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Research Group: EWI-SC: Semiconductor Components
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2014

Boksteen, B.K. and Ferrara, A. and Heringa, A. and Steeneken, P.G. and Hueting, R.J.E. (2014) Impact of interface charge on the electrostatics of field-plate assisted RESURF devices. IEEE transactions on electron devices, 61 (8). pp. 2859-2866. ISSN 0018-9383 *** ISI Impact 2,06 ***
Friedlein, R. and Fleurence, A. and Aoyagi, K. and de Jong, M.P. and Van Hao, B. and Wiggers, F.B. and Yoshimoto, S. and Koitaya, T. and Shimizu, S. and Noritake, H. and Mukai, K. and Yoshinobu, J. and Yamada-Takamura, Y. (2014) Core level excitations — A fingerprint of structural and electronic properties of epitaxial silicene. The journal of Chemical Physics, 140 (18). pp. 1-6. ISSN 0021-9606 *** ISI Impact 3,16 ***
Friedlein, R. and Van Hao, B. and Wiggers, F.B. and Yamada-Takamura, Y. and Kovalgin, A.Y. and de Jong, M.P. (2014) Interaction of epitaxial silicene with overlayers formed by exposure to Al atoms and O2 molecules Journal of chemical physics, 140. 204705:1-204705:4. ISSN 0021-9606 *** ISI Impact 3,16 ***
Hajlasz, M. and Donkers, J.J.T.M. and Sque, S.J. and Heil, S.B.S. and Gravesteijn, D.J. and Rietveld, F.J.R. and Schmitz, J. (2014) Sheet resistance under Ohmic contacts to AlGaN/GaN heterostructures. Applied physics letters, 104. 242109. ISSN 0003-6951 *** ISI Impact 3,79 ***
Kaleli, B. and Hueting, R.J.E. and Nguyen, Minh Duc and Wolters, R.A.M. (2014) Integration of a piezoelectric layer on Si finFETs for tunable strained device applications. IEEE transactions on electron devices, 61 (6). pp. 1929-1935. ISSN 0018-9383 *** ISI Impact 2,06 ***
Kaleli, B. and Nguyen, Minh Duc and Schmitz, J. and Wolters, R.A.M. and Hueting, R.J.E. (2014) Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode. Microelectronic engineering, 119. pp. 16-19. ISSN 0167-9317 *** ISI Impact 1,22 ***
Kazmi, S.N.R. (2014) Capacitively transduced polycrystalline GeSi MEM resonators. PhD thesis, University of Twente. ISBN 978-90-365-3675-2
Kovalgin, A.Y. and Van Hao, B. and Schmitz, J. and Wolters, R.A.M. (2014) Growth and properties of subnanometer thin titanium nitride films. (Invited) In: Nano & Giga 2014, 10-14 March 2014, Phoenix, Arizona, USA. 1. Nano and Giga Challenges in Electronics, Photonics and Renewable Energy. ISBN not assigned
Schmitz, J. (2014) CMOS post-processing for monolithic microsystems. In: Website of the Nano & Giga 2014., 10-14 March 2014, Arizona. Nano and Giga Challenges in Electronics, Photonics and Renewable Energy. ISBN not assigned
Schmitz, J. and Rangarajan, B. and Kovalgin, A.Y. (2014) Materials and integration schemes for above-IC integrated optics. In: 15th International Conference on Ultimate Integration on Silicon, ULIS 2014, 7-9 April 2014, Stockholm, Sweden. pp. 153-156. IEEE Circuits & Systems Society. ISBN 978-1-4799-3718-9
Van Hao, B. and Nguyen, Minh Duc and Wiggers, F.B. and Aarnink, A.A.I. and de Jong, M.P. and Kovalgin, A.Y. (2014) Self-limiting growth and thickness- and temperature-dependence of optical constants of ALD AlN thin films. ECS journal of solid state science and technology, 3 (4). pp. 101-106. ISSN 2162-8769
Van Hao, B. and Wiggers, F.B. and Aarnink, A.A.I. and Nguyen, Minh Duc and de Jong, M.P. and Kovalgin, A.Y. and Gupta, A. (2014) Growth characteristics, optical properties, and crystallinity of thermal and plasma-enhanced ALD AlN films. In: Proceeding of the 14th International Conference on Atomic Layer Deposition, 15-18 June 2014, Kyoto, Japan. pp. 113-113. ALD 2014. ISBN not assigned
Van Hao, B. and Wiggers, F.B. and de Jong, M.P. and Kovalgin, A.Y. (2014) An approach to characterize ultra-thin conducting films protected against native oxidation by an in-situ capping layer. In: International Conference on Microelectronic Test Structures, ICMTS 2014, 24-27 March 2014, Udine, Italy. pp. 53-57. IEEE Circuits & Systems Society. ISSN 1071-9032 ISBN 978-1-4799-2193-5

2013

Boksteen, B.K. and Ferrara, A. and Heringa, A. and Steeneken, P.G. and Koops, G.E.J. and Hueting, R.J.E. (2013) Design optimization of field-plate assisted RESURF devices. In: 25th International Symposium on Power Semiconductor Devices and ICs, ISPSD 2013, 26-30 May 2013 , Kanazawa , Japan. pp. 237-240. IEEE Circuits & Systems Society. ISSN 1943-653X ISBN 978-1-4673-5134-8
Ferrara, A. and Boksteen, B.K. and Schmitz, J. and Hueting, R.J.E. and Steeneken, P.G. and Reimann, K. and Heringa, A. and Yan, Liang and Swanenberg, M. and Koops, G.E.J. and Scholten, A.J. and Surdeanu, R. (2013) Comparison of electrical techniques for temperature evaluation in power MOS transistors. In: IEEE International Conference on Microelectronic Test Structures (ICMTS 2013), 25-28 Mar 2013, San Diego, CA, USA. pp. 115-120. IEEE Circuits & Systems Society. ISSN 1071-9032 ISBN 978-1-4673-4848-5
Ferrara, A. and Steeneken, P.G. and Heringa, A. and Boksteen, B.K. and Swanenberg, M. and Scholten, A.J. and van Dijk, L. and Schmitz, J. and Hueting, R.J.E. (2013) The safe operating volume as a general measure for the operating limits of LDMOS transistors. In: International Electron Devices Meeting (IEDM 2013), 9-11 Dec 2013, Washington, DC. 6.7.1-6.7.4 . IEEE Electron Devices Society. ISBN 978-1-4799-2306-9
van der Graaf, H. and Aarnink, A.A.I. and Aarts, A. and van Bakel, N. and Berbee, E. and Berkien, A. and van Beuzekom, M. and Bosma, M. and Campbell, M. and Chefdeville, M.A. and Colas, P. and Colijn, A.-P. and Fomaini, A. and Fransen, M. and Giganon, A. and Giomataris, I. and Gotink, W. and de Groot, N. and Hartjes, F. and van der Heijden, B. and Hessey, N. and Jansweijer, P. and Konig, A. and Koppert, W. and Llopart, X. and de Nooij, L. and van der Putten, S. and Rövekamp, J. and Salm, C. and San Segundo Bello, D. and Schmitz, J. and Smits, S.M. and Timmermans, J. and Verkooijen, H. and Visschers, J. and Visser, J. and Wijnen, T. and Wyrsch, N. (2013) The gridpix detector: History and perspective. Modern physics letters A, 28 (28-13). pp. 13400211-13400217. ISSN 0217-7323 *** ISI Impact 1,11 ***
van Hemert, T. (2013) Tailoring strain in microelectronic devices. PhD thesis, University of Twente. ISBN 978-90-365-1169-8
van Hemert, T. and Hueting, R.J.E. (2013) Piezoelectric strain modulation in FETs. IEEE transactions on electron devices, 60 (10). pp. 3265-3270. ISSN 0018-9383 *** ISI Impact 2,06 ***
van Hemert, T. and Kaleli, B. and Hueting, R.J.E. and Esseni, D. and van Dal, M.J.H. and Schmitz, J. (2013) Strain and conduction-band offset in narrow n-type finFETs. IEEE transactions on electron devices, 60 (3). pp. 1005-1010. ISSN 0018-9383 *** ISI Impact 2,06 ***
Kaleli, B. (2013) Characterization of strained silicon FinFETs and the integration of a piezoelectric layer. PhD thesis, University of Twente. ISBN 978-90-365-0471-3
Kaleli, B. and van Hemert, T. and Hueting, R.J.E. and Wolters, R.A.M. (2013) Strain characterization of FinFETs using Raman spectroscopy. Thin solid films, 541. pp. 57-61. ISSN 0040-6090 *** ISI Impact 1,60 ***
Kazmi, S.N.R. and Salm, C. and Schmitz, J. (2013) Cryogenic reactive ion etching of in-situ highly boron doped LPCVD poly Si0.3Ge0.7 using SF6 and O2 plasma In: 38th International Conference on Micro and Nano Engineering, 16-20 Sept 2012, Toulouse, France. pp. 311-314. Microelectronic Engineering 110. Elsevier. ISSN 0167-9317
Kazmi, S.N.R. and Salm, C. and Schmitz, J. (2013) Deep reactive ion etching of in situ boron doped LPCVD Ge0.7Si0.3 using SF6 and O2 plasma Microelectronic engineering, 110. pp. 311-314. ISSN 0167-9317 *** ISI Impact 1,22 ***
Koppert, W.J.C. and van Bakel, N. and Bilevych, Y. and Colas, P. and Desch, K. and Fransen, M. and van der Graaf, H. and Hartjes, F. and Hessey, N.P. and Kaminski, J. and Schmitz, J. and Schön, R. and Zappon, F. (2013) GridPix detectors: production and beam test results. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 732. pp. 245-249. ISSN 0168-9002 *** ISI Impact 1,14 ***
Kovalgin, A.Y. and Aarnink, A.A.I. (2013) Semiconductor processing apparatus with compact free radical source. Patent US201313918094 (Application).
Piccolo, G. and Sammak, A. and Hueting, R.J.E. and Schmitz, J. and Nanver, L.K. (2013) Role of junction depth in light emission from silicon p-i-n LEDs. In: Proceeding of European Solid State Device Research Conference (ESSDERC 2013), 16-20 Sept 2013, Bucharest. pp. 119-122. IEEE Solid-State Circuits Society. ISBN 978-1-4799-0649-9
Rangarajan, B. (2013) Materials for monolithic integration of optical functions on CMOS. PhD thesis, University of Twente. ISBN 978-90-365-0720-2
Rangarajan, B. and Kovalgin, A.Y. and Schmitz, J. (2013) Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150 °C. Surface and coatings technology, 230. pp. 46-50. ISSN 0257-8972 *** ISI Impact 1,94 ***
Rangarajan, B. and Kovalgin, A.Y. and Wörhoff, K. and Schmitz, J. (2013) Low-temperature deposition of high-quality siliconoxynitride films for CMOS-integrated optics. Optics letters, 38 (6). pp. 941-943. ISSN 0146-9592 *** ISI Impact 3,39 ***
Schmitz, J. (2013) Microchip post-processing: There is plenty of room at the top. In: Future trends in microelectronics: frontiers and innovation. Frontiers and Innovations 7. John Wiley & Sons, Inc., Hoboken, New Jersey, pp. 110-119. ISBN 978-1-118-44216-6
Spruijtenburg, P.C. and Ridderbos, J. and Mueller, F. and Leenstra, A.W. and Brauns, M. and Aarnink, A.A.I. and van der Wiel, W.G. and Zwanenburg, F.A. (2013) Single-hole tunneling through a two-dimensional hole gas in intrinsic silicon. Applied physics letters, 102 (19). 192105. ISSN 0003-6951 *** ISI Impact 3,79 ***
Van Hao, B. (2013) Atomic layer deposition of TiN films : growth and electrical behavior down to sub-nanometer scale. PhD thesis, University of Twente. ISBN 978-9-03653-484-0
Van Hao, B. and Kovalgin, A.Y. and Aarnink, A.A.I. and de Jong, M.P. (2013) In situ spectroscopic ellipsometry for studying the growth and optical constants of ALD AlN films. NEVAC Blad, 51 (3). pp. 24-31. ISSN 0169-9431
Van Hao, B. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. (2013) Hot-Wire generated atomic hydrogen and its impact on thermal ALD in TiCl4/NH3 System ECS Journal of Solid State Science and Technology, 2 (4). pp. 149-155. ISSN 2162-8769
Van Hao, B. and Kovalgin, A.Y. and Schmitz, J. and Wolters, R.A.M. (2013) Conduction and electric field effect in ultra-thin TiN films. Applied physics letters, 103 (5). 051904. ISSN 0003-6951 *** ISI Impact 3,79 ***
Van Hao, B. and Kovalgin, A.Y. and Wolters, R.A.M. (2013) On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films. In: SURFINT-SREN III, 14-19 May 2012, Florence, Italy. pp. 45-49. Applied Surface Science 269. Elsevier. ISSN 0169-4332
Wang, Jiahui and Salm, C. and Schmitz, J. (2013) Comparison of C-V measurement methods for RF-MEMS capacitive switches. In: IEEE International Conference on Microelectronic Test Structures, ICMTS 2013, 25-28 Mar 2013, San Diego, CA, USA. pp. 53-58. IEEE Electron Devices Society. ISSN 1071-9032 ISBN 978-1-4673-4848-5

2012

Boksteen, B.K. and Dhar, S. and Ferrara, A. and Heringa, A. and Hueting, R.J.E. and Koops, G.E.J. and Salm, C. and Schmitz, J. (2012) On the degradation of field-plate assisted RESURF power devices. In: IEEE International Electron Devices Meeting, IEDM 2012, 10-13 Dec 2012, San Francisco, CA, USA. pp. 311-314. Technical Digest. IEEE International Electron Device Meeting . ISSN 0163-1918 ISBN 978-1-4673-4872-0
Boksteen, B.K. and Dhar, S. and Heringa, A. and Koops, G.E.J. and Hueting, R.J.E. (2012) Extraction of the Electric Field in Field Plate Assisted RESURF Devices. In: Proceedings of 24th International Symposium on Power Semiconductor Devices and ICs (ISPSD 2012) , Bruges, Belgium. pp. 145-148. IEEE Electron Devices Society. ISSN 1943-653X ISBN 978-1-4577-1594-5
Faber, E.J. and Wolters, R.A.M. and Schmitz, J. (2012) Novel test structures for dedicated temperature budget determination. IEEE transactions on semiconductor manufacturing, 25 (3). pp. 339-345. ISSN 0894-6507 *** ISI Impact 0,86 ***
Groenland, A.W. and Vereshchagina, E. and Kovalgin, A.Y. and Wolters, R.A.M. and Gardeniers, J.G.E. and Schmitz, J. (2012) Micro- and nano-link ultra-low power heaters for sensors. In: European Solid-State Device Research Conference, ESSDERC 2012, 17-21 Sept 2012, Bordeaux, France. pp. 169-172. IEEE Solid-State Circuits Society. ISSN 1930-8876 ISBN 978-1-4673-1706-1
Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2012) Four point probe structures with buried and surface electrodes for the electrical characterization of ultrathin conducting films. IEEE transactions on semiconductor manufacturing, 25 (2). pp. 178-184. ISSN 0894-6507 *** ISI Impact 0,86 ***
van Hemert, T. and Hueting, R.J.E. (2012) Active strain modulation in field effect devices. In: Solid-State Device Research Conference (ESSDERC), 2012 Proceedings of the European, 17-21 Sept 2012, Bordeaux, France. pp. 125-128. IEEE Solid-State Circuits Society. ISSN 1930-8876 ISBN 978-1-4673-1706-1
van Hemert, T. and Reimann, K. and Hueting, R.J.E. (2012) Extraction of second order piezoelectric parameters in bulk acoustic wave resonators. Applied physics letters, 100 (23). 232901:1-232901:4. ISSN 0003-6951 *** ISI Impact 3,79 ***
Herfst, R.W. and Steeneken, P.G. and Tiggelman, M.P.J. and Stulemeijer, J. and Schmitz, J. (2012) Fast RF-CV characterization through High-Speed 1-port S-Parameter measurements. IEEE transactions on semiconductor manufacturing, 25 (3). pp. 310-316. ISSN 0894-6507 *** ISI Impact 0,86 ***
Heringa, A. and Koops, G. and Boksteen, B.K. and Ferrara, A. (2012) Field plate assisted resistance reduction in a semiconductor device. Patent US201213651096 (Application).
Kazmi, S.N.R. and Aarnink, A.A.I. and Salm, C. and Schmitz, J. (2012) CMOS-MEMS Post Processing Compatible Capacitively Transduced GeSi Resonators. In: Proceedings of 2012 IEEE International Frequency Control Symposium (IFCS) , 21-24 May 2012, Baltimore, USA. pp. 1-4. IEEE Electron Devices Society. ISBN 978-1-4577-1820-5
Kazmi, S.N.R. and Kovalgin, A.Y. and Aarnink, A.A.I. and Salm, C. and Schmitz, J. (2012) Low-Stress Highly-Conductive In-Situ Boron Doped Ge0.7Si0.3 Films by LPCVD ECS Journal of Solid State Science and Technology, 1 (5). P222-P226. ISSN 2162-8769
Kovalgin, A.Y. and Tiggelman, N. and Wolters, R.A.M. (2012) An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance. IEEE transactions on electron devices, 59 (2). pp. 426-432. ISSN 0018-9383 *** ISI Impact 2,06 ***
Piccolo, G. and Kovalgin, A.Y. and Schmitz, J. (2012) Nanoscale carrier injectors for high luminescence Si-based LEDs. Solid-state electronics, 74 (Special Issue, Selected Papers from the ESSDERC 2011 Conference ). pp. 43-48. ISSN 0038-1101 *** ISI Impact 1,48 ***
Puliyankot Palackavalapil, V. and Hueting, R.J.E. (2012) One-Dimensional Physical Model to Predict the Internal Quantum Efficiency of Si-Based LEDs. IEEE transactions on electron devices, 59 (1). pp. 26-34. ISSN 0018-9383 *** ISI Impact 2,06 ***
Rangarajan, B. and Kovalgin, A.Y. and Oesterlin, P. and de Kloe, R. and Brunets, I. and Schmitz, J. (2012) Laterally confined large-grained Poly-GeSi films: Crystallization and dopant activation using green laser. ECS Journal of Solid State Science and Technology, 1 (6). pp. 263-268. ISSN 2162-8769
Van Hao, B. and Kovalgin, A.Y. and Wolters, R.A.M. (2012) Growth of sub-nanometer thin continuous TiN films by atomic layer deposition. ECS Journal of Solid State Science and Technology, 1 (6). pp. 285-290. ISSN 2162-8769
Van Hao, B. and Wolters, R.A.M. and Kovalgin, A.Y. (2012) TiN films by Atomic Layer Deposition: Growth and electrical characterization down to sub-nm thickness. (Invited) In: Proceedings of the International Conference on Anvanced Materials and Nanotechnology (ICAMN 2012), 13-14 Dec 2012, Hanoi, Vietnam. pp. 7-12. Hanoi University of Science and Technology. ISBN 978-604-911-247-8

