EEMCS

Legrain, A.B.H. and Berenschot, J.W. and Sanders, R.G.P. and Ma, K. and Tas, N.R. and Abelmann, L. (2011) Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 250-253. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9

Jansen, H.V. and de Boer, M.J. and Ma, K. and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF₆ plasma Journal of micromechanics and microengineering, 20 (7). 075027. ISSN 0960-1317 *** ISI Impact 2,276 ***

Tjerkstra, R.W. and Ekkels, P. and Krijnen, G.J.M. and Egger, S. and Berenschot, J.W. and Ma, K. and Brugger, J. (2003) Fabrication of an active nanostencil with integrated microshutters. In: TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003, 8-12 June, Boston, USA. pp. 1651-1654. IEEE Computer Society. ISBN 0-7803-7731-1