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2012

Bernhardi, E.H. and Khan, M.R.H. and Roeloffzen, C.G.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2012) Photonic generation of stable microwave signals from a dual-wavelength Al₂O₃:Yb³⁺ distributed-feedback waveguide laser Optics letters, 37 (2). pp. 181-183. ISSN 0146-9592 *** ISI Impact 3,059 ***

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2012) Stable microwave generation in a dual-phase-shifted Al₂O₃:Yb³⁺ distributed-feedback waveguide laser In: Lasers, Sources and Related Photonic Devices, Conference Program, 29 Jan - 03 Feb 2012, San Diego, California, USA. Paper AM5A.6. 2012 OSA Optics and Photonics Congress. Optical Society of America. ISBN 978-1-55752-933-6

Delalande, M.Y. and de Vries, Jeroen and Abelmann, L. and Lodder, J.C. (2012) Measurement of the nucleation and domain depinning field in a single Co/Pt multilayer dot by anomalous Hall effect. Journal of magnetism and magnetic materials, 324 (7). pp. 1277-1280. ISSN 0304-8853 *** ISI Impact 1,204 ***

Hoang, Thi Hanh (2012) Machining technologies for silicon-based nanochannels and some properties of aqueous solutions confined in these channels. PhD thesis, University of Twente. ISBN 978-90-365-3298-3

Lötters, J.C. and Lammerink, T.S.J. and Haneveld, J. and Hageman, T.A.G. and Wiegerink, R.J. (2012) Fully integrated micro coriolis mass flow sensor operating at atmospheric pressure. Technisches Messen, 79 (1). pp. 4-9. ISSN 0171-8096 *** ISI Impact 0,321 ***

Yagubizade, H. and Younis, M.I. (2012) The Effect of Squeeze-Film Damping on the Shock Response of Clamped-Clamped Microbeams. Journal of Dynamic Systems, Measurement and Control, 134 (1). 011017. ISSN 0022-0434 *** ISI Impact 0,84 ***

2011

Abdulla, S.M.C. (2011) Integration of Micro-cantilevers with Photonic Structures for Mechano-optical Wavelength Selective Devices. PhD thesis, University of Twente. ISBN 978-90-365-3176-4

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and Jansen, H.V. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever. Optics express, 19 (17). pp. 15864-15878. ISSN 1094-4087 *** ISI Impact 3,278 ***

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter. Journal of micromechanics and microengineering, 21 (7). 0740041. ISSN 0960-1317 *** ISI Impact 1,997 ***

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning. Journal of micromechanics and microengineering, 21 (12). 125010. ISSN 0960-1317 *** ISI Impact 1,997 ***

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M.A. and Berenschot, J.W. and de Boer, M.J. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Mechano-optical switching in a mems integrated photonic crystal slab waveguide. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January, 2011, Cancun, Mexico. pp. 9-12. IEEE Micro Electro Mechanical Systems. ISBN 978-1-4244-9633-4

Abdulla, S.M.C. and Kauppinen, L.J. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Integrated self-aligned tips for dispersion tuning in a photonic crystal micro-cavity. In: 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11, 5-9 June 2011, Beijing. China. pp. 2534-2537. IEEE Photonics Society. ISBN 978-1-4577-0156-6

Abelmann, L. (2011) The 21st MicroMechanics Europe Workshop (MME 2010). Journal of micromechanics and microengineering, 21 (7). pp. 070201-070202. ISSN 0960-1317 *** ISI Impact 1,997 ***

Alink, L. and Marsman, G.H. and Woldering, L.A. and Abelmann, L. (2011) Simulating three dimensional self-assembly of shape modified particles using magnetic dipolar forces. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 Jun 2011, Tonsberg, Norway. pp. 254-257. Department of micro and nano systems technology, Vestfold University College . ISBN 978-82-7860-224-9

Bernhardi, E.H. and Lu, Qi and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) Monolithic Distributed Bragg Reﬂector Cavities in Al₂O₃ with Quality Factors Exceeding 10⁶ Photonics and Nanostructures, 9 (3). pp. 225-234. ISSN 1569-4410 *** ISI Impact 2,131 ***

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) Highly efficient, low-threshold monolithic distributed-Bragg-reflector channel waveguide laser in Al₂O₃:Yb³⁺ Optics letters, 36 (5). pp. 603-605. ISSN 0146-9592 *** ISI Impact 3,059 ***

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) High-Q monolithic distributed Bragg reflector cavities in Al₂O₃ channel waveguides In: Conference on Lasers and Electro-Optics, CLEO, 1-6 May 2011, Baltimore, Maryland, USA. CME4. Optical Society of America. ISBN 978-1-55752-910-7

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) Distributed Bragg reflector high-Q cavities and lasers in Al₂O₃ on silicon In: Conference on Lasers and Electro-Optics, CLEO/Europe, 22-26 May 2011, Munich, Germany. Paper CE5.2. Optical Society of America. ISBN 978-1-4577-0532-8

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) Distributed feedback channel waveguide lasers in erbium- and ytterbium-doped Al₂O₃:Er³⁺ on silicon In: Conference on Lasers and Electro-Optics, CLEO Europe, 22-26 May 2011, Munich, Germany. Paper CJ10.4. Optical Society of America. ISBN 978-1-4577-0532-8

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) Monolithic distributed Bragg reflector cavities in Al₂O₃ with quality factors exceeding one million In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia. Paper 4240-CT-6. Conference Handbook. Australian Optical Society. ISBN 978-0-9775657-7-1

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) Ultra-narrow-linewidth distributed feedback lasers in Al₂O₃:Er³⁺ and Al₂O₃:Yb³⁺ In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia. Paper 5420. Conference Handbook. Australian Optical Society. ISBN 978-0-9775657-7-1

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) Efficient and ultra-narrow-linewidth integrated waveguide lasers in Al₂O₃:Yb and Al₂O₃:Er (Invited) In: International Laser Physics Workshop, LPHYS 2011, 11-15 July 2011, Sarajevo, Bosnia and Herzegovina. Paper 4.5.3. L'Phys'11 Program. General Physics Institute, Moscow. ISBN not assigned

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) High-Q distributed-Bragg-grating laser cavities. In: 16th International Conference on Luminescence & Optical Sperctroscopy of Condensed Matter, 26 Jun - 01 Jul 2011, Ann Arbor, MI. Paper MI2-p.12. Conference Program. University of Michigan. ISBN not assigned

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and de Ridder, R.M. and Pollnau, M. (2011) High-Quality Monolithic Distributed Bragg Reflector Cavities and Lasers in Alumina Channel Waveguides. In: Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter, 1-2 December 2011, Ghent, Belgium. pp. 41-44. Proceedings of the 2011 Anual Symposium of the IEEE Photonics Benelux Chapter. Department of Information Technology, Ghent University. ISBN 978-90-76546-00-1

Broer, W. and Palasantzas, G. and Knoester, J. and Svetovoy, V. (2011) Roughness correction to the Casimir force beyond perturbation theory. A Letters Journal Exploring the Frontiers of Physics, 95 (3). pp. 1-6. ISSN 0295-5075 *** ISI Impact 2,893 ***

Burouni, N. and Berenschot, J.W. and Elwenspoek, M.C. and Tas, N.R. (2011) Dimensional Control in Corner Lithography for Wafer-Scale Fabrication of Nano-Apertures. In: 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, 20-23 Feb 2011, Kaohsiung, Taiwan. pp. 940-943. IEEE-NEMS 2011. ISBN 978-1-61284-775-7

Chapuis, Y.-A. and Jalabert, L. and Sarajlic, E. and Vermeer, R. and Collard, D. and Fujita, H. (2011) Polymer membrane-based thermo-pneumatic actuation for distributed air-jet planar micromanipulator. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico. pp. 141-144. IEEE Micro Electro Mechanical Systems. ISBN 978-1-4244-9633-4

Dagamseh, A.M.K. (2011) Bio-inspired Hair Flow Sensor Arrays: From Nature to MEMS. PhD thesis, University of Twente. ISBN 978-90-365-3308-9

Dagamseh, A.M.K. and Krijnen, G.J.M. (2011) Arrays of biomimetic hair flow-sensor dedicated for measuring flow patterns. In: International Congress on Flow Sensing in Air and Water, 17-20 July 2011, Bonn, Germany. University of Bonn. ISBN not assigned

Dagamseh, A.M.K. and Lammerink, T.S.J. and Sanders, R.G.P. and Wiegerink, R.J. and Krijnen, G.J.M. (2011) Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition. In: 24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011), 23-27 January 2011, Cancun, Mexico. pp. 648-651. IEEE. ISBN 978-1-4244-9633-4

Dagamseh, A.M.K. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2011) Advancements in Biomimetic Hair Flow-Sensor Arrays. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tønsberg, Norway. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9

Dagamseh, A.M.K. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2011) Artificial lateral-line system for imaging dipole sources using Beamforming techniques. In: 25th Eurosensors conference (Eurosensors 2011), 4-7 Sep. 2011, Athens, Greece. Elsevier. ISSN 1877-7058

Droogendijk, H. and de Boer, M.J. and Krijnen, G.J.M. (2011) Stochastic Resonance in an Electrostatically Controlled MEMS-slider. In: Sense of Contact 13, 7 Apr 2011, Zeist, The Netherlands. STW Technology Foundation. ISBN not assigned

Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Krijnen, G.J.M. (2011) Non-degenerate parametric amplification and filtering in biomimetic hair flow sensors. In: 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11, 5-9 Jun 2011, Beijing, China. pp. 2038-2041. IEEE Circuits & Systems Society. ISBN 978-1-4577-0157-3

Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Krijnen, G.J.M. (2011) Non-resonant parametric amplification in biomimetic hair flow sensors: Selective gain and tunable filtering. Applied Physics Letters, 99 (21). 213503. ISSN 0003-6951 *** ISI Impact 3,554 ***

Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Siebelder, O.G. and Krijnen, G.J.M. (2011) Lowering the sensory threshold and enhancing the responsivity of biomimetic hair flow sensors by electrostatic spring softening. In: IEEE Sensors 2011, 28-31 Oct 2011, Limerick, Ireland. pp. 829-832. IEEE. ISSN 1930-0395 ISBN 978-1-4244-9290-9

Droogendijk, H. and Dagamseh, A.M.K. and Yntema, D.R. and Sanders, R.G.P. and Krijnen, G.J.M. (2011) On the use of various oscillatory air flow fields for characterization of biomimetic hair flow sensors. In: Flow Sensing in Air and Water, 17-20 Jul 2011, Bonn, Germany. pp. 62-62. University of Bonn. ISBN not assigned

Droogendijk, H. and Dagamseh, A.M.K. and Yntema, D.R. and Sanders, R.G.P. and Krijnen, G.J.M. (2011) On the Use of Various Oscillatory Air Flow Fields for Characterization of Biomimetic Hair Flow Sensors. In: ICT.OPEN 2011, 14-15 Nov 2011, Veldhoven, The Netherlands. Netherlands Organisation for Scientfic Research (NWO). ISBN not assigned

Elwenspoek, M.C. (2011) Long-time data storage: relevant time scales. Challenges, 2 (1). pp. 19-36. ISSN 2078-1547

Engelen, J.B.C. (2011) Optimization of Comb-Drive Actuators [Nanopositioners for probe-based data storage and musical MEMS]. PhD thesis, University of Twente. ISBN 978-90-365-3120-7

Gemelli, M. and Abelmann, L. and Engelen, J.B.C. and Khatib, M.G. and Koelmans, W.W. and Zaboronski, O. (2011) Probe Storage. In: Memory mass storage. Springer Verlag, Berlin Heidelberg, pp. 99-167. ISBN 978-3-642-14751-7

Groenesteijn, J. and Lammerink, T.S.J. and Lötters, J.C. and Haneveld, J. and Wiegerink, R.J. (2011) Miniaturization of a micro coriolis mass flow sensor with lorentz actuation. In: Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011, 19-22 Jun 2011, Toensberg, Noorwegen. pp. 1-4. Micromechanics and Micro systems Europe . ISBN 978-82-7860-224-9

Groenesteijn, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Haneveld, J. and Lötters, J.C. (2011) Optimization of a micro Coriolis mass flow sensor. In: Proceedings Eurosensors XXV, 4-7 sep 2011, Athens, Greece. pp. 783-786. Procedia Engineering 25. Elsevier. ISSN 1877-7058

Groenesteijn, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Haneveld, J. and Lötters, J.C. (2011) Optimization of the Lorentz Force Actuation for a micro Coriolis mass flow sensor. In: Netherlands MicroNano Conference 2011, 15-16 Nov 2011, Ede, The Netherlands. pp. 1-1. MicroNano Conference. ISBN not assigned

Hoang, Thi Hanh and Segers-Nolten , I.M. and Tas, N.R. and van Honschoten, J.W. and Subramaniam, V. and Elwenspoek, M.C. (2011) Analysis of single quantum-dot mobility inside 1D nanochannel devices. Nanotechnology, 22 (27). 275201. ISSN 0957-4484 *** ISI Impact 3,137 ***

Hoang, Thi Hanh and Tong, H.D. and Segers-Nolten, I.M. and Tas, N.R. and Subramaniam, V. and Elwenspoek, M.C. (2011) Wafer-scale thin encapsulated two-dimensional nanochannels and its application toward visualization of single molecules. Journal of colloid and interface science, 367 (1). pp. 455-459. ISSN 0021-9797 *** ISI Impact 3,019 ***

van Honschoten, J.W. and Jong, H.W. and Koelmans, W.W. and Parnell, T.P. and Zaboronski, O. (2011) Information storage and retrieval for probe storage using optical diffraction patterns. Journal of applied physics, 110 (104309). pp. 1-14. ISSN 0021-8979 *** ISI Impact 2,072 ***

van Honschoten, J.W. and Legrain, A.B.H. and Berenschot, J.W. and Abelmann, L. and Tas, N.R. (2011) Micro-assembly of three dimensional tetrahedra by capillary forces. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 Jan 2011, Cancun, Mexico. pp. 288-291. IEEE Robotics and Automation Society. ISBN 978-1-4244-9633-4

Iannuzzi, D. and Deladi, S. and Elwenspoek, M.C. (2011) Optical device comprising a cantilever and method of fabrication and use thereof. Patent US7916306 (Assigned).

Izadi, N. (2011) Bio-inspired MEMS Aquatic Flow Sensor Arrays. PhD thesis, University of Twente. ISBN 978-90-365-3140-5

Izadi, N. and Krijnen, G.J.M. (2011) Design and fabrication process for artificial lateral line sensors. In: Frontiers in Sensing : From Biology to Engineering. Springer Verlag, Wien, pp. 405-421. ISBN 978-3-211-99748-2

Jaganatharaja, R.K. and Droogendijk, H. and Vats, S. and Hagedoorn, B. and Bruinink, C.M. and Krijnen, G.J.M. (2011) Unraveling the viscosity-mediated coupling effect in biomimetic hair sensor arrays. In: 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), 23-27 Jan 2011, Cancun, Mexico. pp. 652-655. IEEE. ISBN 978-1-4244-9633-4

Kauppinen, L.J. and Abdulla, S.M.C. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and Krijnen, G.J.M. and Pollnau, M. and de Ridder, R.M. (2011) Micromechanically tuned ring resonator in silicon on insulator. (Invited) In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia. Paper 4240-IT. Conference Handbook. Australian Optical Society. ISBN 978-0-9775657-7-1

Kauppinen, L.J. and Abdulla, S.M.C. and Krijnen, G.J.M. and Pollnau, M. and de Ridder, R.M. (2011) Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever. In: Conference on Lasers and Electro-Optics, CLEO/Europe, 22-26 May 2011, Munich, Germany. Paper CE5.1. Online Conference Digest. Optical Society of America. ISBN 978-1-4577-0532-8

Keuning, J. D. and de Vries, Jeroen and Abelmann, L. and Misra, S. (2011) Image-based magnetic control of paramagnetic microparticles in water. In: IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS), 25-30 September 2011, San Francisco, USA. pp. 421-426. IEEE Robotics and Automation Society. ISSN 2153-0858

Khatib, M.G. (2011) Performance Evaluation of Three Architectural Variants for Multi-sled MEMS Storage. In: IEEE 19th International Symposium on Modeling, Analysis & Simulation of Computer and Telecommunication Systems (MASCOTS), 25-27 July 2011, Singapore. pp. 217-226. IEEE Computer Society. ISBN 978-1-4577-0468-0

Khatib, M.G. and Abelmann, L. (2011) Buffering Implications for the Design Space of Streaming MEMS Storage. In: Proceedings of Design, Automation & Test in Europe (DATE'11), 14-18 Mar 2011, Grenoble. pp. 253-256. ACM. ISBN 978-3-9810801-7-9

Koelmans, W.W. (2011) Parallel Probe Readout. PhD thesis, University of Twente. ISBN 978-90-365-3192-4

Koelmans, W.W. and Sebastian, A. and Abelmann, L. and Despont, M. and Pozidis, H. (2011) Force modulation for enhanced nanoscale electrical sensing. Nanotechnology, 22 (25). pp. 1-9. ISSN 0957-4484 *** ISI Impact 3,137 ***

Kottumakulal Jaganatharaja, R. (2011) Cricket Inspired Flow-Sensor Arrays. PhD thesis, University of Twente. ISBN 978-90-365-3215-0

Krijnen, B. and Hogervorst, R. and van Dijk, J.W. and Engelen, J.B.C. and Woldering, L.A. and Brouwer, D.M. and Abelmann, L. and Soemers, H.M.J.R. (2011) A Thermal displacement sensor in MEMS [Towards accurate small-scale manipulation]. Mikroniek, 51 (4). pp. 5-11. ISSN 0026-3699

Krijnen, B. and Hogervorst, R.P. and van Dijk, J.W. and Engelen, J.B.C. and Woldering, L.A. and Brouwer, D.M. and Abelmann, L. and Soemers, H.M.J.R. (2011) A single-mask thermal displacement sensor in MEMS. Journal of micromechanics and microengineering, 21 (7). pp. 074007-074019. ISSN 0960-1317 *** ISI Impact 1,997 ***

Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. and Wiegerink, R.J. (2011) Flowmeter. Patent US7895905 (Assigned).

Lammerink, T.S.J. and Lötters, J.C. and Wiegerink, R.J. and Groenesteijn, J. and Haneveld, J. (2011) Single chip flow sensing system with a dynamic flow range of more than 4 decades. In: Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 June, 2011, Beijing, China. pp. 890-893. IEEE . ISBN 978-1-4577-0157-3

Lötters, J.C. and Lammerink, T.S.J. and Groenesteijn, J. and Haneveld, J. and Wiegerink, R.J. (2011) Integrated thermal and micro Coriolis flow sensing system with a dynamic flow range of more than 4 decades. In: Netherlands MicroNano Conference 2011, 15-16 Nov 2011, Ede, The Netherlands. pp. 1-1. MicroNano Conference. ISBN not assigned

Legrain, A.B.H. and Berenschot, J.W. and Sanders, R.G.P. and Ma, K. and Tas, N.R. and Abelmann, L. (2011) Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 250-253. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9

Nazeer, H. and Nguyen, M.D. and Rijnders, A.J.H.M. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2011) Pulsed laser deposited Pb(Zr,Ti)O₃ thin films with excellet piezoelectric and mechanical properties In: Proceedings of the The 20th IEEE International Symposium on Applications of Ferroelectrics International Symposium on Piezoresponse Force Microscopy & Nanoscale Phenomena in Polar Materials , 24-27 Jul 2011, Vancouver Canada. Organisation committee ISAF-PFM 2011. ISBN not assigned

Nazeer, H. and Nguyen, Minh Duc and Woldering, L.A. and Abelmann, L. and Rijnders, A.J.H.M. and Elwenspoek, M.C. (2011) Determination of the Young's modulus of pulsed laser deposited epitaxial PZT thin films. Journal of micromechanics and microengineering, 21 (7). pp. 074008-074014. ISSN 0960-1317 *** ISI Impact 1,997 ***

Nazeer, H. and Nguyen, Minh Duc and Woldering, L.A. and Rijnders, A.J.H.M. and Elwenspoek, M.C. and Abelmann, L. (2011) Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O₃ thin films In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 238-241. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9

Nazeer, H. and Woldering, L.A. and Abelmann, L. and Nguyen, Minh Duc and Rijnders, A.J.H.M. and Elwenspoek, M.C. (2011) Influence of silicon orientation and cantilever undercut on the determination of the Young’s modulus of thin films. Microelectronic engineering, 88 (8). pp. 2345-2348. ISSN 0167-9317 *** ISI Impact 1,488 ***

Nguyen, Minh Duc and Dekkers, M. and van Zalk, M. and Broekmaat, J. and Janssens, A. and Nazeer, H. and Blank, D.H.A. and Rijnders, D. (2011) Large-area pulsed laser deposition and assembly processes for pierzoelectric MEMS devices based on all-oxide LaNiO₃/Pb(Zr,Ti)O₃/LaNiO₃ thin films In: Proceedings of the International Conference on Materials for Advanced Tehcnologies, ICMAT 2011, 26 Jun - 1 Jul 2011, Suntec, Singapore. Organisation Committee of the ICMAT 2011. ISBN not assigned

Pham, V.S. and Dijkstra, M. and Hollink, A.J.F. and de Ridder, R.M. and van Wolferen, H.A.G.M. and Krijnen, G.J.M. and Pollnau, M. and Hoekstra, H.J.W.M. (2011) Grated waveguide cavity for label-free protein and mechano-optical gas sensing. In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia. Paper 2250-CT-7. Conference Handbook. Australian Optical Society. ISBN 978-0-9775657-7-1

Pham, V.S. and Dijkstra, M. and van Wolferen, H.A.G.M. and Pollnau, M. and Krijnen, G.J.M. and Hoekstra, H.J.W.M. (2011) A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide In: Conference on Lasers and Electro-Optics, CLEO, 1-6 May 2011, Baltimore, Maryland, USA. CThQ4. Optical Society of America. ISBN 978-1-55752-910-7

Pham, V.S. and Dijkstra, M. and van Wolferen, H.A.G.M. and Pollnau, M. and Krijnen, G.J.M. and Hoekstra, H.J.W.M. (2011) Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si₃N₄ grated waveguide. Optics letters, 36 (15). pp. 3003-3005. ISSN 0146-9592 *** ISI Impact 3,059 ***

Pham, V.S. and Dijkstra, M. and van Wolferen, H.A.G.M. and Pollnau, M. and Krijnen, G.J.M. and Hoekstra, H.J.W.M. (2011) A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide In: Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter, 1-2 December 2011, Ghent, Belgium. pp. 61-64. Department of Information Technology, Ghent University. ISBN 978-90-76546-00-1

Pham, V.S. and Kauppinen, L.J. and Dijkstra, M. and van Wolferen, H.A.G.M. and de Ridder, R.M. and Hoekstra, H.J.W.M. (2011) Read-Out of Cantilever Bending With a Grated Waveguide Optical Cavity. IEEE photonics technology letters, 23 (4). pp. 215-217. ISSN 1041-1135 *** ISI Impact 1,815 ***

Pjetri, O. and Koelmans, W.W. and Abelmann, L. and Siekman, M.H. and Elwenspoek, M.C. (2011) Using diffraction to detect deflection of the cantilevers in an array. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 278-281. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9

Rottenberg, X. and Jansen, H.V. and Tilmans, H.A.C. and De Raedt, W. (2011) Switchable capacitor. Patent EP1398811 (Assigned).