2011

Andricciola, P. (2011) Interpretation of MOS transistor mismatch signature through statistical device simulations. PhD thesis, University of Twente. ISBN 978-90-365-3289-1
Andricciola, P. and Tuinhout, H. and Wils, N. and Schmitz, J. (2011) Microsecond pulsed DC matching measurements on MOSFETs in strong and weak inversion. In: 24th International Conference on Microelectronic Test Structures, ICMTS 2011, 4-7 Apr 2011, Amsterdam. pp. 90-94. IEEE Electron Devices Society. ISSN 1071-9032 ISBN 978-1-4244-8527-7
Bilevych, Y. and Blanco Carballo, V.M. and Chefdeville, M.A. and Colas, P. and Delagnes, E. and Fransen, M. and van der Graaff, H. and Koppert, W.J.C. and Melai, J. and Salm, C. and Schmitz, J. and Timmermans, J. and Wyrsch, N. (2011) Spark protection layers for CMOS pixel anode chips in MPGDs. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 629 (1). pp. 66-73. ISSN 0168-9002 *** ISI Impact 1,14 ***
Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. (2011) Negative Charge in Plasma Oxidized SiO2 Layers In: 219th ECS Meeting, 1 - 6 May 2011, Montreal QC, Canada. pp. 259-272. The Electrochemical Society. ISSN 1938-5862
Brunets, I. and Walters, R.J. and Kovalgin, A.Y. and Polman, A. and Schmitz, J. (2011) Realization of Silicon-Nanodots-Based CMOS Backend-Compatible Electrical SPP Source. In: 219th ECS Meeting, 1-6 May 2011, Montreal, QC, Canada. MA2011-01. Electrochemical Society . ISSN 2151-2043
Faber, E.J. and Wolters, R.A.M. and Schmitz, J. (2011) On the kinetics of platinum silicide formation. Applied physics letters, 98 (8). 082102. ISSN 0003-6951 *** ISI Impact 3,79 ***
Faber, E.J. and Wolters, R.A.M. and Schmitz, J. (2011) Gap-closing test structures for temperature budget determination. In: 24th International Conference on Microelectronic Test Structures, ICMTS 2011, 4-7 Apr 2011, Amsterdam. pp. 165-169. IEEE Electron Devices Society. ISSN 1071-9032 ISBN 978-1-4244-8527-7
Groenland, A.W. (2011) Nanolink-based thermal devices: integration of ALD TiN thin films. PhD thesis, University of Twente. ISBN 978-90-365-3213-6
Groenland, A.W. and Kovalgin, A.Y. and Schmitz, J. (2011) Nano-Link Based Ultra Low Power Micro Electronic Hotplates for Sensors and Actuators. ECS Transactions, 35 (30). pp. 25-34. ISSN 1938-5862
Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2011) A Difference in Using Atomic Layer Deposition or Physical Vapour Deposition TiN as Electrode Material in Metal-Insulator-Metal and Metal-Insulator-Silicon Capacitors. Journal of nanoscience and nanotechnology, 11 (9). pp. 8368-8373. ISSN 1533-4880 *** ISI Impact 1,15 ***
van Hemert, T. and Kaleli, B. and Hueting, R.J.E. and Esseni, D. and van Dal, M.J.H. and Schmitz, J. (2011) Extracting the Conduction Band Offset in Strained FinFETs from Subthreshold-Current Measurements. In: Proceedings of the 41st European Solid-State Device Research Conference (Essderc 2011), 12-16 Sep 2011, Helsinki, Finland. pp. 275-278. IEEE Solid-State Circuits Society. ISBN 978-1-4577-0708-7
van Hemert, T. and Sakriotis, D. and Hueting, R.J.E. and Schmitz, J. (2011) Exploring Capacitance-Voltage measurements to find the Piezoelectric Coefficient of Aluminum Nitride. In: 24th International Conference on Microelectronic Test Structures, ICMTS 2011, 4-7 Apr 2011, Amsterdam. pp. 69-73. IEEE Electron Devices Society. ISSN 1071-9032 ISBN 978-1-4244-8527-7
Herfst, R.W. and Schmitz, J. and Scholten, A.J. (2011) Simultaneous extraction of threshold voltage and mobility degradation from on-the-fly NBTI measurements. In: IEEE International Reliability Physics Symposium, IRPS 2011, 10-14 Apr 2011, Monterey, CA, USA. XT.6.1 -XT.6.4. IEEE Reliability Society. ISSN 1541-7026 ISBN 978-1-4244-9113-1
Jose, S. (2011) Reflector stack optimization for Bulk Acoustic Wave resonators. PhD thesis, University of Twente. ISBN 978-90-365-3297-6
Kazmi, S.N.R. and Aarnink, A.A.I. and Kovalgin, A.Y. and Salm, C. and Schmitz, J. (2011) Low Stress In Situ Boron Doped Poly SiGe Layers for MEMS Modular Integration with CMOS. ECS Transactions, 35 (30). pp. 45-52. ISSN 1938-5862
Koppert, W.J.C. and Fransen, M. and van Bakel, N. and van der Graaf, H. and Hartjes, F. and Timmermans, J. and Visser, J. and Kluit, R. and Gromov, V. and Zappon, F. and Blanco Carballo, V.M. and Schmitz, J. and Bilevych, Y. (2011) Charge protection characterisation and drift time resolution improvement for GridPix. In: IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2011, 23-29 Oct 2011, Valencia, Spain. pp. 1799-1802. IEEE Nuclear & Plasma Sciences Society. ISSN 1082-3654 ISBN 978-1-4673-0118-3
Lu, Jiwu (2011) Solar Cells on CMOS Chips as Energy Harvesters. PhD thesis, University of Twente. ISBN 978-90-365-3211-2
Lu, Jiwu and Kovalgin, A.Y. and van der Werf, C.H.M. and Schropp, R.E.I. and Schmitz, J. (2011) Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells. IEEE transactions on electron devices, 58 (5). pp. 2014-2021. ISSN 0018-9383 *** ISI Impact 2,06 ***
Lu, Jiwu and Liu, Wei and Kovalgin, A.Y. and Sun, Y. and Schmitz, J. (2011) Materials Characterization of CIGS solar cells on Top of CMOS chips. In: Proceedings of 2011 MRS Spring Meeting, 25-29 Apr 2011, San Francisco, USA. e06-23. Cambridge University Press. ISSN 1946-4274
Lu, Jiwu and Liu, Wei and Kovalgin, A.Y. and Sun, Yun and Schmitz, J. (2011) Integration of Solar Cells on Top of CMOS Chips - Part II: CIGS Solar Cells. IEEE transactions on electron devices, 58 (8). pp. 2620-2627. ISSN 0018-9383 *** ISI Impact 2,06 ***
Piccolo, G. and Puliyankot Palackavalapil, V. and Kovalgin, A.Y. and Hueting, R.J.E. and Heringa, A. and Schmitz, J. (2011) Light emission enhancement by geometrical scaling of carrier injectors in Si-based LEDs. In: 2011 Proceedings of the 41st European Solid-State Device Research Conference (Essderc), 12-16 Sep 2011, Helsinki, Finland. pp. 175-178. IEEE Solid-State Circuits Society. ISBN 978-1-4577-0708-7
Puliyankot Palackavalapil, V. and Piccolo, G. and Hueting, R.J.E. and Heringa, A. and Kovalgin, A.Y. and Schmitz, J. (2011) Increased light emission by geometrical changes in Si LEDs. In: Proceedings of the 8th International Conference on Group IV Photonics (GFP), 14-16 Sep 2011, London, UK. pp. 287-289. IEEE Photonics Society. ISBN 978-1-4244-8340-2
Rangarajan, B. and Brunets, I. and Oesterlin, P. and Kovalgin, A.Y. and Schmitz, J. (2011) Green Laser Crystallization of GeSi thin Films and Dopant Activation. In: 219 th ECS meeting Transactions, 1 - 6 May 2011, Montreal, QC, Canada. pp. 17-25. The Electrochemical Society. ISSN 1938-5862
Rangarajan, B. and Brunets, I. and Oesterlin, P. and Kovalgin, A.Y. and Schmitz, J. (2011) Characterization of Green Laser Crystallized GeSi Thin Films. In: Proceedings of 2011 MRS Spring Meeting, 25-29 Apr 2011, San Francisco, USA. a06-04. MRS Proceedings 1321. Cambridge University Press. ISSN 1946-4274
Roy, D. (2011) Characterization of electrical contacts for phase change memory cells. PhD thesis, University of Twente. ISBN 978-90-77172-77-3
Roy, D. and Klootwijk, J.H. and Gravesteijn, D.J. and Wolters, R.A.M. (2011) Contact resistance of TiW to ultra-thin phase change material layers. In: 2011 Proceedings of the 41st European Solid-State Device Research Conference (Essderc), 12-16 Sep 2011, Helsinki, Finland. pp. 87-90. IEEE Solid-State Circuits Society. ISBN 978-1-4577-0708-7
Roy, D. and Pijper, R.M.T. and Tiemeijer, L.F. and Wolters, R.A.M. (2011) Contact resistance measurement structures for high frequencies. In: Proceedings of the 24th International Conference on Microelectronic Test Structures (ICMTS), 4-7 Apr 2011, Amsterdam. pp. 49-54. IEEE Electron Devices Society. ISSN 1071-9032 ISBN 978-1-4244-8527-7
Roy, D. and Wolters, R.A.M. (2011) Interface Characterization of Metals and Metal-nitrides to Phase Change Materials. In: Proceedings of 2011 MRS Spring Meeting, 25-29 Apr 2011, San Francisco, USA. q03-02. Cambridge University Press. ISSN 1946-4274
Roy, D. and in 't Zandt, M.A.A. and Wolters, R.A.M. (2011) Electrical characterization of Thin-Film structures with redeposited sidewall. IEEE transactions on electron devices, 58 (4). pp. 924-930. ISSN 0018-9383 *** ISI Impact 2,06 ***
van der Steen, J-L.P.J. (2011) Geometrical scaling effects on carrier transport in ultrthin-body MOSFETs. PhD thesis, University of Twente. ISBN 978-90-365-3158-0
Van Hao, B. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. (2011) Ultra-Thin Atomic Layer Deposited TiN Films: Non-Linear I–V Behaviour and the Importance of Surface Passivation. Journal of nanoscience and nanotechnology, 11 (9). pp. 8120-8125. ISSN 1533-4880 *** ISI Impact 1,15 ***
Van Hao, B. and Groenland, A.W. and Aarnink, A.A.I. and Wolters, R.A.M. and Schmitz, J. and Kovalgin, A.Y. (2011) Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry. Journal of the Electrochemical Society, 158 (3). pp. 214-220. ISSN 0013-4651 *** ISI Impact 2,59 ***
Vereshchagina, E. and Wolters, R.A.M. and Gardeniers, J.G.E. (2011) Measurement of reaction heats using a polysilicon-based microcalorimetric sensor. Sensors and actuators A (Physical), 169 (2). pp. 308-316. ISSN 0924-4247 *** ISI Impact 1,84 ***
Vereshchagina, E. and Wolters, R.A.M. and Gardeniers, J.G.E. (2011) The development of titanium silicide–boron-doped polysilicon resistive temperature sensors. Journal of micromechanics and microengineering, 21 (10). 105022. ISSN 0960-1317 *** ISI Impact 1,79 ***

2010

Andricciola, P. and Tuinhout, H. and Wils, N. (2010) Trends and differences of the temperature effect on mismatch in different CMOS technology nodes. In: Proceedings of STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands. Technology Foundation STW. ISBN 978-90-73461-67-3
Andricciola, P. and Tuinhout, H.P. (2010) Mismatch sources in LDMOS devices. In: Proceedings of the 40th European Solid-State Device Research, Essderc 2010, 13-17 Sep 2010, Sevilla, Spain. pp. 126-129. IEEE Solid-State Circuits Society. ISBN 978-1-4244-6660-3
Blanco Carballo, V.M. and Chefdeville, M.A. and Decowski, M.P. and Fransen, M. and van der Graaf, H. and Koppert, W.J.C. and Schmitz, J. (2010) Applications of GridPix detectors. Journal of Instrumentation, 5 (2). pp. 1-5. ISSN 1748-0221
Blanco Carballo, V.M. and Fransen, M. and van der Graaf, H. and Lu, Jiwu and Schmitz, J. (2010) A CMOS compatible Microbulk Micromegas-like detector using silicon oxide as spacer material. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 629 (1). pp. 118-122. ISSN 0168-9002 *** ISI Impact 1,14 ***
Boksteen, B.K. (2010) A simulation study and analysis of advanced silicon schottky barrier field effect transistors. Master's thesis, University of Twente.
Boksteen, B.K. and Hueting, R.J.E. and Salm, C. and Schmitz, J. (2010) An Initial study on The Reliability of Power Semiconductor Devices. In: Proceedings of STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands. pp. 68-72. Technology Foundation STW. ISBN 978-90-73461-67-3
van Dijk, K. and Volf, P. and Detcheverry, C. and Yau, A. and Ngan, P. and Liang, Z. and Kuper, F.G. (2010) Validating foundry technologies for extended mission profiles. In: Proceedings of IEEE International Reliability Physics Symposium 2010 (IRPS), 2-6 May 2010, Anaheim, CA, USA. pp. 111-116. IEEE Computer Society. ISBN 978-1-4244-5430-3
Faber, E.J. and Wolters, R.A.M. and Schmitz, J. (2010) Novel test structures for temperature budget determination during wafer processing. In: IEEE International Conference on Microelectronic Test Structures (ICMTS), 2010, 22-25 Mar 2010, Hirosjima, Japan. pp. 30-33. IEEE Computer Society. ISBN 978-1-4244-6912-3
Faber, E.J. and Wolters, R.A.M. and Schmitz, J. (2010) Thermal history sensing. Patent EP20100010930 (Application).
Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2010) On the leakage problem of MIM capacitors due to improper etching of titanium nitride. In: Proceedings of STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands. pp. 89-92. Technology Foundation STW. ISBN 978-90-73461-67-3
Hasper, A. and Snijders, G.J. and Vandezande, L. and De Blank, M.J. and Bankras, R.G. (2010) Deposition of TiN films in a batch reactor. Patent US7732350 (Assigned).
van Hemert, T. and Hueting, R.J.E. and Rajasekharan, B. and Salm, C. and Schmitz, J. (2010) On the modelling and optimisation of a novel Schottky based silicon rectifier. In: Proceedings of the 40th European Solid-State Device Research, Essderc 2010, 13-17 Sep 2010, Sevilla, Spain. pp. 460-463. IEEE Solid-State Circuits Society. ISBN 978-1-4244-6660-3
Herfst, R.W. and Steeneken, P.G. and Tiggelman, M.P.J. and Stulemeijer, J. and Schmitz, J. (2010) Fast RF-CV characterization through high-speed 1-port S-parameter measurements. In: Proceedings of IEEE International Conference on Microelectronic Test Structures (ICMTS), 2010, 22-25 Mar 2010, Hirosjima, Japan. pp. 170-173. IEEE Computer Society. ISBN 978-1-4244-6912-3
Jinesh, K.B. (2010) Dielectric properties of atomic-layer-deposited LayZr1-yOx and EryHf1-yOx thin films PhD thesis, University of Twente. ISBN 978-90-889-1196-5
Jose, S. and Hueting, R.J.E. and Jansman, A.B.M. (2010) Acoustic dispersion of solidly mounted resonators with an optimized reflector stack for dual wave reflection. In: Proceedings of the IEEE International Ultrasonics Symposium, IUS 2010, 11-14 Oct 2010, San Diego, CA. pp. 91-94. IEEE Ultrasonics, Ferroelectrics & Frequency Control Society. ISBN 978-1-4577-0382-9
Jose, S. and Jansman, A.B.M. and Hueting, R.J.E. and Schmitz, J. (2010) Optimized reflector stacks for solidly mounted bulk acoustic wave resonators. IEEE transactions on ultrasonics, ferroelectrics and frequency control, 57 (12). pp. 2753-2763. ISSN 0885-3010 *** ISI Impact 1,82 ***
Kaleli, B. and Aarnink, A.A.I. and Smits, S.M. and Hueting, R.J.E. and Wolters, R.A.M. and Schmitz, J. (2010) Electron Beam Lithography of HSQ and PMMA Resists and Importance of their Properties to Link the Nano World to the Micro World. In: Proceeding of STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands. pp. 105-108. Technology Foundation STW. ISBN 978-90-73461-67-3
Kazmi, S.N.R. and Rangarajan, B. and Aarnink, A.A.I. and Salm, C. and Schmitz, J. (2010) Low Stressed In-situ Boron doped Poly SiGe Layers for High-Q Resonators. In: Proceedings of the STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands. pp. 109-113. Technology Foundation STW. ISBN 978-90-73461-67-3
Knotter, D.M. and Wali, F. (2010) Particles in Semiconductor Processing. In: Developments in Surface Contamination and Cleaning - Methods for Removal of Particle Contaminants. Elsevier, Amsterdam, pp. 81-120. ISBN 978-1-4377-7830-4
Li, Yuan and Donnet, D. and Grzegorczyk, A. and Cavelaars, J. and Kuper, F.G. (2010) Assessing the degradation mechanisms and current limitation design rules of SICR-based thin-film resistors in integrated circuits. In: Proceedings of the IEEE International Reliability Physics Symposium 2010 (IRPS), 2-6 May 2010, Anaheim, CA, USA. pp. 724-730. IEEE Computer Society. ISBN 978-1-4244-5430-3
Lu, Jiwu and Liu, Wei and van der Werf, C.H.M. and Kovalgin, A.Y. and Sun, Y. and Schropp, R.E.I. and Schmitz, J. (2010) Above-CMOS a-Si and CIGS Solar Cells for Powering Autonomous Microsystems. In: Proceedings of the 2010 IEEE International Electron Devices Meeting (IEDM), 6-8 Dec 2010, San Francisco, USA. 31.3.1.-31.3.4. IEEE Electron Devices Society. ISSN 0163-1918 ISBN 978-1-4424-7418-5
Melai, J. (2010) Photon imaging using post-processed CMOS chips. PhD thesis, University of Twente. ISBN 978-90-365-3132-0
Melai, J. and Blanco Carballo, V.M. and Salm, C. and Schmitz, J. (2010) Suspended membranes, cantilevers and beams using SU-8 foils. Microelectronic engineering, 87 (5-8). pp. 1274-1277. ISSN 0167-9317 *** ISI Impact 1,22 ***
Melai, J. and Breskin, A. and Cortesi, M. and Bilevych, Y. and Fransen, M. and van der Graaf, H. and Visschers, J.A. and Blanco Carballo, V.M. and Salm, C. and Schmitz, J. (2010) A UV sensitive integrated micromegas with timepix readout. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 628. pp. 133-137. ISSN 0168-9002 *** ISI Impact 1,14 ***
Melai, J. and Lyashenko, A. and Breskin, A. and van der Graaf, H. and Timmermans, J. and Visschers, J.A. and Salm, C. and Schmitz, J. (2010) An integrated micromegas UV-photon detector. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 633. pp. 194-197. ISSN 0168-9002 *** ISI Impact 1,14 ***
Nguyen, Van Hieu and Salm, C. (2010) Effect of current crowding on electromigration lifetime investigated by simulation and experiment. Computational Materials Science, 49 (4 - Supplement 1). S235-S238. ISSN 0927-0256 *** ISI Impact 1,88 ***
Oosthoek, J.L.M. and Kooi, B.J. and De Hosson, J.T.M. and Wolters, R.A.M. and Gravesteijn, D.J. and Attenborough, K. (2010) Growth rate determination through automated TEM image analysis: crystallization studies of doped SbTe phase-change thin films. Microscopy and Microanalysis, 16 (3). pp. 291-299. ISSN 1431-9276 *** ISI Impact 2,50 ***
Piccolo, G. and Kovalgin, A.Y. and Schmitz, J. (2010) On the effect of nano-injectors on conduction in silicon p-i-n diodes. In: Proceedings of STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands. pp. 140-142. Technology Foundation STW. ISBN 978-90-73461-67-3
Rajasekharan, B. and Hueting, R.J.E. and Salm, C. and van Hemert, T. and Wolters, R.A.M. and Schmitz, J. (2010) Fabrication and characterization of the charge-plasma diode. IEEE electron device letters, 31 (6). pp. 528-530. ISSN 0741-3106 *** ISI Impact 2,79 ***
Roy, D. and in 't Zandt, M.A.A. and Wolters, R.A.M. (2010) Bias dependent specic contact resistance of phase change material to metal contacts. In: Proceedings of STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands. pp. 147-149. Technology Foundation STW. ISBN 978-90-73461-67-3
Roy, D. and in 't Zandt, M.A.A. and Wolters, R.A.M. (2010) Specific contact resistance of phase change materials to metal electrode. IEEE electron device letters, 31 (11). pp. 1293-1295. ISSN 0741-3106 *** ISI Impact 2,79 ***
Salm, C. and Eijkel, J.C.T. and van der Heijden, F. and Odijk, M. (2010) Adapting to a changing highschool population. In: Proceedings of 8th European Workshop on Microelectronics Education, EWME 2010, 10-12 May 2010, Darmstadt, Germany. pp. 180-184. Technische Universitaet Darmstadt. ISBN not assigned
van der Steen, J-L.P.J. and Palestri, P. and Esseni, D. and Hueting, R.J.E. (2010) A new model for the backscatter coefficient in nanoscale MOSFETs. In: Proceedings of the 40th European Solid-State Device Research, Essderc 2010, 13-17 Sep 2010, Sevilla, Spain. pp. 234-237. IEEE Solid-State Circuits Society. ISBN 978-1-4244-6660-3
Tiggelman, M.P.J. and Reimann, K. and Klee, M. and Mauczock, R. and Keur, W. and Hueting, R.J.E. (2010) BaxSr1-xTi1.02O3 metal-insulator-metal capacitors on planarized alumina substrates Thin solid films, 518 (10). pp. 2854-2959. ISSN 0040-6090 *** ISI Impact 1,60 ***
Tiggelman, N. and Kovalgin, A.Y. and Brennan, R. and Wolters, R.A.M. (2010) Low specific contact resistance of NiSi and PtSi to Si: impact of interface. Electrochemical and solid-state letters, 13 (12). H450-H453. ISSN 1099-0062 *** ISI Impact 2,01 ***
Walters, R. and Brunets, I. and Polman, A. and Schmitz, J. (2010) Integrated plasmonic nanocavity sensing device. Patent EP20100159175 (Application).
Walters, R.J. and van Loon, R.V.A. and Brunets, I. and Schmitz, J. and Polman, A. (2010) A silicon-based electrical source of surface plasmon polaritons. Nature materials, 9 (21-25). pp. 1-5. ISSN 1476-1122 *** ISI Impact 35,75 ***

