EEMCS

Gui, C. and Legtenberg, R. and Tilmans, H.A.C. and Fluitman, J.H.J. and Elwenspoek, M.C. (1998) Nonlinearity and hysteresis of resonant strain gauges. Journal of microelectromechanical systems, 7 (1). pp. 122-127. ISSN 1057-7157 *** ISI Impact 2,157 ***

Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Elwenspoek, M.C. (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part II: Fabrication and performance. Journal of microelectromechanical systems, 7 (1). pp. 87-93. ISSN 1057-7157 *** ISI Impact 2,157 ***

Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Elwenspoek, M.C. (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part I: Design and modeling. Journal of microelectromechanical systems, 7 (1). pp. 79-86. ISSN 1057-7157 *** ISI Impact 2,157 ***

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1997) A fabrication process for electrostatic microactuators with integrated gear linkages. Journal of microelectromechanical systems, 6 (3). pp. 234-241. ISSN 1057-7157 *** ISI Impact 2,157 ***

Legtenberg, R. and Gilbert, J. and Senturia, S.D. and Elwenspoek, M.C. (1997) Electrostatic curved electrode actuators. Journal of microelectromechanical systems, 6 (3). pp. 257-265. ISSN 1057-7157 *** ISI Impact 2,157 ***

Legtenberg, R. (1996) Electrostatic actuators fabricated by surface micromachining techniques. PhD thesis, University of Twente. ISBN 90-3650796-0

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Electrostatic microactuators with integrated gear linkages for mechanical power transmission. In: Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS '96, 11-15 Feb 1996, San Diego, CA, USA. pp. 204-209. IEEE Computer Society. ISBN 0-7803-2985-6

Legtenberg, R. and Groeneveld, A.W. and Elwenspoek, M.C. (1996) Comb-drive actuators for large displacements. Journal of micromechanics and microengineering, 6 (3). pp. 320-329. ISSN 0960-1317 *** ISI Impact 2,276 ***

Tas, N.R. and Sonnenberg, A.H. and Jansen, H.V. and Legtenberg, R. and Elwenspoek, M.C. (1996) Stiction in surface micromachining. Journal of micromechanics and microengineering, 6 (4). pp. 385-397. ISSN 0960-1317 *** ISI Impact 2,276 ***

Elwenspoek, M.C. and Weustink, M. and Legtenberg, R. (1995) Static and dynamic properties of active joints. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX. Part 2 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 412-415. IEEE Computer Society. ISBN 91-630-3473-5

Gui, C. and Legtenberg, R. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure. Journal of micromechanics and microengineering, 5 (2). pp. 183-185. ISSN 0960-1317 *** ISI Impact 2,276 ***

Gui, C. and Legtenberg, R. and Tilmans, H.A.C. and Fluitman, J.H.J. and Elwenspoek, M.C. (1995) Nonlinearity and hysteresis of resonant strain gauges. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 157-162. IEEE Computer Society. ISBN 0-7803-2503-6

Jansen, H.V. and de Boer, M.J. and Burger, J.F. and Legtenberg, R. and Elwenspoek, M.C. (1995) Black silicon method II: the effect of mask material and loading on the reactive ion etching of deep silicon trenches. Microelectronic engineering, 27 (1-4). pp. 475-480. ISSN 0167-9317 *** ISI Impact 1,569 ***

Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elders, J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Process for producing micromechanical structures by means of reactieve ion etching. Patent WO1995NL00221 (Application).

Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elwenspoek, M.C. (1995) The black silicon method: A universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. Journal of micromechanics and microengineering, 5 (2). pp. 115-120. ISSN 0960-1317 *** ISI Impact 2,276 ***

Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (1995) An electrostatic lower stator axial gap wobble motor: design and fabrication. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX. Part 2 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 404-407. IEEE Computer Society. ISBN 91-630-3473-5

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Electrostatic curved electrode actuators. In: : Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 37-42. IEEE Computer Society. ISBN 0-7803-2503-6

Legtenberg, R. and Jansen, H.V. and de Boer, M.J. and Elwenspoek, M.C. (1995) Anisotropic reactive ion etching of silicon using SF₆/O₂/CHF₃ gas mixtures Journal of the Electrochemical Society, 142 (6). pp. 2020-2028. ISSN 0013-4651 *** ISI Impact 2,420 ***

Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elwenspoek, M.C. (1994) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. In: Micro Mechanics Europe 1994, 5-6 Sept 1994, Pisa, Italy. pp. 1-5. MicroMechanics Europe.

Legtenberg, R. and Tilmans, H.A.C. and Elders, J. and Elwenspoek, M.C. (1994) Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms. Sensors and actuators A: Physical, 43 (1-3). pp. 230-238. ISSN 0924-4247 *** ISI Impact 1,933 ***

Tilmans, H.A.C. and Legtenberg, R. and Schurer, H. and IJntema, D.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) (Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators. IEEE transactions on ultrasonics, ferroelectrics and frequency control, 41 (1). pp. 4-6. ISSN 0885-3010 *** ISI Impact 1,460 ***

Legtenberg, R. and Bouwstra, S. and Elwenspoek, M.C. (1991) Low-temperature glass bonding for sensor application using boron oxide thin films. Journal of micromechanics and microengineering, 1 (3). pp. 157-160. ISSN 0960-1317 *** ISI Impact 2,276 ***

Legtenberg, R. and Bouwstra, S. and Fluitman, J.H.J. (1991) Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer. Sensors and actuators A: Physical, 27 (1-3). pp. 723-727. ISSN 0924-4247 *** ISI Impact 1,933 ***

Bouwstra, S. and Legtenberg, R. and Tilmans, H.A.C. and Elwenspoek, M.C. (1990) Resonating microbridge mass flow sensor. Sensors and actuators A: Physical, 21 (1-3). pp. 332-335. ISSN 0924-4247 *** ISI Impact 1,933 ***