EEMCS

Nguyen, Quoc Duy (2007) Electrochemistry in anisotropic etching of silicon in alkaline solutions. PhD thesis, University of Twente. ISBN 978-90-365-2551-0

Nguyen, Quoc Duy and Elwenspoek, M.C. (2007) Influence of applied potentials on anisotropic etching of silicon described using kinematic wave etch model. Journal of the Electrochemical Society, 154 (12). D684-D691. ISSN 0013-4651 *** ISI Impact 2,420 ***

Nguyen, Quoc Duy and Elwenspoek, M.C. (2006) Characterisation of anisotropic etching in KOH using network etch rate function model: influence of an applied potential in terms of microscopic properties. Journal of physics: conference series, 34 (1). pp. 1038-1043. ISSN 1742-6588

Nguyen, Quoc Duy and Elwenspoek, M.C. (2005) Influence of an Applied Potential on the Anisotropic Etch rates of Silicon in KOH. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 45-48. Chalmers University of Technology. ISBN 978-0-4445-1037-2