-372. ISSN 0924-4247 *** ISI Impact 2,201 ***
Lammerink, T.S.J. and Dijkstra, F. and Houkes, Z. and van Kuijk, J.C.C. (1995) Intelligent gas-mixture flow sensor. Sensors and actuators A: Physical, 47 (n 1-3 pt 4). pp. 380-384. ISSN 0924-4247 *** ISI Impact 2,201 ***
Lammerink, T.S.J. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Micromachined hydraulic astable multivibrator. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 13-18. IEEE Computer Society. ISBN 0-7803-2503-6
Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (1995) An electrostatic lower stator axial gap wobble motor: design and fabrication. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX. Part 2 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 404-407. IEEE Computer Society. ISBN 91-630-3473-5
Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Electrostatic curved electrode actuators. In: : Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 37-42. IEEE Computer Society. ISBN 0-7803-2503-6
Legtenberg, R. and Jansen, H.V. and de Boer, M.J. and Elwenspoek, M.C. (1995) Anisotropic reactive ion etching of silicon using SF6/O2/CHF3 gas mixtures Journal of the Electrochemical Society, 142 (6). pp. 2020-2028. ISSN 0013-4651 *** ISI Impact 3,014 ***
Popescu, D.S. and Dascalu, D.C. and Elwenspoek, M.C. and Lammerink, T.S.J. (1995) Silicon active microvalves using buckled membranes for actuation. In: The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95., 25-29 June 1995, Stockholm, Sweden. pp. 305-308. IEEE Computer Society. ISBN 91-630-3473-5
van Rijn, C.J.M. and Elwenspoek, M.C. (1995) Micro filtration membrane sieve with silicon micro machining for industrial and biomedical applications. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 83-87. IEEE Computer Society. ISBN 0-7803-2503-6
van Rijn, C.J.M. and Nijdam, W. and Elwenspoek, M.C. (1995) High flow rate microsieve for bio medical applications. Proceedings of the ASME Dynamic Systems and Control Division, 57-2. pp. 995-1000. ISSN 0022-0434 *** ISI Impact 0,975 ***
Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. (1995) Planarization and fabrication of bridges across deep grooves or holes in silicon using a dry film photoresist followed by an etch back. Journal of micromechanics and microengineering, 5 (2). pp. 189-192. ISSN 0960-1317 *** ISI Impact 1,768 ***
Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Sacrificial wafer bonding for planarization after very deep etching. Journal of microelectromechanical systems, 4 (3). pp. 151-157. ISSN 1057-7157 *** ISI Impact 1,939 ***