Sarajlic, E. and Siekman, M.H. and Fujita, H. and Abelmann, L. and Tas, N.R. (2011) A novel electrostatically actuated AFM probe for vibro-flexural mode operation. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 Jan 2011, Cancun, Mexico. pp. 537-540. IEEE. ISBN 978-1-4244-9633-4

Sardan Sukas, O. and Berenschot, J.W. and de Boer, M.J. and Nguyen, Minh Duc and van Zalk, M. and Abelmann, L. (2011) Towards in-situ tem analysis of PLD Pb(Zr,Ti)O₃ thin film membranes In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 287-290. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9

Sengo, G. and van Wolferen, H.A.G.M. and Driessen, A. (2011) Optimized Deep UV Curing Process for Metal-Free Dry-Etching of Critical Integrated Optical Devices. Journal of the Electrochemical Society, 158 (10). H1084-H1089. ISSN 0013-4651 *** ISI Impact 2,241 ***

Shao, X. and Alink, L. and Groenland, J.P.J. and Abelmann, L. and Slump, C.H. (2011) A Simple Two-Dimensional Coding Scheme for Bit Patterned Media. IEEE transactions on magnetics, 47 (10). pp. 2559-2562. ISSN 0018-9464 *** ISI Impact 1,061 ***

Stranczl, M. and Sarajlic, E. and Krijnen, G.J.M. and Fujita, H. and Gijs, M.A.M. and Yamahata, C. (2011) Modal analysis and modeling of a frictionless electrostatic rotary stepper micromotor. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, 23-27 January, 2011, Cancun, Mexico. pp. 1257-1260. IEEE Micro Electro Mechanical Systems. ISBN 978-1-4244-9633-4

Svetovoy, V. and Moktadir, Z. and Elwenspoek, M.C. and Mizuta, H. (2011) Tailoring the thermal Casimir force with graphene. EPL: A Letters Journal Exploring the Frontiers of Physics, 96 (1). 14006. ISSN 0295-5075 *** ISI Impact 2,893 ***

Svetovoy, V. and Sanders, R.G.P. and Lammerink, T.S.J. and Elwenspoek, M.C. (2011) Combustion of hydrogen-oxygen mixture in electrochemically generated nanobubbles. Physical review E Statistical, nonlinear, and soft matter physics, 84 (3). 035302. ISSN 1539-3755 *** ISI Impact 2,4 ***

Syed Nawazuddin, M.B. and Lammerink, T.S.J. and Wiegerink, R.J. and Berenschot, J.W. and de Boer, M.J. and Elwenspoek, M.C. (2011) Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance. In: Proccedings of 16th International Solid-State Sensors, Actuators and Microsystems conference, 5-9 Jun 2011, Beijing, China. pp. 434-437. Solid-State Sensors, Actuators and Microsystems conference (Transducers) Volume 1 (M 1 . 001-T 2D.003). IEEE Electron Devices Society. ISBN 978-1-4577-0157-3

Vermeer, R. and Woldering, L.A. and Abelmann, L. (2011) Effect of electric fields generated by microactuators on the imaging in electron microscopy. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 222-225. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9

Volker, A.W.F. and Blokland, H. and Velthuis, J.F.M. and Lötters, J.C. (2011) Fluid flow meter using thermal tracers. Patent EP2100105 (Assigned).

de Vries, Jeroen and Keuning, J. and Zondervan, L. and Misra, S. and Abelmann, L. (2011) Image-based magnetic control of self-propelling catalytic micro motors. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 234-237. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9

Wiegerink, R.J. and Lammerink, T.S.J. and Haneveld, J. and Hageman, T.A.G. and Lötters, J.C. (2011) Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 Jan 2011, Cancun, Mexico. pp. 1135-1138. IEEE . ISBN 978-1-4244-9633-4

Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2011) Predicted photonic band gaps in diamond-lattice crystals built from silicon truncated tetrahedrons. Journal of applied physics, 110 (4). pp. 043107-043114. ISSN 0021-8979 *** ISI Impact 2,072 ***

van Wolferen, H.A.G.M. and Abelmann, L. (2011) Laser Interference Lithography. In: Lithography: Principles, Processes and Materials. Nova Publishers, Hauppauge NY, USA, pp. 133-148. ISBN 978-1-61122-123-7

Yamahata, C. and Sarajlic, E. and Stranczl, M. and Krijnen, G.J.M. and Gijs, M.A.M. (2011) Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images. In: 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11, 5-9 June 2011, Beijing, China. pp. 1697-1700. IEEE Photonics Society. ISBN 978-1-4577-0156-6

van Zwol, P.J. and Svetovoy, V. and Palasantzas, G. (2011) Characterization of optical properties and surface roughness profiles: The casimir force between real materials. In: Casimir Physics. Lecture Notes in Physics 834. Springer Verlag, London, pp. 311-343. ISBN 978-3-642-20288-9

2010

Abelmann, L. and Groenland, J.P.J. and van Honschoten, J.W. and Verputten, H., ed. (2010) MME2010 21st Micromechanics and Micro systems Europe Workshop : Abstracts. University of Twente, Transducers Science and Technology, Enschede, The Netherlands. ISBN 978-90-81673716

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and de Ridder, R.M. and Krijnen, G.J.M. (2010) Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides. In: 21st Micromechanics and Micro systems Europe Workshop (MME2010), 26-29 Sept 2010, Enschede, the Netherlands. pp. 120-123. University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science. ISBN 978-90-81673716

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and de Ridder, R.M. and Krijnen, G.J.M. (2010) Micro bimorph cantilever switches for tuning integrated optical systems. In: The Sense of Contact 12, 8 Apr 2010, Zeist, The Netherlands. pp. 1-2. FHI Federatie Van Technologiebranches. ISBN 978-90-74702-56-0

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and de Ridder, R.M. and Krijnen, G.J.M. (2010) Mechanical tuning of optical race-track ring resonators. Procedia Engineering, 5. pp. 424-427. ISSN 1877-7058

Abelmann, L. (2010) Magnetic Force Microscopy. In: Encyclopedia of Spectroscopy and Spectrometry. Elsevier, Amsterdam, pp. 1415-1425. ISBN 978-0-12-374417-3

Abelmann, L. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. (2010) Self-assembled three-dimensional non-volatile memories. Micromachines, 1 (1). pp. 1-18. ISSN 2072-666X

Albrechts, B. and Hautzinger, D.S. and Kruger, M. and Elwenspoek, M.C. and Muller, K.M. and Korvink, J.G. (2010) Adsorption studies of DNA origami on silicon dioxide. In: 21st Micromechanics and Micro Systems Europe workshop (MME 2010), 26-29 Sept 2010, Enschede. pp. 1-4. University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science. ISBN 978-90-81673716

Alexandrou, M. and Nutter, P.W. and Delalande, M.Y. and de Vries, Jeroen and Hill, E.W. and Schedin, F. and Abelmann, L. and Thomson, T. (2010) Spatial sensitivity mapping of Hall crosses using patterned magnetic nanostructures. Journal of applied physics, 108 (4). 043920. ISSN 0021-8979 *** ISI Impact 2,072 ***

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Agazzi, L. and Khan, M.R.H. and Roeloffzen, C.G.H. and Wörhoff, K. and Pollnau, M. and de Ridder, R.M. (2010) Low-threshold, single-frequency distributed-feedback waveguide laser in Al₂O₃:Er³⁺ on silicon In: Conference on Lasers and Electro-Optics, 16-21 May 2010, San Jose, CA. CTuU4. Optical Society of America. ISBN 978-1-55752-889-6

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Agazzi, L. and Khan, M.R.H. and Roeloffzen, C.G.H. and Wörhoff, K. and Pollnau, M. and de Ridder, R.M. (2010) Ultra-narrow-linewidth, single-frequency distributed feedback waveguide laser in Al₂O₃:Er³⁺ on silicon Optics letters, 35 (14). pp. 2394-2396. ISSN 0146-9592 *** ISI Impact 3,059 ***

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and Pollnau, M. and de Ridder, R.M. (2010) High-Quality, Distributed Phase-Shift, Distributed Feedback Cavities in Al₂O₃ Waveguides In: Bragg Gratings, Photosensitivity, and Poling in Glass Waveguides, 21-24 June 2010, Karlsruhe, Germany. BMB5. Optical Society of America. ISBN not assigned

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Wörhoff, K. and Pollnau, M. and de Ridder, R.M. (2010) 1.7-kHz-linewidth distributed feedback laser in Al₂O₃:Er³⁺ In: Europhoton Conference, 30 Aug - 3 Sep 2010, Hamburg, Germany. Paper FrB7. Europhysics Conference Abstract 34C. European Physical Society. ISBN 2-914771-64-9

Brookhuis, R.A. and de Boer, M.J. and Dijkstra, M.A. and Kuijpers, A.A. and van Lierop, D. and Wiegerink, R.J. (2010) A micromirror for optical projection displays. In: 21st Micromechanics and Micro Systems Europe Workshop (MME 2010), 26-29 Sept 2010, Enschede. pp. 1-4. University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science. ISBN 978-90-81673716

Brouwer, D.M. and Otten, A. and Engelen, J.B.C. and Krijnen, B. and Soemers, H.M.J.R. (2010) Long-range elastic guidance mechanisms for electrostatic comb-drive actuators. In: Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology, 31 May - 4 Jun 2010, Delft, The Netherlands. pp. 47-50. Delft University . ISBN 978-0-9553082-8-4

Brunets, N. and Haneveld, J. and Jansen, H.V. and Tas, N.R. (2010) Viscosity of Water in Nano-Confinement. In: Micro- and nanofluidics for cell biology, 18-22 January 2010, Leiden. 1. Lorentz Center. ISSN not assigned

Casas, J. and Steinmann, T. and Krijnen, G.J.M. (2010) Why do insects have such a high density of flow-sensing hairs? Insights from the hydromechanics of biomimetic MEMS sensors. Journal of the Royal Society interface, 7. pp. 1487-1495. ISSN 1742-5689 *** ISI Impact 4,241 ***

Dagamseh, A.M.K. and Bruinink, C.M. and Droogendijk, H. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2010) Engineering of Biomimetic Hair-Flow Sensor Arrays Dedicated to High-Resolution Flow Field Measurements. In: IEEE Sensors 2010 conference, 1-4 November 2010, Hawaii - USA. pp. 2251-2254. IEEE. ISBN 978-1-4244-8168-2

Dagamseh, A.M.K. and Bruinink, C.M. and Kolster, M.L. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2010) Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition. In: DTIP2010 - Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, 4-7 May 2010, Sevilla-Spain. pp. 48-51. EDA Publshing. ISBN 978-2-35500-011-9

Dagamseh, A.M.K. and Krijnen, G.J.M. (2010) Map estimation of air-flow dipole source positions using array signal processing. In: Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE 2010), 18-19 November 2010, Veldhoven, The Netherlands. STW Technology Foundation. ISBN 978-90-73461-67-3

Dagamseh, A.M.K. and Lammerink, T.S.J. and Kolster, M.L. and Bruinink, C.M. and Wiegerink, R.J. and Krijnen, G.J.M. (2010) Dipole-source localization using biomimetic flow-sensor arrays positioned as lateral-line system. Sensors and actuators A: Physical, 162 (2). pp. 355-360. ISSN 0924-4247 *** ISI Impact 1,674 ***

Dao Viet, Dzung D. and Izadi, N. and Anh Ho, V. and Sugiyama, S. and Hirai, S. (2010) A three sensing points tactile finger tip. In: 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology 2010, 6-9 July 2010, Perth, Western Australia. pp. 91-91. The University of Western Australia. ISBN 978-1-74052-207-6

Droogendijk, H. and Krijnen, G.J.M. (2010) Parametric Amplification and Stochastic Resonance in Bio-Inspired Hair Flow Sensors. In: The Sense of Contact 12, 8 Apr 2010, Zeist, The Netherlands. FHI Federatie Van Technologiebranches. ISBN 978-90-74702-56-0

Droogendijk, H. and Krijnen, G.J.M. (2010) Simulation Studies of Parametric Amplification in Bio-inspired Flow Sensors. In: 21st Micromechanics and Micro systems Europe workshop, 26-29 Sep 2010, Enschede, The Netherlands. pp. 149-152. University of Twente - Transducers Science and Technology (TST). ISBN not assigned

Droogendijk, H. and Krijnen, G.J.M. (2010) A study on performance improvement of MEMS hair flow sensors by parametric amplification. In: Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE 2010), 18-19 Nov 2010, Veldhoven, The Netherlands. Technology Foundation STW. ISBN 978-90-73461-67-3

Duan, Xuexin and Zhao, Yiping and Berenschot, J.W. and Tas, N.R. and Reinhoudt, D.N. and Huskens, J. (2010) Large-Area Nanoscale Patterning of Functional Materials by Nanomolding in Capillaries. Advanced functional materials, 20 (15). pp. 2519-2526. ISSN 1616-301X *** ISI Impact 6,99 ***

Elwenspoek, M.C. and Abelmann, L. and Berenschot, J.W. and van Honschoten, J.W. and Jansen, H.V. and Tas, N.R. (2010) Self-assembly of (sub-)micron particles into supermaterials. Journal of micromechanics and microengineering, 20 (6). 064001. ISSN 0960-1317 *** ISI Impact 1,997 ***

Engelen, J.B.C. (2010) Een klok doet geen "pok". In: Jaarboek E.T.S.V. Scintilla 2008-2009. Debakel. University of Twente, Enschede, pp. 159-167. ISBN not assigned

Engelen, J.B.C. and Abelmann, L. and Elwenspoek, M.C. (2010) Optimized comb drive finger shape for shock-resistant actuation. In: 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 , 24-28 Jan 2010 , Wanchai, Hong Kong . pp. 1147-1150. IEEE. ISBN 978-1-4244-5763-2

Engelen, J.B.C. and Abelmann, L. and Elwenspoek, M.C. (2010) Optimized comb-drive finger shape for shock-resistant actuation. Journal of micromechanics and microengineering, 20 (10). 105003. ISSN 0960-1317 *** ISI Impact 1,997 ***

Engelen, J.B.C. and de Boer, H. and Beekman, J.G. and Been, A.J. and Folkertsma, G.A. and Fortgens, L. and de Graaf, D. and Vocke, S. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2010) A Musical instrument in MEMS. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 193-196. University of Twente - TST. ISBN 978-90-81673716

Engelen, J.B.C. and Delalande, M.Y. and le Fèbre, A.J. and Bolhuis, T. and Shimatsu, T. and Kikuchi, N. and Abelmann, L. and Lodder, J.C. (2010) Thermally induced switching field distribution of a single CoPt dot in a large array. Nanotechnology, 21 (3). pp. 035703-035709. ISSN 0957-4484 *** ISI Impact 3,137 ***

Escalante, M. and Lenferink, A. and Zhao, Yiping and Tas, N.R. and Huskens, J. and Hunter, C.N. and Subramaniam, V. and Otto, C. (2010) Long-Range Energy Propagation in Nanometer Arrays of Light Harvesting Antenna Complexes. Nano letters, 10 (4). pp. 1450-1457. ISSN 1530-6984 *** ISI Impact 9,991 ***

Haneveld, J. and Lammerink, T.S.J. and de Boer, M.J. and Sanders, R.G.P. and Mehendale, A. and Lötters, J.C. and Dijkstra, M.A. and Wiegerink, R.J. (2010) Modeling, design, fabrication and characterization of a micro Coriolis mass flow sensor. Journal of micromechanics and microengineering, 20 (6). 125001. ISSN 0960-1317 *** ISI Impact 1,997 ***

Hogervorst, R.P. and Krijnen, B. and Brouwer, D.M. and Engelen, J.B.C. and Staufer, U. (2010) A single-mask thermal displacement sensor in MEMS. In: Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology, 31 May - June 4 2010, Delft, The Netherlands. pp. 462-465. Delft University. ISBN 978-0-9553082-8-4

van Honschoten, J.W. and Berenschot, J.W. and Ondarcuhu, T. and Sanders, R.G.P. and Sundaram, J. and Elwenspoek, M.C. and Tas, N.R. (2010) Elastocapillary fabrication of three-dimensional microstructures. Applied physics letters, 97 (1). 014103/1-014103/3. ISSN 0003-6951 *** ISI Impact 3,554 ***

van Honschoten, J.W. and Brunets, N. and Tas, N.R. (2010) Capillarity at the nanoscale. Chemical Society Reviews, 39. pp. 1096-1114. ISSN 0306-0012 *** ISI Impact 20,086 ***

van Honschoten, J.W. and Tas, N.R. and Elwenspoek, M.C. (2010) The profile of a capillary liquid bridge between solid surfaces. American journal of physics, 78 (3). pp. 277-287. ISSN 0002-9505 *** ISI Impact 0,779 ***

Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Krijnen, G.J.M. (2010) Fabrication of superficial neuromast inspired capacitive flow sensors. Journal of micromechanics and microengineering, 20 (8). 085041. ISSN 0960-1317 *** ISI Impact 1,997 ***

Jaganatharaja, R.K. and Bruinink, C.M. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2010) Biomimetic Hair Sensor Arrays: From Inspiration To Implementation. In: The Sense of Contact 12, 08 Apr 2010, Zeist, the Netherlands. FHI Federatie Van Technologiebranches. ISBN 978-90-74702-56-0

Jansen, H.V. and de Boer, M.J. and Ma, K. and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF₆ plasma Journal of micromechanics and microengineering, 20 (7). 075027. ISSN 0960-1317 *** ISI Impact 1,997 ***

de Jong, B.R. and Brouwer, D.M. and de Boer, M.J. and Jansen, H.V. and Soemers, H.M.J.R. and Krijnen, G.J.M. (2010) Design and Fabrication of a Planar Three-DOFs MEMS-Based Manipulator. Journal of microelectromechanical systems, 19 (5). pp. 1116-1130. ISSN 1057-7157 *** ISI Impact 1,922 ***

Khatib, M.G. and Hartel, P.H. (2010) Optimizing MEMS-Based Storage Devices for Mobile Battery-Powered Systems. ACM Transactions on Storage, 6 (1). pp. 1-37. ISSN 1553-3077

Khatib, M.G. and Hartel, P.H. and van Dijk, H.W. (2010) Energy-Efficient Streaming Using Non-volatile Memory. Journal of Signal Processing Systems, 60 (2). pp. 149-168. ISSN 1939-8018 *** ISI Impact 0,533 ***

Koelmans, W.W. and van Honschoten, J.W. and de Vries, Jeroen and Vettiger, P. and Abelmann, L. and Elwenspoek, M.C. (2010) Parallel optical readout of cantilever arrays in dynamic mode. Nanotechnology, 21 (39). pp. 395503-395506. ISSN 0957-4484 *** ISI Impact 3,137 ***

Koelmans, W.W. and Peters, T. and Abelmann, L. and Elwenspoek, M.C. (2010) Fabrication of cantilever arrays with tips for parallel optical readout. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 277-280. University of Twente, Transducers Science and Technology. ISBN 978-90-81673716

Koelmans, W.W. and Sebastian, A. and Despont, M. and Pozidis, H. (2010) Force modulation for improved conductive-mode atomic force microscopy. In: Proceedings of the 10th IEEE Conference on Nanotechnology, IEEE-NANO 2010, 17-20 Aug 2010, Seoul, South-Korea. pp. 875-878. IEEE. ISBN 978-1-4244-7033-4

Krijnen, B. and Hogervorst, R.P. and Engelen, J.B.C. and van Dijk, J.W. and Brouwer, D.M. and Abelmann, L. (2010) Single-mask thermal displacement sensor in MEMS. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 52-55. University of Twente - TST. ISBN 978-90-81673716

Krijnen, G.J.M. and Lammerink, T.S.J. and Wiegerink, R.J. (2010) Learning from Crickets: Artificial Hair-Sensor Array Developments. In: IEEE Sensors 2010 Conference, 1-4 Nov 2010, Waikoloa, Hawaii, USA. pp. 2218-2223. IEEE. ISBN 978-1-4244-8168-2

Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2010) A modular assembly method of a feed and thruster system for Cubesats. Journal of micromechanics and microengineering, 20 (11). 115011. ISSN 0960-1317 *** ISI Impact 1,997 ***

Mehendale, A. and Hagedoorn, W. and Lötters, J.C. (2010) Transformer core. Patent US7843306 (Assigned).

