EEMCS

Herfst, R.W. and Steeneken, P.G. and Schmitz, J. and Mank, A.J.G. and van Gils, M. (2008) Kelvin probe study of laterally inhomogeneous dielectric charging and charge diffusion in RF MEMS capacitive switches. In: Proceedings of the International Reliability Physics Symposium 2008, 27 Apr - 1 May 2008, Phoenix, AZ, USA. pp. 492-496. IEEE Computer Society. ISBN 978-1-4244-2050-6