1994

Berenschot, J.W. and Gardeniers, J.G.E. and Lammerink, T.S.J. and Elwenspoek, M.C. (1994) New applications of r.f.-sputtered glass films as protection and bonding layers in silicon micromachining. Sensors and actuators A: Physical, 41 ( 1-3 pt 3). pp. 338-343. ISSN 0924-4247 *** ISI Impact 2,201 ***
van den Berg, A. and Bergveld, P. and Reinhoudt, D.N. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) Miniaturized chemical analysis systems. In: Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings, 2-4 October 1994, Nagoya, Jpn. pp. 181-184. IEEE Computer Society. ISBN 0-7803-2095-6
Craciun, V. and Elders, J. and Gardeniers, J.G.E. and Boyd, I.W. (1994) Characteristics of high quality ZnO thin films deposited by pulsed laser deposition. Applied physics letters, 65 (23). pp. 2963-2965. ISSN 0003-6951 *** ISI Impact 3,142 ***
Elders, J. and Jansen, H.V. and Elwenspoek, M.C. (1994) Materials analysis of fluorocarbon films for MEMS applications. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 170-175. IEEE Computer Society. ISBN 0-7803-1833-1
Elwenspoek, M.C. (1994) Some selected research item of the micro mechanics department at MESA. In: Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings, 2-4 October 1994, Nagoya, Jpn. pp. 8-31. IEEE Computer Society. ISBN 0-7803-2095-6
Elwenspoek, M.C. and Lammerink, T.S.J. and Miyake, R. and Fluitman, J.H.J. (1994) Towards integrated microliquid handling systems. Journal of micromechanics and microengineering, 4 (4). pp. 227-245. ISSN 0960-1317 *** ISI Impact 1,768 ***
Elwenspoek, M.C. and Lindberg, U. and Kok, H. and Smith, L. (1994) Wet chemical etching mechanism of silicon. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 223-228. IEEE Computer Society. ISBN 0-7803-1833-1
Fluitman, J.H.J. (1994) Micro systems technology. In: Proceedings of the IEEE 1994 Custom Integrated Circuits Conference, 1-4 May 1994, San Diego, CA, USA. pp. 471-478. IEEE Computer Society. ISBN 0-7803-1886-2
Fluitman, J.H.J. and van den Berg, A. and Lammerink, T.S.J. (1994) Micromechanical components for μTAS. (Invited) In: Proceedings of the μTAS ’94 conference, 21-22 November 1994, Enschede. pp. 73-83. Kluwer Academic Publishers. ISBN 0-7923-3217-2
Gardeniers, J.G.E. and Elwenspoek, M.C. and Cobianu, C. (1994) Texture variations in sol-gel derived PZT films on substrates with platinum metallization. In: Proceedings of the 1994 MRS Spring Meeting, 4-8 April 1994, San Francisco, CA, USA. pp. 451-456. Materials Research Society. ISSN 0272-9172
Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elwenspoek, M.C. (1994) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. In: Micro Mechanics Europe 1994, 5-6 Sept 1994, Pisa, Italy. pp. 1-5. MicroMechanics Europe.
Jansen, H.V. and Gardeniers, J.G.E. and Elders, J. and Tilmans, H.A.C. and Elwenspoek, M.C. (1994) Applications of fluorocarbon polymers in micromechanics and micromachining. Sensors and actuators A: Physical, 41 (1-3). pp. 136-140. ISSN 0924-4247 *** ISI Impact 2,201 ***
Jansen, H.V. and Verhagen, R. and Elwenspoek, M.C. (1994) BSM 3: design rules, modelling, optimisation, and performance of precision position systems for scanning probe, gripping, and other MEMS applications. In: Seminar on Handling and Assembly of Microparths, 14 Nov 1994, Vienna, Austria. pp. 1-10. Unknown. ISBN Not assigned
Legtenberg, R. and Tilmans, H.A.C. and Elders, J. and Elwenspoek, M.C. (1994) Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms. Sensors and actuators A: Physical, 43 (1-3). pp. 230-238. ISSN 0924-4247 *** ISI Impact 2,201 ***
Popescu, D.S. and Lammerink, T.S.J. and Elwenspoek, M.C. (1994) Buckled membranes for microstructures. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 188-192. IEEE Computer Society. ISBN 0-7803-1833-1
Prak, A. and Fluitman, J.H.J. (1994) Applications of a model for silicon resonant sensors. Sensors and actuators A: Physical, 41 (1-3 pt 3). pp. 251-255. ISSN 0924-4247 *** ISI Impact 2,201 ***
Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) Low temperature sacrificial wafer bonding for planarization after very deep etching. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 69-74. IEEE Computer Society. ISBN 0-7803-1833-1
Tilmans, H.A.C. and Legtenberg, R. and Schurer, H. and IJntema, D.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) (Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators. IEEE transactions on ultrasonics, ferroelectrics and frequency control, 41 (1). pp. 4-6. ISSN 0885-3010 *** ISI Impact 2,287 ***