Mehendale, A. and Lötters, J.C. (2010) Flowmeter of the Coriolis type. Patent US7677112 (Assigned).

Mogulkoc, B. (2010) Reflow Bonding of Burosilicate Glass Tubes of Silicon Substrates as Fluidic Interconnect. PhD thesis, University of Twente. ISBN 978-90-365-3083-5

Mogulkoc, B. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2010) Incorporation of in-plane electrical internonnects to the reflow bonding. In: 21st Micromechanics and Micro systems Europe workshop (MME2010), 26-29 Sept 2010, Enschede. pp. 1-4. Universiteit Twente - TST. ISBN 978-90-81673716

Mogulkoc, B. and Knowles, K.M. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2010) Surface Devitrification and the Growth of Cristobalite in Borofloat® (Borosilicate 8330) Glass. Journal of the American Ceramic Society, 93 (9). pp. 2713-2719. ISSN 0002-7820 *** ISI Impact 1,944 ***

Nazeer, H. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2010) Determination of young's modulus of PZT-influence of cantilever orientation. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 257-260. University of Twente - TST. ISBN 978-90-81673716

Nazeer, H. and Woldering, L.A. and Abelmann, L. and Nguyen, Minh Duc and Rijnders, A.J.H.M. and Elwenspoek, M.C. (2010) Influence of silicon orientation and cantilever undercut on the determination of Young's modulus of pulsed laser deposited PZT. In: Proceedings of the 36th International Micro & Nano Engineering Conference (MNE 2010), 19-22 Sept 2010, Genoa, Italy. MNE 2010 Organisation. ISBN not assigned

Nguyen, Minh Duc and Nazeer, H. and Karakaya, K. and Pham, V.S. and Steenwelle, R. and Dekkers, M. and Abelmann, L. and Blank, D.H.A. and Rijnders, A.J.H.M. (2010) Characterization of epitaxial Pb(Zr,Ti)O₃ thin films deposited by pulsed laser deposition on silicon cantilevers Journal of micromechanics and microengineering, 20 (8). pp. 085022-085032. ISSN 0960-1317 *** ISI Impact 1,997 ***

Palasantzas, G. and Svetovoy, V. and van Zwol, P.J. (2010) Optical properties and kinetic roughening influence on dispersive casimir and van der Waals forces. International Journal of Modern Physics B, 24 (31). pp. 6013-6024. ISSN 0217-9792 *** ISI Impact 0,408 ***

Pham, V.S. and Kauppinen, L.J. and Dijkstra, M. and van Wolferen, H.A.G.M. and de Ridder, R.M. and Hoekstra, H.J.W.M. (2010) Mechano-optical sensors for hydrogen gas: Fabrication and Proof of concept. In: The Sense of Contact 12, 8 April 2010, Zeist, the Netherlands. STW Technology Foundation. ISBN 978-90-74702-56-0

Pham, V.S. and Kauppinen, L.J. and Dijkstra, M. and van Wolferen, H.A.G.M. and de Ridder, R.M. and Hoekstra, H.J.W.M. (2010) Cantilever Deflection Read-out with a Grated Waveguide Optical Cavity. In: Proceedings of the 15th European Conference on Integrated Optics, ECIO 2010, 6-9 April 2010, Cambridge, UK. ThE6. IEEE Photonics Society. ISBN not assigned

Sarajlic, E. and Geerlings, Joël and Berenschot, J.W. and Siekman, M.H. and Tas, N.R. and Abelmann, L. (2010) Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 24-27. University of Twente - TST. ISBN 978-90-81673716

Sarajlic, E. and Vermeer, R. and Delalande, M.Y. and Siekman, M.H. and Huijink, R. and Fujita, H. and Abelmann, L. (2010) Batch fabrication of scanning microscopy probes for thermal and magnetic imaging using standard micromachining. In: 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systemes, MEMS 2010, 24-28 Jan 2010, Wanchai, Hong Kong. pp. 328-331. IEEE Magnetics Society. ISSN 1084-6999 ISBN 978-1-4244-5761-8

Sarajlic, E. and Yamahata, C. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. (2010) High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology. Micromachines, 1 (2). pp. 48-67. ISSN 2072-666X

Sinno, I. and Sanz-Velasco, A. and Kang, S. and Jansen, H.V. and Olsson, E. and Enoksson, P. and Svensson, K. (2010) Fabrication of nanoscale electrostatic lenses. Journal of micromechanics and microengineering, 20 (9). pp. 1-7. ISSN 0960-1317 *** ISI Impact 1,997 ***

Syed Nawazuddin, M.B. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2010) Measurement setup for detecting the Casimir force between parallel plates separated at a sub-micron distance. Journal of micromechanics and microengineering, 20 (6). 064005. ISSN 0960-1317 *** ISI Impact 1,997 ***

Tas, N.R. and Escalante, M. and van Honschoten, J.W. and Jansen, H.V. and Elwenspoek, M.C. (2010) Capillary Negative Pressure Measured by Nanochannel Collapse. Langmuir, 26 (3). pp. 1473-1476. ISSN 0743-7463 *** ISI Impact 3,898 ***

Tilmans, H.A.C. and Beyne, E. and Jansen, H.V. and De Raedt, W. (2010) System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent US7835157 (Assigned).

Torricelli, G. and van Zwol, P.J. and Shpak, O. and Binns, C. and Palasantzas, G. and Kooi, B.J. and Svetovoy, V. (2010) Switching Casimir forces with phase-change materials. Physical review A, 82 (1). 010101R. ISSN 1050-2947 *** ISI Impact 2,866 ***

de Vries, Jeroen and Abelmann, L. and Manz, A. and Elwenspoek, M.C. (2010) Tungsten-siliconnitride medium for mega- to gigayear data storage. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 261-264. University of Twente, Transducers Science and Technology. ISBN 978-90-81673716

de Vries, Jeroen and Delalande, M.Y. and Abelmann, L. and Alexandrou, M. and Schedin, F. and Nutter, P. and Hill, E.W. and Thomson, T. (2010) Simulation of position sensitivity of the anomalous Hall effect on a single magnetic dot. In: Proceedings of the International Symposium on Advanced Magnetic Materials and Applications, ISAMMA 2010, 12-16 Jul 2010, Sendai, Japan. Journal of Physics: Conference Series 266. IOP Publishing. ISBN 9781617823008

Yagubizade, H. and Berenschot, J.W. and Jansen, H.V. and Elwenspoek, M.C. and Tas, N.R. (2010) Silicon Nanowire Fabrication Using Edge and Corner Lithography. In: IEEE Nanotechnology Materials and Devices Conference, NMDC 2010, 12-14 Oct 2010, Monterey, CA, USA. pp. 128-131. IEEE Nanotechnology Council. ISBN 978-1-4244-8896-4

Yamahata, C. and Sarajlic, E. and Krijnen, G.J.M. and Gijs, M.A.M. (2010) Subnanometer Translation of Microelectromechanical Systems Measured by Discrete Fourier Analysis of CCD Images. Journal of microelectromechanical systems, 19 (5). pp. 1273-1275. ISSN 1057-7157 *** ISI Impact 1,922 ***

Yntema, D.R. and Haneveld, J. and Engelen, J.B.C. and Brookhuis, R.A. and Sanders, R.G.P. and Wiegerink, R.J. and Elwenspoek, M.C. (2010) Listening to MEMS: An acoustic vibrometer. In: Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on, 24-28 Jan 2010, Hong Kong. pp. 1-4. MEMS 2010. ISSN 1084-6999 ISBN 978-1-4244-5763-2

Zhao, Yiping (2010) High-Resolution Stamp Fabrication by Edge Lithography. PhD thesis, University of Twente. ISBN 978-90-365-3036-1

Zhao, Yiping and Jansen, H.V. and de Boer, M.J. and Berenschot, J.W. and Bouwes, D. and Girones, M. and Huskens, J. and Tas, N.R. (2010) Combining retraction edge lithography and plasma etching for arbitrary contour nanoridge fabrication. Journal of micromechanics and microengineering, 20 (9). pp. 1-13. ISSN 0960-1317 *** ISI Impact 1,997 ***

2009

Abdulla, S.M.C. and Berenschot, J.W. and de Boer, M.J. and Kauppinen, L.J. and de Ridder, R.M. and Krijnen, G.J.M. (2009) Optimisation study of micro cantilevers for switching of photonic band gap crystals. In: Proceedings of the International Conference on Photonics in Switching 2009, 15-19 Sep 2009, Pisa, Italy. pp. 1-2. IEEE Photonics in Switching. ISBN 978-1-4244-3856-3

Abelmann, L. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. (2009) Self assembled three-dimensional nonvolatile memories. Technical Report TR-CTIT-09-29, Centre for Telematics and Information Technology University of Twente, Enschede. ISSN 1381-3625

Alberts, C.J. and de Man, S. and Berenschot, J.W. and Gadgil, V.J. and Elwenspoek, M.C. and Iannuzzi, D. (2009) Fiber-top refractometer. Measurement science and technology, 20 (3). 034005. ISSN 0957-0233 *** ISI Impact 1,317 ***

Been, A.J. and Folkertsma, G.A. and Verputten, H.H.J. and Bolhuis, T. and Abelmann, L. (2009) Reduction of time-varying nanotesla magnetic fields from electric power lines by twisting. Journal of Electron Microscopy, 58 (4). pp. 251-252. ISSN 0022-0744 *** ISI Impact 1,047 ***

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2009) Chemically anisotropic single-crystalline silicon nanotetrahedra. Nanotechnology, 20 (47). pp. 1-7. ISSN 0957-4484 *** ISI Impact 3,137 ***

Berenschot, J.W. and Wissink, J.M. and Tas, N.R. and de Boer, M.J. (2009) Microneedle, microneedle array and production method therefor. Patent NL2001718 (Assigned).

Bernhardi, E.H. and van Wolferen, H.A.G.M. and Dijkstra, M. and Agazzi, L. and Wörhoff, K. and Pollnau, M. and de Ridder, R.M. (2009) Designing an Integrated Al₂O₃:Er³⁺ Distributed Feedback Laser In: Proceedings of the 2009 Annual Symposium of the IEEE Photonics Benelux Chapter, 05-06 Nov 2009, Brussels, Belgium. pp. 197-200. VUBPress Brussels University Press. ISBN 978-90-5487-650-2

van den Broek, D.M. and Elwenspoek, M.C. (2009) Effect of cavity pressure on the performance of the explosive micro-bubble actuator. Microelectronic engineering, 86 (4-6). pp. 1271-1273. ISSN 0167-9317 *** ISI Impact 1,488 ***

Brombacher, C. and Saitner, M. and Pfahler, C. and Plettl, A. and Ziemann, P. and Makarov, D. and Assmann, D. and Siekman, M.H. and Abelmann, L. and Albrecht, M. (2009) Tailoring particle arrays by isotropic plasma etching: an approach towards percolated perpendicular media. Nanotechnology, 20 (10). pp. 105304-105308. ISSN 0957-4484 *** ISI Impact 3,137 ***

Brouwer, D.M. and de Jong, B.R. and de Boer, M.J. and Jansen, H.V. and van Dijk, J. and Krijnen, G.J.M. and Soemers, H.M.J.R. (2009) MEMS-based clamp with a passive hold function for precision position retaining of micromanipulators. Journal of micromechanics and microengineering, 19 (6). pp. 1-20. ISSN 0960-1317 *** ISI Impact 1,997 ***

Bruinink, C.M. and Jaganatharaja, R.K. and de Boer, M.J. and Berenschot, J.W. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Advancements in technology and design of biomimetic flow-sensor arrays. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), 25-29 Jan 2009, Sorrento, Italy. pp. 152-155. IEEE Computer Society. ISSN 1084-6999 ISBN 978-1-4244-2978-3

Bruinink, C.M. and Jaganatharaja, R.K. and de Boer, M.J. and Berenschot, J.W. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Developing the ultimate biomimetic flow-sensor array. In: Proceedings of the 1st International Conference on Natural and Biomimetic Mechanosensing, 26-28 Oct 2009, Dresden, Germany. 65. Forschungszentrum Juelich GmbH. ISSN 1433-5565 ISBN 978-3-89336-583-8

Cuperus, R. and Flokstra, F.F. and Droogendijk, H. and Wiegerink, R.J. and Flokstra, Jaap (2009) Gravity gradiometer system for Earth Exploration. In: MicroNanoConference 2009, 5-6 Nov 2009, Delft, The Netherlands. MinacNed. ISBN not assigned

Dagamseh, A.M.K. and Bruinink, C.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2009) Interfacing and processing artificial hairs array for flow pattern recognition. In: The Sense of Contact 11, 08 April 2009, Zeist, The Netherlands. FHI Federatie Van Technologiebranches. ISBN 978-90-74702-55-3

Dagamseh, A.M.K. and Krijnen, G.J.M. (2009) Thermal noise estimation in bio-inspired hair flow sensor. In: Proceedings of the 1st International Conference on Natural and Biomimetic Mechanosensing, 26-28 October 2009, Dresden, Germany. 64. Forschungszentrum Julich Gmbh. ISSN 1433-5565 ISBN 978-3-89336-583-8

Dagamseh, A.M.K. and Lammerink, T.S.J. and Bruinink, C.M. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Dipole source localisation using bio-mimetic flow-sensor arrays. Procedia Chemistry, 1 (1). pp. 891-894. ISSN 1876-6196

Dagamseh, A.M.K. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) A simulation study of the dipole source localisation applied on bio-mimetic flow-sensor linear array. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 26-27 November 2009, Veldhoven, The Netherlands. pp. 534-537. Technology Foundation STW. ISBN 978-90-73461-62-8

Dash, S.P. and Sharma, S. and Patel, R.S. and de Jong, M.P. and Jansen, R. (2009) Electrical creation of spin polarization in silicon at room temperature. Nature, 462 (4). pp. 491-494. ISSN 0028-0836 *** ISI Impact 34,48 ***

Delalande, M.Y. and Engelen, J.B.C. and le Fèbre, A.J. and Abelmann, L. and Lodder, J.C. (2009) Thermally induced switching field distribution of individual single nanomagnets in a large assembly. In: Proceedings of the European Workshop on Self-Organized Nanomagnets, 29 March- 3 April 2009, Aussois, France. 30. CNRS. ISBN not assigned

van Delft, K.M. and Eijkel, J.C.T. and Mijatovic, D. and Druzhinina, T.S. and Rathgen, H. and Tas, N.R. and van den Berg, A. and Mugele, F.G. (2009) Erratum: Micromachined Fabry-Pérot Interferometer with Embedded Nanochannels for Nanoscale Fluid Dynamics. Nano letters, 9 (8). pp. 1-2. ISSN 1530-6984 *** ISI Impact 9,991 ***

Dijkstra, M.A. (2009) Low-Drift Micro Flow Sensors. PhD thesis, University of Twente. ISBN 978-90-365-2856-6

Dijkstra, M.A. and Lammerink, T.S.J. and de Boer, M.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2009) Ambient temperature-gradient compensated low-drift thermopile flow sensor. In: 22nd IEEE International Conference on MEMS, 25-29 January 2009, Sorrento, Italy. pp. 479-482. Institute of Electrical and Electronics Engineers, Inc.. ISSN 1084-6999 ISBN 978-1-4244-2977-6

Duan, Xuexin and Zhao, Yiping and Perl, A. and Berenschot, J.W. and Reinhoudt, D.N. and Huskens, J. (2009) High-Resolution Contact Printing with Chemically Patterned Flat Stamps Fabricated by Nanoimprint Lithography. Advanced materials, 21 (27). pp. 2798-2802. ISSN 0935-9648 *** ISI Impact 8,379 ***

Engelen, J.B.C. and Lantz, M.A. and Rothuizen, H.E. and Abelmann, L. and Elwenspoek, M.C. (2009) Improved performance of large stroke comb-drive actuators by using a stepped finger shape. In: The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 21-25 June 2009, Denver, Colorado, USA. pp. 1762-1765. IEEE. ISBN 978-1-4244-4190-7

Engelen, J.B.C. and Rothuizen, H.E. and Drechsler, U. and Stutz, R. and Despont, M. and Abelmann, L. and Lantz, M.A. (2009) A Mass-balanced through-wafer electrostatic x/y-scanner for probe data storage. Microelectronic Engineering, 86 (4-6). pp. 1230-1233. ISSN 0167-9317 *** ISI Impact 1,488 ***

Flokstra, Jaap and Cuperus, R. and Wiegerink, R.J. and Essen, M.C. (2009) A MEMS-based gravity gradiometer for future planetary missions. Cryogenics, 49 (11). pp. 665-668. ISSN 0011-2275 *** ISI Impact 0,987 ***

Haneveld, J. and Lammerink, T.S.J. and de Boer, M.J. and Wiegerink, R.J. (2009) Micro coriolis mass flow sensor with integrated capacitive readout. In: IEEE 22nd International Conference on MEMS, 25-29 January 2009, Sorrento, Italy. pp. 463-466. Institute of Electrical and Electronics Engineering, Inc.. ISSN 1084-6999 ISBN 978-1-4244-2977-6

Hoang, Thi Hanh and Segers-Nolten, I.M. and Berenschot, J.W. and de Boer, M.J. and Tas, N.R. and Haneveld, J. and Elwenspoek, M.C. (2009) Fabrication and interfacing of nanochannel devices for single-molecule studies. Journal of micromechanics and microengineering, 19 (065017). pp. 1-10. ISSN 0960-1317 *** ISI Impact 1,997 ***

van Honschoten, J.W. (2009) Ruis bij de MicMec. In: Scintilla's jaarboek 2007-2008 Ruis. ETSV Scintilla Universiteit Twente, Enschede, pp. 83-94. ISBN not assigned

van Honschoten, J.W. and Berenschot, J.W. and Sanders, R.G.P. and Abelmann, L. and Tas, N.R. and Elwenspoek, M.C. (2009) Fabrication of three-dimensional microstructures using capillary forces. In: MME 09 - Proceedings 20th MicroMechanics Europe 2009, 20-22 September 2009, Toulouse, France. pp. 1-4. Laas-CNRS. ISBN not assigned

van Honschoten, J.W. and Escalante, M. and Tas, N.R. and Elwenspoek, M.C. (2009) Formation of liquid menisci in flexible nanochannels. Journal of colloid and interface science, 329 (1). pp. 133-139. ISSN 0021-9797 *** ISI Impact 3,019 ***

van Honschoten, J.W. and Escalante, M. and Tas, N.R. and Elwenspoek, M.C. (2009) Corrigendum to “Formation of liquid menisci in flexible anochannels". Journal of colloid and interface science, 332 (2). pp. 520-520. ISSN 0021-9797 *** ISI Impact 3,019 ***

van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. (2009) An integrated 3D sound intensity sensor using four-wire particle velocity sensors: II. Modelling. Journal of micromechanics and microengineering, 20 (1). 015043. ISSN 0960-1317 *** ISI Impact 1,997 ***

Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Biomimetic aquatic hair sensors fabrication. In: The sense of contact, workshop sensortechnology, 8 Apr 2009, Zeist, The Netherlands. Technology foundation STW. ISBN 978-90-74702-55-3

Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) A fabrication scheme for biomimetic aquatic hair sensors. In: Proceedings of the 1st International Conference on Natural and Biomimetic Mechanosensing, 26-28 October 2009, Dresden, Germany. pp. 66-66. Forschungszentrum Julich Gmbh. ISSN 1433-5565 ISBN 978-3-89336-583-8

Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Mogdans, J. and Krijnen, G.J.M. (2009) Fabrication of dense flow sensor arrays on flexible membranes. In: Proceedings of the 15th International Conference on Solid State Sensors, Actuators and Microsystems, 21-25 Jun 2009, Denver, Colorado, USA. pp. 1075-1078. IEEE. ISBN 978-1-4244-4193-8

Jaganatharaja, R.K. and Bruinink, C.M. and Hagedoorn, B.M. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Highly sensitive, biomimetic hair sensor arrays for sensing low-frequency air flows. In: Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 21-25 Jun 2009, Denver, U.S.A. pp. 1541-1544. IEEE. ISBN 978-1-4244-4193-8

Jaganatharaja, R.K. and Bruinink, C.M. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Highly sensitive biomimetic flow sensor arrays. In: The Sense of Contact 11, 08 Apr 2009, Zeist. FHI Federatie Van Technologiebranches. ISBN 978-90-74702-55-3

Jaganatharaja, R.K. and Bruinink, C.M. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Optimized biomimetic hair sensor arrays for sensing oscillating air flows. In: Proceedings of the 1st International Conference on Natural and Biomimetic Mechanosensing, 26-28 Oct 2009, Dresden, Germany. 16. Forschungszentrum Juelich GmbH. ISSN 1433-5565 ISBN 978-3-89336-583-8

Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2009) Poor man's nanofabrication. In: International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 Nov 2009, Vung Tau, Vietnam . Vietnam National University. ISBN not assigned

Jansen, H.V. and de Boer, M.J. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2009) Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment. Journal of micromechanics and microengineering, 19 (3). 033001. ISSN 0960-1317 *** ISI Impact 1,997 ***

Khatib, M.G. and van Dijk, H.W. (2009) Fast Configuration of MEMS-Based Storage Devices for Streaming Applications. In: Proceedings of the 2009 IEEE/ACM/IFIP 7th Workshop on Embedded Systems for Real-Time Multimedia, 15-16 Oct 2009, Grenoble. pp. 55-63. IEEE. ISBN 978-1-4244-5170-8

Khatib, M.G. and Hartel, P.H. (2009) Policies for Probe-Wear Leveling in MEMS-Based Storage Devices. In: Proceedings of the 17th Annual Meeting of the IEEE/ACM International Symposium on Modeling, Analysis & Simulation of Computer and Telecommunication Systems (MASCOTS), 21-23 Sep 2009, London, UK. pp. 152-161. IEEE Computer Society. ISSN 1526-7539 ISBN 978-1-4244-4928-6

Koelmans, W.W. and van Honschoten, J.W. and Vettiger, P. and Abelmann, L. and Elwenspoek, M.C. (2009) Parallel optical readout of a cantilever array in dynamic mode. In: Proceedings of the International Workshop on Nanomechanical cantilever sensors 2009, 20-22 May 2009, Jeju, South Korea. Smart Materials and Sensors Laboratory. ISBN not assigned

Krijnen, G.J.M. and Wiegerink, R.J. (2009) Lifelike MEMS en wat krekels ons influisteren. De Vonk, 3. pp. 4-12. ISSN 0925-5427

Kuijpers, A.A. and Lierop, D. and Sanders, R.H.M. and Tangenberg, J. and Moddejonge, H. and Eikenbroek, J.W.T. and Lammerink, T.S.J. and Wiegerink, R.J. (2009) Towards embedded control for resonant scanning MEMS micromirror. Procedia Chemistry, 1 (1). pp. 1307-1310. ISSN 1876-6196

Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. and Lötters, J.C. (2009) Flowmeter with silicon flow tube. Patent NL1034905 (Assigned).

