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Classification: TST-FABRICATION
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2014

Vermeer, R. and Berenschot, J.W. and Sarajlic, E. and Tas, N.R. and Jansen, H.V. (2014) Fabrication of novel AFM probe with high-aspect-ratio ultra-sharp three-face silicon nitride tips. In: Proceedings of the 14th IEEE International Conference on Nanotechnology, 18-21 Aug 2014, Toronto, Canada. pp. 229-233. IEEE . ISBN 978-1-4799-4082-0

2013

Berenschot, J.W. and Jansen, H.V. and Tas, N.R. (2013) Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon. Journal of micromechanics and microengineering, 23 (5). 10. ISSN 0960-1317 *** ISI Impact 1,768 ***

2012

Abdulla, S.M.C. and Kauppinen, L.J. and Krijnen, G.J.M. and de Ridder, R.M. (2012) Mechano-optical wavelength tuning in a photonic crystal microcavity with sub-1 V drive voltage. Optics letters, 37 (11). pp. 2010-2012. ISSN 0146-9592 *** ISI Impact 3,040 ***
Berenschot, J.W. and Burouni, N. and Schurink, B. and van Honschoten, J.W. and Sanders, R.G.P. and Truckenmüller, R.K. and Jansen, H.V. and Elwenspoek, M.C. and van Apeldoorn, A.A. and Tas, N.R. (2012) 3D Nanofabrication of Fluidic Components by Corner Lithography. Small, 8 (24). pp. 3823-3831. ISSN 1613-6810 *** ISI Impact 8,315 ***

2009

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) MEMS within a Swagelok®: a new platform for microfluidic devices. Lab on a chip, 9 (13). pp. 1966-1969. ISSN 1473-0197 *** ISI Impact 5,586 ***

2008

Bruinink, C.M. and Burresi, M. and de Boer, M.J. and Segerink, F.B. and Jansen, H.V. and Berenschot, J.W. and Reinhoudt, D.N. and Huskens, J. and Kuipers, L. (2008) Nanoimprint Lithography for Nanophotonics in Silicon. Nano Letters, 8 (9). pp. 2872-2877. ISSN 1530-6984 *** ISI Impact 13,779 ***

2004

Tong, Hien Duy and Jansen, H.V. and Gadgil, V.J. and Bostan, C.G. and Berenschot, J.W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2004) Silicon nitride nanosieve membrane. Nano letters, 4 (2). pp. 283-287. ISSN 1530-6984 *** ISI Impact 13,779 ***