1993

Elders, J. and Tilmans, H.A.C. and Bouwstra, S. and Elwenspoek, M.C. (1993) Mechanical parameter extraction using resonant structures. In: Proceedings of the 1993 Spring Meeting of the Materials Research Society, 12-16 April 1993, San Francisco, CA, USA. pp. 171-176. Materials Research Society. ISSN 0272-9172
Elwenspoek, M.C. (1993) On the mechanism of anisotropic etching of silicon. Journal of the Electrochemical Society, 140 (7). pp. 2075-2080. ISSN 0013-4651 *** ISI Impact 3,014 ***
Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1993) Intergrated micro-liquid dosing system. In: Proceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS, 7-10 Feb 1993, Fort Lauderdale, FL, USA. pp. 254-259. IEEE Computer Society. ISBN 0-7803-0958-8
Lammerink, T.S.J. and Tas, N.R. and Elwenspoek, M.C. and Fluitman, J.H.J. (1993) Micro-liquid flow sensor. Sensors and actuators A: Physical, 37-38. pp. 45-50. ISSN 0924-4247 *** ISI Impact 2,201 ***
Lindberg, U. and Soderkvist, J. and Lammerink, T.S.J. and Elwenspoek, M.C. (1993) Quasi-buckling of micromachined beams. Journal of micromechanics and microengineering, 3 (4). pp. 183-186. ISSN 0960-1317 *** ISI Impact 1,768 ***
Miyake, R. and Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1993) Micro mixer with fast diffusion. In: Proceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS, 7-10 Feb 1993, Fort Lauderdale, FL, USA. pp. 248-253. IEEE Computer Society. ISBN 0-7803-0958-8
de Ridder, R.M. and Sander, A.F.M. and Driessen, A. and Fluitman, J.H.J. (1993) An integrated optic adiabatic TE/TM mode splitter on silicon. Journal of lightwave technology, 11 (11). pp. 1806-1811. ISSN 0733-8724 *** ISI Impact 2,567 ***
Spiering, V.L. and Bouwstra, S. and Burger, J.F. and Elwenspoek, M.C. (1993) Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief. Journal of micromechanics and microengineering, 3 (4). pp. 243-246. ISSN 0960-1317 *** ISI Impact 1,768 ***
Spiering, V.L. and Bouwstra, S. and Fluitman, J.H.J. (1993) Realization of mechanical decoupling zones for package-stress reduction. Sensors and actuators A: Physical, 37-38. pp. 800-804. ISSN 0924-4247 *** ISI Impact 2,201 ***
Tilmans, H.A.C. and Elwenspoek, M.C. (1993) Quasi-monolithic planar load cells using built-in resonant strain gauges. Journal of micromechanics and microengineering, 3 (4). pp. 193-197. ISSN 0960-1317 *** ISI Impact 1,768 ***

1992

Elwenspoek, M.C. and Smith, L. and Hok, B. (1992) Active joints for microrobot limbs. Journal of micromechanics and microengineering, 2 (3). pp. 221-223. ISSN 0960-1317 *** ISI Impact 1,768 ***
van Mullem, C.J. and Tilmans, H.A.C. and Mouthaan, A.J. and Fluitman, J.H.J. (1992) Electrical cross-talk in two-port resonators - the resonant silicon beam force sensor. Sensors and actuators A: Physical, 31 (1-3 pt 3). pp. 168-173. ISSN 0924-4247 *** ISI Impact 2,201 ***
Prak, A. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Selective mode excitation and detection of micromachined resonators. Journal of microelectromechanical systems, 1 (4). pp. 179-186. ISSN 1057-7157 *** ISI Impact 1,939 ***
Prak, A. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Selective mode excitation and detection of micromachined resonators. In: Proceedings of the IEEE Micro Electro Mechanical Systems Workshop, 4-7 Feb 1992, Travemuende, Germany. pp. 220-225. IEEE Computer Society. ISBN 0-7803-0497-7
Tilmans, H.A.C. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Micro resonant force gauges. Sensors and actuators A: Physical, 30 (1-2). pp. 35-53. ISSN 0924-4247 *** ISI Impact 2,201 ***

1991

Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1991) Frequency dependence of thermal excitation of micromechanical resonators. Sensors and actuators A: Physical, 27 (1-3). pp. 685-689. ISSN 0924-4247 *** ISI Impact 2,201 ***
Legtenberg, R. and Bouwstra, S. and Elwenspoek, M.C. (1991) Low-temperature glass bonding for sensor application using boron oxide thin films. Journal of micromechanics and microengineering, 1 (3). pp. 157-160. ISSN 0960-1317 *** ISI Impact 1,768 ***
Legtenberg, R. and Bouwstra, S. and Fluitman, J.H.J. (1991) Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer. Sensors and actuators A: Physical, 27 (1-3). pp. 723-727. ISSN 0924-4247 *** ISI Impact 2,201 ***
van Mullem, C.J. and Blom, F.R. and Fluitman, J.H.J. and Elwenspoek, M.C. (1991) Piezoelectrically driven silicon beam force sensor. Sensors and actuators A: Physical, 26 (1-3). pp. 379-383. ISSN 0924-4247 *** ISI Impact 2,201 ***
Prak, A. and Blom, F.R. and Elwenspoek, M.C. and Lammerink, T.S.J. (1991) Q-factor and frequency shift of resonating silicon diaphragms in air. Sensors and actuators A: Physical, 27 (1-3). pp. 691-698. ISSN 0924-4247 *** ISI Impact 2,201 ***
Spiering, V.L. and Bouwstra, S. and Spiering, R.M.E.J. and Elwenspoek, M.C. (1991) On-chip decoupling zone for package-stress reduction. In: 1991 International Conference on Solid-State Sensors and Actuators - Transducers '91, 24-28 June 1991, San Francisco, CA, USA. pp. 982-985. IEEE Computer Society. ISBN 0-87942-585-7
Tilmans, H.A.C. and Bouwstra, S. and IJntema, D.J. and Elwenspoek, M.C. and Klein, C.F. (1991) A differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247 *** ISI Impact 2,201 ***
Tilmans, H.A.C. and IJntema, D.J. and Fluitman, J.H.J. (1991) Single element excitation and detection of (micro-)mechanical resonators. In: 1991 International Conference on Solid-State Sensors and Actuators - Transducers '91, 24-28 June 1991, San Francisco, CA, USA. pp. 533-537. IEEE Computer Society. ISBN 0-87942-585-7
Vogels, L.J.P. and Bennema, P. and Hottenhuis, M.H.J. and Elwenspoek, M.C. (1991) On the morphology of ammonium nitrate (III): theory and observation. Journal of crystal growth, 108 (3-4). pp. 733-743. ISSN 0022-0248 *** ISI Impact 1,462 ***

