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EEMCS EPrints Service


Editor: Barreca, D.
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Number of items: 1.

2009

Sun, Fei and Sengo, G. and Driessen, A. and Wörhoff, K. (2009) Characterization of phosphorous and boron doped silicon oxynitride prepared plasma enhanced chemical vapor deposition. ECS Transactions, 25 (8). pp. 711-718. ISSN 1938-5862

This list was generated on Thu May 25 23:04:28 CEST 2017.