2009

Aarnink, A.A.I. and Van Bui, B. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) In-situ monitoring of growth and oxidation of ALD TiN layers followed by reduction in atomic hydrogen. In: Proceedings of the 9th International conference on Atomic Layer Deposition, 19-22 Jul 2009, Monterey, CA, USA. America Vaccum Society, Omnipress. ISBN not assigned
Andricciola, P. and Tuinhout, H.P. (2009) Influence of halo doping profiles on MOS transistor mismatch. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 55-58. Technology Foundation STW. ISBN 978-90-73461-62-8
Arguirov, T. and Mchedlidze, T. and Kittler, M. and Reiche, M. and Wilhelm, T. and Hoang, Tù and Holleman, J. and Schmitz, J. (2009) Silicon based light emitters utilizing radiation from dislocations; electric field induced shift of the dislocation-related luminescence. Physica E, 41 (6). pp. 907-911. ISSN 1386-9477 *** ISI Impact 1,52 ***
Bilevych, Y. and Blanco Carballo, V.M. and Breur, S. and Fransen, M. and van der Graaf, H. and Hartjes, F. and Hessey, N. and Kalter, R. and Ketel, T. and Koppert, W.C. and Rogers, M. and Schmitz, J. and Timmermans, J. and Visschers, J. (2009) The performance of GridPix detectors. In: 2009 IEEE Nuclear Science Symposium Conference Record, 24 Oct - 01 Nov 2009, Orlando, FL, USA. pp. 231-236. IEEE Nuclear & Plasma Sciences Society. ISSN 1095-7863 ISBN 978-1-4244-3961-4
Bilevych, Y. and Blanco Carballo, V.M. and Chefdeville, M.A. and Fransen, M. and van der Graaf, H. and Salm, C. and Schmitz, J. and Timmermans, J. (2009) Twingrid: a wafer post-processed multistage micro patterned gaseous detector. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 610 (3). pp. 644-648. ISSN 0168-9002 *** ISI Impact 1,14 ***
Blanco Carballo, V.M. (2009) Radiation imaging detectors made by wafer post-processing of CMOS chips. PhD thesis, University of Twente. ISBN 978-90-365-2855-9
Blanco Carballo, V.M. and Bilevych, Y. and Chefdeville, M.A. and Fransen, M. and van der Graaf, H. and Salm, C. and Schmitz, J. and Timmermans, J. (2009) GEMGrid: a wafer post-processed GEM-like radiation detector. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 608 (1). pp. 86-91. ISSN 0168-9002 *** ISI Impact 1,14 ***
Blanco Carballo, V.M. and Melai, J. and Salm, C. and Schmitz, J. (2009) Moisture resistance of SU-8 and KMPR as structural material. Microelectronic engineering, 86 (4-6). pp. 765-768. ISSN 0167-9317 *** ISI Impact 1,22 ***
Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) Net Negative Charge in low-temperature SiO2 gate dielectric layers Microelectronic engineering, 86 (7-9). pp. 1707-1710. ISSN 0167-9317 *** ISI Impact 1,22 ***
Brunets, I. (2009) Electronic devices fabricated at CMOS backend-compatible temperatures. PhD thesis, University of Twente. ISBN 978-90-365-2935-8
Brunets, I. and Boogaard, A. and Smits, S.M. and de Vries, H. and Aarnink, A.A.I. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2009) Low temperature TFTs with poly-stripes. In: Proceedings of the 5th International Thin Film Transistor Conference ITC'09, 5-6 Mar 2009, Palaiseau, France. pp. 62-65. Ecole Polytechnique. ISBN not assigned
Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Boogaard, A. and Schmitz, J. (2009) Low-temperature fabricated TFTs on polysilicon stripes. IEEE transactions on electron devices, 56 (8). pp. 1637-1644. ISSN 0018-9383 *** ISI Impact 2,06 ***
Chefdeville, M.A. (2009) Development of micromegas-like gaseous detectors using a pixel readout chip as collecting anode. PhD thesis, Universiteit van Amsterdam. ISBN not assigned
Faber, E.J. and Wolters, R.A.M. and Rajasekharan, B. and Salm, C. and Schmitz, J. (2009) Monitoring silicide formation via in situ resistance measurements. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 67-70. Technology Foundation STW. ISBN 978-90-73461-62-8
Furukawa, Y. and Reimann, K. and Jedema, F. and Tiggelman, M.P.J. and Roest, A.L. (2009) Tunable capacitor. Patent EP20090742493 (Application).
Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films. In: Proceedings of the 2009 IEEE International Conference on Microelectronic Test Structures, 30 Mar - 2 Apr 2009, Oxnard, CA, USA. pp. 191-195. IEEE Computer Society. ISBN 978-1-4244-4259-1
Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Contact chain measurements for ultrathin conducting films. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 150-152. Technology Foundation STW. ISBN 978-90-73461-62-8
van Hemert, T. (2009) On the Modeling and Simulation of Novel Schottky Based Silicon Rectifiers. Master's thesis, University of Twente.
Hueting, R.J.E. (2009) PNP with lateral Schottky emitter and Schottky collector. Patent WO2009066364 (Application).
Jose, S. and Jansman, A.B.M. and Hueting, R.J.E. (2009) Solidly Mounted Resonator with Optimized Acoustic Reflector. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 159-162. Technology Foundation STW. ISBN 978-90-73461-62-8
Jose, S. and Jansman, A.B.M. and Hueting, R.J.E. (2009) A design procedure for an acoustic mirror providing dual reflection of longitudinal and shear waves in Solidly Mounted BAW Resonators (SMRs). In: Proceedings of the IEEE International Ultrasonics Symposium (IUS) 2009, 20-23 Sep 2009, Rome, Italy. pp. 2111-2114. IEEE Press. ISSN 1948-5719 ISBN 978-1-4244-4389-5
Kazmi, S.N.R. and Salm, C. and Schmitz, J. (2009) Materials selection for low temperature processed high Q resonators using ashby approach. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 81-84. Technology Foundation STW. ISBN 978-90-73461-62-8
Klee, M. and van Esch, H. and Keur, W. and Kumar, B. and van Leuken-Peters, L. and Liu, Jin and Mauczock, R. and Neumann, K. and Reimann, K. and Renders, C. and Roest, A.L. and Tiggelman, M.P.J. and de Wild, M. and Wunnicke, O. and Zhao, J. (2009) Ferroelectric Thin-Film Capacitors and Piezoelectric Switches for Mobile Communication Applications. IEEE transactions on ultrasonics, ferroelectrics and frequency control, 56 (8). pp. 1505-1512. ISSN 0885-3010 *** ISI Impact 1,82 ***
Kovalgin, A.Y. and Boogaard, A. and Brunets, I. and Aarnink, A.A.I. and Wolters, R.A.M. (2009) Electrical properties of plasma-deposited silicon oxide clarified by chemical modeling. ECS Transactions, 25 (8). pp. 23-32. ISSN 1938-5862
Kovalgin, A.Y. and Boogaard, A. and Wolters, R.A.M. (2009) Impact of small deviations in EEDF on silane-based plasma chemistry. ECS Transactions, 25 (8). pp. 429-436. ISSN 1938-5862
Lu, Jiwu and Kovalgin, A.Y. and Schmitz, J. (2009) Influence of passivation process on chip performance. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 542-544. Technology Foundation STW. ISBN 978-90-73461-62-8
Melai, J. and Lyashenko, A. and Breskin, A. and van der Graaf, H. and Timmermans, J. and Visschers, J.A. and Salm, C. and Schmitz, J. (2009) Photocathodes for a post-processed imaging array. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 32-35. Technology Foundation STW. ISBN 978-90-73461-62-8
Melai, J. and Salm, C. and Smits, S.M. and Visschers, J.A. and Schmitz, J. (2009) The electrical conduction and dielectric strength of SU-8. Journal of micromechanics and microengineering, 19 (6). pp. 065012-065018. ISSN 0960-1317 *** ISI Impact 1,79 ***
Melai, J. and Salm, C. and Wolters, R.A.M. and Schmitz, J. (2009) Qualitative and quantitative characterization of outgassing from SU-8. Microelectronic engineering, 86 (4-6). pp. 761-764. ISSN 0167-9317 *** ISI Impact 1,22 ***
Mouthaan, A.J. and van der Vegt, J.J.W. (2009) Self-Evaluation Applied Mathematics 2003-2008 University of Twente. Scientific Report Number UNSPECIFIED, Faculty of Electrical Engineering, Mathematics and Computer Science, University of Twente, Enschede.
Piccolo, G. and Kovalgin, A.Y. and Schmitz, J. (2009) Effect of carrier injector size on silicon LED performance. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 167-169. Technology Foundation STW. ISBN 978-90-73461-62-8
Puliyankot Palackavalapil, V. and Hueting, R.J.E. and Schmitz, J. (2009) An initial modelling and simulation study on the 1D Si-Based LED. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 170-173. Technology Foundation STW. ISBN 978-90-73461-62-8
Rajasekharan, B. and Salm, C. and Hueting, R.J.E. and Wolters, R.A.M. and Schmitz, J. (2009) Metal contacts to lowly doped Si and ultra thin SOI. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 103-104. Technology Foundation STW. ISBN 978-90-73461-62-8
Rajasekharan, B. and Salm, C. and Wolters, R.A.M. and Aarnink, A.A.I. and Boogaard, A. and Schmitz, J. (2009) Metal contacts to lowly doped Si and ultra thin SOI. In: Proceedings of Fifth Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, 19-21 Jan 2009, Gotheburg, Sweden. pp. 29-30. Chalmers University of Technology. ISBN not assigned
Rangarajan, B. and Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2009) TFTs as photodetectors for optical interconnects. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 52-54. Technology Foundation STW. ISBN 978-90-73461-62-8
Rink, I. and Wali, F. and Knotter, D.M. (2009) Impact of metal-ion contaminated silica particles on gate oxide integrity. Solid State Phenomena, 145-146. pp. 131-134. ISSN 1012-0394
van Rossem, F. (2009) Doping extraction in FinFETs. Master's thesis, University of Twente.
Roy, D. and Klootwijk, J.H. and Verhaegh, N.A.M. and Roosen, H.H.A.J. and Wolters, R.A.M. (2009) Comb Capacitor Structures for On-Chip Physical Uncloneable Function. IEEE Transactions on Semiconductor Manufacturing, 22 (1). pp. 96-102. ISSN 0894-6507 *** ISI Impact 0,86 ***
Roy, D. and in 't Zandt, M.A.A. and Wolters, R.A.M. (2009) Impact of sidewalls on electrical characterization. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 105-107. Technology Foundation STW. ISBN 978-90-73461-62-8
Roy, D. and in 't Zandt, M.A.A. and Wolters, R.A.M. and Timmering, C.E. and Klootwijk, J.H. (2009) Contact resistance of TiW to phase change material in the amorphous and crystalline states. In: Proceedings of 10th Non-Volatile Memory Technology Symposium (NVMTS) 2009, 25-28 Oct. 2009, Portland, OR, USA. pp. 12-15. IEEE. ISBN 978-1-4244-4954-5
Schmitz, J. (2009) Special Section on the 2008 International Conference on Microelectronic Test Structure. In: Special Section on the 2008 International Conference on Microelectronic Test Structure, 2008, Edinburgh, UK. pp. 50-50. IEEE Transactions on Semiconductor Manufacturing 22 (1). IEEE Solid-State Circuits Society. ISSN 0894-6507
Scholten, A.J. and Smit, G.D.J. and Pijper, R.M.T. and Tiemijer, L.F. and Tuinhout, H.P. and van der Steen, J-L.P.J. and Mercha, A. and Braccioli, M. and Klaassen, D.B.M. (2009) Experimental assessment of self-heating in SOI FinFETs. In: Proceedings of the 2009 International Electron Device Meeting, 5-11 Dec 2009, Baltimore, USA. pp. 305-308. IEEE Computer Society. ISBN 978-1-4244-5640-6
Stavitski, N. (2009) Silicide-to-silicon specific contact resistance characterization. PhD thesis, University of Twente. ISBN 978-90-365-2939-6
Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) Cross-Bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization. IEEE Transactions on Semiconductor Manufacturing, 22 (1). pp. 146-152. ISSN 0894-6507 *** ISI Impact 0,86 ***
van der Steen, J-L.P.J. and Hueting, R.J.E. and Schmitz, J. (2009) Extracting energy band offsets on long-channel thin silicon-on-insulator MOSFETs. IEEE transactions on electron devices, 56 (9). pp. 1999-2007. ISSN 0018-9383 *** ISI Impact 2,06 ***
Tiggelaar, R.M. and Groenland, A.W. and Sanders, R.G.P. and Gardeniers, J.G.E. (2009) Electrical properties of low pressure chemical vapor deposited silicon nitride thin films for temperatures up to 650 °C. Journal of applied physics, 105 (3). 033714. ISSN 0021-8979 *** ISI Impact 2,21 ***
Tiggelaar, R.M. and Sanders, R.G.P. and Groenland, A.W. and Gardeniers, J.G.E. (2009) Stability of thin platinum films implemented in high-temperature microdevices. Sensors and actuators A: Physical, 152 (1). pp. 39-47. ISSN 0924-4247 *** ISI Impact 1,84 ***
Tiggelman, M.P.J. (2009) Thin film barium strontium titanate capacitors for tunable RF front-end applications. PhD thesis, University of Twente. ISBN 978-90-365-2937-2
Tiggelman, M.P.J. and Reimann, K. (2009) Reconfigurable radio-frequency front-end. Patent EP20090786833 (Application).
Tiggelman, M.P.J. and Reimann, K. and Van Rijs, F. and Schmitz, J. and Hueting, R.J.E. (2009) On the trade-off between quality factor and tuning ratio in tunable high-frequency capacitors. IEEE transactions on electron devices, 56 (9). pp. 2128-2136. ISSN 0018-9383 *** ISI Impact 2,06 ***
Van Hao, B. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Schmitz, J. (2009) Thermal atomic layer deposition and oxidation of TiN monitored by in-situ spectroscopic ellipsometry. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 59-62. Technology Foundation STW. ISBN 978-90-73461-62-8
Wali, F. and Knotter, D.M. and Bearda, T. and Mertens, P.W. (2009) Local distribution of particles deposited on patterned surfaces. Solid State Phenomena, 145-146. pp. 65-68. ISSN 1012-0394
Wali, F. and Knotter, D.M. and Mud, A. and Kuper, F.G. (2009) Impact of particles in ultra pure water on random yield loss in IC production. Microelectronic engineering, 86 (2). pp. 140-144. ISSN 0167-9317 *** ISI Impact 1,22 ***
Walters, R.J. and van Loon, R.V.A. and Brunets, I. and Schmitz, J. and Polman, A. (2009) A silicon-based electrical source for surface plasmon polaritons. In: Proceedings of the 6th International Conference on GroupIV Photonics GFP'09, 9-11 Sept 2009, San Francisco, USA. pp. 74-76. IEEE Computer Society. ISBN 978-1-4244-4402-1
in 't Zandt, M.A.A. and Jedema, M.J. and Gravesteijn, D.J. and Attenborough, K. and Wolters, R.A.M. (2009) Doped SbTe phase change material in memory cells. (Invited) In: Proceedings of the International Materials Research Congress (IMRC 2009), 16-21 Aug 2009, Cancun, Mexico. Materials Research Society. ISBN not assigned

