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EEMCS EPrints Service


Editor: Hutchison, J.L.
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Number of items: 1.

2005

Saravanan, S. and Keim, E.G. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Growth and surface characterization of piezoelectric AlN thin films on silicon (100) and (110) substrates. In: Microscopy of Semiconducting Materials. Springer Proceedings in Physics 107. Springer, pp. 75-78. ISSN 0930-8989 ISBN 978-3-540-31914-6

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