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Classification: SC-ICS: Integrated Chemical Sensors
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2009

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films. In: Proceedings of the 2009 IEEE International Conference on Microelectronic Test Structures, 30 Mar - 2 Apr 2009, Oxnard, CA, USA. pp. 191-195. IEEE Computer Society. ISBN 978-1-4244-4259-1
Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Contact chain measurements for ultrathin conducting films. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 150-152. Technology Foundation STW. ISBN 978-90-73461-62-8
Kovalgin, A.Y. and Boogaard, A. and Wolters, R.A.M. (2009) Impact of small deviations in EEDF on silane-based plasma chemistry. ECS Transactions, 25 (8). pp. 429-436. ISSN 1938-5862
Tiggelaar, R.M. and Groenland, A.W. and Sanders, R.G.P. and Gardeniers, J.G.E. (2009) Electrical properties of low pressure chemical vapor deposited silicon nitride thin films for temperatures up to 650 °C. Journal of applied physics, 105 (3). 033714. ISSN 0021-8979 *** ISI Impact 2,101 ***
Tiggelaar, R.M. and Sanders, R.G.P. and Groenland, A.W. and Gardeniers, J.G.E. (2009) Stability of thin platinum films implemented in high-temperature microdevices. Sensors and actuators A: Physical, 152 (1). pp. 39-47. ISSN 0924-4247 *** ISI Impact 2,201 ***

2008

Brunets, I. and Groenland, A.W. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. (2008) A study of thermal oxidation and plasma-enhanced oxidation/reduction of ALD TiN layers. In: Proceedings of the 18th International Conference on Atomical Layer Deposition ALD 2008, 29 Jun - 2 Jul 2008, Bruges, Belgium. P-54. TUe Eindhoven. ISBN not assigned
Groenland, A.W. and Brunets, I. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Schmitz, J. (2008) Thermal and plasma-enhanced oxidation of ALD TiN. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 468-471. Technology Foundation STW. ISBN 978-90-73461-56-7

2007

Groenland, A.W. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2007) Simulation of a Nanolink Hot-Plate Device. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 581-583. Technology Foundation STW. ISBN 978-90-73461-49-9
Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2007) A pillar-shaped antifuse-based silicon chemical sensor and actuator. IEEE sensors journal, 7 (1). pp. 18-27. ISSN 1530-437X *** ISI Impact 1,889 ***

2006

Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2006) A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption. In: Proceedings of the IEEE Sensors Conference, 30 Oct - 03 Nov 2005, Irvine, CA, USA. pp. 1225-1228. IEEE CNF. ISBN 0-7803-9056-3
Kovalgin, A.Y. and Holleman, J. and Iordache, G. and Jenneboer, A.J.S.M. and Falke, F. and Zieren, V. and Goossens, M.J. (2006) Low-Power, Antifuse-Based Silicon Chemical Sensor on a Suspended Membrane. Journal of the Electrochemical Society, 153 (9). H181-H188. ISSN 0013-4651 *** ISI Impact 3,014 ***