2008

Agiral, A. and Groenland, A.W. and Kumar Chinthaginjala, J. and Seshan, K. and Lefferts, L. and Gardeniers, J.G.E. (2008) On-chip microplasma reactors using carbon nanofibres and tungsten oxide nanowires as electrodes. Journal of physics D: applied physics, 41 (19). 194009. ISSN 0022-3727 *** ISI Impact 2,53 ***
Bilevych, Y. and Blanco Carballo, V.M. and Chefdeville, M.A. and Fransen, M. and van der Graaf, H. and de Groot, N. and Hartjes, F. and Konig, A. and de Nooij, L. and Rogers, M. and Schmitz, J. and Timmermans, J. and Romaniouk, A. and Konovalov, S. and Morozov, S. (2008) New results from GridPix detectors. In: Proceedings of IEEE Nuclear Science Symposium Conference Record (NSS2008), 19-25 Oct 2008, Dresden, Germany. pp. 1311-1315. IEEE Computer Society. ISBN 978-1-4244-2715-4
Blanco Carballo, V.M. and Chefdeville, M.A. and Fransen, M. and van der Graaf, H. and Melai, J. and Salm, C. and Schmitz, J. and Timmermans, J. (2008) A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip. IEEE electron device letters, 29 (6). pp. 585-588. ISSN 0741-3106 *** ISI Impact 2,79 ***
Blanco Carballo, V.M. and Melai, J. and Salm, C. and Schmitz, J. (2008) Moisture resistance of SU-8 and KMPR as structural material for integrated gaseous detectors. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 395-398. Technology Foundation STW. ISBN 978-90-73461-56-7
Boogaard, A. and Roesthuis, R. and Brunets, I. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2008) Deposition of High-Quality SiO2 Insulating Films at Low Temperatures by means of Remote PECVD In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 452-456. Technology Foundation STW. ISBN 978-90-73461-56-7
Brunets, I. and Groenland, A.W. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. (2008) A study of thermal oxidation and plasma-enhanced oxidation/reduction of ALD TiN layers. In: Proceedings of the 18th International Conference on Atomical Layer Deposition ALD 2008, 29 Jun - 2 Jul 2008, Bruges, Belgium. P-54. TUe Eindhoven. ISBN not assigned
Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Poly-Si stripe TFTs by Grain-Boundary controlled crystallization of Amorphous-Si. In: Proceedings of the 38th European Solid-State Device Research Conference, 15-19 September 2008, Edinburgh, Schotland. pp. 87-90. IOP Institute of Physics. ISBN 978-1-4244-2363-7
Brunets, I. and van Loon, R.V.A. and Walters, R.J. and Polman, A. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2008) Light emission from silicon nanocrystals embedded in ALD-alumina at low temperatures. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 399-402. Technology Foundation STW. ISBN 978-90-73461-56-7
Chefdeville, M.A. and van der Graaf, H. and Hartjes, F. and Timmermans, J. and Visschers, J.A. and Blanco Carballo, V.M. and Salm, C. and Schmitz, J. and Smits, S.M. and Colas, P. and Giomataris, I. (2008) Pulse height fluctuations of integrated micromegas detectors. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 591 (1). pp. 147-150. ISSN 0168-9002 *** ISI Impact 1,14 ***
Groenland, A.W. and Brunets, I. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Schmitz, J. (2008) Thermal and plasma-enhanced oxidation of ALD TiN. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 468-471. Technology Foundation STW. ISBN 978-90-73461-56-7
Herfst, R.W. (2008) Degradation of RF MEMS capacitive switches. PhD thesis, University of Twente. ISBN 978-90-365-2750-7
Herfst, R.W. and Steeneken, P.G. and Huizing, H.G.A. and Schmitz, J. (2008) Center-Shift Method for the Characterization of Dielectric Charging in RF MEMS Capacitive Switches. IEEE Transactions on Semiconductor Manufacturing, 21 (2). pp. 148-153. ISSN 0894-6507 *** ISI Impact 0,86 ***
Herfst, R.W. and Steeneken, P.G. and Schmitz, J. (2008) Identifying degradation mechanisms in RF MEMS capacitive switches. In: Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems, 13-17 Jan 2008, Tucson, AZ, USA. pp. 168-171. IEEE Computer Society. ISBN 978-1-4244-1793-3
Herfst, R.W. and Steeneken, P.G. and Schmitz, J. and Mank, A.J.G. and van Gils, M. (2008) Kelvin probe study of laterally inhomogeneous dielectric charging and charge diffusion in RF MEMS capacitive switches. In: Proceedings of the International Reliability Physics Symposium 2008, 27 Apr - 1 May 2008, Phoenix, AZ, USA. pp. 492-496. IEEE Computer Society. ISBN 978-1-4244-2050-6
Hoang, Tù and Holleman, J. and Schmitz, J. (2008) SOI LEDs with carrier confinement. In: Materials Science Forum. Trans Tech Publications, Switzerland, Stafa- Zurich, Switzerland, pp. 101-116. ISSN 1662-9752 ISBN 978-0-87849-358-6
Hueting, R.J.E. and Rajasekharan, B. and Salm, C. and Schmitz, J. (2008) The charge plasma P-N diode. IEEE electron device letters, 29 (12). pp. 1367-1369. ISSN 0741-3106 *** ISI Impact 2,79 ***
Jedema, F.J. and in 't Zandt, M.A.A. and Wolters, R.A.M. and Tio Castro, D. and Hurkx, G.A.M. and Delhounge, R. and Gravesteijn, D.J. and Attenborough, K. (2008) Scaling properties of doped Sb2Te phase change line cells In: 2008 Joint Non-Volatile Semiconductor Memory Workshop and International Conference on Memory Technology and Design, Proceedings, NVSMW/ICMTD, Ogura, Taku. pp. 43-45. IEEE. ISBN 978-1-4244-1547-2
Jinesh, K.B. and Lamy, Y. and Wolters, R.A.M. and Klootwijk, J.H. and Tois, E. and Roozeboom, F. and Besling, W.F.A. (2008) Silicon out-diffusion and aluminum in-diffusion in devices with atomic-layer deposited La2O3 thin films Applied physics letters, 93 (19). 192912. ISSN 0003-6951 *** ISI Impact 3,79 ***
Jose, S. and Hueting, R.J.E. and Jansman, A.B.M. (2008) Modelling of bulk acoustic wave resonators for microwave filters. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 558-561. Technology Foundation STW. ISBN 978-90-73461-56-7
Kazmi, S.N.R. and Schmitz, J. (2008) Comparison of gate capacitance extraction methodologies. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 562-564. Technology Foundation STW. ISBN 978-90-73461-56-7
Klee, M. and Keur, W. and Mauczock, R. and van Esch, H. and de Wild, M. and Liu, J. and Roest, A.L. and Reimann, K. and Renders, C. and Peters, L. and Tiggelman, M.P.J. and Wunnicke, O. and Neumann, K. (2008) MI004 miniaturised, high performance ferroelectric and piezoelectric thin film devices. In: 17th IEEE International Symposium on the Applications of Ferroelectrics, 2008. ISAF 2008, 23-28 feb 2008, Santa Re, NM, USA. pp. 1-4. IEEE Computer Society. ISSN 1099-4734 ISBN 978-1-4244-2744-4
Kovalgin, A.Y. and Isai, I.G. and Holleman, J. and Schmitz, J. (2008) Low-temperature SiO2 layers deposited by combination of ECR plasma and supersonic silane/helium jet Journal of the Electrochemical Society, 155 (2). G21-G28. ISSN 0013-4651 *** ISI Impact 2,59 ***
Kuindersma, P. and Hoang, Tù and Schmitz, J. and Vijayaraghavan, M.N. and Dijkstra, M. and van Noort, W. and Vanhoucke, T. and Peters, W.C.M. and Kramer, M.C.J.C.M. (2008) The power conversion efficiency of visible light emitting devices in standard BiCMOS processes. In: 5th IEEE International Conference on Group IV Photonics, 2008, 17-19 Sept 2008, Sorrento, Italy. pp. 256-258. IEEE Computer Society. ISBN 978-1-4244-1768-1
Kuper, F.G. (2008) Automotive IC reliability: Elements of the battle towards zero defects. Microelectronics reliability, 48 (8-9). pp. 1459-1463. ISSN 0026-2714 *** ISI Impact 1,14 ***
Lu, Jiwu and Kovalgin, A.Y. and Schmitz, J. (2008) Functional layers for CIGS solar cell on-chip fabrication during post-processing. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 487-490. Technology Foundation STW. ISBN 978-90-73461-56-7
Mchedlidze, T. and Arguirov, T. and Kittler, M. and Hoang, Tù and Holleman, J. and Le Minh, Phuong and Schmitz, J. (2008) Engineering of dislocation-loops for light emission from silicon diodes. Solid State Phenomena, 131-133. pp. 303-308. ISSN 1012-0394
Melai, J. and Blanco Carballo, V.M. and Salm, C. and Wolters, R.A.M. and Schmitz, J. (2008) Further outgassing studies on SU-8. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 491-494. Technology Foundation STW. ISBN 978-90-73461-56-7
Nijhuis, C.A. and ter Maat, J. and Bisri, Z.R. and Weusthof, M.H.H. and Salm, C. and Schmitz, J. and Ravoo, B.J. and Huskens, J. and Reinhoudt, D.N. (2008) Preparation of metal-SAM-dendrimer-SAM-metal junctions by supramolecular metal transfer printing. New journal of chemistry, 32. pp. 652-661. ISSN 1144-0546 *** ISI Impact 2,97 ***
van Noort, W.D. and Rodriguez, A. and Sun, HongJiang and Zaato, F. and Zhang, Nancy and Nesheiwat, T. and Neuilly, F. and Melai, J. and Hijzen, E. (2008) BiCMOS technology improvements for microwave application. In: Proceedings of IEEE Bipolar/BiCMOS Circuits and Technology Meeting, 2008 (BCTM 2008)., 13-15 Oct 2008, Monterey, CA, USA. pp. 93-96. IEEE Computer Society. ISSN 1088-9299 ISBN 978-1-4244-2725-3
Piccolo, G. and Hoang, Tù and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Silicon LEDs with antifuse injection. In: 5th IEEE International Conference on Group IV Photonics, 2008, 17-19 Sept 2008, Sorrento, Italy. pp. 49-51. IEEE Computer Society. ISBN 978-1-4244-1768-1
Piccolo, G. and Hoang, Tù and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Antifuse injectors for SOI LEDs. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 573-575. Technology Foundation STW. ISBN 978-90-73461-56-7
Rajasekharan, B. and Hueting, R.J.E. and Salm, C. and Hoang, Tù and Schmitz, J. (2008) Charge plasma diode - a novel device concept. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 576-579. Technology Foundation STW. ISBN 978-90-73461-56-7
Rajasekharan, B. and Salm, C. and Hueting, R.J.E. and Hoang, Tù and Schmitz, J. (2008) Dimensional scaling effects on transport properties of ultrathin body p-i-n diodes. In: Proceedings of the 9th Conference on ULtimate Integration on Silicon, 12-14 Mar 2008, Udine, Italy. pp. 195-198. Electron Device Society. IEEE Computer Society. ISBN 978-1-4244-1730-8
Roy, D. and Klootwijk, J.H. and Verhaegh, N.A.M. and Roosen, H.H.A.J. and Wolters, R.A.M. (2008) Comb capacitor structures for measurement of post-processed layers. In: Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures, 24-28 Mar 2008, Edinburgh, Schotland. pp. 205-209. IEEE Computer Society. ISBN 978-1-4244-1801-5
Roy, D. and in 't Zandt, M.A.A. and Delhounge, R. and Klootwijk, J.H. and Wolters, R.A.M. (2008) Influence of interfacial layer on contact resistance. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 499-500. Technology Foundation STW. ISBN 978-90-73461-56-7
Salm, C. and Blanco Carballo, V.M. and Melai, J. and Schmitz, J. (2008) Reliability aspects of a radiation detector fabricated by post-processing a standard CMOS chip. Microelectronics reliability, 48 (8-9). pp. 1139-1143. ISSN 0026-2714 *** ISI Impact 1,14 ***
Sasse, G.T. (2008) Reliability engineering in RF CMOS. PhD thesis, University of Twente. ISBN 978-90-365-2690-6
Sasse, G.T. and Acar, M. and Kuper, F.G. and Schmitz, J. (2008) RF CMOS reliability simulations. Microelectronics reliability, 48 (8-9). pp. 1581-1585. ISSN 0026-2714 *** ISI Impact 1,14 ***
Sasse, G.T. and Kuper, F.G. and Schmitz, J. (2008) MOSFET Degradation Under RF Stress. IEEE transactions on electron devices, 55 (11). pp. 3167-3174. ISSN 0018-9383 *** ISI Impact 2,06 ***
Sasse, G.T. and Schmitz, J. (2008) Application and evaluation of the RF charge-pumping technique. IEEE transactions on electron devices, 55 (3). pp. 881-889. ISSN 0018-9383 *** ISI Impact 2,06 ***
Schmitz, J. (2008) Special issue devoted to the ESSDERC'07 conference. In: Special issue devoted to the ESSDERC'07 conference. pp. 1265-1265. Elsevier. ISSN 0038-1101
Schmitz, J. and de Vries, R. and Salm, C. and Hoang, Tù and Hueting, R.J.E. and Holleman, J. (2008) On the switching speed of SOI LEDs. In: Proceedings of the Fourth Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, 23-25 Jan 2008, Cork, Ireland. pp. 101-102. Tyndall National Institute. ISBN not assigned
Stavitski, N. and van Dal, M.J.H. and Lauwers, A. and Vrancken, C. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) Systematic TLM Measurements of NiSi and PtSi Specific Contact Resistance to n- and p-Type Si in a Broad Doping Range. IEEE electron device letters, 29 (4). pp. 378-381. ISSN 0741-3106 *** ISI Impact 2,79 ***
Stavitski, N. and van Dal, M.J.H. and Lauwers, A. and Vrancken, C. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific Contact Resistance Extraction. IEEE transactions on electron devices, 55 (5). pp. 1170-1176. ISSN 0018-9383 *** ISI Impact 2,06 ***
Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) A study of cross-bridge kelvin resistor structures for reliable measurement of low contact resistances. In: Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures, 24-28 Mar 2008, Edinburgh, Schotland. pp. 199-204. IEEE Computer Society. ISBN 978-1-4244-1801-5
van der Steen, J-L.P.J. and Hueting, R.J.E. and Schmitz, J. (2008) Extracting energy band offsets on Thin Silicon-On-Insulator MOSFETs. In: Proceedings of the 38th European Solid-State Device Research Conference, 15-19 September 2008, Edinburgh, Schotland. pp. 242-245. IOP Institute of Physics. ISBN 978-1-4244-2363-7
van der Steen, J-L.P.J. and Hueting, R.J.E. and Schmitz, J. (2008) Energy band offset extraction - a comparative study. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 592-595. Technology Foundation STW. ISBN 978-90-73461-56-7
Steeneken, P.G. and Herfst, R.W. and Suy, H. and Goossens, M. and van Beek, J. and Bielen, J. and Stulemeijer, J. and Schmitz, J. (2008) RF MEMS Switches for Mobile Communication. Future Fab International, 24. pp. 24-30. ISSN 1363-5182
Tiggelman, M.P.J. and Reimann, K. and Liu, J. and Klee, M. and Keur, W. and Mauczock, R. and Schmitz, J. and Hueting, R.J.E. (2008) Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies. In: Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures, 24-27 Mar 2008, Edinburgh, Schotland. pp. 190-195. IEEE Computer Society. ISBN 978-1-4244-1801-5
Tiggelman, M.P.J. and Reimann, K. and Liu, J. and Klee, M. and Mauczock, R. and Keur, W. and Schmitz, J. and Hueting, R.J.E. (2008) The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 506-508. Technology Foundation STW. ISBN 978-90-73461-56-7
de Vries, R. (2008) Switching behavior of nano scale light sources. Master's thesis, University of Twente.
Wali, F. and Knotter, D.M. and Kuper, F.G. (2008) Liquid-borne nano particles impact on the random yield during critical processes in IC’s production. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 513-515. Technology Foundation STW. ISBN 978-90-73461-56-7
Wali, F. and Knotter, D.M. and Kuper, F.G. (2008) Impact of nano particles on semiconductor manufacturing. In: Proceedings of 12th IEEE International Multitopic Conference (INMIC) 2008, 23-24 Dec 2008, Karachi. pp. 97-99. IEEE. ISBN 978-1-4244-2823-6
Walters, R.J. and van Loon, R.V.A. and Polman, A. and Brunets, I. and Piccolo, G. and Schmitz, J. (2008) Luminescence properties of silicon nanocrystals in Al2O3 fabricated at low temperature In: 5th IEEE International Conference on Group IV Photonics, 2008, 17-19 Sept 2008, Sorrento, Italy. pp. 41-42. IEEE Computer Society. ISBN 978-1-4244-1768-1