Louwerse, M.C. (2009) Cold Gas Micro Propulsion. PhD thesis, University of Twente. ISBN 978-90-365-2903-7

Louwerse, M.C. and Jansen, H.V. and Groenendijk, M.N.W. and Elwenspoek, M.C. (2009) Nozzle fabrication for micropropulsion of a microsatellite. Journal of micromechanics and microengineering, 19 (4). pp. 1-9. ISSN 0960-1317 *** ISI Impact 1,997 ***

Mogulkoc, B. and Jansen, H.V. and Berenschot, J.W. and ter Brake, H.J.M. and Knowles, K.M. and Elwenspoek, M.C. (2009) Characterization of MEMS-on-tube assembly: reflow bonding of borosilicate glass (Duran ®) tubes to silicon substrates. Journal of micromechanics and microengineering, 19 (085027). pp. 1-10. ISSN 0960-1317 *** ISI Impact 1,997 ***

Nazeer, H. and Abelmann, L. and Tas, N.R. and van Honschoten, J.W. and Siekman, M.H. and Elwenspoek, M.C. (2009) Determination of young's modulus of PZT and CO₈₀Ni₂₀ thin films by means of micromachined cantilevers In: Proceedings of the 20th Micromechanics Europe Workshop, 21-23 Sept 2009, Toulouse, France. pp. 278-281. LAAS-CNRS. ISBN not assigned

Pham, V.S. and Kauppinen, L.J. and Dijkstra, M. and van Wolferen, H.A.G.M. and de Ridder, R.M. and Hoekstra, H.J.W.M. (2009) Photonic crystal waveguides integrated with microcantilevers as a novel platform for gas sensors. In: Proceedings of the 7th International Symposium on Modern Optics and Its Applications (ISMOA), 10-14 August 2009, Bandung, Indonesia. pp. 68-68. Bandung Institute of Technology. ISBN not assigned

Pham, V.S. and Kauppinen, L.J. and Dijkstra, M. and van Wolferen, H.A.G.M. and de Ridder, R.M. and Hoekstra, H.J.W.M. (2009) Fabrication of mechano-optical sensors for hydrogen gas. In: Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 26-27 Nov 2009, Veldhoven, the Netherlands. pp. 44-47. Technology Foundation STW. ISBN 978-90-73461-62-8

Pham, V.S. and Kauppinen, L.J. and Dijkstra, M. and van Wolferen, H.A.G.M. and de Ridder, R.M. and Hoekstra, H.J.W.M. (2009) Simulation and fabrication of a mechano-optical sensor for nano-displacements. In: 1st Nano Today Conference, 2-5 Aug 2009, Biopolis, Singapore. pp. 33-33. Institute of Bioengineering and Nanotechnology, Singapore. ISBN not assigned

Profijt, H.B. and Pigot, C. and Reyne, G. and Grechishkin, R.M. and Cugat, O. (2009) Stable diamagnetic self-levitation of a micro-magnet by improvement of its magnetic gradients. Journal of magnetism and magnetic materials, 321 (4). pp. 259-262. ISSN 0304-8853 *** ISI Impact 1,204 ***

Syed Nawazuddin, M.B. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2009) Parallel plate structures for optical modulation and casimir force measurement. In: MME 09 - Proceedings 20th MicroMechanics Europe 2009, 20-22 September 2009, Toulouse, France. pp. 1-4. Laas-CNRS. ISBN not assigned

Tas, N.R. and Haneveld, J. and Jansen, H.V. and Brunets, N. and van Honschoten, J.W. (2009) Capillarity effect in silicon based nanochannels. In: Proceedings Second International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 Nov 2009, Vung Tau, Vietnam. pp. 1-1. IWNA 2009 International Conference. ISBN not assigned

Tiggelaar, R.M. and Groenland, A.W. and Sanders, R.G.P. and Gardeniers, J.G.E. (2009) Electrical properties of low pressure chemical vapor deposited silicon nitride thin films for temperatures up to 650 °C. Journal of applied physics, 105 (3). 033714. ISSN 0021-8979 *** ISI Impact 2,072 ***

Tiggelaar, R.M. and Sanders, R.G.P. and Groenland, A.W. and Gardeniers, J.G.E. (2009) Stability of thin platinum films implemented in high-temperature microdevices. Sensors and actuators A: Physical, 152 (1). pp. 39-47. ISSN 0924-4247 *** ISI Impact 1,674 ***

Unnikrishnan, S. (2009) Micromachined Dense Palladium Electrodes for Thin-film Solid Acid Fuel Cells. PhD thesis, University of Twente. ISBN 978-90-365-2949-5

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) MEMS within a Swagelok®: a new platform for microfluidic devices. Lab on a chip, 9 (13). pp. 1966-1969. ISSN 1473-0197 *** ISI Impact 6,342 ***

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) Microfluidics within a Swagelok®: A MEMS-on-tube assembly. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, 25-29 January 2009, Sorrento, Italy. pp. 1-4. Technical Digest. ISSN 1084-6999

Unnikrishnan, S. and Jansen, H.V. and Falke, F.H. and Tas, N.R. and van Wolferen, H.A.G.M. and de Boer, M.J. and Sanders, R.G.P. and Elwenspoek, M.C. (2009) Transition flow through an ultra-thin nanosieve. Nanotechnology, 20 (30). pp. 1-6. ISSN 0957-4484 *** ISI Impact 3,137 ***

Wiegerink, R.J. and Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. (2009) Thermal and Coriolis type micro flow sensors based on surface channel technology. Procedia Chemistry, 1 (1). pp. 1455-1458. ISSN 1876-6196

Yntema, D.R. and van Honschoten, J.W. and Wiegerink, R.J. (2009) An integrated 3D sound intensity sensor using four-wire particle velocity sensors: I. Design and characterization. Journal of micromechanics and microengineering, 20 (1). 015042. ISSN 0960-1317 *** ISI Impact 1,997 ***

Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Sub-10 nm silicon ridge nanofabrication by advanced edge lithography for NIL applications. Microelectronic engineering, 86 (4-6). pp. 832-835. ISSN 0167-9317 *** ISI Impact 1,488 ***

Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Multi-silicon ridge nanofabrication by repeated edge lithography. Nanotechnology, 20 (315305). pp. 1-7. ISSN 0957-4484 *** ISI Impact 3,137 ***

van Zwol, P.J. and Svetovoy, V. and Palasantzas, G. (2009) Distance upon contact: Determination from roughness profile. Physical review B: Condensed matter and materials physics, 80 (23). 235401. ISSN 1098-0121 *** ISI Impact 3,475 ***

2008

Abelmann, L. and le Fèbre, A.J. (2008) Doorslaan in veld emissie. In: Doorgeslagen. Jaarboek E.T.S.V. Scintilla 2007-2008. University of Twente, Enschede, pp. 116-128. ISBN not assigned

Antezza, M. and Pitaevskii, L.P. and Stringari, S. and Svetovoy, V. (2008) Casimir-Lifshitz force out of thermal equilibrium. Physical review A, 77 (2). 022901. ISSN 1050-2947 *** ISI Impact 2,866 ***

Berenschot, J.W. and Tas, N.R. (2008) A method for making a 3D nanostructure having a nanosubsructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method. Patent EP20080000094 (Application).

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2008) 3D-Nanomachining using corner lithography. In: 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, 6-9 Jan 2008, Sanya, China. pp. 729-732. IEEE Computer Society. ISBN 978-1-4244-1907-4

Berenschot, J.W. and Wissink, J.M. and Tas, N.R. and de Boer, M.J. (2008) Microneedle, microneedle array and production method therefor. Patent NL20082001718 (Application).

Bos, J.W. and Hoitink, R.W.J. and Besseling, J.H. and Lötters, J.C. (2008) Flow sensor of the thermal type. Patent US7437928 (Assigned).

van den Broek, D.M. (2008) Explosive micro-bubble actuator. PhD thesis, University of Twente. ISBN 978-90-365-2743-9

van den Broek, D.M. and Elwenspoek, M.C. (2008) Explosive micro-bubble actuator. Sensors and actuators A: Physical, 145-146 (1-2). pp. 387-393. ISSN 0924-4247 *** ISI Impact 1,674 ***

van den Broek, D.M. and Elwenspoek, M.C. (2008) Bubble nucleation in an explosive micro-bubble actuator. Journal of micromechanics and microengineering, 18 (6). 064003. ISSN 0960-1317 *** ISI Impact 1,997 ***

Bruinink, C.M. and Burresi, M. and de Boer, M.J. and Segerink, F.B. and Jansen, H.V. and Berenschot, J.W. and Reinhoudt, D.N. and Huskens, J. and Kuipers, L. (2008) Nanoimprint Lithography for Nanophotonics in Silicon. Nano Letters, 8 (9). pp. 2872-2877. ISSN 1530-6984 *** ISI Impact 9,991 ***

Dagamseh, A.M.K. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2008) Interfacing of artificial hairs array for complex flow pattern recognition. In: Micromechanics Europe Workshop 2008, 28-30 Sep 2008, Aachen. pp. 129-132. RWTH Aachen University. ISBN 978-3-00-025529-8

Delalande, M.Y. and Engelen, J.B.C. and le Fèbre, A.J. and Abelmann, L. and Lodder, J.C. (2008) Switching field distribution of arrays of Co-Pt Nanodots determined by anomalous hall effect measurements. In: Proceedings of the Asian Magnetics Conference 2008, 10 - 13 Dec 2008, Busan, Korea. Korea University. ISBN not assigned

Delalande, M.Y. and le Fèbre, A.J. and van Wolferen, H.A.G.M. and Abelmann, L. and Lodder, J.C. (2008) Magnetic properties of CoPt thin films and nanosized dots patterned by Laser Interference Lithography (LIL). In: Proceedings of the 12eme Colloque Louis Neel, 30 Sept - 3 Oct 2008, La grande Motte, France. CEMES. ISBN not assigned

Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels. Sensors and actuators A: Physical, 143 (1). pp. 1-6. ISSN 0924-4247 *** ISI Impact 1,674 ***

Dijkstra, M.A. and Lammerink, T.S.J. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift U-Shaped Thermopile Flow Sensor. In: Sensors, 2008 IEEE, 26-29 Oct 2008, Lecce, Italy. pp. 66-69. IEEE. ISSN 1930-0395 ISBN 978-1-4244-2580-8

Dijkstra, M.A. and Lammerink, T.S.J. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift flow sensor with zero-offset thermopile-based power feedback. In: Proceedings of Design, Test, Integration and Packaging of MEMS/MOEMS, 9-11 Apr 2008, Nice. 4. EDA Publisher. ISBN 978-2-35500-006-5

Engelen, J.B.C. and Khatib, M.G. (2008) A ''Millipede'' scanner model - Energy consumption and performance. Technical Report TR-CTIT-08-51, Centre for Telematics and Information Technology University of Twente, Enschede. ISSN 1381-3625

Engelen, J.B.C. and Rothuizen, H.E. and Drechsler, U. and Stutz, R. and Despont, M. and Lantz, M.A. (2008) Mass-balanced through-wafer electrostatic x/y-scanner for parallel probe data storage. In: 34th International Conference on Micro & Nano Engineering, 15-19 Sep 2008, Athens, Greece. 92. Ergo Publications. ISBN not assigned

Escalante, M. and Zhao, Yiping and Ludden, M.J.W. and Vermeij, R. and Olsen, J.D. and Berenschot, J.W. and Hunter, C.N. and Huskens, J. and Subramaniam, V. and Otto, C. (2008) Nanometer arrays of functional light harvesting antenna complexes by nanoimprint lithography and host--guest interactions. Journal of the American Chemical Society, 130 (28). pp. 8892-8893. ISSN 0002-7863 *** ISI Impact 8,58 ***

Fazal, I. and Elwenspoek, M.C. (2008) Piezoelectric microvalve for precise control of gas flow at high pressure. In: 2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007, 4-7 Sept 2007, Las Vegas, NV, United States. pp. 841-844. American Society of Mechanical Engineers. ISBN 0791848027

Fazal, I. and Elwenspoek, M.C. (2008) Fusion-bonded fluidic interconnects. Journal of micromechanics and microengineering, 18 (5). 055011. ISSN 0960-1317 *** ISI Impact 1,997 ***

le Fèbre, A.J. (2008) Field emission sensing for non-contact probe recording. PhD thesis, University of Twente. ISBN 978-90-8570-300-6

le Fèbre, A.J. and Abelmann, L. and Lodder, J.C. (2008) Field emisssion at nanometer distances for high-resolution positioning. Journal of vacuum science and technology B: microelectronics, processing and phenomena, 26 (2). pp. 724-729. ISSN 1071-1023

Haneveld, J. and Lammerink, T.S.J. and Dijkstra, M.A. and Droogendijk, H. and de Boer, M.J. and Wiegerink, R.J. (2008) Highly sensitive micro coriolis mass flow sensor. In: MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems, 13-17 Jan 2008, Tucson, AZ, United States. pp. 920-923. IEEE Computer Society. ISBN 978-1-4244-1793-3

Haneveld, J. and Tas, N.R. and Brunets, N. and Jansen, H.V. and Elwenspoek, M.C. (2008) Capillary filling of sub- 10 nm nanochannels. Journal of applied physics, 104 (1). 14309. ISSN 0021-8979 *** ISI Impact 2,072 ***

Hartel, P.H. and Abelmann, L. and Khatib, M.G. (2008) Towards Tamper-Evident Storage on Patterned Media. In: 6th USENIX Conf. on File and Storage Technologies (FAST), Feb. 26-29, 2008, San Jose, California. pp. 283-296. USENIX Association. ISBN 978-1-931971-56-0

van Honschoten, J.W. and Escalante, M. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2008) Erratum:"Elastocapillary filling of deformable nanochannels" [J. Appl. Phys. 101, 094310 (2007)]. Journal of applied physics, 103 (2). pp. 1-1. ISSN 0021-8979 *** ISI Impact 2,072 ***

van Honschoten, J.W. and Koelmans, W.W. and Konings, S.M. and Abelmann, L. and Elwenspoek, M.C. (2008) Nanotesla torque magnetometry using a microcantilever. In: Eurosensors XXII, 7 - 10 Sept 2008, Dresden, Germany. pp. 597-600. Eurosensors Committee. ISBN 978-3-00-025217-4

van Honschoten, J.W. and Tas, N.R. and Svetovoy, V. and Escalante, M. and Elwenspoek, M.C. (2008) Formation of liquid menisci in flexible nanochannels. In: Proceedings of MicroTas 2008, Oct 2008, San Diego. pp. 1504-1506. University of San Diego. ISBN 978-0-9798064-1-4

van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Modeling and characterization of the sensitivity of a hot-wire particle velocity sensor. In: MME 2008, 28-30 Sept 2008, Aachen. RWTH Aachen University. ISBN 978-3-00-025529-8

van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Analysis of the angular sensitivity of an innovative particle velocity sensor. In: Proceedings of IEEE Sensors 2008, Oct 2008, Lecce, Italy. 4. Lecce University. ISBN 9781424425815

Iannuzzi, D. and De Man, S. and Alberts, C.J. and Berenschot, J.W. and Elwenspoek, M.C. and Said, A.A. and Dugan, M. (2008) Fiber-top micromachined devices. In: 19th International Conference on Optical Fibre Sensors, 15-18 April 2008, Perth, WA, Australia. 700403. Proceedings SPIE 7004. SPIE. ISSN 0277-786X

Iannuzzi, D. and Deladi, S. and Elwenspoek, M.C. (2008) Optical device comprising a cantilever and method of fabrication and use thereof. Patent US20080094352 (Application).

Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Krijnen, G.J.M. (2008) Fabrication scheme for dense aquatic flow sensor arrays. In: Proceedings of Eurosensors XXII, 7-10 Sep 2008, Dresden, Germany. pp. 912-915. Verein Deutscher Ingenieure e.V. (VDI). ISBN 978-3-00-025217-4

Izadi, N. and Krijnen, G.J.M. and Wiegerink, R.J. (2008) Biomimetic aquatic hair sensors design. In: The Sense of Contact, workshop sensortechnology, 9 Apr 2008, Zeist, The Netherlands. Technology foundation STW. ISBN 978-90-74702-54-6

Izadi, N. and Verlaat, B. and Berenschot, J.W. and Wiegerink, R.J. and de Boer, M.J. and Mogdans, J. and Krijnen, G.J.M. (2008) Design and fabrication process for artificial lateral line flow sensors. In: Proceedings of the International Conference on Sensor and Sensing in Biology and Engineering, 12-16 Oct 2008, Cetraro, Italy. Engineering Conferences International. ISBN not assigned

Jaganatharaja, R.K. and Bruinink, C.M. and Izadi, N. and Lammerink, T.S.J. and Wiegerink, R.J. and Casas, J. and Krijnen, G.J.M. (2008) Optimization Of Bio-inspired Hair Sensor Arrays. In: 34th International Conference on Micro & Nano Engineering, 15-19 Sep 2008, Athens, Greece. Micro & Nano Engineering Committee. ISBN not assigned

Jaganatharaja, R.K. and Bruinink, C.M. and Izadi, N. and Lammerink, T.S.J. and Wiegerink, R.J. and Casas, J. and Krijnen, G.J.M. (2008) Optimization Of Bio-inspired Hair Sensor Arrays. In: Sensors and Sensing in Biology and Engineering Conference, 12-16, 2008, Cetraro, Italy. Engineering Conferences International. ISBN not assigned

Jaganatharaja, R.K. and Izadi, N. and Floris, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2008) Model-based optimization of tunable, biomimetic hair sensor arrays. In: The Sense of Contact 10, 09 Apr 2008, Zeist. FHI Federatie Van Technologiebranches. ISBN 978-90-74702-54-6

Janssen, K.G.H. and Hoang, Thi Hanh and Floris, J. and de Vries, Jeroen and Tas, N.R. and Eijkel, J.C.T. and Hankemeier, T. (2008) Solution titration by wall deprotonation during capillary filling of silicon oxide nanochannels. Analytical Chemistry, 80 (21). pp. 8095-8101. ISSN 0003-2700 *** ISI Impact 5,214 ***

Kauppinen, L.J. and Hoekstra, H.J.W.M. and Dijkstra, M. and de Ridder, R.M. and Krijnen, G.J.M. (2008) Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections. In: Proceedings of the 14th European Conference on Integrated Optics (ECIO), 11-13 June 2008, Eindhoven, The Netherlands. pp. 111-114. Eindhoven University of Technology. ISBN 978-90-386-1317-8

Kauppinen, L.J. and Hoekstra, H.J.W.M. and Dijkstra, M. and de Ridder, R.M. and Krijnen, G.J.M. (2008) Grated waveguide-based optical cavities as compact sensors for sub-nanometre cantilever deflections, and small refractive-index changes. In: Book of Abstracts 9th European Conference on Optical Chemical Sensors and Biosensors (Europtrode IX), 30-3-2008-02-04-2008, Dublin, Ireland. P084. Dublin City University. ISBN not assigned

Khatib, M.G. and Engelen, J.B.C. and Hartel, P.H. (2008) Shutdown Policies for MEMS-Based Storage Devices -- Analytical Models. Technical Report TR-CTIT-08-03, Centre for Telematics and Information Technology University of Twente, Enschede. ISSN 1381-3625

Kohlheyer, D. and Unnikrishnan, S. and Besselink, G.A.J. and Schlautmann, S. and Schasfoort, R.B.M. (2008) A microfluidic device for array patterning by perpendicular electrokinetic focusing. Microfluidics and Nanofluidics, 4 (6). pp. 557-564. ISSN 1613-4982 *** ISI Impact 3,286 ***

Krijnen, G.J.M. and Casas, J. (2008) Imitating cricket mechanosensory hairs: dream or reality? (Invited) In: Sensors and Sensing in Biology and Engineering 2008, 12-16 Oct 2008, Grand Hotel San Michele, Cetraro (Calabria), Italy. pp. 26-27. Engineering Conferences International. ISBN not assigned

Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. and Lötters, J.C. (2008) Flowmeter with silicon flow tube. Patent NL20081034905 (Application).

Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. and Wiegerink, R.J. (2008) Flowmeter. Patent US20080335045 (Application).

Lerou, P.P.P.M. and ter Brake, H.J.M. and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Rogalla, H. (2008) Micromachined Joule-Thomson coolers. In: AIP Conference Proceedings, 16-20 July 2007, Chattanooga, Tennessee, USA. pp. 614-621. Advances in Cryogenic Engineering, Transactions of the Cryogenic Engineering Conference - CEC 985 (1). American Institute of Physics. ISSN 0094-243X ISBN 978-0-7354-0504-2

Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2008) Modular Thruster and Feeding System for Micro-Satellite. In: MME 2008, 19th MicroMechanics Europe Workshop, 28-30 September 2008, Aachen, Germany. pp. 17-20. VDI/VDE IT. ISBN 978-3-00-025529-8

Louwerse, M.C. and Jansen, H.V. and Groenendijk, M.N.W. and Elwenspoek, M.C. (2008) Nozzle fabrication for Micro Propulsion of a Micro-Satellite. In: MME 2008, 19th MicroMechanics Europe Workshop, 28-30 September 2008, Aachen, Germany. pp. 45-48. VDI/VDE IT. ISBN 978-3-00-025529-8

Mehendale, A. and Hagedoorn, W. and Lötters, J.C. (2008) Transformer core. Patent US20080117050 (Application).

