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Classification: SC-ICF: Integrated Circuit Fabrication
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2011

Van Hao, B. and Groenland, A.W. and Aarnink, A.A.I. and Wolters, R.A.M. and Schmitz, J. and Kovalgin, A.Y. (2011) Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry. Journal of the Electrochemical Society, 158 (3). pp. 214-220. ISSN 0013-4651 *** ISI Impact 3,014 ***

2010

Boksteen, B.K. (2010) A simulation study and analysis of advanced silicon schottky barrier field effect transistors. Master's thesis, University of Twente.
Hasper, A. and Snijders, G.J. and Vandezande, L. and De Blank, M.J. and Bankras, R.G. (2010) Deposition of TiN films in a batch reactor. Patent US7732350 (Assigned).
Rajasekharan, B. and Hueting, R.J.E. and Salm, C. and van Hemert, T. and Wolters, R.A.M. and Schmitz, J. (2010) Fabrication and characterization of the charge-plasma diode. IEEE electron device letters, 31 (6). pp. 528-530. ISSN 0741-3106 *** ISI Impact 2,528 ***
Walters, R.J. and van Loon, R.V.A. and Brunets, I. and Schmitz, J. and Polman, A. (2010) A silicon-based electrical source of surface plasmon polaritons. Nature materials, 9 (21-25). pp. 1-5. ISSN 1476-1122 *** ISI Impact 38,891 ***

2009

Aarnink, A.A.I. and Van Bui, B. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) In-situ monitoring of growth and oxidation of ALD TiN layers followed by reduction in atomic hydrogen. In: Proceedings of the 9th International conference on Atomic Layer Deposition, 19-22 Jul 2009, Monterey, CA, USA. America Vaccum Society, Omnipress. ISBN not assigned
Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) Net Negative Charge in low-temperature SiO2 gate dielectric layers Microelectronic engineering, 86 (7-9). pp. 1707-1710. ISSN 0167-9317 *** ISI Impact 1,277 ***
Brunets, I. (2009) Electronic devices fabricated at CMOS backend-compatible temperatures. PhD thesis, University of Twente. ISBN 978-90-365-2935-8
Brunets, I. and Boogaard, A. and Smits, S.M. and de Vries, H. and Aarnink, A.A.I. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2009) Low temperature TFTs with poly-stripes. In: Proceedings of the 5th International Thin Film Transistor Conference ITC'09, 5-6 Mar 2009, Palaiseau, France. pp. 62-65. Ecole Polytechnique. ISBN not assigned
Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Boogaard, A. and Schmitz, J. (2009) Low-temperature fabricated TFTs on polysilicon stripes. IEEE transactions on electron devices, 56 (8). pp. 1637-1644. ISSN 0018-9383 *** ISI Impact 2,207 ***
van Hemert, T. (2009) On the Modeling and Simulation of Novel Schottky Based Silicon Rectifiers. Master's thesis, University of Twente.
Kazmi, S.N.R. and Salm, C. and Schmitz, J. (2009) Materials selection for low temperature processed high Q resonators using ashby approach. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 81-84. Technology Foundation STW. ISBN 978-90-73461-62-8
Kovalgin, A.Y. and Boogaard, A. and Brunets, I. and Aarnink, A.A.I. and Wolters, R.A.M. (2009) Electrical properties of plasma-deposited silicon oxide clarified by chemical modeling. ECS Transactions, 25 (8). pp. 23-32. ISSN 1938-5862
Rajasekharan, B. and Salm, C. and Wolters, R.A.M. and Aarnink, A.A.I. and Boogaard, A. and Schmitz, J. (2009) Metal contacts to lowly doped Si and ultra thin SOI. In: Proceedings of Fifth Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, 19-21 Jan 2009, Gotheburg, Sweden. pp. 29-30. Chalmers University of Technology. ISBN not assigned
Rangarajan, B. and Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2009) TFTs as photodetectors for optical interconnects. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 52-54. Technology Foundation STW. ISBN 978-90-73461-62-8
Roy, D. and Klootwijk, J.H. and Verhaegh, N.A.M. and Roosen, H.H.A.J. and Wolters, R.A.M. (2009) Comb Capacitor Structures for On-Chip Physical Uncloneable Function. IEEE Transactions on Semiconductor Manufacturing, 22 (1). pp. 96-102. ISSN 0894-6507 *** ISI Impact 1,045 ***
Stavitski, N. (2009) Silicide-to-silicon specific contact resistance characterization. PhD thesis, University of Twente. ISBN 978-90-365-2939-6
Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) Cross-Bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization. IEEE Transactions on Semiconductor Manufacturing, 22 (1). pp. 146-152. ISSN 0894-6507 *** ISI Impact 1,045 ***
Van Hao, B. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Schmitz, J. (2009) Thermal atomic layer deposition and oxidation of TiN monitored by in-situ spectroscopic ellipsometry. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 59-62. Technology Foundation STW. ISBN 978-90-73461-62-8
Walters, R.J. and van Loon, R.V.A. and Brunets, I. and Schmitz, J. and Polman, A. (2009) A silicon-based electrical source for surface plasmon polaritons. In: Proceedings of the 6th International Conference on GroupIV Photonics GFP'09, 9-11 Sept 2009, San Francisco, USA. pp. 74-76. IEEE Computer Society. ISBN 978-1-4244-4402-1
in 't Zandt, M.A.A. and Jedema, M.J. and Gravesteijn, D.J. and Attenborough, K. and Wolters, R.A.M. (2009) Doped SbTe phase change material in memory cells. (Invited) In: Proceedings of the International Materials Research Congress (IMRC 2009), 16-21 Aug 2009, Cancun, Mexico. Materials Research Society. ISBN not assigned

