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Number of items: 1. 2009
Sun, Fei and Sengo, G. and Driessen, A. and Wörhoff, K.
(2009)
Characterization of phosphorous and boron doped silicon oxynitride prepared plasma enhanced chemical vapor deposition.
ECS Transactions, 25 (8).
pp. 711-718.
ISSN 1938-5862
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