EEMCS

Engelen, J.B.C. and Lantz, M.A. and Rothuizen, H.E. and Abelmann, L. and Elwenspoek, M.C. (2009) Improved performance of large stroke comb-drive actuators by using a stepped finger shape. In: The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 21-25 June 2009, Denver, Colorado, USA. pp. 1762-1765. IEEE. ISBN 978-1-4244-4190-7

Engelen, J.B.C. and Rothuizen, H.E. and Drechsler, U. and Stutz, R. and Despont, M. and Abelmann, L. and Lantz, M.A. (2009) A Mass-balanced through-wafer electrostatic x/y-scanner for probe data storage. Microelectronic Engineering, 86 (4-6). pp. 1230-1233. ISSN 0167-9317 *** ISI Impact 1,569 ***

Engelen, J.B.C. and Rothuizen, H.E. and Drechsler, U. and Stutz, R. and Despont, M. and Lantz, M.A. (2008) Mass-balanced through-wafer electrostatic x/y-scanner for parallel probe data storage. In: 34th International Conference on Micro & Nano Engineering, 15-19 Sep 2008, Athens, Greece. 92. Ergo Publications. ISBN not assigned