EEMCS EPrints Service
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Number of items: 1. 2005
Saravanan, S. and Keim, E.G. and Krijnen, G.J.M. and Elwenspoek, M.C.
(2005)
Growth and surface characterization of piezoelectric AlN thin films on silicon (100) and (110) substrates.
In:
Microscopy of Semiconducting Materials.
Springer Proceedings in Physics 107.
Springer, pp. 75-78.
ISSN 0930-8989
ISBN 978-3-540-31914-6
This list was generated on Thu May 24 05:57:04 CEST 2012. |
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