1990

Blom, F.R. and Yntema, D.J. and van de Pol, F.C.M. and Elwenspoek, M.C. and Fluitman, J.H.J. and Popma, T.J.A. (1990) Thin-film ZnO as micromechanical actuator at low frequencies. Sensors and actuators A: Physical, 21 (1-3). pp. 226-228. ISSN 0924-4247 *** ISI Impact 2,201 ***
Bouwstra, S. and Legtenberg, R. and Tilmans, H.A.C. and Elwenspoek, M.C. (1990) Resonating microbridge mass flow sensor. Sensors and actuators A: Physical, 21 (1-3). pp. 332-335. ISSN 0924-4247 *** ISI Impact 2,201 ***
Bouwstra, S. and de Weerd, E.L. and Elwenspoek, M.C. (1990) In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators. Sensors and actuators A: Physical, 24 (3). pp. 227-235. ISSN 0924-4247 *** ISI Impact 2,201 ***
Eijkel, C.J.M. and Branebjerg, J. and Elwenspoek, M.C. and van de Pol, F.C.M. (1990) A new technology for micromachining of silicon: Dopant selective HF anodic etching for the realization of low-doped monocrystalline silicon structures. IEEE electron device letters, 11 (12). pp. 588-589. ISSN 0741-3106 *** ISI Impact 2,528 ***
Eijkel, C.J.M. and Fluitman, J.H.J. (1990) Optimization of the response of magnetoresistive elements. IEEE transactions on magnetics, 26 (1). pp. 311-321. ISSN 0018-9464 *** ISI Impact 1,277 ***
Lammerink, T.S.J. and Elwenspoek, M.C. and Van Ouwerkerk, R.H. and Bouwstra, S. and Fluitman, J.H.J. (1990) Performance of thermally excited resonators. Sensors and actuators A: Physical, 21 (1-3). pp. 352-356. ISSN 0924-4247 *** ISI Impact 2,201 ***
van de Pol, F.C.M. and Van Lintel, H.T.G. and Elwenspoek, M.C. and Fluitman, J.H.J. (1990) A thermopneumatic micropump based on micro-engineering techniques. Sensors and actuators A: Physical, 21 (1-3). pp. 198-202. ISSN 0924-4247 *** ISI Impact 2,201 ***
de Ridder, R.M. and Fluitman, J.H.J. (1990) Hysteresis model for an orthogonal thin-film magnetometer. IEEE transactions on magnetics, 26 (4). pp. 1237-1245. ISSN 0018-9464 *** ISI Impact 1,277 ***
Tilmans, H.A.C. and Bouwstra, S. and Fluitman, J.H.J. and Spence, S.L. (1990) Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges. Sensors and actuators A: Physical, 25 (1-3). pp. 79-86. ISSN 0924-4247 *** ISI Impact 2,201 ***
Van der Heijden, A.E.D.M. and Elwenspoek, M.C. (1990) Contact nucleation. In situ and ex situ observations of surface damaging. Journal of crystal growth, 100 (3). pp. 1087-1091. ISSN 0022-0248 *** ISI Impact 1,462 ***
Vogels, L.J.P. and Marsman, H.A.M. and Verheijen, M.A. and Bennema, P. and Elwenspoek, M.C. (1990) On the growth of ammonium nitrate(III) crystals. Journal of crystal growth, 100 (3). pp. 439-446. ISSN 0022-0248 *** ISI Impact 1,462 ***