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EEMCS EPrints Service


Editor: Parala, H.
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Number of items: 1.

2005

Hussein, M.G. and Wörhoff, K. and Sengo, G. and Driessen, A. (2005) Deposition and characterization of PECVD phosphorus doped silicon oxynitride layers for integrated optics applications. In: 15th European Conference on Chemical Vapor Deposition (EUROCVD-15), 5-9 September 2005, Bochum, Germany. pp. 457-464. Electrochemical Society Proceedings 2005-09. Electrochemical Society. ISBN 1-56677-427-6

This list was generated on Mon May 22 03:47:01 CEST 2017.