2007

Blanco Carballo, V.M. and Chefdeville, M.A. and Colas, P. and Giomataris, Y. and van der Graaf, H. and Gromov, V. and Hartjes, F. and Kluit, R. and Koffeman, E. and Salm, C. and Schmitz, J. and Smits, S.M. and Timmermans, J. and Visschers, J.L. (2007) Charge amplitude distribution of the Gossip gaseous pixel detector. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 583 (1). pp. 42-48. ISSN 0168-9002 *** ISI Impact 1,14 ***
Blanco Carballo, V.M. and Salm, C. and Smits, S.M. and Schmitz, J. and Chefdeville, M.A. and van der Graaf, H. and Timmermans, J. and Visschers, J.L. (2007) On the geometrical design of integrated micromegas detectors. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 576 (1). pp. 1-4. ISSN 0168-9002 *** ISI Impact 1,14 ***
Blanco Carballo, V.M. and Salm, C. and Smits, S.M. and Schmitz, J. and Melai, J. and Chefdeville, M.A. and van der Graaf, H. (2007) Technological aspects of gaseous pixel detectors fabrication. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 501-503. Technology Foundation STW. ISBN 978-90-73461-49-9
Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Aarnink, A.A.I. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2007) Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD Surface & coatings technology, 201. pp. 8976-8980. ISSN 0257-8972 *** ISI Impact 1,94 ***
Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Aarnink, A.A.I. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) On the verification of EEDFs in plasmas with silane using optical emission spectroscopy. ECS Transactions, 6 (1). pp. 259-270. ISSN 1938-5862
Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Holleman, J. and Schmitz, J. (2007) Optical and Electrical Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD In: Proceedings of the 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 29 - 30 Nov 2007, Veldhoven, The Netherlands. pp. 404-407. Technology Foundation STW. ISBN 978-90-73461-49-9
Brunets, I. and Aarnink, A.A.I. and Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices. Surface & Coatings Technology, 201. pp. 9209-9214. ISSN 0257-8972 *** ISI Impact 1,94 ***
Brunets, I. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) Low-temperature process steps for realization of non-volatile memory devices. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 504-508. Technology Foundation STW. ISBN 978-90-73461-49-9
Castro, D.T. and Goux, L. and Hurkx, G.A.M. and Attenborough, K. and Delhounge, R. and Lisoni, J. and Jedema, F.J. and in 't Zandt, M.A.A. and Wolters, R.A.M. and Gravesteijn, D.J. and Verheijen, M. and Kaiser, M. and Weemaes, R.G.R. (2007) Evidence of the thermo-electric Thomson effect and influence on the program conditions and cell optimization in phase-change memory cells. In: Proceedings of International Electron Devices Meeting (IEDM) 2007, 10-12 Dec. 2007, Washington, DC, USA. pp. 315-318. IEEE. ISBN 978-1-4244-1507-6
Degraeve, R. and Schmitz, J. and Pantisano, L. and Simoen, E. and Houssa, M. and Kaczer, B. and Groeseneken, G. (2007) Electrical characterization of advanced gate dielectrics. In: Dielectric Films for Advanced Microelectronics. Wiley series in materials for electronic & optoelectronic applications. John Wiley & Sons Ltd., England, pp. 371-435. ISBN 978-0-470-01360-1
Groenland, A.W. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2007) Simulation of a Nanolink Hot-Plate Device. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 581-583. Technology Foundation STW. ISBN 978-90-73461-49-9
Herfst, R.W. and Steeneken, P.G. and Schmitz, J. (2007) Time and voltage dependence of dielectric charging in RF MEMS capacitive switches. In: Proceedings of 45th Annual International Reliability Physics Symposium, Phoenix, 2007, 15-19 Apr 2007, Phoenix, Arizona. pp. 417-421. IEEE Computer Society. ISBN 1-42440919-5
Hoang, Tù (2007) High efficient infrared-light emission from silicon LEDs. PhD thesis, University of Twente. ISBN 978-90-365-2557-2
Hoang, Tù and Holleman, J. and Le Minh, Phuong and Schmitz, J. and Mchedlidze, T. and Arguirov, T. and Kittler, M. (2007) Influence of dislocation loops on the near infrared light emission from silicon diodes. IEEE transactions on electron devices, 54 (8). pp. 1860-1866. ISSN 0018-9383 *** ISI Impact 2,06 ***
Hoang, Tù and Le Minh, Phuong and Holleman, J. and Schmitz, J. (2007) Strong efficiency improvement of SOI-LEDs through carrier confinement. IEEE electron device letters, 28 (5). pp. 383-385. ISSN 0741-3106 *** ISI Impact 2,79 ***
Hurley, P.K. and Cherkaoui, K. and McDonnell, S. and Hughes, G. and Groenland, A.W. (2007) Characterisation and passivation of interface defects in (1 0 0)/Si/SiO2/HfO2/TiN gate stacks Microelectronics reliability, 47 (2007) (8). pp. 1195-1201. ISSN 0026-2714 *** ISI Impact 1,14 ***
Klee, M. and Beelen, D. and Keurl, W. and Kiewitt, R. and Kumar, B. and Mauczock, R. and Reimann, K. and Renders, C. and Roest, A.L. and Roozeboom, F. and Steeneken, P.G. and Tiggelman, M.P.J. and Vanhelmont, F. and Wunnicke, O. and Lok, P. and Neumann, K. and Fraser, J. and Schmitz, G. (2007) Application of Dielectric, Ferroelectric and Piezoelectric Thin Film Devices in Mobile Communication and Medical Systems. (Invited) In: 15th ieee international symposium on the Applications of ferroelectrics, 2006. isaf '06, 30 Jul - 03 Aug 2006, Sunset Beach, NC, USA. pp. 9-16. IEEE Computer Society. ISSN 1099-4734 ISBN 978-1-4244-1332-4
Kovalgin, A.Y. and Boogaard, A. and Brunets, I. and Holleman, J. and Schmitz, J. (2007) Chemical modeling of a high-density inductively-coupled plasma reactor containing silane. Surface & Coatings Technology, 201. pp. 8849-8853. ISSN 0257-8972 *** ISI Impact 1,94 ***
Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2007) A pillar-shaped antifuse-based silicon chemical sensor and actuator. IEEE sensors journal, 7 (1). pp. 18-27. ISSN 1530-437X *** ISI Impact 1,48 ***
Lee, Kyong-Tae and Schmitz, J. and Brown, G.A. and Heh, Dawei and Choi, Rino and Harris, R. and Song, Seung-Chul and Lee, Byoung Hun and Han, In-Shik and Lee, Hi-Deok and Jeong, Yoon-Ha (2007) Test structures for accurate UHF C-V measurements of nano-scale CMOSFETs with HfSiON and TiN metal gate. In: Proceedings of the 2007 IEEE International Conference on Microelectronic Test Structures, 19-22 March 2007, Tokyo, Japan.. pp. 124-127. IEEE Computer Society. ISBN 1-4244-0781-8
Lu, Jiwu and Kovalgin, A.Y. and Schmitz, J. (2007) Modeling of an Integrated Electromagnetic Generator for Energy Scavenging. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 603-607. Technology Foundation STW. ISBN 978-90-73461-49-9
Mchedlidze, T. and Arguirov, T. and Kittler, M. and Hoang, Tù and Holleman, J. and Schmitz, J. (2007) Influence of electric field on spectral positions of dislocation-related luminescence peaks in silicon: Stark effect. Applied physics letters, 91 (20). 201113. ISSN 0003-6951 *** ISI Impact 3,79 ***
Melai, J. and Salm, C. and Smits, S.M. and Blanco Carballo, V.M. and Schmitz, J. and Hageluken, B. (2007) Considerations on using SU-8 as a construction material for high aspect ratio structures. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 529-534. Technology Foundation STW. ISBN 978-90-73461-49-9
Nicollian, P.E. (2007) Physics of Trap Generation and Electrical Breakdown in Ultra-thin SiO2 and SiON Gate Dielectric Materials PhD thesis, University of Twente. ISBN 978-90-365-2563-3
Piccolo, G. and Sarubbi, F. and Vandamme, L.J.K. and Macucci, M. and Scholtes, T.L.M. and Nanver, L.K. (2007) Low-Frequency Noise Characterization of Ultra-shallow Gate N-channel Junction Field Effect Transistors. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 448-451. Technology Foundation STW. ISBN 978-90-73461-49-9
Rajasekharan, B. and Salm, C. and Hueting, R.J.E. and Hoang, Tù and van der Wiel, W.G. and Schmitz, J. (2007) Dimensional scaling effects on transport properties of p-i-n diodes. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 457-459. Technology Foundation STW. ISBN 978-90-73461-49-9
Salm, C. and Hoekstra, E. and Kolhatkar, J.S. and Hof, A.J. and Wallinga, H. and Schmitz, J. (2007) Low-frequency noise in hot-carrier degraded nMOSFETs. Microelectronics reliability, 47 (4-5). pp. 577-580. ISSN 0026-2714 *** ISI Impact 1,14 ***
Sasse, G.T. and de Vries, R.J. and Schmitz, J. (2007) Methodology for performing RF reliability experiments on a generic test structure. In: 20th ICMTS Conference Proceedings, 19-22 Mar 2007, Tokyo, Japan. pp. 177-182. IEEE Computer Society. ISBN 1-4244-0780-X
Schmitz, J. (2007) More than Moore creates opportunities for Materials Science. (Invited) In: 16th International Materials Research Congress (IMRC) 2007, 25 Oct - 1 Nov 2007, Cancun, Mexico. pp. 19-19. The Academia Mexicana de Ciencia de Materiales. ISBN 978-968-9182-65-8
Schmitz, J. (2007) Adding functionality to microchips by wafer post-processing. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 576 (1). pp. 142-149. ISSN 0168-9002 *** ISI Impact 1,14 ***
Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Boksteen, B.K. and Kovalgin, A.Y. and Wolters, R.A.M. (2007) Cross-bidge Kelvin resistor (CBKR) structures for measurement of low contact resistances. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 551-554. Technology Foundation STW. ISBN 978-90-73461-49-9
van der Steen, J-L.P.J. and Esseni, D. and Palestri, P. and Selmi, L. and Hueting, R.J.E. (2007) Validity of the parabolic effective mass approximation in silicon and germanium n-MOSFETs with different crystal orientations. IEEE transactions on electron devices, 54 (8). pp. 1843-1851. ISSN 0018-9383 *** ISI Impact 2,06 ***
van der Steen, J-L.P.J. and Hueting, R.J.E. and Smit, G.D.J. and Hoang, Tù and Holleman, J. and Schmitz, J. (2007) Valence Band Offset Measurements on Thin Silicon-on-Insulator MOSFETs. IEEE electron device letters, 28 (9). pp. 821-824. ISSN 0741-3106 *** ISI Impact 2,79 ***
van der Steen, J-L.P.J. and Hueting, R.J.E. and Smit, G.D.J. and Hoang, Tù and Holleman, J. and Schmitz, J. (2007) Band Offset Measurements on Ultra-Thin (100) SOI MOSFETs. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 460-464. Technology Foundation STW. ISBN 978-90-73461-49-9
Steeneken, P.G. and Suy, H. and Herfst, R.W. and Goossens, M. and van Beek, J. and Schmitz, J. (2007) Micro-elektromechanische schakelaars voor mobiele telefoons. Nederlands Tijdschrift voor Natuurkunde, 73e jaargang (9). pp. 314-317. ISSN 0926-4264
Tiggelman, M.P.J. and Reimann, K. and Klee, M. and Schmitz, J. and Hueting, R.J.E. and Liu, J. and Furukawa, Y. and Mauczock, R. and Keur, W. (2007) Separation of intrinsic dielectric and resistive electrode losses in ferroelectric capacitors at radio frequencies. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 465-467. Technology Foundation STW. ISBN 978-90-73461-49-9
Tiggelman, M.P.J. and Reimann, K. and Schmitz, J. (2007) Reducing AC impedance measurement errors caused by the DC voltage dependence of broadband high-voltage bias-tees. In: Proceeding of 2007 IEEE International Conference on Microelectronic Test Structures,, 19-22 March 2007, Tokyo, Japan.. pp. 200-205. IEEE Computer Society. ISBN 1-4244-0781-8
Visschers, J.L. and Blanco Carballo, V.M. and Chefdeville, M.A. and Colas, P. and van der Graaf, H. and Schmitz, J. and Smits, S.M. and Timmermans, J. (2007) Direct readout of gaseous detectors with tiled CMOS circuits. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 572. pp. 203-204. ISSN 0168-9002 *** ISI Impact 1,14 ***
Wali, F. and Knotter, D.M. and Wortelboer, R. and Mud, A. (2007) Statistical relation between particle contaminations in ultra pure water and defects generated by process tools. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 555-557. Technology Foundation STW. ISBN 978-90-73461-49-9
van der Wel, A.P. and Klumperink, E.A.M. and Kolhatkar, J.S. and Hoekstra, E. and Snoeij, M.F. and Salm, C. and Wallinga, H. and Nauta, B. (2007) Low-frequency noise phenomena in switched MOSFETs. IEEE journal of solid-state circuits, 42 (3). pp. 540-550. ISSN 0018-9200 *** ISI Impact 3,06 ***