Mehendale, A. and Lötters, J.C. (2008) Flowmeter of the Coriolis type. Patent US20080167257 (Application).

Mogulkoc, B. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2008) Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects. In: Proceedings of the 19th micromechanics Europe conference, 28-30 Sept 2008, Aachen, Germany. VDI/VDE. ISBN 978-3-00-025529-8

Okamoto, S. and Kikuchi, N. and Kato, T. and Kitakami, O. and Mitsuzuka, K. and Shimatsu, T. and Muraoka, H. and Aoi, H. and Lodder, J.C. (2008) Magnetization behavior of nanomagnets for patterned media application. Journal of magnetism and magnetic materials, 320 (22). pp. 2874-2879. ISSN 0304-8853 *** ISI Impact 1,204 ***

Onoue, T. and Siekman, M.H. and Abelmann, L. and Lodder, J.C. (2008) Heat assisted magnetic probe recording onto a thin film with perpendicular magnetic anisotropy. Journal of physics D: applied physics, 41 (15). 155008. ISSN 0022-3727 *** ISI Impact 2,083 ***

Pham, V.S. and Kauppinen, L.J. and Hoekstra, H.J.W.M. and Dijkstra, M. and van Wolferen, H.A.G.M. and Krijnen, G.J.M. and de Ridder, R.M. (2008) Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements. In: Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter, 27,28 November 2008, Enschede, The Netherlands. pp. 155-158. IEEE LEOS Benelux Chapter. ISBN 978-90-365-2768-2

Svetovoy, V. (2008) Application of the Lifshitz Theory to Poor Conductors. Physical review letters, 101 (16). 163603. ISSN 0031-9007 *** ISI Impact 7,328 ***

Svetovoy, V. and van Zwol, P.J. and Palasantzas, G. and De Hosson, J.T.M. (2008) Optical properties of gold films and the Casimir force. Physical review B: Condensed matter and materials physics, 77 (3). 035439. ISSN 1098-0121 *** ISI Impact 3,475 ***

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2008) Wafer scale nano-membrane supported on a silicon microsieve using thin-film transfer technology. Journal of micromechanics and microengineering, 18 (6). 064005. ISSN 0960-1317 *** ISI Impact 1,997 ***

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Fazal, I. and Louwerse, M.C. and Mogulkoc, B. and Sanders, R.G.P. and de Boer, M.J. and Elwenspoek, M.C. (2008) A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent EP20080007746 (Application).

Vanapalli, S. (2008) High-frequency Operation and Miniaturization aspects of Pulse-tube Cryocoolers. PhD thesis, University of Twente. ISBN 978-90-365-2652-4

Vanapalli, S. and ter Brake, H.J.M. and Jansen, H.V. and Zhao, Yiping and Holland, H.J. and Burger, J.F. and Elwenspoek, M.C. (2008) High frequency pressure oscillator for microcryocoolers. Review of scientific instruments, 79 (4). 045103. ISSN 0034-6748 *** ISI Impact 1,521 ***

Wissink, J. and Berenschot, J.W. and Tas, N.R. (2008) Atom sharp needles, the missing link in microneedle drug delivery. In: Proceedings of Medical Devices Conference, 6 Oct 2008, Kopenhagen. pp. 23-26. Medical Devices Committee. ISBN not assigned

Woldering, L.A. and Tjerkstra, R.W. and Jansen, H.V. and Setija, I. and Vos, W.L. (2008) Periodic arrays of deep nanopores made in silicon with reactive ion etching and deep UV lithography. Nanotechnology, 19 (14). pp. 1-11. ISSN 0957-4484 *** ISI Impact 3,137 ***

Yang, Chung-Kai and le Fèbre, A.J. and Pandraud, G. and van der Drift, E. and French, P.J. (2008) Field emission for cantilever sensors. Journal of vacuum science and technology B: microelectronics, processing and phenomena, 26 (3). pp. 927-933. ISSN 1071-1023

Yntema, D.R. (2008) An integrated three-dimensional sound-intensity-probe. PhD thesis, University of Twente. ISBN 978-90-365-2733-0

Yntema, D.R. and van Honschoten, J.W. and Wiegerink, R.J. (2008) Integrated 3D sound intensity sensor with four-wire particle velocity sensors. In: Proceedings of DTIP 2008, 9-11 April 2008, Nice. 3. EDA Publishing Association. ISBN 978-2-35500-006-5

Yntema, D.R. and van Honschoten, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) A complete three-dimensional sound intensity sensor integrated on a single chip. Journal of micromechanics and microengineering, 18 (11). pp. 1-9. ISSN 0960-1317 *** ISI Impact 1,997 ***

Zhao, Yiping and Berenschot, J.W. and de Boer, M.J. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Fabrication of a silicon oxide stamp by edge lithography reinforced with silicon nitride for nanoimprint lithography. Journal of micromechanics and microengineering, 18 (18). 064013. ISSN 0960-1317 *** ISI Impact 1,997 ***

Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Monolithics silicon nano-ridge fabrication by edge lithography and wet anisotropic etching of silicon. In: 34th International Conference on Micro & Nano Enginering, 15-18 Sept 2008, Greece. 221. Ergo publications. ISBN not assigned

2007

Abdulla, S.M.C. and Krijnen, G.J.M. (2007) Optimised Frequency Range of Active Joints for Nanometre Range Stroke. In: MicroMechanics Europe Workshop 2007, 16-18 Sep 2007, Guimarães, Portugal. pp. 211-214. University of Minho. ISBN 978-972-98603-3-1

Abdulla, S.M.C. and Krijnen, G.J.M. (2007) Bimorph based Active Joints for Nanometre scale Actuation. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven,The Netherlands. pp. 568-571. Technology Foundation STW. ISBN 978-90-73461-49-9

Alonso-González, P. and González, L. and González, Y. and Fuster, D. and Fernández-Martinez, I. and Martin-Sánchez, J. and Abelmann, L. (2007) New process for high optical quality InAs quantum dots grown on patterned GaAs(001) substrates. Nanotechnology, 18 (35). 355302. ISSN 0957-4484 *** ISI Impact 3,137 ***

Bos, J.W. and Hoitink, R.W.J. and Besseling, J.H. and Lötters, J.C. (2007) Flow sensor of the thermal type. Patent US20070798983 (Application).

van den Broek, D.M. and Elwenspoek, M.C. (2007) Explosive micro-bubble actuator. In: Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International, 10-14 Juni, Lyon - Frankrijk. pp. 2441-2444. IEEE Computer Society. ISBN 1-4244-0842-3

Brouwer, D.M. (2007) Design principles for six degrees-of-freedom MEMS-based precision manipulators. PhD thesis, University of Twente. ISBN 978-90-365-2510-7

van Delft, K.M. and Eijkel, J.C.T. and Mijatovic, D. and Druzhinina, T.S. and Rathgen, H. and Tas, N.R. and van den Berg, A. and Mugele, F.G. (2007) Micromachined Fabry-Perot interferometer with embedded nanochannels for nanoscale fluid dynamics. Nano letters, 7 (2). pp. 345-350. ISSN 1530-6984 *** ISI Impact 9,991 ***

Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) A versatile surface channel concept for microfluidic applications. Journal of micromechanics and microengineering, 17 (10). pp. 1971-1977. ISSN 0960-1317 *** ISI Impact 1,997 ***

Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. In: Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on, 21-25 January, Kobe, Japan. pp. 123-126. IEEE Computer Society. ISBN 1-4244-0951-9

Fazal, I. (2007) Development of a gas microvalve based on fine and micromachining. PhD thesis, University of Twente. ISBN 978-90-365-2571-8

Fazal, I. and Elwenspoek, M.C. (2007) Design and analysis of a high pressure piezoelectric actuated microvalve. Journal of micromechanics and microengineering, 17 (11). pp. 2366-2379. ISSN 0960-1317 *** ISI Impact 1,997 ***

Fazal, I. and Elwenspoek, M.C. (2007) Design challenges for stepper motor actuated microvalve based on fine and micro-machining. In: 18th Workshop on MicroMechanics Europe MME 2007, 16-18 September 2007, Guimaraes, Portugal. pp. 219-222. University of Minho. ISBN 978-972-98603-3-1

le Fèbre, A.J. and Abelmann, L. and Lodder, J.C. (2007) Field Emission to control nanometer tip-medium distances in probe storage. In: Technical digest of the International Vacuum Nanoelectronics Conference (IVNC 2007), 08 July - 12 July 2007, Chigaco, USA. pp. 223-224. IEEE Computer Society. ISBN 1-4244-1134-3

le Fèbre, A.J. and Luttge, R. and Abelmann, L. and Lodder, J.C. (2007) Field emission to control tip-sample distance in magnetic probe recording. In: International Conference on Nanoscience and Technology 2006, 30 July - 4 Aug 2006, Basel, Switzerland. pp. 673-677. Journal of Physics: Conference Series (JPCS) 61. IOP Publishing Ltd. ISSN 1742-6588

le Fèbre, A.J. and Siekman, M.H. and Abelmann, L. and Lodder, J.C. (2007) Displacement sensing by field emission with nanometer resolution. In: Transducers 2007 & Eurosensors XXI Digest of Technical Papers, 10 June - 14 June 2007, Lyon, France. pp. 2361-2364. IEEE Computer Society. ISBN 1-4244-0841-5

Floris, J. and Izadi, N. and Jaganatharaja, R.K. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2007) Adaptation for frequency focusing and increased sensitivity in biomimetic flow sensors using electrostatic spring softening. In: Proceedings of The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, 10-14 Jun 2007, Lyon, France. pp. 1267-1270. IEEE. ISBN 1-4244-0841-5

Gielens, F.C. and Tong, D.H. and Vorstman, M.A.G. and Keurentjes, J.T.F. (2007) Measurement and modeling of hydrogen transport through high-flux Pd membranes. Journal of membrane science, 289 (1-2). pp. 15-25. ISSN 0376-7388 *** ISI Impact 3,203 ***

Groenland, J.P.J. (2007) Magnetische registratie. In: Poly-elektronica zakboek. Reed Business bv, Doetinchem, D4/2-D4/22, D4/31. ISBN 978-90-6228-484-9

Groenland, J.P.J. and Abelmann, L. (2007) Two-dimensional coding for probe recording on magnetic patterned media. IEEE Transactions on Magnetics, 43 (6). pp. 2307-2309. ISSN 0018-9464 *** ISI Impact 1,061 ***

Groenland, J.P.J. and Abelmann, L. (2007) Two-dimensional data detection for probe recording on patterned media. In: Abstracts of the 10th Joint MMM/Intermag Conference 2007, 7-11 Jan 2007, Baltimore, MD, USA. pp. 428-428. American Institute of Physics. ISBN not assigned

Hartel, P.H. and Abelmann, L. (2007) Towards compliant data retention with probe storage on patterned media. Technical Report TR-CTIT-07-49, Centre for Telematics and Information Technology University of Twente, Enschede. ISSN 1381-3625

Hoang, Thi Hanh and Segers-Nolten, I.M. and Tas, N.R. and de Boer, M.J. and Subramaniam, V. and Elwenspoek, M.C. (2007) Fabrication of 1d nanochannels with thin glass wafers for single molecule studies. In: Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, 20-24 May 2007, Santa Clara, California, USA. pp. 260-263. NSTI. ISBN 1-4200-6184-4

Hoexum, A.M. (2007) Unleashed Microactuators electrostatic wireless actuation for probe-based data storage. PhD thesis, University of Twente. ISBN 978-90-365-2498-8

van Honschoten, J.W. and Escalante, M. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2007) Elastocapillary filling of deformable nanochannels. Journal of applied physics, 101. 094310. ISSN 0021-8979 *** ISI Impact 2,072 ***

van Honschoten, J.W. and Yntema, D.R. and Svetovoy, V. and Dijkstra, M.A. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Analysis of the performance of a particle velocity sensor between two cylindrical obstructions. Journal of the Acoustical Society of America, 121 (5). pp. 2711-2722. ISSN 0001-4966 *** ISI Impact 1,523 ***

van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Analysis of a three-dimensional particle velocity sensor for design optimization. Journal of micromechanics and microengineering, 17. S137-S146. ISSN 0960-1317 *** ISI Impact 1,997 ***

Iannuzzi, D. and Deladi, S. and Slaman, M. and Rector, J.H. and Schreuders, H. and Elwenspoek, M.C. (2007) A fiber-top cantilever for hydrogen detection. Sensors and actuators B: Chemical, 121 (2). pp. 706-708. ISSN 0925-4005 *** ISI Impact 3,083 ***

Iannuzzi, D. and Heeck, K. and Slaman, M. and de Man, S. and Rector, J.H. and Schreuders, H. and Berenschot, J.W. and Gadgil, V.J. and Sanders, R.G.P. and Elwenspoek, M.C. and Deladi, S. (2007) Fibre-top cantilevers: design, fabrication and applications. Measurement science and technology, 18 (10). pp. 3247-3252. ISSN 0957-0233 *** ISI Impact 1,317 ***

Izadi, N. and Jaganatharaja, R.K. and Floris, J. and Krijnen, G.J.M. (2007) Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing. In: Proceedings of the ninth International Symposium on Design, Test, integration and packaging of MEMS / MOEMS, 25-27 Apr 2007, Stresa, Italy. pp. 112-115. EDA Publishing. ISBN 978-2-35500-000-3

Izadi, N. and Jaganatharaja, R.K. and Krijnen, G.J.M. (2007) Optimization of biomimetic hair sensors. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 584-588. Technology Foundation STW. ISBN 978-90-73461-49-9

Jaganatharaja, R.K. and Izadi, N. and Floris, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2007) Model-based optimization and adaptivity of cricket-inspired biomimetic artificial hair sensor arrays. In: MicroMechanics Europe Workshop 2007, 16-18 Sep 2007, Guimarães, Portugal. pp. 203-206. University of Minho. ISBN 978-972-98603-3-1

Jaganatharaja, R.K. and Izadi, N. and Floris, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2007) Adaptive, cricket-inspired artificial hair sensor arrays. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 589-593. Technology Foundation STW. ISBN 978-90-73461-49-9

Koelmans, W.W. and de Bruin, G. (2007) Diamagnetische levitatie. De Vonk, 25 (4). pp. 4-6. ISSN 0925-5427

Kohlheyer, D. and Unnikrishnan, S. and Besselink, G.A.J. and Schlautmann, S. and Schasfoort, R.B.M. (2007) A microfluidic device for array patterning by perpendicular electrokinetic focusing. Microfluidics and Nanofluidics, 4 (6). pp. 557-564. ISSN 1613-4982 *** ISI Impact 3,286 ***

Krijnen, G.J.M. and Floris, J. and Dijkstra, M.A. and Lammerink, T.S.J. and Wiegerink, R.J. (2007) Biomimetic micromechanical adaptive flow-sensor arrays. (Invited) In: Proceedings of "SPIE Europe Microtechnologies for the New Millennium 2007", 2-4 May 2007, Maspalomas, Gran Canaria, Spain. 65920F. Proceedings of SPIE, Bioengineered and Bioinspired Systems 6592. SPIE. ISBN 978-0-8194-6726-3

Krijnen, G.J.M. and Lammerink, T.S.J. and Wiegerink, R.J. and Casas, J. (2007) Cricket inspired flow-sensor arrays. (Invited) In: IEEE Sensors 2007, 28-31 Oct 2007, Atlanta, USA. pp. 539-546. IEEE. ISSN 1930-0395 ISBN 1-4244-1262-5

Lerou, P.P.P.M. and Venhorst, G.C.F. and Veenstra, T.T. and Jansen, H.V. and Burger, J.F. and Holland, H.J. and ter Brake, H.J.M. and Rogalla, H. (2007) All-Micromachined Joule-Thomson Cold Stage. In: Proceedings of the 14th International Cryocooler Conference, 16-20 July 2007, Annapolis, MD, USA. pp. 437-441. International Cryocooler Conference. ISBN not assigned

Lisfi, A. and Williams, C.M. and Nguyen, Long Thang and Lodder, J.C. and Coleman, A. and Corcoran, H. and Johnson, A. and Chang, P. and Kumar, A. and Morgan, W. (2007) Reorientation of magnetic anisotropy in epitaxial cobalt ferrite thin films. Physical review B: Condensed matter and materials physics, 76 (5). 054405(1)-054405(6). ISSN 1098-0121 *** ISI Impact 3,475 ***

Louwerse, M.C. and Jansen, H.V. and Moerel, J.L.P.A. and Sanders, H.M. and Zandbergen, B.T.C. (2007) Modular Micro Propulsion System. In: National MicroNano conference 2007, 15-16 November 2007, Wageningen, Netherlands. 22. MicacNed. ISBN not assigned

Luttge, R. and Berenschot, J.W. and de Boer, M.J. and Altpeter, D.M. and Vrouwe, E.X. and van den Berg, A. and Elwenspoek, M.C. (2007) Integrated lithographic molding for microneedle-based devices. Journal of microelectromechanical systems, 16 (4). pp. 872-884. ISSN 1057-7157 *** ISI Impact 1,922 ***

Luttge, R. and van Wolferen, H.A.G.M. and Abelmann, L. (2007) Laser interferometric nanolithography using a new positive chemical amplified resist. Journal of vacuum science and technology B, 25 (6). pp. 2476-2480. ISSN 1071-1023 *** ISI Impact 1,46 ***

Mitsuzuka, K. and Kikuchi, N. and Shimatsu, T. and Kitakami, O. and Aoi, H. and Muraoka, H. and Lodder, J.C. (2007) Switching field and thermal stability of CoPt/Ru dot arrays with various thicknesses. IEEE Transactions on Magnetics, 43 (6). pp. 2160-2162. ISSN 0018-9464 *** ISI Impact 1,061 ***

Moktadir, Z. and van Honschoten, J.W. and Elwenspoek, M.C. (2007) Long range diffusion noise in platinum microwires with metallic adhesion layers. Applied physics letters, 90 (23). 233506. ISSN 0003-6951 *** ISI Impact 3,554 ***

Murillo Vallejo, R. and Siekman, M.H. and Bolhuis, T. and Abelmann, L. and Lodder, J.C. (2007) Thermal stability and switching field distribution of CoNi/Pt patterned media. Microsystem technologies, 13 (2). pp. 177-180. ISSN 0946-7076 *** ISI Impact 1,025 ***

Nguyen, Quoc Duy (2007) Electrochemistry in anisotropic etching of silicon in alkaline solutions. PhD thesis, University of Twente. ISBN 978-90-365-2551-0

Nguyen, Quoc Duy and Elwenspoek, M.C. (2007) Influence of applied potentials on anisotropic etching of silicon described using kinematic wave etch model. Journal of the Electrochemical Society, 154 (12). D684-D691. ISSN 0013-4651 *** ISI Impact 2,241 ***

Patrascu, M. and Stramigioli, S. and de Boer, M.J. and Krijnen, G.J.M. (2007) Nanometer range closed-loop control of a stepper micro-motor for data storage. In: Proceedings of 2007 ASME International Mechanical Engineering Congress and Exposition, 11-15 Nov 2007, Seattle, Washington, USA. pp. 1-9. ASME. ISBN 0791838129

Svetovoy, V. (2007) Evanescent character of the repulsive thermal casimir force. Physical review A, 76 (6). 062102-1-062102-4. ISSN 1050-2947 *** ISI Impact 2,866 ***

Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Experimental investigation of anisotropy in isotropic silicon etching. Journal of micromechanics and microengineering, 17 (11). pp. 2344-2351. ISSN 0960-1317 *** ISI Impact 1,997 ***

Thomson, T. and Abelmann, L. and Groenland, J.P.J. (2007) Magnetic data storage: past, present and future. In: Magnetic Nanostructures in Modern Technology. NATO Science for Peace and Security Series Subseries: NATO Science for Peace and Security Series B: Physics and Biophysics. Springer Verlag, Berlin, pp. 237-306. ISBN 978-1-4020-6336-7

Tiggelaar, R.M. and Berenschot, J.W. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Dorsman, R. and Kleijn, C.R. (2007) Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in si (110). Journal of vacuum science and technology B, 25 (4). pp. 1207-1216. ISSN 1071-1023 *** ISI Impact 1,46 ***

Tilmans, H.A.C. and Beyne, E. and Jansen, H.V. and De Raedt, W. (2007) System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent US20070951739 (Application).

Tilmans, H.A.C. and Beyne, E. and Jansen, H.V. and de Raedt, W. (2007) Fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent EP1251577 (Assigned).

Tong, D.H. and Jansen, H.V. and Tas, N.R. and Gadgil, V.J. and Carlen, E.T. and van den Berg, A. (2007) Simple technique for direct patterning of nanowires using a nanoslit shadow-mask. In: International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS), 10-14 June 2007, Paris. pp. 191-194. TRANSDUCERS 1. IEEE. ISBN 1-4244-0842-3

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Wafer scale nano-membranes supported on a silicon microsieve. In: Micromechanics Europe 2007, 16-18 September 2007, Portugal. pp. 127-130. University of Minho. ISBN 978-972-98603-3-1

Vanapalli, S. and ter Brake, H.J.M. and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Veenstra, T.T. and Elwenspoek, M.C. (2007) Pressure drop of laminar gas flow in a microchannel containing various pillar matrices. Journal of micromechanics and microengineering, 17 (7). pp. 1381-1386. ISSN 0960-1317 *** ISI Impact 1,997 ***

Vanapalli, S. and Lewis, M. and Gan, Z. and Radebaugh, R. (2007) 120 Hz pulse tube cryocooler for fast cooldown to 50 K. Applied physics letters, 90. pp. 072504-3. ISSN 0003-6951 *** ISI Impact 3,554 ***

Volker, A.W.F. and Blokland, H. and Velthuis, J.F.M. and Lötters, J.C. (2007) Fluid flow meter using thermal tracers. Patent EP20070834679 (Application).

