EEMCS

Wali, F. and Knotter, D.M. and Mud, A. and Kuper, F.G. (2009) Impact of particles in ultra pure water on random yield loss in IC production. Microelectronic engineering, 86 (2). pp. 140-144. ISSN 0167-9317 *** ISI Impact 1,569 ***

Wali, F. and Knotter, D.M. and Wortelboer, R. and Mud, A. (2007) Statistical relation between particle contaminations in ultra pure water and defects generated by process tools. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 555-557. Technology Foundation STW. ISBN 978-90-73461-49-9