2006

Aarts, A.A.A. (2006) Development and characterization of through-wafer interconnects for 3D integration. Master's thesis, University of Twente.
Aarts, A.A.A. and Blanco Carballo, V.M. and Chefdeville, M.A. and Colas, P. and Dunand, S. and Fransen, M. and van der Graaf, H. and Giomataris, Y. and Hartjes, F. and Koffeman, G. and Melai, J. and Peek, H. and Riegler, W. and Salm, C. and Schmitz, J. and Smits, S.M. and Timmermans, J. and Visschers, J.L. and Wyrsch, N. (2006) Discharge Protection and Ageing of Micromegas Pixel Detectors. In: 2006 IEEE Nuclear Science Symposium Conference Record, 29 Oct - 4 Nov 2006, San Diego, CA, USA. pp. 3865-3869. IEEE Nuclear & Plasma Sciences Society. ISBN 1-4244-0561-0
Bankras, R.G. (2006) In-situ RHEED and characterization of ALD Al2O3 gate dielectrics PhD thesis, University of Twente. ISBN 90-365-2271-4
Bankras, R.G. and Holleman, J. and Schmitz, J. and Sturm, J.M. and Zinine, A.I. and Wormeester, H. and Poelsema, B. (2006) In Situ Reflective High-Energy Electron Diffraction Analysis During the Initial Stage of a Trimethylaluminum/Water ALD Process. Chemical Vapor Deposition, 12 (5). pp. 275-280. ISSN 0948-1907 *** ISI Impact 1,32 ***
Bankras, R.G. and Tiggelman, M.P.J. and Negara, M.A. and Sasse, G.T. and Schmitz, J. (2006) C-V Test Structures for Metal Gate CMOS. In: Proceedings of the International Conference on Microelectronic Test Structures (ICMTS), 6-9 Mar 2006, Austin, Texas. pp. 226-229. Electron Devices Society. IEEE. ISBN 1-4244-0167-4
Blanco Carballo, V.M. and Chefdeville, M.A. and van der Graaf, H. and Salm, C. and Aarnink, A.A.I. and Smits, S.M. and Altpeter, D.M. and Timmermans, J. and Visschers, J.L. and Schmitz, J. (2006) A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing. In: Proceedings of 32nd European Solid State Device Research Conference, 02-06 July 2006, Montreux, Switzerland. pp. 129-132. IEEE Computer Society. ISBN 1-4244-0301-4
Blanco Carballo, V.M. and Salm, C. and Smits, S.M. and Schmitz, J. and Chefdeville, M.A. and van der Graaf, H. and Timmermans, J. and Visschers, J.L. (2006) An integrated gaseous detector using microfabrication post-processing technology. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 369-372. Technology Foundation STW. ISBN 90-73461-44-8
Boogaard, A. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. and Holleman, J. and Brunets, I. and Schmitz, J. (2006) Langmuir-probe characterization of an inductively-coupled remote plasma system intended for CVD and ALD. ECS Transactions, 2 (7). pp. 181-191. ISSN 1938-5862
Boogaard, A. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. and Holleman, J. and Brunets, I. and Schmitz, J. (2006) Measurement of electron temperatures of Argon Plasmas in a High-Density Inductively-Coupled Remote Plasma System by Langmuir Probe and Optical-Emission Spectroscopy. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 412-418. Technology Foundation STW. ISBN 978-90-73461-44-4
Brunets, I. and van Hemert, T. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2006) Memory devices with encapsulated Si nano-crystals: Realization and Characterization. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 419-422. Technology Foundation STW. ISBN 978-90-73461-44-4
Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Aarnink, A.A.I. and Boogaard, A. and Oesterlin, P. and Schmitz, J. (2006) A green laser Crystallization of α-Si Films using preformed α-Si Lines. In: Proceedings of the 210th Electrochemical Society meeting, 29 okt - 03 nov 2006, Cancun. Mexico. pp. 185-191. ECS Transactions 3, 8 (2006). ECS. ISBN 1-56677-508-6
Campbell, M. and Heijne, E.H.M. and Llopart, X. and Chefdeville, M.A. and Colas, P. and Giomataris, Y. and Colijn, A.P. and Fornaini, A. and van der Graaf, H. and Kluit, P. and Timmermans, J. and Visschers, J.L. and Schmitz, J. (2006) An integrated readout system for drift chambers: the application of monolithic CMOS pixel sensors as segmented direct anode. In: Proceedings of the 9th Topical Seminar on Innovative Particle and Radiation Detectors, 23–26 May 2004, Siena, Italy. pp. 200-203. Nuclear Physics B - proceedings supplements 150. Elsevier Science direct. ISSN 0920-5632
Hasper, A. and Snijders, G.J. and Vandezande, L. and De Blank, M.J. and Bankras, R.G. (2006) Deposition of TiN films in a batch reactor. Patent US20060634043 (Application).
Herfst, R.W. and Huizing, H.G.A. and Steeneken, P.G. and Schmitz, J. (2006) Characterization of dielectric charging in RF MEMS capacitive switches. In: Proceedings of the 2006 International Conference on Microelectronic Test Structures (ICMTS), 6-9 Mar 2006, Austin, TX, USA. pp. 133-136. IEEE. ISBN 1-4244-0167-4
Hoang, Tù and Le Minh, Phuong and Holleman, J. and Schmitz, J. (2006) The effect of dislocation loops on the light emission of silicon LEDs. IEEE electron device letters, 27 (2). pp. 105-107. ISSN 0741-3106 *** ISI Impact 2,79 ***
Hueting, R.J.E. and Heringa, A. (2006) Analysis of the Subthreshold Current of Pocket or Halo-Implanted nMOSFETs. IEEE Transactions on Electron Devices, 53 (7). pp. 1641-1646. ISSN 0018-9383 *** ISI Impact 2,06 ***
Hurley, P.K. and Cherkaoui, K. and Groenland, A.W. (2006) Electrically active interface defects in the (100)Si/SiOx/HfO2/TiN system: Origin, instabilities and passivation (Invited) In: 210th Meeting of The Electrochemical Society (ECS), October 29-November 3, 2006, Cancun, Mexico. pp. 97-110. ECS Transactions 3. The Electrochemical Society. ISSN 1938-5862
Kovalgin, A.Y. and Holleman, J. (2006) Low-Temperature LPCVD of Polycrystalline GexSi1-x Films with High Germanium Content Journal of the Electrochemical Society, 153 (5). G363-G371. ISSN 0013-4651 *** ISI Impact 2,59 ***
Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2006) A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption. In: Proceedings of the IEEE Sensors Conference, 30 Oct - 03 Nov 2005, Irvine, CA, USA. pp. 1225-1228. IEEE CNF. ISBN 0-7803-9056-3
Kovalgin, A.Y. and Holleman, J. and Iordache, G. and Jenneboer, A.J.S.M. and Falke, F. and Zieren, V. and Goossens, M.J. (2006) Low-power micro-scale CMOS-compatible silicon sensor on a suspended membrane. In: Microfabricated systems and MEMS VII: Proceedings of the 206th ECS Meeting, 2004, Honolulu, Hawaii. pp. 173-183. Electrochemical Society. ISBN 1-56677-422-5
Kovalgin, A.Y. and Holleman, J. and Iordache, G. and Jenneboer, A.J.S.M. and Falke, F. and Zieren, V. and Goossens, M.J. (2006) Low-Power, Antifuse-Based Silicon Chemical Sensor on a Suspended Membrane. Journal of the Electrochemical Society, 153 (9). H181-H188. ISSN 0013-4651 *** ISI Impact 2,59 ***
Kovalgin, A.Y. and Zinine, A.I. and Bankras, R.G. and Wormeester, H. and Poelsema, B. and Schmitz, J. (2006) On the growth of native oxides on hydrogen-terminated silicon surfaces in dark and under illumination with light. In: Proceedings of the Electrochemical Society, 29 okt - 3 nov 2006, Cancun, Mexico. pp. 191-202. ECS Transactions 3 (2). Electrochemical Society. ISSN 1938-5862 ISBN 1-56677-502-7
Kuper, F.G. and Fan, X.J. (2006) Reliability practice. In: Mechanics of Microelectronics. Solid Mechanics and Its Applications 141. Springer Verlag, London, pp. 35-63. ISBN 978-1-4020-4934-7
Le Minh, Phuong and Hoang, Tù and Holleman, J. and Schmitz, J. (2006) Influence of interface recombination in light emission from lateral Si-based light emitting devices. ECS Transactions, 3 (11). pp. 9-16. ISSN 1938-5862
Le Minh, Phuong and Holleman, J. (2006) Silicon light-emitting diode antifuse: properties and devices. Journal of physics D: applied physics, 39. pp. 3749-3754. ISSN 0022-3727 *** ISI Impact 2,53 ***
Melai, J. and Salm, C. and Schmitz, J. and Smits, S.M. and Visschers, J.L. (2006) An integrated single photon detector array using porous anodic alumina. In: Proceedings of 8th IWORID (International Workshop on Radiation Imaging Detectors), 2 - 6 July 2006, Pisa, Italy. 1. Universita di Pisa. ISBN not assigned
Melai, J. and Salm, C. and Schmitz, J. and Smits, S.M. and Visschers, J.L. (2006) An integrated single photon detector array using porous anodic alumina. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 389-393. Technology Foundation STW. ISBN 90-73461-44-8
Merticaru, A.R. and Mouthaan, A.J. and Kuper, F.G. (2006) Current Degradation of a-Si:H/SiN TFTs at Room Temperature and Low Voltages. IEEE Transactions on Electron Devices, 53 (9). pp. 2273-2279. ISSN 0018-9383 *** ISI Impact 2,06 ***
Merticaru, A.R. and Mouthaan, A.J. and Kuper, F.G. (2006) Determination of the contribution of defect creation and charge trapping to the degradation of a-Si:H/SiN TFTs at room temperature and low voltages. Journal of Non-Crystalline Solids, 352 (36-37). pp. 3849-3853. ISSN 0022-3093 *** ISI Impact 1,60 ***
Salm, C. and Hoekstra, E. and Kolhatkar, J.S. and Hof, A.J. and Wallinga, H. and Schmitz, J. (2006) Low-Frequency noise in hot-carrier degraded MOSFETs. In: 14th workshop on dielectrics in microelectronics WODIM, 26-28 june 2006, Santa Tecla, Italy. pp. 64-65. ISBN not assigned
Salm, C. and Hof, A.J. and Kuper, F.G. and Schmitz, J. (2006) Reduced temperature dependence of hot carrier degradation in deuterated nMOSFETs. Microelectronics reliability, 46 (9-11). pp. 1617-1622. ISSN 0026-2714 *** ISI Impact 1,14 ***
Sasse, G.T. and Schmitz, J. (2006) Charge Pumping at radio Frequencies: Methodology, Trap Response and Application. In: Proceedings of International Reliability Physics Symposium IRPS 2006, 26-30 Mar 2006, San Jose, CA, USA. pp. 627-628. IEEE. ISBN 0-7803-9498-4
Sasse, G.T. and Schmitz, J. (2006) Interface trap response to RF charge pumping measurements. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 427-431. Technology Foundation STW. ISBN 978-90-73461-44-4
Stavitski, N. and van Dal, M.J.H. and Klootwijk, J.H. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2006) Cross-Bridge Kelvin Resistor (CBKR) structures for silicide-semiconductor junctions characterization. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 436-438. Technology Foundation STW. ISBN 978-90-73461-44-4
Stavitski, N. and van Dal, M.J.H. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2006) Specific Contact Resistance Measurements of Metal Semiconductor-Junctions. In: Proceedings of the IEEE International Conference on Microelectronic Test Structures (ICMTS), 6-9 Mar 2006, Austin, TX, USA. pp. 13-17. IEEE. ISBN 1-4244-0167-4
van der Steen, J-L.P.J. (2006) Investigation of the band gap widening effect in thin silicon double gate MOSFETs. Master's thesis, University of Twente.
van der Steen, J-L.P.J. and Esseni, D. and Palestri, P. and Selmi, L. (2006) Validity of the Effective Mass Approximation in Silicon and Germanium Inversion Layers. In: Proceedings of International Workshop on Computational Electronics (nr. 11) IWCE, 25-27 May 2006, Vienna, Austria. pp. 301-302. ICWE. ISBN 3-901578-16-1
Tiggelman, M.P.J. and Reimann, K. and Klee, M. and Beelen, D. and Keur, W. and Schmitz, J. and Hueting, R.J.E. (2006) Electrical characterization of thin film ferroelectric capacitors. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 439-443. Technology Foundation STW. ISBN 90-73461-44-8
Wali, F. and Martin Knotter, D. and Kelly, J.J. and Kuper, F.G. (2006) Deposition and detection of particles during integrated circuit manufacturing. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 483-487. Technology Foundation STW. ISBN 90-73461-44-8

2005

Aarnink, A.A.I. and Boogaard, A. and Brunets, I. and Isai, I.G. and Kovalgin, A.Y. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2005) A high-density inductively-coupled remote plasma system for the deposition of dielectrics and semiconductors. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, the Netherlands. pp. 67-69. Technology Foundation STW. ISBN 90-73461-50-2
Bankras, R.G. and Holleman, J. and Schmitz, J. (2005) In-Situ RHEED analysis of atomic layer deposition. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, The Netherlands. pp. 70-75. Technology Foundation STW. ISBN 90-73461-50-2
Brunets, I. and Boogaard, A. and Isai, I.G. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2005) Three-dimensional IC's prolong the life of Moore's law. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, the Netherlands. pp. 76-78. Technology Foundation STW. ISBN 90-73461-50-2
Bystrova, S. and Aarnink, A.A.I. and Holleman, J. and Wolters, R.A.M. (2005) Atomic layer deposition of W1.5N barrier films for Cu Metallization Journal of The Electrochemical Society, 152 (7). G522-527. ISSN 0013-4651 *** ISI Impact 2,59 ***
Bystrova, S. and Holleman, J. and Aarnink, A.A.I. and Wolters, R.A.M. (2005) Barrier properties of ALD1,5N thin films. In: International Conference on Advanced Metallization, 19-21 October 2004, San Diego, California, USA. pp. 769-774. Materials Research Society. ISBN 978-15589-9814-8
Campbell, M. and Chefdeville, M.A. and Colas, P. and Colijn, A.P. and Fornaini, A. and Giomataris, Y. and van der Graaf, H. and Heijne, E.H.M. and Kluit, P. and Llopart, X. and Schmitz, J. and Timmermans, J. and Visschers, J.K. (2005) The detection of single electrons by means of a Micromegas-covered Medipix2 pixel CMOS readout circuit. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 540 (2-3). pp. 295-304. ISSN 0168-9002 *** ISI Impact 1,14 ***
Campbell, M. and Heijne, E.H.M. and Llopart, X. and Colas, P. and Giganon, A. and Giomataris, Y. and Chefdeville, M.A. and Colijn, A.P. and Fornaini, A. and van der Graaf, H. and Kluit, P. and Timmermans, J. and Visschers, J.L. and Schmitz, J. (2005) GOSSIP: A vertex detector combining a thin gas layer as signal generator with a CMOS readout pixel array. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 560. pp. 131-134. ISSN 0168-9002 *** ISI Impact 1,14 ***
Chefdeville, M.A. and Colas, P. and Giomataris, Y. and van der Graaf, H. and Heijne, E.H.M. and van der Putten, S. and Salm, C. and Schmitz, J. and Smits, S.M. and Timmermans, J. and Visschers, J.L. (2005) An electron-multiplying 'Micromegas' grid made in silicon wafer post-processing technology. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, The Netherlands. pp. 139-142. Technology Foundation STW. ISBN 90-73461-50-2
Chefdeville, M.A. and Colas, P. and Giomataris, Y. and van der Graaf, H. and Heijne, E.H.M. and van der Putten, S. and Salm, C. and Schmitz, J. and Smits, S.M. and Timmermans, J. and Visschers, J.L. (2005) An electron-multiplying ''Micromegas'' grid made in silicon wafer post-processing technology. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 556. pp. 490-494. ISSN 0168-9002 *** ISI Impact 1,14 ***
Faber, E.J. and de Smet, L.C.P.M. and Olthuis, W. and Zuilhof, H. and Sudhölter, E.J.R. and Bergveld, P. and van den Berg, A. (2005) Si-C Linked Organic Monolayers on Crystalline Silicon Surfaces as Alternative Gate Insulators. ChemPhysChem, 6 (10). pp. 2153-2166. ISSN 1439-4235 *** ISI Impact 3,35 ***
Fornaini, A. and Campbell, M. and Chefdeville, M.A. and Colas, P. and Colijn, A.P. and van der Graaf, H. and Giomataris, Y. and Heijne, E.H.M. and Kluit, P. and Llopart, X. and Schmitz, J. and Timmermans, J. and Visschers, J.L. (2005) The detection of single electrons using a Microgas gas amplification and a MediPix2 CMOS pixel readout. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 546 (1-2). pp. 270-273. ISSN 0168-9002 *** ISI Impact 1,14 ***
Herfst, R.W. and Huizing, H.G.A. and Steeneken, P.G. and Schmitz, J. (2005) Characterization of dielectric charging in RF MEMS. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, The Netherlands. pp. 11-14. Technology Foundation STW. ISBN 90-73461-50-2
Hoang, Tù and Le Minh, Phuong and Holleman, J. and Schmitz, J. (2005) The effect of dislocation loops on the light emission of silicon LEDs. In: Proceedings of 5th European Solid-State Device Research Conference (ESSDERC) 2005, 12-16 Sep 2005, Grenoble, France. pp. 359-362. IEEE Computer Society. ISBN 0-7803-9203-5
Hoang, Tù and Le Minh, Phuong and Holleman, J. and Zieren, V. and Goossens, M.J. and Schmitz, J. (2005) A high efficiency lateral light emitting device on SOI. In: 12th IEEE International Symposium on Electron Devices for Microwave and Optoelectronic Applications, 8-9 November 2004, Berg-en-Dal, Kruger National Park, South Africa. pp. 87-91. IEEE Computer Society. ISBN 0780385748
Hof, A.J. and Hoekstra, E. and Kovalgin, A.Y. and van Schaijk, R. and Baks, W.M. and Schmitz, J. (2005) The impact of deuterated CMOS processing on gate oxide reliability. IEEE Transactions on Electron Devices, 52 (9). pp. 2111-2115. ISSN 0018-9383 *** ISI Impact 2,06 ***
Hof, A.J. and Kovalgin, A.Y. and Woerlee, P.H. and Schmitz, J. (2005) On the oxidation kinetics of silicon in ultradiluted H2O and D2O ambient Journal of the Electrochemical Society, 152 (9). F133-F137. ISSN 0013-4651 *** ISI Impact 2,59 ***
Hueting, R.J.E. and van der Toorn, R. (2005) Analysis of the Kirk effect in silicon-based bipolar transistors with a nonuniform collector profile. IEEE transactions on electron devices, 52 (11). pp. 2489-2495. ISSN 0018-9383 *** ISI Impact 2,06 ***
Klumperink, E.A.M. and van der Wel, A.P. and Kolhatkar, J.S. and Hoekstra, E. and Salm, C. and Wallinga, H. and Nauta, B. (2005) Reduction of 1/f Noise by Switched Biasing: an Overview. In: the 16th Workshop on Circuits, Systems and Signal Processing, ProRISC 2005, 17-18 November 2005, Veldhoven, the Netherlands. pp. 307-315. Technology Foundation STW. ISBN 90-73461-50-2
Kolhatkar, J.S. (2005) Steady-state and cyclo-stationary RTS noise in mosfets. PhD thesis, University of Twente. ISBN 90-365-2127-0
Kolhatkar, J.S. and Hoekstra, E. and Hof, A.J. and Salm, C. and Schmitz, J. and Wallinga, H. (2005) Impact of hot-carrier degradation on the Low-Frequency Noise in MOSFETs under steady-state and periodic Large-Signal Excitation. IEEE electron device letters, 26 (10). pp. 764-766. ISSN 0741-3106 *** ISI Impact 2,79 ***
Kolhatkar, J.S. and Salm, C. and Knitel, M.J. and Wallinga, H. (2005) Constant and switched bias low frequency noise in p-MOSFETs with varying gate oxide thickness. In: Proceedings of the 32nd European Solid-State Device Research Conference, 24-26 September 2002, University of Bologna, Italia. pp. 83-86. IEEE Computer Society. ISBN 88-900847-8-2
Kovalgin, A.Y. and Hof, A.J. and Schmitz, J. (2005) An approach to modeling of silicon oxidation in a wet ultra-diluted ambient. Microelectronic Engineering, 80. pp. 432-435. ISSN 0167-9317 *** ISI Impact 1,22 ***
Lankhorst, M.H.R. and Ketelaars, B.W.S.M.M. and Wolters, R.A.M. (2005) Low-cost and nanoscale non-volatile memory concept for future silicon chips. Nature Materials, 4. pp. 347-352. ISSN 1476-1122 *** ISI Impact 35,75 ***
Le Minh, Phuong and Gokcan, H. and Lodder, J.C. and Jansen, R. (2005) Magnetic tunnel transistor with a silicon hot-electron emitter. Journal of applied physics, 98. pp. 076111-1. ISSN 0021-8979 *** ISI Impact 2,21 ***
Le Minh, Phuong and Hoang, Tù and Holleman, J. and Schmitz, J. (2005) The effect of an electric field on a lateral silicon light-emitting diode. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, The Netherlands. pp. 117-120. Technology Foundation STW. ISBN 90-73461-50-2
Sasse, G.T. and de Vries, H. and Schmitz, J. (2005) Charge pumping at radio frequencies [MOSFET device interface state density measurement]. In: 2005 International Conference on Microelectronic Test Structures, 2005, 4-7 April 2005, Leuven, Belgium. pp. 229-233. IEEE Computer Society. ISBN 0780388550
Sasse, G.T. and de Vries, H. and Schmitz, J. (2005) The RF charge pump technique for measuring the interface state density on leaky dielectrics. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, The Netherlands. pp. 47-51. Technology Foundation STW. ISBN 90-73461-50-2
Schippers, R.E. (2005) Dislocation engineered silicon Light Emitting Diode. Master's thesis, University of Twente.
Sowariraj, M.S.B. (2005) Full chip modelling of ICs under CDM stress. PhD thesis, University of Twente. ISBN 90-365-2217-X
Sowariraj, M.S.B. and de Jong, P.C. and Salm, C. and Mouthaan, A.J. and Kuper, F.G. (2005) A 3-D circuit model to evaluate CDM performance of Ics. Microelectronics Reliability, 45 (9-11). pp. 1425-1429. ISSN 0026-2714 *** ISI Impact 1,14 ***
Sowariraj, M.S.B. and de Jong, P.C. and Salm, C. and Smedes, T. and Mouthaan, A.J. and Kuper, F.G. (2005) Significance of including substrate capacitance in the full chip circuit model of ICs under CDM stress. In: 43rd Annual IEEE International Reliability Physics Symposium, 2005, 17-21 April 2005, San Jose, California, USA. pp. 608-609. IEEE Computer Society. ISBN 0780388038
Stavitski, N. and van Dal, M.J.H. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2005) Specific contact resistance measurements of metal-semiconductor junctions. In: Proceedings of the 8th annual workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE) 2005, 17-18 Nov 2005, Veldhoven, The Netherlands. pp. 52-55. Technology Foundation STW. ISBN 90-73461-50-2
Sturm, J.M. and Zinine, A.I. and Wormeester, H. and Bankras, R.G. and Holleman, J. and Schmitz, J. and Poelsema, B. (2005) Laterally resolved electrical characterisation of high-L oxides with non-contact Atomic Force Microscopy. Microelectronic Engineering, 80. pp. 78-81. ISSN 0167-9317 *** ISI Impact 1,22 ***
Sturm, J.M. and Zinine, A.I. and Wormeester, H. and Poelsema, B. and Bankras, R.G. and Holleman, J. and Schmitz, J. (2005) Imaging of oxide charges and contact potential difference fluctuations in Atomic Layer Deposited Al2O3 on Si Journal of applied physics, 97. 063709. ISSN 0021-8979 *** ISI Impact 2,21 ***
Sturm, J.M. and Zinine, A.I. and Wormeester, H. and Poelsema, B. and Bankras, R.G. and Holleman, J. and Schmitz, J. (2005) Nanoscale topography-capacitance correlation in high-K films: Interface heterogeneity related electrical properties. Journal of Applied Physics, 98 (7). pp. 076104-1. ISSN 0021-8979 *** ISI Impact 2,21 ***
Tiemeijer, L.F. and Havens, R.J. and de Kort, R. and Scholten, A.J. and van Langevelde, R. and Klaassen, D.B.M. and Sasse, G.T. and Bouttement, Y. and Petot, C. and Bardy, S. and Gloria, D. and Scheer, P. and Boret, S. and van Haaren, B. and Clement, C. and Larchanche, J-F. and Lim, I-S. and Duvallet, A. and Zlotnicka, A. (2005) Record RF performance of standard 90 nm CMOS technology. In: IEEE International Electron Devices Meeting 2004, 13-15 December 2004, San Francisco, California, USA. pp. 441-444. IEEE Computer Society. ISBN 0780386841
Tiggelman, M.P.J. (2005) Low series resistance structures for gate dielectrics with a high leakage current. Master's thesis, University of Twente.
Wang, Zhichun and Ackaert, J.G.G. and Scarpa, A. and Salm, C. and Kuper, F.G. and Vugts, M. (2005) Strategies to cope with plasma charging damage in design and layout phases. In: IEEE International Conference in Integrated Circuit and Technology (ICICDT), 9-11 May 2005, Austin, Texas, USA. pp. 91-98. IEEE Computer Society. ISBN 0780390814