Wiegerink, R.J. and Floris, J. and Jaganatharaja, R.K. and Izadi, N. and Lammerink, T.S.J. and Krijnen, G.J.M. (2007) Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets. In: Sensors, IEEE 2007, 28-31 October, Atlanta, USA. pp. 1073-1076. IEEE Computer Society. ISSN 1930-0395 ISBN 978-1-4244-1262-4

Yang, Chung-Kai and le Fèbre, A.J. and Pandraud, G. and van der Drift, D. and French, P.J. (2007) Field Emission for resonance sensing in MEMS/NEMS. In: 20th International Vacuum Nanoelectronics Conference, 8-12 July 2007, Chicago, USA. pp. 72-73. IEEE Computer Society. ISBN 1-4244-1134-3

Yntema, D.R. and Druyvesteyn, W.F. and Wiegerink, R.J. (2007) Choosing the most appropriate sensor for acoustic measurements. In: Proceedings of the 19th International Congress on Acoustics, 02-07 Sep 2007, Madrid, Spain. pp. 1-6. Loudspeakers and sound reinforcement 38. Spanish Acoustical Society. ISBN 84-87985-12-2

Yntema, D.R. and Wiegerink, R.J. and van Honschoten, J.W. and Elwenspoek, M.C. (2007) Fully integrated three dimensional sound intensity sensor. In: Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on, 21-25 January, Kobe, Japan. pp. 51-54. IEEE Computer Society. ISBN 978-1-4244-0950-1

Zhang, Li and Bain, J.A. and Zhu, Jian-Gang and Abelmann, L. and Onoue, T. (2007) The role of MFM signal in mark size measurement in probe-based magnetic recording on CoNi/Pt multilayers. Physica B, 387 (1-2). pp. 328-332. ISSN 0921-4526 *** ISI Impact 1,056 ***

Zhao, Yiping and Berenschot, J.W. and de Boer, M.J. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2007) Silicon oxide nanoimprint stamp fabrication by edge lithography reinforced with silicon nitride. In: 18th MicroMechanics Europe Workshop, MME 2007, 16-18 September 2007, Guimaraes, Portugal. pp. 253-256. Micro Mechanics Europe. ISBN 9789729860331

2006

Antezza, M. and Pitaevskii, L.P. and Stringari, S. and Svetovoy, V. (2006) Casimir-lifshitz force out of thermal equilibrium and asymptotic nonadditivity. Physical review letters, 97. 223203. ISSN 0031-9007 *** ISI Impact 7,328 ***

Besseling, J.H. and Lötters, J.C. (2006) Mass flowmeter for measuring by the CT method. Patent US7028544 (Assigned).

Brouwer, D.M. and de Jong, B.R. and de Boer, M.J. and Soemers, H.M.J.R. (2006) Rotational precision mems-based clamping mechanism for stable fixation of elastic mechanisms. In: Proceedings of the Annual Meeting of the American Society of Precision Engineering (ASPE), October 15-20, 2006, Monterey CA, USA. pp. 275-278. MEMS, LIGA & Nanotechnology. American Society for Precision Engineering. ISSN not assigned

Brouwer, D.M. and de Jong, B.R. and Soemers, H.M.J.R. and van Dijk, J. (2006) Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application. Journal of micromechanics and microengineering, 16 (6). pp. 7-12. ISSN 0960-1317 *** ISI Impact 1,997 ***

Bruinink, C.M. and Peter, M. and Maury, P.A. and de Boer, M.J. and Kuipers, L. and Huskens, J. and Reinhoudt, D.N. (2006) Capillary force lithography: fabrication of functional polymer templates as versatile tools for nanolithography. Advanced functional materials, 16. pp. 1555-1565. ISSN 1616-301X *** ISI Impact 6,99 ***

Davelaar, B.J. and Abelmann, L. (2006) Comment on Wang, Liu, and Wang (2003). Synthese, 153 (3). pp. 457-458. ISSN 0039-7857 *** ISI Impact 0,729 ***

Deladi, S. and Iannuzzi, D. and Gadgil, V.J. and Schreuders, H. and Elwenspoek, M.C. (2006) Carving fiber-top optomechanical transducers from an optical fiber. Journal of micromechanics and microengineering, 16. pp. 886-889. ISSN 0960-1317 *** ISI Impact 1,997 ***

Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Versatile surface channel concept for microfluidic applications. In: Proceedings of the 17 workshop on Micromachining, Micromechanics and Microsystems, 3-5 Sept 2006, Southampton - England. pp. 37-40. Southampton University Press. ISBN 08543-2848-3

Dijkstra, M.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Nano-flow thermal sensor applying dymamic w-2w sensing method. In: Proceedings of the 17 workshop on Micromachining, Micromechanics and Microsystems, 3-5 Sept 2006, Southampton - England. pp. 1-4. Southampton University Press. ISBN 085432 848 3

Eijkel, J.C.T. and van Delft, K.M. and Mijatovic, D. and Rathgen, H. and Tas, N.R. and Mugele, F.G. and van den Berg, A. (2006) Nanochannels with integrated Fabry-Perot interferometry: a new tool for nanofluidics. In: Proceedings of microTAS 2006 Conference, 5-9 Nov 2006, Tokyo, Japan. pp. 615-617. Micro Total Analysis Systems 2006-1. Japan Academic Association Inc. ISBN 4-9903269-0-3

Esquivel-Sirvent, R. and Villarreal, C. and Mochan, W.L. and Contreras-Reyes, A.M. and Svetovoy, V. (2006) Spatial dispersion in Casimir forces: a brief review. Journal of physics A: mathematical and general, 39. pp. 6323-6331. ISSN 0305-4470

Fazal, I. and Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2006) Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machining. Journal of micromechanics and microengineering, 16. pp. 1207-1214. ISSN 0960-1317 *** ISI Impact 1,997 ***

Fazal, I. and Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2006) Stepper Motor Actuated Microvalve. Journal of Physics: Conference Series, 34. pp. 1032-1037. ISSN 1742-6588

le Fèbre, A.J. and Lodder, J.C. and Abelmann, L. (2006) Tip-sample distance control for magnetic probe recording. In: Proceedings of the 2006 Joint European Workshop IMST 2006 and E*PCOS 2006, 29 May - 31 May 2006, Grenoble, France. pp. 253-254. IMST/EPCOS, Minatec Center. ISBN not assigned

Fernández, L.J. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2006) Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications. Journal of micromechanics and microengineering, 16. pp. 862-868. ISSN 0960-1317 *** ISI Impact 1,997 ***

Fernández, L.J. and Wiegerink, R.J. and Flokstra, Jaap and Sesé, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) A capacitive rf power sensor based on mems technology. Journal of micromechanics and microengineering, 16. S1099-S1107. ISSN 0960-1317 *** ISI Impact 1,997 ***

Girones, M. and Akbarsyah, I.J. and Nijdam, W. and van Rijn, C.J.M. and Jansen, H.V. and Lammertink, R.G.H. and Wessling, M. (2006) Polymeric microsieves produced by phase separation micromolding. Journal of membrane science, 283 (1-2). pp. 411-424. ISSN 0376-7388 *** ISI Impact 3,203 ***

Haneveld, J. (2006) Nanochannel Fabrication and characterization using bond micromachining. PhD thesis, University of Twente. ISBN 90-365-2312-5

Haneveld, J. and Berenschot, J.W. and Maury, P.A. and Jansen, H.V. (2006) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. Journal of micromechanics and microengineering, 16. S24-S28. ISSN 0960-1317 *** ISI Impact 1,997 ***

Haneveld, J. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2006) Fabrication and capillary filling of sub-10nm nanochannels. In: Proceedings of the NanoNed / MicroNed Symposium II Eindhoven 2006, 16-17 Nov, Eindhoven. 192. Technische Universiteit Eindhoven. ISBN not assigned

Haneveld, J. and Lammerink, T.S.J. and Dijkstra, M.A. and Wiegerink, R.J. (2006) Micro coriolis flow sensor. In: Proceedings of the NanoNed / MicroNed Symposium II, 16-17 Nov 2006, Eindhoven. 174. University of Eindhoven. ISBN not assigned

van Honschoten, J.W. and Yntema, D.R. and Dijkstra, M.A. and Svetovoy, V. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Analysis of packaging effects on the performance of the microflown. In: Proceedings of DTIP of MEMS & MOEMS 2206, 26-28 April 2006, Stresa Italy. pp. 1-6. TIMA Editions/DTIP. ISBN 2-916187-03-0

van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Directional sensitivity of a three dimensional particle velocity sensor. In: Proceedings of the 17 workshop on Micromachining, Micromechanics and Microsystems, 3-5 Sept 2006, Southampton. pp. 201-204. Southampton University Press. ISBN 085432-848-3

Iannuzzi, D. and Deladi, S. and Berenschot, J.W. and De Man, S. and Heeck, K. and Elwenspoek, M.C. (2006) Fiber-top atomic force microscope. Review of scientific instruments, 77. 106105-1-106105-3. ISSN 0034-6748 *** ISI Impact 1,521 ***

Iannuzzi, D. and Deladi, S. and Elwenspoek, M.C. (2006) Fiber-top cantilevers: a new sensor on the tip of a fiber. Optics and Photonics News, 17 (12). pp. 39-39. ISSN 1047-6938

Iannuzzi, D. and Deladi, S. and Gadgil, V.J. and Sanders, R.G.P. and Schreuders, H. and Elwenspoek, M.C. (2006) Monolithic fiber-top sensor for critical environments and standard applications. Applied physics letters, 88 (053501). pp. 1-3. ISSN 0003-6951 *** ISI Impact 3,554 ***

de Jong, B.R. (2006) A six degrees of freedom mems manipulator. PhD thesis, University of Twente. ISBN 90-365-2413-X

de Jong, B.R. and Brouwer, D.M. and Jansen, H.V. and de Boer, M.J. and Lammertink, T.G. and Stramigioli, S. and Krijnen, G.J.M. (2006) A planar 3 dof sample manipulator for nano-scale characterization. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, 2006, May 2006, Istanbul. pp. 750-753. IEEE Computer Society. ISSN 0018-9219 ISBN 0-7803-9475-5

Krijnen, G.J.M. and Dijkstra, M.A. and van Baar, J.J.J. and Lammerink, T.S.J. and Wiegerink, R.J. (2006) Biomimetic, distributed micromechanical flow-sensing. (Invited) In: Proceedings of 20th eurosensors conference, 17-20 Sept. 2006, Göteborg - Sweden. pp. 1-2. Chalmers University of Technology. ISBN 9163192810

Krijnen, G.J.M. and Dijkstra, M.A. and van Baar, J.J.J. and Shankar, S.S. and Kuipers, W.J. and de Boer, J.H. and Altpeter, D.M. and Lammerink, T.S.J. and Wiegerink, R.J. (2006) Mems based hair flow-sensors as model systems for acoustic perception studies. Nanotechnology, 17. S84-S89. ISSN 0957-4484 *** ISI Impact 3,137 ***

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2006) A micromachined capacitive incremental position sensor: part 2. experimental assessment. Journal of micromechanics and microengineering, 16 (6). S125-S134. ISSN 0960-1317 *** ISI Impact 1,997 ***

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2006) A micromachined capacitive incremental position sensor: part 1. Analysis and simulations. Journal of micromechanics and microengineering, 16. S116-S124. ISSN 0960-1317 *** ISI Impact 1,997 ***

Kuipers, W.J. and van Baar, J.J.J. and Dijkstra, M.A. and Wiegerink, R.J. and Lammerink, T.S.J. and de Boer, J.H. and Krijnen, G.J.M. (2006) Drag force actuated bistable microswitches for flow sensing. In: Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on, 22-26 Jan. 2006, Istanbul - Turkey. pp. 658-661. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-9475-5

Lötters, J.C. (2006) Mass flowmeter. Patent US6988400 (Assigned).

Lerou, P.P.P.M. and Vanapalli, S. and Jansen, H.V. and Burger, J.F. and Veenstra, T.T. and Venhorst, G.C.F. and Holland, H.J. and Elwenspoek, M.C. and ter Brake, H.J.M. and Rogalla, H. (2006) Microcooling Developments at the University of Twente. In: Advances in cryogenic engineering: transactions of the cryogenic engineering. AIP Conference Proceedings 823. American Institute of Physics, Maryland, pp. 1-8. ISSN 0094-243X ISBN 9780735403178

Lodder, J.C. (2006) Patterned Nanomagnetic Films. In: Advanced Magnetic Nanostructures. Springer Verlag, New York, pp. 261-288. ISBN 978-0-387-23309-3

Louwerse, M.C. and Jansen, H.V. and Moerel, J.L.P.A. and Sanders, H.M. and Zandbergen, B.T.C. (2006) Design of a cold gas micro thruster. In: Proceeding of NanoNed/MicroNed Symposium II, 16-17 Nov 2006, Eindhoven. 180. Eindhoven University Press. ISBN not assigned

Louwerse, M.C. and Sanders, H.M. and Jansen, H.V. (2006) Microsysteemtechnologie verpakt in een buisje. Ruimtevaart. pp. 11-15. ISSN 1382-2446

Luttge, R. (2006) Exposure: an art from the past carrying the economical success of the 21st century. In: Belichting. E.T.S.V. Scintilla Jaarboek 2005-2006. ETSV Scintilla Universiteit Twente, Enschede, pp. 109-116. ISBN not assigned

Mehendale, A. and Lötters, J.C. and Zwikker, J.M. (2006) Mass flowmeter of the coriolis type. Patent US20060412175 (Application).

Mehendale, A. and Lötters, J.C. and Zwikker, J.M. (2006) Mass flowmeter of the coriolis type. Patent US7353718 (Assigned).

Mitsuzuka, K. and Kikuchi, N. and Shimatsu, T. and Kitakami, O. and Aoi, H. and Muraoka, H. and Lodder, J.C. (2006) Pt content dependence of magnetic properties of CoPt/Ru patterned films. IEEE Transactions on Magnetics, 42 (12). pp. 3883-3885. ISSN 0018-9464 *** ISI Impact 1,061 ***

Nguyen, Quoc Duy and Elwenspoek, M.C. (2006) Characterisation of anisotropic etching in KOH using network etch rate function model: influence of an applied potential in terms of microscopic properties. Journal of physics: conference series, 34 (1). pp. 1038-1043. ISSN 1742-6588

Pirozhenko, I. and Lambrecht, A. and Svetovoy, V. (2006) Sample dependence of the casimir force. New Journal of Physics, 8. pp. 238-253. ISSN 1367-2630 *** ISI Impact 3,312 ***

Rottenberg, X. and Jansen, H.V. and Tilmans, H.A.C. and de Raedt, W. (2006) Switchable capacitor and method of making the same. Patent US7002439 (Assigned).

Sarajlic, E. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) Fabrication and characterization of an electrostatic contraction beams micromotor. In: 19th IEEE International Conference on MEMS 2006, 22-26 Jan. 2006, Istanbul - Turkey. pp. 814-817. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-9475-5

Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators. Sensors and actuators A: Physical, 130-131. pp. 340-345. ISSN 0924-4247 *** ISI Impact 1,674 ***

Steinmann, T. and Casas, J. and Krijnen, G.J.M. and Dangles, O. (2006) Air-flow sensitive hairs: boundary layers in oscillatory flows around arthropod appendages. The Journal of Experimental Biology, 209. pp. 4398-4408. ISSN 0022-0949 *** ISI Impact 2,722 ***

Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2006) Precise test of the diffusion-controlled wet isotropic etching of silicon via circular mask openings. Journal of the Electrochemical Society, 153 (9). C641-C647. ISSN 0013-4651 *** ISI Impact 2,241 ***

Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2006) Experimental verification of the diffusion theory for wet isotropic etching of si via circular mask openings. In: Fifth International Workshop on Physical Chemistry of Wet Etching of Semiconductors, 19-21 June 2006, Saarbrücken, Germany. University of Saarbrücken. ISBN not assigned

Svetovoy, V. and Esquivel, R. (2006) The casimir free energy in high- and low-temperature limits. Journal of physics A: mathematical and general, 39. pp. 6777-6784. ISSN 0305-4470

Tas, N.R. and Haneveld, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) Surface Tension Effects in Nanochannels: Capillary Filling and Negative Pressure. (Invited) In: Meeting abstracts 210th ECS Meeting, 29 Oct - 3 Nov 2006, Cancun, Mexico. pp. 1-1. Electrochemical Society. ISSN 1091-8213

Timmer, B.H. and van Delft, K.M. and Koelmans, W.W. and Olthuis, W. and van den Berg, A. (2006) Selective low concentration ammonia sensing in a microfluidic lab-on-a-chip. IEEE sensors journal, 6 (3). pp. 829-835. ISSN 1530-437X *** ISI Impact 1,581 ***

Vargas, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2006) Seedless electroplating on patterned silicon. Journal of micromechanics and microengineering, 16. pp. 1-6. ISSN 0960-1317 *** ISI Impact 1,997 ***

Winkel, J.C. and Yntema, D.R. and Druyvesteyn, W.F. and de Bree, H.E. (2006) A particle velocity based method for separating all multi incoherent sound sources. In: Proceedings of the 31st FISITA World Automotive Congress, 22-27 Oct 2006, Yokohama, Japan. pp. 1-9. Society of Automotive Engineers of Japan (JSAE) and FISITA. ISBN 4-915219-83-6

Yntema, D.R. and de Bree, H.E. and van Heck, J.G.A.M. (2006) An intuitive handheld acoustic noise source finder. In: proceedings from the FISITA 2006 World Automotive Congress, 22-27 Oct. 2006, Yokohama, Japan. FISITA 2006 World Automotive Congress. FISITA JSAE. ISBN 4-915219-83-6

Yntema, D.R. and Druyvesteyn, W.F. and Elwenspoek, M.C. (2006) A four particle velocity sensor device. Journal of the Acoustical Society of America, 119. pp. 943-951. ISSN 0001-4966 *** ISI Impact 1,523 ***

Yntema, D.R. and van Honschoten, J.W. and de Bree, H.E. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) A three dimensional microflown. In: Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on, 22-26 Jan. 2006, Instanbul - Turkey. pp. 654-657. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-9475-5

Zhang, Li and Bain, J.A. and Zhu, Jian-Gang and Abelmann, L. and Onoue, T. (2006) The effect of external magnetic field on mark size in heat-assisted probe recording on CoNi/Pt multilayers. Journal of applied physics, 99 (023902). pp. 1-5. ISSN 0021-8979 *** ISI Impact 2,072 ***

Zhang, Li and Bain, J.A. and Zhu, Jian-Gang and Abelmann, L. and Onoue, T. (2006) A model of heat transfer in STM-based magnetic recording on CoNi/Pt multilayers. Physica B, 381. pp. 204-208. ISSN 0921-4526 *** ISI Impact 1,056 ***

Zhang, Li and Bain, J.A. and Zhu, Jian-Gang and Abelmann, L. and Onoue, T. (2006) Heat-assisted magnetic probe recording on a granular CoNi/Pt multilayered film. Journal of physics D: applied physics, 39. pp. 2485-2487. ISSN 0022-3727 *** ISI Impact 2,083 ***

Zhang, Li and Bain, J.A. and Zhu, Jian-Gang and Abelmann, L. and Onoue, T. (2006) Characterization of heat-assisted magnetic probe recording on CoNi/Pt multilayers. Journal of magnetism and magnetic materials, 305 (1). pp. 16-23. ISSN 0304-8853 *** ISI Impact 1,204 ***

Zhang, Li and Bain, J.A. and Zhu, Jian-Gang and Abelmann, L. and Onoue, T. (2006) Dynamic domain motion of thermal-magnetically formed marks on CoNi/Pt multilayers. Journal of applied physics, 100 (053901). pp. 1-5. ISSN 0021-8979 *** ISI Impact 2,072 ***

2005

van Baar, J.J.J. and Dijkstra, M.A. and Wiegerink, R.J. and Lammerink, T.S.J. and de Boer, J.H. and Krijnen, G.J.M. (2005) Arrays of cricket-inspired sensory hairs with capacitive motion detection. In: Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, 30-01 / 03-02-2005, Miami. pp. 646-649. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5

Benito-Lopez, F. and Verboom, W. and Kakuta, M. and Gardeniers, J.G.E. and Egberink, R.J.M. and Oosterbroek, R.E. and van den Berg, A. and Reinhoudt, D.N. (2005) Optical fiber-based-on-line UV/Vis spectroscopic monitoring of chemical reaction kinetics under high pressure in a capillary microreactor. Chemical communications, 22. pp. 2857-2859. ISSN 1359-7345 *** ISI Impact 5,504 ***

Blom, M.T. and Chmela, E. and van der Heyden, F.H.J. and Oosterbroek, R.E. and Tijssen, R.P. and Elwenspoek, M.C. and van den Berg, A. (2005) A differential viscosity detector for use in miniaturized chemical separation systems. Journal of microelectromechanical systems, 14 (1). pp. 70-80. ISSN 1057-7157 *** ISI Impact 1,922 ***

Blom, M.T. and van 't Oever, R. and Claes, P. and Verboom, W. and O'Donohue, S. and van den Berg, A. and Reinhoudt, D.N. (2005) A micro differential viscosity detector for polymer separation system. In: MicroTAS 2005 Conference -9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 9-13 October 2005, Boston, MA, USA. pp. 988-990. Micro total analysis systems 2005. Transducer Research Foundation. ISBN 9780444511003

Brivio, M. and Liesener, A. and Oosterbroek, R.E. and Verboom, W. and Karst, U. and van den Berg, A. and Reinhoudt, D.N. (2005) Chip-based on-line nanospray MS method enabling study of the kinetics of isocyanate derivatization reactions. Analytical chemistry, 77 (21). pp. 6852-6856. ISSN 0003-2700 *** ISI Impact 5,214 ***

