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Number of items: 1. 2005
Hussein, M.G. and Wörhoff, K. and Sengo, G. and Driessen, A.
(2005)
Deposition and characterization of PECVD phosphorus doped silicon oxynitride layers for integrated optics applications.
In: 15th European Conference on Chemical Vapor Deposition (EUROCVD-15), 5-9 September 2005, Bochum, Germany.
pp. 457-464.
Electrochemical Society Proceedings 2005-09.
Electrochemical Society.
ISBN 1-56677-427-6
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