2004

Ackaert, J.G.G. (2004) Dielectric engineering: Characterization, development and process damage minimization of various silicon oxides. PhD thesis, University of Twente. ISBN 90-365-2069-X
Bystrova, S. (2004) Diffusion barriers for Cu metallisation in Si integrated circuits : deposition and related thin film properties. PhD thesis, University of Twente. ISBN 90-365-2114-9
Campbell, M. and Heijne, E.H.M. and Llopart, X. and Chefdeville, M.A. and Colas, P. and Giganon, A. and Giomataris, Y. and Colijn, A.P. and Fornaini, A. and van der Graaf, H. and Kluit, P. and Timmermans, J. and Visschers, J.L. and Schmitz, J. (2004) New gaseous detectors: the application of CMOS pixel chips as direct anode. In: 2004 IEEE Nuclear Science Symposium Conference Record, 16-22 Oct 2004, Rome, Italy. pp. 955-958. IEEE Computer Society. ISBN 0-7803-8700-7
Colas, P. and Colijn, A.P. and Fornaini, A. and Giomataris, Y. and van der Graaf, H. and Heijne, E.H.M. and Llopart, X. and Schmitz, J. and Timmermans, J. and Visschers, J.L. (2004) The readout of a GEM or Micromegas-equipped TPC by means of the Medipix2 CMOS sensor as direct anaode. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment., 535 (1-2). pp. 506-510. ISSN 0168-9002 *** ISI Impact 1,14 ***
Cubaynes, F.N. (2004) Ultra-thin plasma nitrided oxide gate dielectrics for advanced MOS transistors. PhD thesis, University of Twente. ISBN 90-365-2059-2
Hof, A.J. (2004) Deuterium in the gate dielectric if CMOS devices. PhD thesis, University of Twente. ISBN 90-365-2093-2
Hof, A.J. and Kovalgin, A.Y. and van Schaijk, R. and Baks, W.M. and Schmitz, J. (2004) Gate oxide reliability and deuterated CMOS processing. In: IEEE Integrated Reliability Workshop, 18-21 October 2004, Lake Tahoe, USA. pp. 7-10. IEEE Computer Society. ISBN 0-7803-8517-9
Isai, I.G. and Holleman, J. and Wallinga, H. and Woerlee, P.H. (2004) Conduction and trapping mechanisms in SiO2 films grown near room temperature by multipolar electron cyclotron resonance plasma enhanced chemical vapor deposition Journal of Vacuum Science & Technology B, 22 (3). pp. 1022-1029. ISSN 1071-1023 *** ISI Impact 1,27 ***
Isai, I.G. and Holleman, J. and Woerlee, P.H. and Wallinga, H. (2004) Low hydrogen content silicon nitride films deposited at room temperature with a multipolar ECR plasma source. Journal of the Electrochemical Society, 151 (10). C649-C654. ISSN 0013-4651 *** ISI Impact 2,59 ***
Kolhatkar, J.S. and Hoekstra, E. and Salm, C. and van der Wel, A.P. and Klumperink, E.A.M. and Schmitz, J. and Wallinga, H. (2004) Modeling of RTS Noise in MOSFETs under Steady-State and Large-Signal Excitation. In: IEEE International Electron Devices Meeting 2004 (IEDM 2004), 13-15 December 2004, San Francisco, California, USA. pp. 759-762. IEEE Computer Society. ISBN 0780386841
Kolhatkar, J.S. and Vandamme, L.K.J. and Salm, C. and Wallinga, H. (2004) Separation of random telegraph sSignals from 1/f noise in MOSFETs under constant and switched bias conditions. In: 33rd Conference on European Solid-State Device Research 2003 (ESSDERC), 16-18 September 2003, Estoril, Portugal. pp. 549-552. IEEE Computer Society. ISBN 0780379993
Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2004) A micro-scale hot-surface device based on non-radiative carrier recombination. In: The 34th European Solid-State Device Research conference, 2004, 21-23 September 2004, Leuven, Belgium. pp. 353-356. IEEE Computer Society. ISBN 0780384784
Merticaru, A.R. (2004) Electrical instability of a-Si:H/SiN thin film transistors : a study at room temperature and low voltage stress. PhD thesis, University of Twente. ISBN 90-365-2056-8
Nguyen, Van Hieu (2004) Multilevel interconnect reliability on the effects of electro-thermomechanical stresses. PhD thesis, University of Twente. ISBN 90-365-2029-0
Nguyen, Van Hieu and Salm, C. and Krabbenborg, B.H. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2004) Fast thermal cycling-enhanced electromigration in power metallization. IEEE Transactions on Device and Materials Reliability, 4 (2). pp. 246-255. ISSN 1530-4388 *** ISI Impact 1,52 ***
Nguyen, Van Hieu and Salm, C. and Krabbenborg, B.H. and Weide-Zaage, K. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2004) Effect of thermal gradients on the electromigration lifetime in power electronics. In: IEEE 42nd Annual International Reliability Physics Symposium, 25-29 Apr 2004, Phoenix, Arizona, USA. pp. 619-620. IEEE Computer Society. ISSN 1082-7285 ISBN 078038315X
Sasse, G.T. and de Kort, R. and Schmitz, J. (2004) Gate-capacitance extraction from RF C-V measurements. In: The 34th European Solid-State Device Research conference, 2004, 21-23 September 2004, Leuven, Belgium. pp. 113-116. IEEE Computer Society. ISBN 0780384784
Schmitz, J. and Cubaynes, F.N. and Havens, R.J. and de Kort, R. and Scholten, A.J. and Tiemeijer, L.F. (2004) Test structures design considerations for RF-CV measurements on leaky dielectrics. IEEE transactions on semiconductor manufacturing, 17 (2). pp. 150-154. ISSN 0894-6507 *** ISI Impact 0,86 ***
Schmitz, J. and Cubaynes, F.N. and de Kort, R. and Havens, R.J. and Scholten, A.J. and Tiemeijer, L.F. (2004) The RF-CV method for characterization of leaky gate dielectrics. Microelectronic engineering, 72. pp. 149-153. ISSN 0167-9317 *** ISI Impact 1,22 ***
Schmitz, J. and Weusthof, M.H.H. and Hof, A.J. (2004) Leakage current correction in quasi-static C-V measurements. In: International Conference of Microelectronic Test Structures ICMTS 2004, 22-25 March 2004, Awaji Yumebutai, Japan. pp. 179-181. IEEE Computer Society. ISBN 0780382625
Tao, Guoqiao and Scarpa, A. and van Marwijk, L. and van Dijk, K. and Kuper, F.G. (2004) Applying the fWLR concept to Stress induced leakage current in non-volatile memory processes. Microelectronics reliability, 44 (8). pp. 1269-1273. ISSN 0026-2714 *** ISI Impact 1,14 ***
Wang, Zhichun (2004) Detection of and protection against plasma charging damage in modern IC Technology. PhD thesis, University of Twente. ISBN 90-365-2079-7
Wang, Zhichun and Ackaert, J.G.G. and Salm, C. and Kuper, F.G. and de Backer, E. (2004) Plasma charging damage reduction in IC processing by a self-balancing interconnect. Microelectronics Reliability, 44 (9-11). pp. 1503-1507. ISSN 0026-2714 *** ISI Impact 1,14 ***
Wang, Zhichun and Ackaert, J.G.G. and Salm, C. and Kuper, F.G. and Tack, M. and de Backer, E. and Coppens, P. and de Schepper, L. and Vlachakis, B. (2004) Plasma-charging damage of floating MIM capacitors. IEEE transactions on electron devices, 51 (6). pp. 1017-1024. ISSN 0018-9383 *** ISI Impact 2,06 ***
van der Wel, A.P. and Klumperink, E.A.M. and Kolhatkar, J.S. and Hoekstra, E. and Nauta, B. (2004) Visualisation Techniques for Random Telegraph Signals in MOSFETs. In: the 15th ProRisc workshop on Circuits, Systems and Signal Processing (ProRisc 2004), 25-26 November 2004, Veldhoven, the Netherlands. Technology Foundation STW. ISBN 90-73461-43-X

2003

Bankras, R.G. and Aarnink, A.A.I. and Holleman, J. and Schmitz, J. (2003) In-situ RHEED analysis of atomic layer deposition and characterization of Al203 gate dielectrics In: Proceedings of the 6th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands. pp. 726-729. Technology Foundation STW. ISBN 90-73461-39-1
Bystrova, S. and Holleman, J. and Wolters, R.A.M. and Aarnink, A.A.I. (2003) Atomic layer deposition of W - based layers on SiO2 In: Proceedings of the 6th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands. pp. 730-734. Technology Foundation STW. ISBN 90-73461-39-1
Cubaynes, F.N. and Schmitz, J. and van der Marel, C. and Snijders, J.H.M. and Veloso, A. and Rothschild, A. and Olsen, C. and Date, L. (2003) Plasma nitridation optimization for sub-15 A gate dielectrics. In: Symposium on silicon nitride and silicon dioxide thin insulating films, 28 April - 2 May 2003, Paris, France. pp. 595-604. The Electrochemical Society. ISSN 0161-6374 ISBN 1566773474
Galca, A.C. and Kooij, E.S. and Wormeester, H. and Salm, C. and Leca, V. and Rector, J.H. and Poelsema, B. (2003) Structural and optical characterization of porous anodic aluminium oxide. Journal of Applied Physics, 94 (7). pp. 4296-4305. ISSN 0021-8979 *** ISI Impact 2,21 ***
Hoang, Tù and Le Minh, Phuong and Holleman, J. and Schmitz, J. and Wallinga, H. (2003) High external quantum efficiency of the lateral P-I-N diodes realized of silicon on insulator (SOI) material. In: Proceedings of the 6th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands. pp. 610-613. Technology Foundation STW. ISBN 90-73461-39-1
Hof, A.J. and Kovalgin, A.Y. and Woerlee, P.H. and Schmitz, J. (2003) On oxidation kinetics and electrical quality of gate oxide grown in H2O or D2O ambient In: Proceedings of the 6th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands. pp. 743-747. Technology Foundation STW. ISBN 90-73461-39-1
Iordache, G. and Holleman, J. and Kovalgin, A.Y. and Jenneboer, A.J.S.M. (2003) Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications. In: Proceedings of the 6th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands. pp. 693-696. Technology Foundation STW. ISBN 90-73461-39-1
Isai, I.G. (2003) ECR plasma deposited SiO2 and Si3N4 layers: a room temperature technology PhD thesis, University of Twente. ISBN 90-365-1934-9
Kolhatkar, J.S. and Salm, C. and Wallinga, H. (2003) Separation of random telegraph signals from 1/f noise in MOSFETs. In: Proceedings of the 6th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands. pp. 614-617. Technology Foundation STW. ISBN 90-73461-39-1
Kolhatkar, J.S. and van der Wel, A.P. and Klumperink, E.A.M. and Salm, C. and Nauta, B. and Wallinga, H. (2003) Measurement and extraction of RTS parameters under 'Switched Biased' conditions in MOSFETS. In: 17th International Conference on Noise and Fluctuations, 18-22 August 2003, Prague, Czech Republic. pp. 237-240. Czech Noise Research Laboratory (CNRL). ISBN 8023910051
Le Minh, Phuong (2003) Silicon light emitting devices for integrated applications. PhD thesis, University of Twente. ISBN 90-365-1858-X
Le Minh, Phuong and Holleman, J. and Wallinga, H. and Berenschot, J.W. and Tas, N.R. and van den Berg, A. (2003) Novel integration of a microchannel with a silicon light emitting diode antifuse. Journal of Micromechanics and Microengineering, 13 (3). pp. 425-429. ISSN 0960-1317 *** ISI Impact 1,79 ***
Li, Yuan and Veenstra, K.J. and Dubois, J. and Peters-Wu, L. and van Zomeren, A.A. and Kuper, F.G. (2003) Reservoir effect and maximum allowed VIA misalignment for AICu interconnect with tungsten VIA plug. Microelectronics Reliability, 43 (9-11). pp. 1449-1454. ISSN 0026-2714 *** ISI Impact 1,14 ***
Merticaru, A.R. and Mouthaan, A.J. and Kuper, F.G. (2003) Progressive degradation in a-Si: H/SiN thin film transistors. Thin Solid Films, 427 (1-2). 60-66. ISSN 0040-6090 *** ISI Impact 1,60 ***
Nguyen, Van Hieu and Salm, C. and Krabbenborg, B.H. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2003) Electrothermomigration-induced failure in power IC metallization. In: Proceedings of the 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003, 25-26 November 2003, Veldhoven, The Netherlands. pp. 622-630. Technology Foundation STW. ISBN 90-73461-39-1
Nguyen, Van Hieu and Salm, C. and Krabbenborg, B.H. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2003) A reliability model for interlayer dielectric cracking during fast thermal cycling. In: Advanced Metallization Conference (AMC 2003), 21-23 Oct 2003, Montreal, Canada. pp. 295-299. Materials Research Society. ISBN 1558997571
Nguyen, Viet Hoang and Daamen, R. and van Kranenburg, H. and van der Velden, P. and Woerlee, P.H. (2003) A physical model for dishing during metal CMP. Journal of the Electrochemical Society, 150 (11). G689-G693. ISSN 0013-4651 *** ISI Impact 2,59 ***
Schmitz, J. and Cubaynes, F.N. and Havens, R.J. and de Kort, R. and Scholten, A.J. and Tiemeijer, L.F. (2003) RF capacitance-voltage characterization of MOSFETs with high-leakage dielectric. IEEE Electron Device Letters, 24 (1). pp. 37-39. ISSN 0741-3106 *** ISI Impact 2,79 ***
Schmitz, J. and Cubaynes, F.N. and Havens, R.J. and de Kort, R. and Scholten, A.J. and Tiemeijer, L.F. (2003) Test structure design considerations for RF-CV measurements on leaky dielectrics. In: International Conference on Microelectronic Test Structures, 2003, 17-20 March 2003, Monterey, California, USA. pp. 181-185. IEEE Computer Society. ISBN 0780376536
Sowariraj, M.S.B. and Smedes, T. and Salm, C. and Mouthaan, A.J. and Kuper, F.G. (2003) Role of package parasitics and substrate resistance on the Charged Device Model (CDM) failure levels - An explantion and die protection strategy. Microelectronics Reliability, 43 (9-11). pp. 1569-1575. ISSN 0026-2714 *** ISI Impact 1,14 ***
Sowariraj, M.S.B. and Smedes, T. and Salm, C. and Mouthaan, A.J. and Kuper, F.G. (2003) Study on the influence of package parasitics and substrate resistance on the Charged Device Model(CDM) failure levels - possible protection methodology. In: Proceedings of the 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands. pp. 657-662. Technology Foundation STW. ISBN 90-73461-39-1
Tao, Guoqiao and Scarpa, A. and van Dijk, K. and Kuper, F.G. (2003) Process qualification strategy for advances embedded non volatile memory technology - the Philips'0.18um embedded flash case. In: International Reliability Physics Symposium IRPS 2003, 30 March - 4 April 2003, Dallas, Texas, USA. pp. 604-605. IEEE Computer Society. ISBN 0780376498
Wang, Zhichun and Ackaert, J.G.G. and Salm, C. and Kuper, F.G. and Bessemans, K. and de Backer, E. (2003) "Plasma charging damage induced by a power ramp down step in the end of plasma enhanced chemical vapour deposition (PECVD) process. In: Proceedings of the 6th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands. pp. 766-770. Technology Foundation STW. ISBN 90-73461-39-1