Brivio, M. and Liesner, A. and Oosterbroek, R.E. and Verboom, W. and Karst, U. and van den Berg, A. and Reinhoudt, D.N. (2005) Kinetic study of an on-chip isocyanate derivatization reaction by on-line nano-esi ms. In: MicroTAS 2005 Conference - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 9-13 Oct 2005, Boston, MA, USA. pp. 927-929. Transducer Research Foundation. ISBN 0-9743611-1-9

Brivio, M. and Oosterbroek, R.E. and Verboom, W. and van den Berg, A. and Reinhoudt, D.N. (2005) Simple chip-based interfaces for on-line monitoring of supramolecular interactions by nano-ESI MS. Lab on a chip, 5. pp. 1111-1122. ISSN 1473-0197 *** ISI Impact 6,342 ***

Brivio, M. and Tas, N.R. and Goedbloed, M.H. and Gardeniers, J.G.E. and Verboom, W. and van den Berg, A. and Reinhoudt, D.N. (2005) A maldi-chip integrated system with a monitoring window. Lab on a chip, 5 (4). pp. 378-381. ISSN 1473-0197 *** ISI Impact 6,342 ***

Brouwer, D.M. and de Jong, B.R. and Soemers, H.M.J.R. and van Dijk, J. (2005) Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force un-powerd for TEM application. In: Proceedings of the 16th MME MicroMechanics Europe Workshop, 4-6 September, Göteborg, Sweden. pp. 1-4. Chalmers University. ISBN 91-631-7553-3

Dao, T.N.N. and Kikuchi, N. and Abelmann, L. and Lodder, J.C. (2005) Micromagnetic simulation of Non Uniform Nanodots with Perpendicular Anisotropy. In: International Magnetics Conference - INTERMAG Asia 2005, 4-8 April 2005, Nagoya, Japan. pp. 1847-1848. IEEE Magnetics Society. ISBN 0-7803-9009-1

Deladi, S. (2005) MEMS generated and afm-based surface modification. PhD thesis, University of Twente. ISBN 90-365-2138-6

Deladi, S. and Berenschot, J.W. and de Boer, M.J. and Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2005) In situ characterization technique for nanotribological investigations. Review of scientific instruments, 76. pp. 016102-016104. ISSN 0034-6748 *** ISI Impact 1,521 ***

Deladi, S. and Berenschot, J.W. and Tas, N.R. and de Boer, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of micromachined fountain pen with in situ characterization possibility of nanoscale surface modification. Journal of micromechanics and microengineering, 15. pp. 528-534. ISSN 0960-1317 *** ISI Impact 1,997 ***

Deladi, S. and Sarajlic, E. and Kuijpers, A.A. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Applications of the microelectromechanical systems in nanoscience. In: Proceedings of the II Eccomas Conference on Smart Structures and Materials, 18-21 July 2005, Lissabon, Portugal. pp. 1-15. Instituto de Engenharia Mecânica. ISBN 972-8688-42-3

Deladi, S. and Tas, N.R. and Berenschot, J.W. and de Boer, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005, 30-01 / 03-02-2005, Miami. pp. 564-567. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5

Deladi, S. and Tas, N.R. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Multifunctional tool for expanding afm-based applications. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 5-9 June 2005, Seoul. pp. 159-162. Digest of Technical Papers. TRANSDUCERS '05 1. IEEE Computer Society. ISBN 0-7803-8994-8

Dijkstra, M.A. and van Baar, J.J.J. and Wiegerink, R.J. and Lammerink, T.S.J. and de Boer, J.H. and Krijnen, G.J.M. (2005) Artificial sensory hairs based on the flow sensitive receptor hairs of crickets. Journal of micromechanics and microengineering, 15. S132-S138. ISSN 0960-1317 *** ISI Impact 1,997 ***

Esquivel, R. and Svetovoy, V. (2005) Nonlocal thin films in calculations of the casimir force. Physical review B: Condensed matter and materials physics, 72 (4). 45443. ISSN 1098-0121 *** ISI Impact 3,475 ***

Fazal, I. and Berenschot, J.W. and de Boer, J.H. and Jansen, H.V. and Elwenspoek, M.C. (2005) Bond strength tests between silicon wafers and duran tubes (fusion bonded fluidic interconnects). In: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., 5-9 June 2005, Seoul. pp. 936-939. Solid-State Sensors, Actuators and Microsystems 1. IEEE Computer Society. ISBN 0-7803-8994-8

Fernández, L.J. (2005) A capacitive rf power sensor based on mems technology. PhD thesis, University of Twente. ISBN 90-365-2294-3

Fernández, L.J. and Arz, U. and Schubert, D. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, Jaap (2005) A cmos compatible process for improved rf performance on highly doped substrates. In: Proceedings. 9th IEEE Workshop on Signal Propagation on Interconnects, 2005., 10-13 May 2005, Garmisch Partenkirchen. pp. 167-170. IEEE Computer Society. ISBN 0-7803-9054-7

Fernández, L.J. and Berenschot, J.W. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2005) Fabrication of thick silicon nitride blocks for integration of rf devices. Electronics letters, 41 (3). pp. 1-2. ISSN 0013-5194 *** ISI Impact 0,97 ***

Fernández, L.J. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2005) Radio frequency power sensor based on mems technology with ultra low loss. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005., 30-01 / 03-02-2005, Miami. pp. 191-194. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5

Fox, M.B. and Esveld, E. and Luttge, R. and Boom, R. (2005) A new pulsed electric field microreactor: comparison between the laboratory and microtechnology scale. Lab on a chip, 5 (9). pp. 943-948. ISSN 1473-0197 *** ISI Impact 6,342 ***

Haneveld, J. and Berenschot, J.W. and Pascale, M. and Jansen, H.V. (2005) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 72-75. Chalmers University . ISBN 9163175533

Haq, E. and Banerjee, T. and Siekman, M.H. and Lodder, J.C. and Jansen, R. (2005) Spin-filtering of non-equilibrium holes in semiconductor-ferromagnet hybrid structure. In: IEEE International Magnetics Conference - INTERMAG Asia, 4-8 April 2005, Nagoya, Japan. pp. 1201-1202. Physics of Spin Injection Sessions FA (FA-06). IEEE Magnetics Society. ISBN 0-7803-9009-1

Hoevers, H.F.C. and Ridder, M.L. and Germeau, A. and Bruijn, M.P. (2005) Radiative ballistic phonon transport in silicon-nitride membranes at low temperatures. Applied physics letters, 86. 251903. ISSN 0003-6951 *** ISI Impact 3,554 ***

van Honschoten, J.W. and Svetovoy, V. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Optimization of a thermal flow sensor for acoustic particle velocity measurements. Journal of micromechanics and microengineering, 14 (3). pp. 436-443. ISSN 0960-1317 *** ISI Impact 1,997 ***

de Jong, B.R. and Brouwer, D.M. and Jansen, H.V. and de Boer, M.J. and Krijnen, G.J.M. (2005) Nanometer resolution TEM sample manipulator for rotational and translational positioning. In: Proceedings of EuroSensors XIX 2005, 11-14 September 2005, Barcelona, Spain. pp. 1-4. Elsevier. ISBN 84-475-2984-3

de Jong, B.R. and Jansen, H.V. and de Boer, M.J. and Krijnen, G.J.M. (2005) Tailored Etch-Profiles of high aspect ratio trenches to prevent voids after refill with LPCVD sirn. In: 16th MicroMechanics Europe Workshop, 4-6 September 2005, Gotheborg, Sweden. pp. 1-4. Chalmers University of Technology. ISBN 9163175533

Kohlheyer, D. and Unnikrishnan, S. and Schlautmann, S. and Bessellink, G.A.J. and Tudos, A.J. and Schasfoort, R.B.M. (2005) Laminar Flow Microarray Patterning by Perpendicular Electrokinetic Focusing. In: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2005, 9-13 October 2005, Boston, MA, USA. pp. 1337-1339. The Transducer Research Foundation. ISBN 9780974361116

Krijnen, G.J.M. and Dijkstra, M.A. and van Baar, J.J.J. and de Boer, J.H. and Lammerink, T.S.J. and Wiegerink, R.J. (2005) MEMS based hair flow-sensors as model systems for acoustic perception studies. In: International Conference on Bio-Nano-Information Fusion, 20-22 July 2005, Marina del Rey, CA, USA. pp. 1-4. IOP Science. ISBN not assigned

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2005) Analysis Of Micromachined Capacitive Incremental Position Sensor. In: 16th MicroMechanics European Workshop, 4-6 Sep 2005, Gotheborg, Sweden. pp. 1-4. Elsevier. ISBN 978-0-4445-1037-2

Lötters, J.C. (2005) Mass flowmeter. Patent US6945106 (Assigned).

Lemay, S.G. and van den Broek, D.M. and Storm, A.J. and Krapf, D. and Smeets, R.M.M. and Heering, H.A. and Dekker, C. (2005) Lithographically fabricated nanopore-based electrodes for electrochemistry. Analytical chemistry, 77 (6). pp. 1911-1915. ISSN 0003-2700 *** ISI Impact 5,214 ***

Nguyen, Quoc Duy and Elwenspoek, M.C. (2005) Influence of an Applied Potential on the Anisotropic Etch rates of Silicon in KOH. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 45-48. Chalmers University of Technology. ISBN 978-0-4445-1037-2

Park, B.G. and Banerjee, T. and Min, B.C. and Sanderink, J.G.M. and Lodder, J.C. and Jansen, R. (2005) Probing spin-polarized tunneling at high bias and temperature with a magnetic tunnel transistor. In: International Magnetics Conference - INTERMAG Asia, 4-8 April 2005, Nagoya, Japan. pp. 1199-1200. IEEE Magnetics Society. ISBN 0-7803-9009-1

Sarajlic, E. (2005) Electrostatic microactuators fabricated by vertical trench isolation technology. PhD thesis, University of Twente. ISBN 90-365-2212-9

Sarajlic, E. and Berenschot, J.W. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Bidirectional electrostatic linear shuffle motor with two degrees of freedom. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005., 30-01 / 03-02-2005, Miami. pp. 391-394. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5

Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of 3d nanowire frames by conventional micromachining technology. In: Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems 2005, 5-9 June 2005, Seoul. pp. 27-30. IEEE Computer Society. ISBN 0-7803-8994-8

Sarajlic, E. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology. In: Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, 5-9 June 2005, Seoul. pp. 53-56. IEEE Computer Society. ISBN 0-7803-8994-8

Sarajlic, E. and de Boer, M.J. and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Bulk micromachining technology for fabrication of two-level mems in standard silicon substrate. In: Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems 2005, 5-9 June 2005, Seoul. pp. 1404-1405. IEEE Computer Society. ISBN 0-7803-8994-8

Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Surface micromachined fabrication of piezoelectric ain unimorph suspension devices for rf resonator applications. In: Proceedings of the 13th International Conferences on Solid-State Sensors, Actuators and Microsystems 2005, 5-9 June 2005, Seoul. pp. 1362-1365. IEEE Computer Society. ISBN 0-7803-8994-8

Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators. In: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS (DTIP), 1-3 June 2005, Montreux, Switzerland. DTIP of MEMS & MOEMS. ISBN 2-84813-057-1

Saravanan, S. and Dijkstra, M. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) AIN thin film unimorph piezoelectric actuators on polysilicon microbridges. In: 16th MME MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 320-323. Chalmers University. ISBN 91-631-7553-3

Saravanan, S. and Keim, E.G. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Growth and surface characterization of piezoelectric AlN thin films on silicon (100) and (110) substrates. In: Microscopy of Semiconducting Materials. Springer Proceedings in Physics 107. Springer, pp. 75-78. ISSN 0930-8989 ISBN 978-3-540-31914-6

Schmuhl, R. and Nijdam, A.J. and Sekulic, J. and Chowdhury, R. and van Rijn, C.J.M. and van den Berg, A. and ten Elshof, J.E. and Blank, D.H.A. (2005) Si-supported mesoporous and microporous oxide interconnects as electrophoretic gates for application in microfluidic devices. Analytical chemistry, 77 (1). pp. 178-184. ISSN 0003-2700 *** ISI Impact 5,214 ***

Svetovoy, V. and Esquivel, R. (2005) Nonlocal impedances and the casimir entropy at low temperatures. Physical review E Statistical, nonlinear, and soft matter physics, 72 (3). 36113. ISSN 1539-3755 *** ISI Impact 2,4 ***

Tiggelaar, R.M. and Berenschot, J.W. and de Boer, J.H. and Sanders, R.G.P. and Gardeniers, J.G.E. and Oosterbroek, R.E. and van den Berg, A. and Elwenspoek, M.C. (2005) Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes. Lab on a chip, 5. pp. 326-336. ISSN 1473-0197 *** ISI Impact 6,342 ***

Tiggelaar, R.M. and Berenschot, J.W. and van Male, P. and Oosterbroek, R.E. and Gardeniers, J.G.E. and de Croon, M.H.J.M. and Schouten, J.C. and van den Berg, A. and Elwenspoek, M.C. (2005) Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane. Sensors and actuators A: Physical, 119 (1). pp. 196-205. ISSN 0924-4247 *** ISI Impact 1,674 ***

Tong, D.H. and van den Berg, A. and Gardeniers, J.G.E. and Jansen, H.V. and Gielens, F.C. and Elwenspoek, M.C. (2005) Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane. Thin solid films, 479 (1-2). pp. 89-94. ISSN 0040-6090 *** ISI Impact 1,727 ***

Tong, D.H. and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, H.V. and Berenschot, J.W. and de Boer, M.J. and de Boer, J.H. and van Rijn, C.J.M. and Elwenspoek, M.C. (2005) Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation. Journal of microelectromechanical systems, 14 (1). pp. 113-123. ISSN 1057-7157 *** ISI Impact 1,922 ***

Valero, A. and Luttge, R. and van Nieuwkasteele, J.W. and Andersson-Svahn, S.M.H. and van den Berg, A. (2005) Flow-through microfluidic chip for cell transfection by electropermeabilization. In: MicroTAS 2005 Conference - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 9-13 Oct 2005, Boston, MA, USA. pp. 1395-1397. Transducer Research Foundation. ISBN 9780974361116

Valero, A. and Merino, F. and Wolbers, F. and Luttge, R. and Vermes, I. and Andersson-Svahn, S.M.H. and van den Berg, A. (2005) Apoptotic cell death dynamics of HL60 cells studied using a microfluidic cell trap device. Lab on a chip, 5 (1). pp. 49-55. ISSN 1473-0197 *** ISI Impact 6,342 ***

Vanapalli, S. and Burger, J.F. and Veenstra, T.T. and Holland, H.J. and Venhorst, G.C.F. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2005) Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 354-357. Chalmers University of Technology. ISBN 978-0-4445-1037-2

Vargas, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2005) Direct Electroplating on Highly Doped Patterned Silicon Wafers. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 1-4. Elsevier. ISBN 978-0-4445-1037-2

Vrouwe, E.X. (2005) Quantitative microchip capillary electrophoresis for inorganic ion analysis at the point of care. PhD thesis, University of Twente. ISBN 90-9019293-X

Vrouwe, E.X. and Luttge, R. and Olthuis, W. and van den Berg, A. (2005) Microchip analysis of lithium in blood using moving boundary electrophoresis and zone electrophoresis. Electrophoresis, 26 (15). pp. 3032-3042. ISSN 0173-0835 *** ISI Impact 3,077 ***

Wensink, H. and Benito-Lopez, F. and Hermes, D.C. and Verboom, W. and Gardeniers, J.G.E. and Reinhoudt, D.N. and van den Berg, A. (2005) Measuring reaction kinetics in a lab-on-a-Chip by microcoil NMR. Lab on a chip, 5 (3). pp. 280-284. ISSN 1473-0197 *** ISI Impact 6,342 ***

Wiegerink, R.J. and van Baar, J.J.J. and de Boer, J.H. and Ridder, M.L. and Bruijn, M.P. and Germeau, A. and Hoevers, H.F.C. (2005) Cryogenic imaging x-ray spectrometer. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005., 30-01 / 03-02-2005, Miami. pp. 56-59. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5

Wolbers, F. and ter Braak, P.M. and Le Gac, S. and Luttge, R. and Andersson-Svahn, S.M.H. and Vermes, I. and van den Berg, A. (2005) Evaluation of the viability of HL60 cells in contact with commonly used microchip materials. In: MicroTAS 2005 Conference - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 9-13 Oct 2005, Boston, MA, USA. pp. 1288-1290. Transducer Research Foundation. ISSN 1556-5890 ISBN 9780444511003

Yeshurun, Y. and Hefetz, M. and Berenschot, J.W. and de Boer, M.J. and Altpeter, D.M. and Boom, G. (2005) Polymer Microneedles. Patent US6924087 (Assigned).

Yntema, D.R. and de Bree, H.E. (2005) A Microflown based sound pressure microphone suitable for harsh environments. In: National Conference on Noise Control Engineering, NOISE-CON 2005, 17-19 Oct 2005, Minneapolis, Minnesota, USA. pp. 1-8. INCE-USA. ISBN not assigned

2004

Besseling, J.H. and Lötters, J.C. (2004) Mass flowmeter for measuring by the CT method. Patent US20040834104 (Application).

Bruinink, C.M. and Peter, M. and de Boer, M.J. and Kuipers, L. and Huskens, J. and Reinhoudt, D.N. (2004) Stamps for submicrometer soft lithography fabricated by capillary force lithography. Advanced materials, 16 (13). pp. 1086-1090. ISSN 0935-9648 *** ISI Impact 8,379 ***

Deladi, S. and Berenschot, J.W. and de Boer, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) An AFM-based device for in-situ characterization of nano-wear. In: . 17th IEEE International Conference onMicro Electro Mechanical Systems, 2004. (MEMS), 25-29 January 2004, Maastricht. pp. 181-184. IEEE Computer Society. ISBN 0-7803-8265-x

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Distinction of the irreversible and reversible actuation regions of b-doped poly-si based electrothermal actuators. Journal of micromechanics and microengineering, 14. S31-S36. ISSN 0960-1317 *** ISI Impact 1,997 ***

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Parallel-beams/lever electrothermal out-of-plane actuator. Microsystem technologies, 10 (5). pp. 393-399. ISSN 0946-7076 *** ISI Impact 1,025 ***

Deladi, S. and Svetovoy, V. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Flash release - an alternative for releasing complex mems devices. Journal of micromechanics and microengineering, 14 (12). pp. 1659-1664. ISSN 0960-1317 *** ISI Impact 1,997 ***

Deladi, S. and Tas, N.R. and Berenschot, J.W. and Krijnen, G.J.M. and de Boer, M.J. and de Boer, J.H. and Peter, M. and Elwenspoek, M.C. (2004) Micromachined fountain pen for atomic force microscope-based nanopatterning. Applied physics letters, 85 (22). pp. 5361-5363. ISSN 0003-6951 *** ISI Impact 3,554 ***

Esquivel, R. and Svetovoy, V. (2004) Correction to the casimir force due to the anomalous skin effect. Physical review A, 69 (6). 62102. ISSN 1050-2947 *** ISI Impact 2,866 ***

Fernández, L.J. and Sesé, J. and Jansen, H.V. and Wiegerink, R.J. and Flokstra, Jaap (2004) Optimization of a capacitive MEMS power sensor for radio frequency applications. In: 15th MicroMechanics Europe Workshop, MME 2004, 5-7 Sept 2004, Leuven. pp. 257-260. MicroMechanics Europe. ISBN 9056825356

Fernández, L.J. and Visser, E. and Sesé, J. and Wiegerink, R.J. and Jansen, H.V. and Flokstra, Jaap and Elwenspoek, M.C. (2004) Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing. In: Conference on Precision Electromagnetic Measurements 2004, 27 Jun - 2 Jul 2004, London. pp. 117-118. IEEE Electromagnetic Compatibility Society. ISBN 0-7803-8494-6

Hoang, Thi Hanh and Tong, D.H. and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2004) Fabrication and characterization of dual sputtered pd-Cu alloy films for hydrogen separation membranes. Materials Letters, 58 (3-4). pp. 525-528. ISSN 0167-577X *** ISI Impact 1,94 ***

van Honschoten, J.W. (2004) Modelling and optimisation of the Microflown. PhD thesis, University of Twente. ISBN 90-365-2030-4

van Honschoten, J.W. and Druyvesteyn, W.F. and Kuipers, H. and Raangs, R. and Krijnen, G.J.M. (2004) Noise reduction in acoustic measurements with a particle velocity sensor by means of a cross-correlation technique. Acta acustica united with Acustica, 90 (2). pp. 349-355. ISSN 1610-1928 *** ISI Impact 0,637 ***

van Honschoten, J.W. and Krijnen, G.J.M. and Svetovoy, V. and de Bree, H.E. and Elwenspoek, M.C. (2004) Analytic model of a two-wire thermal sensor for flow and sound measurements. Journal of micromechanics and microengineering, 14 (11). pp. 1468-1477. ISSN 0960-1317 *** ISI Impact 1,997 ***

van Honschoten, J.W. and Svetovoy, V. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Determination of the sensitivity behavior of an acoustic, thermal flow sensor by electronic characterization. Sensors and actuators A: Physical, 112 (1). pp. 1-9. ISSN 0924-4247 *** ISI Impact 1,674 ***

Kuijpers, A.A. (2004) Micromachined capacitive long-range displacement sensor for nanopositioning of microatuator systems. PhD thesis, University of Twente. ISBN 90-365-2119-X

Kuijpers, A.A. and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2004) Capacitive long-range position sensor for microactuators. In: Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS), 25-29 January, Maastricht. pp. 544-547. Micro Electro Mechanical Systems. IEEE Computer Society. ISBN 0-7803-8265-x

Lötters, J.C. (2004) Mass flowmeter. Patent US20040841461 (Application).

