EEMCS

Elwenspoek, M.C. and Lindberg, U. and Kok, H. and Smith, L. (1994) Wet chemical etching mechanism of silicon. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 223-228. IEEE Computer Society. ISBN 0-7803-1833-1

Lindberg, U. and Soderkvist, J. and Lammerink, T.S.J. and Elwenspoek, M.C. (1993) Quasi-buckling of micromachined beams. Journal of micromechanics and microengineering, 3 (4). pp. 183-186. ISSN 0960-1317 *** ISI Impact 2,276 ***