2008

Boogaard, A. and Roesthuis, R. and Brunets, I. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2008) Deposition of High-Quality SiO2 Insulating Films at Low Temperatures by means of Remote PECVD In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 452-456. Technology Foundation STW. ISBN 978-90-73461-56-7
Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Poly-Si stripe TFTs by Grain-Boundary controlled crystallization of Amorphous-Si. In: Proceedings of the 38th European Solid-State Device Research Conference, 15-19 September 2008, Edinburgh, Schotland. pp. 87-90. IOP Institute of Physics. ISBN 978-1-4244-2363-7
Brunets, I. and van Loon, R.V.A. and Walters, R.J. and Polman, A. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2008) Light emission from silicon nanocrystals embedded in ALD-alumina at low temperatures. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 399-402. Technology Foundation STW. ISBN 978-90-73461-56-7
Hueting, R.J.E. and Rajasekharan, B. and Salm, C. and Schmitz, J. (2008) The charge plasma P-N diode. IEEE electron device letters, 29 (12). pp. 1367-1369. ISSN 0741-3106 *** ISI Impact 2,528 ***
Kovalgin, A.Y. and Isai, I.G. and Holleman, J. and Schmitz, J. (2008) Low-temperature SiO2 layers deposited by combination of ECR plasma and supersonic silane/helium jet Journal of the Electrochemical Society, 155 (2). G21-G28. ISSN 0013-4651 *** ISI Impact 3,014 ***
Lu, Jiwu and Kovalgin, A.Y. and Schmitz, J. (2008) Functional layers for CIGS solar cell on-chip fabrication during post-processing. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 487-490. Technology Foundation STW. ISBN 978-90-73461-56-7
Rajasekharan, B. and Hueting, R.J.E. and Salm, C. and Hoang, Tù and Schmitz, J. (2008) Charge plasma diode - a novel device concept. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 576-579. Technology Foundation STW. ISBN 978-90-73461-56-7
Rajasekharan, B. and Salm, C. and Hueting, R.J.E. and Hoang, Tù and Schmitz, J. (2008) Dimensional scaling effects on transport properties of ultrathin body p-i-n diodes. In: Proceedings of the 9th Conference on ULtimate Integration on Silicon, 12-14 Mar 2008, Udine, Italy. pp. 195-198. Electron Device Society. IEEE Computer Society. ISBN 978-1-4244-1730-8
Roy, D. and Klootwijk, J.H. and Verhaegh, N.A.M. and Roosen, H.H.A.J. and Wolters, R.A.M. (2008) Comb capacitor structures for measurement of post-processed layers. In: Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures, 24-28 Mar 2008, Edinburgh, Schotland. pp. 205-209. IEEE Computer Society. ISBN 978-1-4244-1801-5
Roy, D. and in 't Zandt, M.A.A. and Delhounge, R. and Klootwijk, J.H. and Wolters, R.A.M. (2008) Influence of interfacial layer on contact resistance. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 499-500. Technology Foundation STW. ISBN 978-90-73461-56-7
Stavitski, N. and van Dal, M.J.H. and Lauwers, A. and Vrancken, C. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) Systematic TLM Measurements of NiSi and PtSi Specific Contact Resistance to n- and p-Type Si in a Broad Doping Range. IEEE electron device letters, 29 (4). pp. 378-381. ISSN 0741-3106 *** ISI Impact 2,528 ***
Stavitski, N. and van Dal, M.J.H. and Lauwers, A. and Vrancken, C. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific Contact Resistance Extraction. IEEE transactions on electron devices, 55 (5). pp. 1170-1176. ISSN 0018-9383 *** ISI Impact 2,207 ***
Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) A study of cross-bridge kelvin resistor structures for reliable measurement of low contact resistances. In: Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures, 24-28 Mar 2008, Edinburgh, Schotland. pp. 199-204. IEEE Computer Society. ISBN 978-1-4244-1801-5
Tiggelman, M.P.J. and Reimann, K. and Liu, J. and Klee, M. and Keur, W. and Mauczock, R. and Schmitz, J. and Hueting, R.J.E. (2008) Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies. In: Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures, 24-27 Mar 2008, Edinburgh, Schotland. pp. 190-195. IEEE Computer Society. ISBN 978-1-4244-1801-5
Tiggelman, M.P.J. and Reimann, K. and Liu, J. and Klee, M. and Mauczock, R. and Keur, W. and Schmitz, J. and Hueting, R.J.E. (2008) The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 506-508. Technology Foundation STW. ISBN 978-90-73461-56-7
Walters, R.J. and van Loon, R.V.A. and Polman, A. and Brunets, I. and Piccolo, G. and Schmitz, J. (2008) Luminescence properties of silicon nanocrystals in Al2O3 fabricated at low temperature In: 5th IEEE International Conference on Group IV Photonics, 2008, 17-19 Sept 2008, Sorrento, Italy. pp. 41-42. IEEE Computer Society. ISBN 978-1-4244-1768-1