2002

Ackaert, J.G.G. and Wang, Zhichun and de Backer, E. and Coppens, P. (2002) Charging damage in floating metal-insulator-metal capacitors. In: 6th International Symposium on Plasma Process-Induced Damage, 13-15 May 2001, Monterey, California, USA. pp. 120-123. American Vacuum Society. ISBN 096515775X
Ackaert, J.G.G. and Wang, Zhichun and de Backer, E. and Coppens, P. (2002) Plasma damage in floating metal-insulator-metal capacitors. In: 8th International Symposium on the Physical & Failure Analysis of Integrated Circuits, 9 - 13 Jul 2001, Singapore, Thailand. pp. 224-227. IEEE Computer Society. ISBN 0-7803-6675-1
Ackaert, J.G.G. and Wang, Zhichun and de Backer, E. and Salm, C. (2002) Correlation between hot carrier stress, oxide breakdown and gate leakage current for monitoring plasma processing induced damage on gate oxide. In: 7th International symposium of Plasma Process-Induced Damage, 6-7 June 2002, Maui, Hawaii, USA. pp. 45-48. IEEE Computer Society. ISBN 0-9651577-7-6
Bankras, R.G. and Holleman, J. and Woerlee, P.H. (2002) Characterization of pulsed laser deposited Al2O3 gate dielectric In: Proceedings of the 5th annual workshop on semiconductors advances for future electronics SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands. pp. 1-4. Technology Foundation STW. ISBN 90-73461-33-2
Bearda, T. and Woerlee, P.H. and Wallinga, H. and Heyns, M.M. (2002) Charge transport after hard breakdown in gate oxides. Japanese Journal of Applied Physics, Special Issue: Solid State Devices & Materials Part 1, No. 4B, April 2002, 41 (4B). pp. 2431-2436. ISSN 0021-4922 *** ISI Impact 1,07 ***
Bystrova, S. and Holleman, J. and Woerlee, P.H. and Wolters, R.A.M. (2002) Characterisation of Ta-based barrier films on SiLK for Cu-metalisation. In: 5th Annual Workshop on Semiconductors Advances for Future Electronics SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands. pp. 9-13. Technology Foundation STW. ISBN 90-73461-33-2
Golo-Tosic, N. (2002) Electrostatic discharge effects in thin film transistors. PhD thesis, University of Twente. ISBN 9036518091
Golo-Tosic, N. and Jenneboer, A.J.S.M. and Mouthaan, A.J. (2002) Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology. In: Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002, 29 Nov 2002, Veldhoven, The Netherlands. pp. 616-621. Technology Foundation STW. ISBN 90-73461-33-2
Golo-Tosic, N. and Kuper, F.G. and Mouthaan, A.J. (2002) Analysis of the electrical breakdown in hydrogenated amorphous silicon thin-film transistors. IEEE transactions on electron devices, 49 (6). pp. 1012-1018. ISSN 0018-9383 *** ISI Impact 2,06 ***
Golo-Tosic, N. and Kuper, F.G. and Mouthaan, A.J. (2002) Zapping thin film transistors. Microelectronics Reliability, 42 (4). pp. 747-765. ISSN 0026-2714 *** ISI Impact 1,14 ***
Golo-Tosic, N. and van der Wal, S. and Kuper, F.G. and Mouthaan, A.J. (2002) Estimation of the impact of electrostatic discharge on density of states in hydrogenated amorphous silicon thin-film transistors. Applied Physics Letters, 80 (18). pp. 3337-3339. ISSN 0003-6951 *** ISI Impact 3,79 ***
Hof, A.J. and Kovalgin, A.Y. and Woerlee, P.H. (2002) Comparison of H2O and D2O oxidation kinetics of <100> silicon In: Proceedings of the 5th annual workshop on Semiconductors Advances for Future Electronics SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands. pp. 35-38. Technology Foundation STW. ISBN 90-73461-33-2
Isai, I.G. and Holleman, J. and Woerlee, P.H. and Wallinga, H. (2002) Silicon nitride layers obtained by ECR PECVD. In: Proceedings of the 5th annual workshop on Semiconductors Advances for Future Electronics SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands. pp. 39-41. Technology Foundation STW. ISBN 90-73461-33-2
Kim, G.M. and Kovalgin, A.Y. and Holleman, J. and Brugger, J.P. (2002) Replication molds having nanometer-scale shape control fabricated by means of oxidation and etching. Journal of Nanoscience and Nanotechnology, 2 (1). pp. 55-59. ISSN 1533-4880 *** ISI Impact 1,15 ***
Kolhatkar, J.S. and Salm, C. and Wallinga, H. (2002) Analysis of 'Switched Biased' random telegraph signals in MOSFETs. In: Proceedings of the 5th annual workshop on Semiconductors Advances for Future Electronics SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands. pp. 42-45. Technology Foundation STW. ISBN 90-73461-33-2
Kovalgin, A.Y. and Holleman, J. and van den Berg, A. (2002) Combined light/heat/gas sensor with decoupled electrical and thermal resistances. In: Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002, 29 November 2002, Veldhoven, The Netherlands. pp. 635-648. Technology Foundation STW. ISBN 90-73461-33-2
Kovalgin, A.Y. and Holleman, J. and van den Berg, A. (2002) A novel approach to low-power hot-surface devices with decoupled electrical and thermal resistances. In: Proceedings of Eurosensors 2002, 15-18 Sep 2002, Czech Technical University, Prague, Czech Republi. pp. 88-91. Czech Technical University. ISBN 80-01-02576-4
Le Minh, Phuong and Holleman, J. and Berenschot, J.W. and Tas, N.R. and van den Berg, A. (2002) Integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. In: Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002, 29 November 2002, Veldhoven, The Netherlands. pp. 644-648. Technology Foundation STW. ISBN 90-73461-33-2
Le Minh, Phuong and Holleman, J. and Berenschot, J.W. and Tas, N.R. and van den Berg, A. (2002) Monolithic integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. In: Proceedings of the 32nd European Solid-State Device Research Conference ESSDERC 2002, 24-26 September 2002, Florence, Italy. pp. 451-454. IEEE Computer Society. ISBN 88-900847-8-2
Le Minh, Phuong and Holleman, J. and Wallinga, H. (2002) Highly efficient silicon light emitting diode. In: SAFE 2002, Proceedings of the 5th annual workshop on Semiconductors Advances for Future Electronics, 27-28 November 2002, Veldhoven, The Netherlands. pp. 46-50. Technology Foundation STW. ISBN 90-73461-33-2
Nguyen, Van Hieu and Salm, C. and Vroemen, J. and Voets, J. and Krabbenborg, B.H. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2002) Fast temperature cycling and electromigration induced thin film cracking multilevel interconnection: experiments and modeling. Microelectronics Reliability, 42 (9-11). pp. 1415-1420. ISSN 0026-2714 *** ISI Impact 1,14 ***
Nguyen, Van Hieu and Salm, C. and Vroemen, J. and Voets, J. and Krabbenborg, B.H. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2002) Fast temperature cycling stress-induced and electromigration-induced interlayer dielectric cracking failure in multilevel interconnection. In: Proceedings of the 5th annual workshop on Semiconductors Advances for Future Electronics SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands. pp. 69-74. Technology Foundation STW. ISBN 90-73461-33-2
Nguyen, Van Hieu and Salm, C. and Vroemen, J. and Voets, J. and Krabbenborg, B.H. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2002) Test chip for detecting thin film cracking induced by fast temperature cycling and electromigration in multilevel interconnect systems. In: 9th International Symposium on Physics and Failure Analysis 2002, 8-12 Jul 2002, Singapore, Thailand. pp. 135-139. IEEE Computer Society. ISBN 0780374169
Nguyen, Van Hieu and Salm, C. and Wenzel, R. and Mouthaan, A.J. and Kuper, F.G. (2002) Simulation and experimental characterization of reservoir and via layout effects on electromigration lifetime. Microelectronics Reliability, 42 (9-11). pp. 1421-1425. ISSN 0026-2714 *** ISI Impact 1,14 ***
Sowariraj, M.S.B. and Kuper, F.G. and Salm, C. and Mouthaan, A.J. and Smedes, T. (2002) Impact of layout and technology variation on the CDM performance of ggNMOSTs and SCRs. In: Proceedings of the 5th annual workshop on Semiconductors Advances for Future Electronics SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands. pp. 104-107. Technology Foundation STW. ISBN 90-73461-33-2
Sowariraj, M.S.B. and Salm, C. and Mouthaan, A.J. and Smedes, T. and Kuper, F.G. (2002) The influence of technology variation on ggNMOSTs and SCRs against CDM ESD stress. Microelectronics Reliability, 42 (9-11). pp. 1287-1292. ISSN 0026-2714 *** ISI Impact 1,14 ***
Wang, Zhichun and Ackaert, J.G.G. and Salm, C. and de Backer, E. and van den Bosch, G. and Zawalski, W. (2002) Correlation between hot carrier stress, oxide breakdown and gate leakage current for monitoring plasma processing induced damage on gate oxide. In: 9th International Symposium on Physics and Failure Analysis 2002, 8-12-Jul 2002, Singapore, Thailand. pp. 242-245. IEEE Computer Society. ISBN 0-7803-7416-9
Wang, Zhichun and Scarpa, A. and Smits, S.M. and Kuper, F.G. and Salm, C. (2002) Temperature effect on protection diode for plasma-process induced charging damage. In: Proceedings of the 5th annual workshop on Semiconductors Advances for Future Electronics SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands. pp. 127-130. Technology Foundation STW. ISBN 90-73461-33-2
Wang, Zhichun and Scarpa, A. and Smits, S.M. and Salm, C. and Kuper, F.G. (2002) Temperature effect on antenna protection strategy for plasma-process induced charging damage. In: 7th International symposium of Plasma Process-Induced Damage, 6-7 June 2002, Maui, Hawaii, USA. pp. 134-137. IEEE Computer Society. ISBN 0965157776

2001

Ackaert, J.G.G. and Wang, Zhichun and De Backer, E. and Colson, P. and Coppens, P. (2001) Non contact surface potential measurements for charging reduction during manufacturing of metal-insulator-metal capacitors. Microelectronics Reliability, 41 (9-10). pp. 1403-1407. ISSN 0026-2714 *** ISI Impact 1,14 ***
Bystrova, S. and Holleman, J. and Woerlee, P.H. (2001) Growth and properties of LPCVD W-Si-N barrier layers. Microelectronic Engineering, 55 (1-4). pp. 189-195. ISSN 0167-9317 *** ISI Impact 1,22 ***
Chen, X.Y. and Johansen, J.A. and Salm, C. and van Rheenen, A.D. (2001) On low-frequency noise of polycrystalline GexSi1-x for sub-micron CMOS technologies Solid-State Electronics, 45 (11). pp. 1967-1971. ISSN 0038-1101 *** ISI Impact 1,48 ***
Golo-Tosic, N. and van der Wal, S. and Kuper, F.G. and Mouthaan, A.J. (2001) The time-voltage trade-off for ESD damage threshold in amorphous silicon hydrogenated thin film transistors. Microelectronics Reliability, 41 (9-10). pp. 1391-1396. ISSN 0026-2714 *** ISI Impact 1,14 ***
Hof, A.J. and Holleman, J. and Woerlee, P.H. (2001) Gate current for p+-poly PMOS devices under gate injection conditions. In: Proceedings of the 4th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 28-30 Nov 2001, Veldhoven, The Netherlands. pp. 72-75. Technology Foundation STW. ISBN 90-73461-29-4
Isai, I.G. and Holleman, J. and Woerlee, P.H. and Wallinga, H. (2001) Electronic conduction processes in SiO2 films obtained by ECR PECVD In: Proceedings of the 4th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2001, 28-30 Nov 2001, Veldhoven, The Netherlands. pp. 76-81. Technology Foundation STW. ISBN 90-73461-29-4
Kolhatkar, J.S. and Salm, C. and Wallinga, H. (2001) 1/f noise and switched bias noise measurement in p-MOSFET with varying gate oxide thickness. In: Proceedings of the 4th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2001, 28-30 Nov 2001, Veldhoven, The Netherlands. pp. 92-95. Technology Foundation STW. ISBN 90-73461-29-4
Kovalgin, A.Y. and Holleman, J. (2001) A study of morphology and texture of LPCVD germanium-silicon films. Journal de physique. IV, 11. Pr3-47-Pr3-54. ISSN 1155-4339
Kovalgin, A.Y. and Holleman, J. and van den Berg, A. and Wallinga, H. (2001) Thin-film antifuses for pellistor type gas sensors. In: Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2001, 30 Nov 2001, Veldhoven, The Netherlands. pp. 809-812. Technology Foundation STW. ISBN 90-73461-29-4
Kovalgin, A.Y. and Holleman, J. and Salm, C. and Woerlee, P.H. (2001) Low-Pressure CVD of Germanium-Silicon films using Silane and Germane sources. In: Thin Film Transistors Technologies V, 23-25 Oct 2000, Phoenix, Arizona, USA. pp. 269-275. Electrochemical Society. ISBN 1566772982
Mannino, G. and Stolk, P.A. and Cowern, N.E.B. and de Boer, W. and Dirks, A.G. and Roozeboom, F. and van Berkum, J.G.M. and Woerlee, P.H. and Toan, N.N. (2001) Effect of heating ramp rates on transient enhanced diffusion in ion-implemented silicon. Applied physics letters, 78 (7). pp. 889-891. ISSN 0003-6951 *** ISI Impact 3,79 ***
Merticaru, A.R. and Mouthaan, A.J. (2001) Dynamics of metastable defects in a-Si:H/SiN TFTs. Thin solid Films, 383 (1-2). pp. 122-124. ISSN 0040-6090 *** ISI Impact 1,60 ***
Merticaru, A.R. and Mouthaan, A.J. and Kuper, F.G. (2001) Study of dynamics of charge trapping in a-Si:H/SiN TFTs. In: Proceedings of the 4th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2001, 29-30 Nov 2001, Veldhoven, The Netherlands. pp. 109-114. Technology Foundation STW. ISBN 90-73461-29-4
Nguyen, Van Hieu and Salm, C. and Mouthaan, A.J. and Kuper, F.G. (2001) Modeling of the reservoir effect on electromigration lifetime. In: 8th International Symposium on the Physical & Failure Analysis of Integrated Circuits, 9-13 Jul 2001, Singapore, Thailand. pp. 169-173. IEEE Computer Society. ISBN 0-7803-6675-1
Nguyen, Van Hieu and Salm, C. and Vroemen, J. and Voets, J. and Krabbenborg, B.H. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2001) Fast thermal cycling stress and degredation in multilayer interconnects. In: Proceedings of 4th Annual Workshop on Semiconductors Advances for Future Electronics SAFE 2001, 28-30 Nov 2001, Veldhoven, The Netherlands. pp. 136-140. Technology Foundation STW. ISBN 90-73461-29-4
Nguyen, Viet Hoang and Hof, A.J. and van Kranenburg, H. and Woerlee, P.H. and Weimar, F. (2001) Copper chemical mechanical polishing using a slurry-free technique. Microelectronic engineering, 55 (1-4). pp. 305-312. ISSN 0167-9317 *** ISI Impact 1,22 ***
Salm, C. and Houtsma, V.E. and Kuper, F.G. and Woerlee, P.H. (2001) Temperature acceleration of thin gate-oxide degradation. In: Proceedings of the 4th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2001, 28-30 Nov 2001, Veldhoven, The Netherlands. pp. 174-177. Technology Foundation STW. ISBN 90-73461-29-4
Wang, Zhichun and Ackaert, J.G.G. and Salm, C. and Kuper, F.G. (2001) Charging induced damage on complex-antenna test structures. In: Proceedings of the 4th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2001, 28-30 Nov 2001, Veldhoven, The Netherlands. pp. 220-223. Technology Foundation STW. ISBN 90-73461-29-4
Wang, Zhichun and Ackaert, J.G.G. and Salm, C. and Kuper, F.G. (2001) Plasma process-induced latent damage on gate oxide - demonstrated by single-layer and multi-layer antenna structures. In: 8th International Symposium on the Physical & Failure Analysis of Integrated Circuits, 9-13 Jul 2001, Singapore, Thailand. pp. 220-223. IEEE Computer Society. ISBN 0-7803-6675-1
Wang, Zhichun and Scarpa, A. and Salm, C. and Kuper, F.G. (2001) Relation between plasma process-induced oxide failure fraction and antenna ratio. In: 6th International Symposium on Plasma Process-Induced Damage, 13-15 May 2001, Monterey, California, USA. pp. 16-19. IEEE Computer Society. ISBN 0-9651577-5-X

2000

Scarpa, A. and Tao, Guoqiao and Kuper, F.G. (2000) Wafer level reliability monitoring strategy of an advanced multi-process CMOS foundry. In: Proceedings of the 41st Annual IEEE International International Reliability Physics Symposium, IRPS 2003, 30 March - 4 April 2003, Dallas, Texas, USA. pp. 602-603. IEEE Computer Society. ISBN 0780376498