Lötters, J.C. (2004) Mass flowmeter. Patent US20040843412 (Application).

Lerou, P.P.P.M. and Jansen, H.V. and Venhorst, G.C.F. and Burger, J.F. and Veenstra, T.T. and Holland, H.J. and ter Brake, H.J.M. and Elwenspoek, M.C. and Rogalla, H. (2004) Progress in Micro Joule-Thomson Cooling at Twente University. In: Proceedings of the 13th International Cryocooler Conference, 29 March - 1 April 2004, New Orleans. pp. 489-496. Springer Science + Business. ISSN 1570-2235 ISBN 0-387-23901-4

Rusu, C.R. and Jansen, H.V. and Gunn, R. and Witvrouw, A. (2004) Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process. Microsystem technologies, 10 (5). pp. 364-371. ISSN 0946-7076 *** ISI Impact 1,025 ***

Sarajlic, E. and Berenschot, J.W. (2004) Method for manufacturing a nanstructure. Patent WO2004NL00902 (Application).

Sarajlic, E. and de Boer, M.J. and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Advanced plasma processing combined with trench isolation technology for fabrication and fast prototyping of high aspect ratio MEMS in standard silicon wafers. Journal of micromechanics and microengineering, 14. S70-S75. ISSN 0960-1317 *** ISI Impact 1,997 ***

Svetovoy, V. (2004) Comment on "surface-impedance approach solves problems with the thermal casimir force between real metals". Physical review A, 70. 16101. ISSN 1050-2947 *** ISI Impact 2,866 ***

Tas, N.R. and Haneveld, J. and Jansen, H.V. and Elwenspoek, M.C. and van den Berg, A. (2004) Capillary filling speed of water in nanochannels. Applied physics letters, 85 (15). pp. 3274-3276. ISSN 0003-6951 *** ISI Impact 3,554 ***

Tiggelaar, R.M. (2004) Silicon-technology based microreactors for high-temperature heterogeneous partial oxidation reactions. PhD thesis, University of Twente. ISBN 90-365-2098-3

Tiggelaar, R.M. and Loeters, P.W.H. and van Male, P. and Oosterbroek, R.E. and Gardeniers, J.G.E. and de Croon, M.H.J.M. and Schouten, J.C. and Elwenspoek, M.C. and van den Berg, A. (2004) Thermal and mechanical analysis of a microreactor for high temperature catalytic gas phase reactions. Sensors and actuators A: Physical, 112 (2-3). pp. 267-277. ISSN 0924-4247 *** ISI Impact 1,674 ***

Tong, D.H. (2004) Microfabricated palladium-based membranes for hydrogen separation. PhD thesis, University of Twente. ISBN 90-365-2058-4

Tong, D.H. and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, H.V. and van Rijn, C.J.M. and Elwenspoek, M.C. and Nijdam, W. (2004) Microfabricated palladium-silver alloy membranes and their application in hydrogen separation. Industrial and engineering chemistry research, 43 (15). pp. 4182-4187. ISSN 0888-5885 *** ISI Impact 1,758 ***

Tong, D.H. and Jansen, H.V. and Gadgil, V.J. and Bostan, C.G. and Berenschot, J.W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2004) Silicon nitride nanosieve membrane. Nano letters, 4 (2). pp. 283-287. ISSN 1530-6984 *** ISI Impact 9,991 ***

Wensink, H. and Hermes, D.C. and van den Berg, A. (2004) High signal to noise ratio in low field nmr on chip, simulations and experimental results. In: Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS), 25-29 January, Maastricht. pp. 407-410. Micro Electro Mechanical Systems, 2004. IEEE Computer Society. ISBN 0-7803-8265-x

2003

van Baar, J.J.J. and Dijkstra, M.A. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2003) Fabrication of arrays of artificial hairs for complex flow pattern recognition. In: Sensors, 2003. Proceedings of IEEE, 22-24 October, Toronto, Canada. pp. 332-336. IEEE Computer Society. ISBN 0-7803-8133-5

van Baar, J.J.J. and Verwey, W.A. and Dijkstra, M.A. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Micromachined two dimensional resistor arrays for determination of gas parameters. In: TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003, 8-12 June, Boston, USA. pp. 1606-1609. IEEE Computer Society. ISBN 0-7803-7731-1

Bruijn, M.P. and Bergmann Tiest, W.M. and Hoevers, H.F.C. and Krouwer, E. and van der Kuur, J. and Ridder, M.L. and Moktadir, Z. and Wiegerink, R.J. and van Gelder, D. and Elwenspoek, M.C. (2003) Development of arrays of transition edge sensors for application in X-ray astronomy. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 513 (1-2 spec iss). pp. 143-146. ISSN 0168-9002 *** ISI Impact 1,317 ***

Damean, N. and Regtien, P.P.L. and Elwenspoek, M.C. (2003) Heat transfer in a mems for microfluidics. Sensors and actuators A: Physical, 105 (2). pp. 137-149. ISSN 0924-4247 *** ISI Impact 1,674 ***

Deladi, S. and de Boer, M.J. and Krijnen, G.J.M. and Rosén, D. and Elwenspoek, M.C. (2003) Innovative process development for a new micro-tribosensor using surface micromachining. Journal of micromechanics and microengineering, 13. S17-S22. ISSN 0960-1317 *** ISI Impact 1,997 ***

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Parallel-beams/lever electrothermal out-of-plane actuator. In: Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on, 5-7 May, Mandelieu-la Napoule, France. pp. 103-107. IEEE Computer Society. ISBN 0-7803-7066-X

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) FEM assisted design and simulation of novel electrothermal actuators. In: Proceedings of the Nanotechnology Conference and Trade Show - Nanotech 2003, 23-27 Feb 2003, San Francisco, United States. pp. 400-403. Computational Publications. ISBN 0972842209

Ekkels, P. and Tjerkstra, R.W. and Krijnen, G.J.M. and Berenschot, J.W. and Brugger, J. and Elwenspoek, M.C. (2003) Fabrication of functional structures on thin silicon nitride membranes. Microelectronic engineering, 67-68. pp. 422-429. ISSN 0167-9317 *** ISI Impact 1,488 ***

Fernández, L.J. and Visser, E. and Sesé, J. and Jansen, H.V. and Wiegerink, R.J. and Flokstra, Jaap (2003) Novel rf power sensor based on capacitive MEMS technology. In: 14th MicroMechanics Europe Workshop, MME 2003, 2-4 Nov 2003, Delft. pp. 41-44. MicroMechanics Europe. ISBN 9080826618

Fernández, L.J. and Visser, E. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jan and Jansen, H.V. and Elwenspoek, M.C. (2003) Radio frequency power sensor based on MEMS technology. In: Sensors, 2003. Proceedings of IEEE, 22-24 Oct., Toronto, Canada. pp. 549-552. IEEE Computer Society. ISBN 0-7803-8133-5

Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2003) Wet anisotropic etching for fluidic 1d nanochannels. Journal of micromechanics and microengineering, 13 (4). S62-S66. ISSN 0960-1317 *** ISI Impact 1,997 ***

van der Heyden, F.H.J. and Blom, M.T. and Gardeniers, J.G.E. and Chmela, E. and Elwenspoek, M.C. and Tijssen, R.P. and van den Berg, A. (2003) A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector. Sensors and actuators B: Chemical, 92 (1-2). pp. 102-109. ISSN 0925-4005 *** ISI Impact 3,083 ***

de Jong, B.R. and Bula, W.P. and Zalewski, D. and van Baar, J.J.J. and Wiegerink, R.J. (2003) Pirani pressure sensor with distributed temperature measurement. In: Proceedings of IEEE Sensors, 22-24 Oct 2003, Toronto, Canada. pp. 718-722. IEEE Computer Society. ISBN 0-7803-8133-5

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2003) 2d-finite-element simulations for long-range capacitive position sensor. Journal of micromechanics and microengineering, 13 (4). S183-S189. ISSN 0960-1317 *** ISI Impact 1,997 ***

Le Minh, P. and Holleman, J. and Wallinga, H. and Berenschot, J.W. and Tas, N.R. and van den Berg, A. (2003) Novel integration of a microchannel with a silicon light emitting diode antifuse. Journal of Micromechanics and Microengineering, 13 (3). pp. 425-429. ISSN 0960-1317 *** ISI Impact 1,997 ***

Ridder, M.L. and Bruijn, M.P. and Hoevers, H.F.C. and Germeau, A. and Baars, N.H.R. and Krouwer, E. and van Baar, J.J.J. and Wiegerink, R.J. (2003) Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures. In: Proceedings of IEEE Sensors 2003, 22-24 Oct 2003, Toronto, Canada. pp. 353-357. IEEE Computer Society. ISBN 0-7803-8133-5

Rottenberg, X. and Jansen, H.V. and Tilmans, H.A.C. and De Raedt, W. (2003) Switchable capacitor. Patent EP20030020159 (Application).

Rottenberg, X. and Jansen, H.V. and Tilmans, H.A.C. and de Raedt, W. (2003) Switchable capacitor and method of making the same. Patent US20030663340 (Application).

Rusu, C.R. and Jansen, H.V. and Gunn, R. and Witvrouw, A. (2003) Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process. In: Symposium on design, test, integration and packaging of MEMS 2003, 5-7 May 2003, Mandelieu-La Napoule, France. pp. 245-250. IEEE Computer Society. ISBN 0-7803-7066-X

Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Versatile trench isolation technology for the fabrication of microactuators. Microelectronic engineering, 67-68 (1). pp. 430-437. ISSN 0167-9317 *** ISI Impact 1,488 ***

Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Low volume, large force (>1mN) and nanometer resolution, electrostatic microactuator for low displacement applications. In: Proceedings of the Nanotechnology Conference and Trade Show - Nanotech 2003, 23 - 27 Feb 2003, San Francisco, United States. pp. 392-395. Computational Publications. ISBN 0-9728422-0-9

Sarajlic, E. and de Boer, M.J. and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Integration of trench isolation technolgy and plasma release for advanced MEMS design on standard silicon wafers. In: 14th MicroMechanics Europe Workshop, MME 2003, 2-4 Nov 2003, Delft. pp. 123-126. Eburon. ISBN 9080826618

Tas, N.R. and Gui, C. and Elwenspoek, M.C. (2003) Static friction in elastic adhesion contacts in MEMS. Journal of Adhesion Science and Technology, 17 (4). 547-561. ISSN 0169-4243 *** ISI Impact 1,175 ***

Tas, N.R. and Mela, P. and Kramer, T. and Berenschot, J.W. and van den Berg, A. (2003) Capillarity Induced Negative Pressure of Water Plugs in Nanochannels. Nano letters, 3 (11). pp. 1537-1540. ISSN 1530-6984 *** ISI Impact 9,991 ***

Tas, N.R. and Sonnenberg, A.H. and Molenaar, R. and Elwenspoek, M.C. (2003) Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage. Journal of micromechanics and microengineering, 13 (1). N6-N15. ISSN 0960-1317 *** ISI Impact 1,997 ***

Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Prak, A. and Mateman, R. and Wissink, J.M. and van den Berg, A. (2003) Analysis systems for the detection of ammonia based on micromachined components modular hybrid versus monolithic integrated approach. Sensors and Actuators B: Chemical, 92 (1-2). pp. 25-36. ISSN 0925-4005 *** ISI Impact 3,083 ***

Tjerkstra, R.W. and Ekkels, P. and Krijnen, G.J.M. and Egger, S. and Berenschot, J.W. and Ma, K. and Brugger, J. (2003) Fabrication of an active nanostencil with integrated microshutters. In: TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003, 8-12 June, Boston, USA. pp. 1651-1654. IEEE Computer Society. ISBN 0-7803-7731-1

Tong, D.H. and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Wensink, H. and Jansen, H.V. and Nijdam, A.J. and Elwenspoek, M.C. and Gielens, F.C. and van Rijn, C.J.M. (2003) Microfabrication of palladium-silver alloy membranes for hydrogen separation. Journal of microelectromechanical systems, 12 (5). pp. 622-629. ISSN 1057-7157 *** ISI Impact 1,922 ***

Tong, D.H. and Gielens, F.C. and Hoang, Thi Hanh and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2003) A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes. In: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, 8-12 June 2003, Boston, USA. pp. 1742-1745. IEEE Electron Devices Society. ISBN 0-7803-7731-1

Tong, D.H. and Gielens, F.C. and Hoang, Thi Hanh and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2003) Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation. In: SESENS 2002, 29 Nov 2002, Veldhoven, the Netherlands. pp. 688-691. STW Technology Foundation. ISBN not assigned

Tong, D.H. and Hoang, Thi Hanh and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2003) Preparation of a dual sputtering PD-Cu alloy film and its application in hydrogen separation. In: 14th MicroMechanics Europe Workshop, MME 2003, 2-4 Nov 2003, Delft. pp. 1-4. Micro Mechanics Europe. ISBN 9080826618

Yeshurun, Y. and Hefetz, M. and Berenschot, J.W. and de Boer, M.J. and Altpeter, D.M. and Boom, G. (2003) Polymer Microneedles. Patent US20030397359 (Application).

2002

van Baar, J.J.J. (2002) Distributed thermal micro sensors for fluid flow. PhD thesis, University of Twente. ISBN 9-036-51828-8

van Baar, J.J.J. and Wiegerink, R.J. and Berenschot, J.W. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Pressure sensor based on distributed temperature sensing. In: Proceedings of IEEE Sensors, 12 -14 June 2002, Orlando, USA. pp. 964-968. IEEE Computer Society. ISBN 0-7803-7454-1

van Baar, J.J.J. and Wiegerink, R.J. and Lammerink, T.S.J. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Combined-Pirani/bending membrane-pressure sensor. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 20-24 JAN 2002, Las Vegas, NV. pp. 328-331. IEEE Computer Society. ISBN 0-7803-7185-2

Bartic, C. and Jansen, H.V. and Campitelli, A. and Borghs, S. (2002) Ta₂O₅ as gate dielectric material for low-voltage organic thin-film transistors Organic Electronics, 3 (2). pp. 65-72. ISSN 1566-1199 *** ISI Impact 3,262 ***

Berenschot, J.W. and Tas, N.R. and Lammerink, T.S.J. and Elwenspoek, M.C. and van den Berg, A. (2002) Advanced sacrificial poly-Si technology for fluidic systems. Journal of micromechanics and microengineering, 12 (5). pp. 621-624. ISSN 0960-1317 *** ISI Impact 1,997 ***

Blom, M.T. (2002) On-chip separation and sensing systems for hydrodynamic chromatography. PhD thesis, University of Twente. ISBN 9036518415

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Tijssen, R.P. and Elwenspoek, M.C. and van den Berg, A. (2002) Design and fabrication of a hydrodynamic chromatography chip. Sensors and Actuators B: Chemical, 82 (1). pp. 111-116. ISSN 0925-4005 *** ISI Impact 3,083 ***

de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Smulders, E.J.T. and Gilde, M.-J. and Roelofs, G.H.M. and Sasserath, J.N. and Elwenspoek, M.C. (2002) Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures. Journal of microelectromechanical systems, 11 (4). pp. 385-401. ISSN 1057-7157 *** ISI Impact 1,922 ***

Brivio, M. and Fokkens, R.H. and Verboom, W. and Reinhoudt, D.N. and Tas, N.R. and Goedbloed, M.H. and van den Berg, A. (2002) Integrated microfluidic system enabling (bio)chemical reactions with on-line MALDI-TOF mass spectrometry. Analytical chemistry, 74 (16). pp. 3972-3976. ISSN 0003-2700 *** ISI Impact 5,214 ***

De Korte, P.A.J. and Hoevers, H.F.C. and Den Herder, J.W.A. and Bleeker, J.A.M. and Bergmann Tiest, W.M. and Bruijn, M.P. and Ridder, M.L. and Wiegerink, R.J. and Kaastra, J.S. and Van der Kuur, J. and Mels, W.A. (2002) A TES X-ray microcalorimeter-array for imaging spectroscopy. In: Proceedings of SPIE - The International Society for Optical Engineering, 24-28 Aug 2002, Waikoloa, HI, United States. pp. 779-789. The International Society for Optical Engineering. ISSN 0277-786X

Deladi, S. and Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2002) Three dimensional adhesion model for arbitrary rough surfaces. In: International Conference on Computational Nanoscience and Nanotechnology - ICCN 2002, 21 - 25 april 2002, San Juan, Puerto Rico. pp. 326-329. Computational Publications. ISBN 0-9708275-6-3

Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2002) Wet anisotropic etching for fluidic 1D nanochannels. In: Micromechanics Europe Workshop, MME 2002, 6-8 Oct 2002, Sinaia, Romania. pp. 47-50. MicroMechanics Europe.

van Honschoten, J.W. and Svetovoy, V. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Determination of the Sensitivity Behaviour of an Acoustic and Thermal Flow Sensor by Electronic Characterisation. In: Proceedings of the First IEEE International Conference on Sensors - IEEE Sensors 2002, 12 -14 June 2002, Orlando, USA. pp. 1298-1303. IEEE Computer Society. ISBN 0-7803-7454-1

Krijnen, G.J.M. and Kuijpers, A.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2002) Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation. In: Proceedings of SPIE - The International Society for Optical Engineering, 21 - 23 May 2002, Presquile de Giens, France. pp. 201-206. The International Society for Optical Engineering. ISSN 0277-786X ISBN 0-8194-4529-0

Kuiper, S. and Brink, R. and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Ceramic microsieves: influence of perforation shape and distribution on flow resistance and membrane strength. Journal of membrane science, 196 (2). pp. 149-157. ISSN 0376-7388 *** ISI Impact 3,203 ***

Kuiper, S. and van Rijn, C.J.M. and Nijdam, W. and Raspe, O. and van Wolferen, H.A.G.M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Filtration of lager beer with microsieves: Flux, permeate haze and in-line microscope observations. Journal of Membrane Science, 196 (2). pp. 159-170. ISSN 0376-7388 *** ISI Impact 3,203 ***

Le Minh, P. and Holleman, J. and Berenschot, J.W. and Tas, N.R. and van den Berg, A. (2002) Monolithic integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. In: Proceedings of the 32nd European Solid-State Device Research Conference ESSDERC 2002, 24-26 September 2002, Florence, Italy. pp. 451-454. IEEE Computer Society. ISBN 88-900847-8-2

Moktadir, Z. and Bruijn, M.P. and Wiegerink, R.J. and Elwenspoek, M.C. and Ridder, M.L. and Mels, W.A. (2002) Limitations of Heat Conductivity in Cryogenic Sensors Due to Surface Roughness. In: Proceedings of IEEE Sensors, 12 - 14 June 2002, Orlando, Florida. pp. 1024-1027. IEEE Computer Society. ISBN 0-7803-7454-1

Rottenberg, X. and Jansen, H.V. and Fiorini, P. and De Raedt, W. and Tilmans, H.A.C. (2002) Novel RF-MEMS capacitive switching structures. In: 32nd European Microwave Conference, EuMC 2002, 23-26 Sept 2002, Milan, Italy. pp. 1-4. IEEE. ISBN not assigned

Tas, N.R. and Berenschot, J.W. and Lammerink, T.S.J. and Elwenspoek, M.C. and van den Berg, A. (2002) Nanofluidic bubble pump using surface tension directed gas injection. Analytical Chemistry, 74 (9). pp. 2224-2227. ISSN 0003-2700 *** ISI Impact 5,214 ***

Tas, N.R. and Berenschot, J.W. and Mela, P. and Jansen, H.V. and Elwenspoek, M.C. and van den Berg, A. (2002) 2D-Confined Nanochannels Fabricated by Conventional Micromachining. Nano letters, 2 (9). pp. 1031-1032. ISSN 1530-6984 *** ISI Impact 9,991 ***

Tas, N.R. and Lammerink, T.S.J. and Berenschot, J.W. and Elwenspoek, M.C. and van den Berg, A. (2002) Scaling behaviour of pressure-driven micro-hydraulic systems. In: Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems, 21 - 25 april 2002, San Juan, Puerto Rico. pp. 174-177. Computational Publications. ISBN 0970827571

Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and van den Berg, A. (2002) A light detection cell to be used in a micro analysis system for ammonia. Talanta, 56 (2). pp. 331-339. ISSN 0039-9140 *** ISI Impact 3,29 ***

Tilmans, H.A.C. and Beyne, E. and Jansen, H.V. and de Raedt, W. (2002) Fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent EP20020076528 (Application).

Tong, D.H. and Gielens, F.C. and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2002) Fabrication and characterization of MEMS based wafer-scale palladium-silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 20-24 Jan 2002, Las Vegas, NV. pp. 268-271. IEEE Computer Society. ISBN 0-7803-7185-2

Veenstra, T.T. and Sharma, N.R. and Forster, F.K. and Gardeniers, J.G.E. and Elwenspoek, M.C. and van den Berg, A. (2002) The design of an in-plane compliance structure for microfluidical systems. Sensors and actuators B (Chemical), 81 (2-3). pp. 377-383. ISSN 0925-4005 *** ISI Impact 3,083 ***

Wensink, H. (2002) Fabrication of microstructures by powder blasting. PhD thesis, University of Twente. ISBN 90-365-1698-6

Wensink, H. and Elwenspoek, M.C. (2002) Reduction of sidewall inclination and blast lag of powder blasted channels. Sensors and Actuators A: Physical, 102 (1-2). pp. 157-164. ISSN 0924-4247 *** ISI Impact 1,674 ***

Wensink, H. and Elwenspoek, M.C. (2002) A closer look at the ductile-brittle transition in solid particle erosion. Wear, 253 (9-10). pp. 1035-1043. ISSN 0043-1648 *** ISI Impact 1,771 ***

Wensink, H. and Schlautmann, S. and Goedbloed, M.H. and Elwenspoek, M.C. (2002) Fine tuning the roughness of powder blasted surfaces. Journal of micromechanics and microengineering, 12 (5). pp. 616-620. ISSN 0960-1317 *** ISI Impact