2007

Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Aarnink, A.A.I. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2007) Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD Surface & coatings technology, 201. pp. 8976-8980. ISSN 0257-8972 *** ISI Impact 2,139 ***
Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Holleman, J. and Schmitz, J. (2007) Optical and Electrical Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD In: Proceedings of the 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 29 - 30 Nov 2007, Veldhoven, The Netherlands. pp. 404-407. Technology Foundation STW. ISBN 978-90-73461-49-9
Brunets, I. and Aarnink, A.A.I. and Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices. Surface & Coatings Technology, 201. pp. 9209-9214. ISSN 0257-8972 *** ISI Impact 2,139 ***
Brunets, I. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) Low-temperature process steps for realization of non-volatile memory devices. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 504-508. Technology Foundation STW. ISBN 978-90-73461-49-9
Klee, M. and Beelen, D. and Keurl, W. and Kiewitt, R. and Kumar, B. and Mauczock, R. and Reimann, K. and Renders, C. and Roest, A.L. and Roozeboom, F. and Steeneken, P.G. and Tiggelman, M.P.J. and Vanhelmont, F. and Wunnicke, O. and Lok, P. and Neumann, K. and Fraser, J. and Schmitz, G. (2007) Application of Dielectric, Ferroelectric and Piezoelectric Thin Film Devices in Mobile Communication and Medical Systems. (Invited) In: 15th ieee international symposium on the Applications of ferroelectrics, 2006. isaf '06, 30 Jul - 03 Aug 2006, Sunset Beach, NC, USA. pp. 9-16. IEEE Computer Society. ISSN 1099-4734 ISBN 978-1-4244-1332-4
Kovalgin, A.Y. and Boogaard, A. and Brunets, I. and Holleman, J. and Schmitz, J. (2007) Chemical modeling of a high-density inductively-coupled plasma reactor containing silane. Surface & Coatings Technology, 201. pp. 8849-8853. ISSN 0257-8972 *** ISI Impact 2,139 ***
Lu, Jiwu and Kovalgin, A.Y. and Schmitz, J. (2007) Modeling of an Integrated Electromagnetic Generator for Energy Scavenging. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 603-607. Technology Foundation STW. ISBN 978-90-73461-49-9
Rajasekharan, B. and Salm, C. and Hueting, R.J.E. and Hoang, Tù and van der Wiel, W.G. and Schmitz, J. (2007) Dimensional scaling effects on transport properties of p-i-n diodes. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 457-459. Technology Foundation STW. ISBN 978-90-73461-49-9
Schmitz, J. (2007) Adding functionality to microchips by wafer post-processing. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 576 (1). pp. 142-149. ISSN 0168-9002 *** ISI Impact 1,200 ***
Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Boksteen, B.K. and Kovalgin, A.Y. and Wolters, R.A.M. (2007) Cross-bidge Kelvin resistor (CBKR) structures for measurement of low contact resistances. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 551-554. Technology Foundation STW. ISBN 978-90-73461-49-9
Tiggelman, M.P.J. and Reimann, K. and Klee, M. and Schmitz, J. and Hueting, R.J.E. and Liu, J. and Furukawa, Y. and Mauczock, R. and Keur, W. (2007) Separation of intrinsic dielectric and resistive electrode losses in ferroelectric capacitors at radio frequencies. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 465-467. Technology Foundation STW. ISBN 978-90-73461-49-9

2006

Aarts, A.A.A. (2006) Development and characterization of through-wafer interconnects for 3D integration. Master's thesis, University of Twente.
Bankras, R.G. (2006) In-situ RHEED and characterization of ALD Al2O3 gate dielectrics PhD thesis, University of Twente. ISBN 90-365-2271-4
Bankras, R.G. and Holleman, J. and Schmitz, J. and Sturm, J.M. and Zinine, A.I. and Wormeester, H. and Poelsema, B. (2006) In Situ Reflective High-Energy Electron Diffraction Analysis During the Initial Stage of a Trimethylaluminum/Water ALD Process. Chemical Vapor Deposition, 12 (5). pp. 275-280. ISSN 0948-1907 *** ISI Impact 1,789 ***
Boogaard, A. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. and Holleman, J. and Brunets, I. and Schmitz, J. (2006) Langmuir-probe characterization of an inductively-coupled remote plasma system intended for CVD and ALD. ECS Transactions, 2 (7). pp. 181-191. ISSN 1938-5862
Boogaard, A. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. and Holleman, J. and Brunets, I. and Schmitz, J. (2006) Measurement of electron temperatures of Argon Plasmas in a High-Density Inductively-Coupled Remote Plasma System by Langmuir Probe and Optical-Emission Spectroscopy. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 412-418. Technology Foundation STW. ISBN 978-90-73461-44-4
Brunets, I. and van Hemert, T. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2006) Memory devices with encapsulated Si nano-crystals: Realization and Characterization. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 419-422. Technology Foundation STW. ISBN 978-90-73461-44-4
Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Aarnink, A.A.I. and Boogaard, A. and Oesterlin, P. and Schmitz, J. (2006) Green laser crystallization of α-Si films using preformed α-Si Lines. In: Proceedings of the 210th Electrochemical Society meeting, 29 okt - 03 nov 2006, Cancun. Mexico. pp. 185-191. ECS Transactions 3, 8 (2006). ECS. ISBN 1-56677-508-6
Hasper, A. and Snijders, G.J. and Vandezande, L. and De Blank, M.J. and Bankras, R.G. (2006) Deposition of TiN films in a batch reactor. Patent US20060634043 (Application).
Kovalgin, A.Y. and Holleman, J. (2006) Low-Temperature LPCVD of Polycrystalline GexSi1-x Films with High Germanium Content Journal of the Electrochemical Society, 153 (5). G363-G371. ISSN 0013-4651 *** ISI Impact 3,014 ***
Kovalgin, A.Y. and Zinine, A.I. and Bankras, R.G. and Wormeester, H. and Poelsema, B. and Schmitz, J. (2006) On the growth of native oxides on hydrogen-terminated silicon surfaces in dark and under illumination with light. In: Proceedings of the Electrochemical Society, 29 okt - 3 nov 2006, Cancun, Mexico. pp. 191-202. ECS Transactions 3 (2). Electrochemical Society. ISSN 1938-5862 ISBN 1-56677-502-7
Tiggelman, M.P.J. and Reimann, K. and Klee, M. and Beelen, D. and Keur, W. and Schmitz, J. and Hueting, R.J.E. (2006) Electrical characterization of thin film ferroelectric capacitors. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 439-443. Technology Foundation STW. ISBN 90-73461-44-8